Motion device and detection equipment

Abstract

The utility model provides a motion device and detection equipment. The motion device comprises a fixed seat; the platform assembly comprises a first platform part, a second platform part and an elastic mechanism; the elastic mechanism comprises a fixed end and a movable end, and the movable end is movably arranged relative to the fixed end in the preset direction; the movable end is connected with the first platform part, and the fixed end is connected with the second platform part; a fixed part of the first driving piece is fixedly connected with the fixed seat; an output part of the first driving part is connected with the second platform part so as to drive the platform assembly to rotate around a preset axis; the extension direction of the preset axis is parallel to or the same as the preset direction; a fixed part of the second driving piece is fixedly connected with the fixed seat; the output part of the second driving part is connected with the first platform part so as to drive the first platform part to move in the preset direction; and the decoupling piece is arranged between the output part of the second driving piece and the first platform part, so that the first platform part is rotatably arranged relative to the second driving piece.

Description

Technical Field

[0001] This utility model relates to the field of precision motion technology, and more specifically, to a motion device and a detection equipment. Background Technology

[0002] In semiconductor precision equipment, the loading and inspection platform needs to have two degrees of freedom, namely vertical movement and horizontal rotation, in some cases, and the two degrees of freedom must not affect each other to achieve decoupling.

[0003] In existing technologies, two-degree-of-freedom decoupling is achieved by stacking, that is, the moving or rotating module is completely stacked on top of another module. This will greatly increase the size and weight of the device, and at the same time, the load mass is relatively large, affecting the overall control performance of the machine.

[0004] Furthermore, when the rotary module is stacked on top of the mobile module, it is impossible to place the ejector pin assembly that rotates synchronously with the suction cup for semiconductor testing applications. The wiring of the mobile module's power and signal lines becomes more complex when the mobile module is stacked on top of the rotary module. Utility Model Content

[0005] The main objective of this invention is to provide a motion device and a testing device to solve the problem that the motion devices in the prior art are large in size and weight due to stacking.

[0006] To achieve the above objectives, according to one aspect of the present invention, a motion device is provided, comprising: a fixed base; a platform assembly including a first platform portion, a second platform portion, and an elastic mechanism; the elastic mechanism including a fixed end and a movable end, the movable end being movably disposed relative to the fixed end along a preset direction, and the movable end and the fixed end being relatively fixed in a direction perpendicular to the preset direction; the movable end being connected to the first platform portion, and the fixed end being connected to the second platform portion, so that the first platform portion is movably disposed relative to the second platform portion along the preset direction, and the first platform portion and the second platform portion are relatively fixed in a direction perpendicular to the preset direction; a first driving member, the fixed portion of the first driving member being fixedly connected to the fixed base; the output portion of the first driving member being connected to the second platform portion to drive the platform assembly to rotate around a preset axis; the extension direction of the preset axis is parallel to or the same as the preset direction; a second driving member, the fixed portion of the second driving member being fixedly connected to the fixed base; the output portion of the second driving member being connected to the first platform portion to drive the first platform portion to move along the preset direction; and a decoupling member disposed between the output portion of the second driving member and the first platform portion, so that the first platform portion is rotatably disposed relative to the second driving member.

[0007] Furthermore, the decoupling component is a bearing.

[0008] Furthermore, the first driving component is a torque motor.

[0009] Furthermore, the second driving component includes a voice coil motor or a lead screw structure.

[0010] Furthermore, the elastic mechanism includes an elastic component, which includes: a first elastic sheet, the first end of which is fixedly connected to a movable end; and a second elastic sheet, the second end of which is fixedly connected to the first end of the first elastic sheet and to a fixed end. The first elastic sheet and the second elastic sheet are arranged at an acute angle to make the first elastic sheet and the second elastic sheet elastic in a preset direction and rigid in a direction perpendicular to the preset direction, thereby allowing the first end of the first elastic sheet to be movably arranged relative to the second end of the second elastic sheet along the preset direction.

[0011] Furthermore, the elastic mechanism also includes a first clamping part, which is used to fix the first end of the first elastic piece to the moving end.

[0012] Furthermore, the elastic mechanism also includes a second clamping part, which is used to fix the second end of the second elastic piece to the fixed end.

[0013] Furthermore, the elastic component also includes a third pressing part, wherein the second end of the first elastic sheet and the first end of the second elastic sheet are both connected to the third pressing part.

[0014] Furthermore, the elastic mechanism includes an elastic component. Alternatively, the elastic mechanism includes multiple elastic components, wherein the first ends of the first elastic pieces of the multiple elastic components are all connected to the first pressing part, and the second ends of the second elastic pieces of the multiple elastic components are all connected to the second pressing part.

[0015] Furthermore, both the first and second elastic sheets have flat surfaces. Alternatively, both the first and second elastic sheets have curved surfaces.

[0016] Furthermore, there are multiple elastic mechanisms, which are distributed circumferentially along the first platform portion and / or the second platform portion; the fixed ends of the multiple elastic mechanisms are connected in sequence to form a ring-shaped fixing member; the moving ends of the multiple elastic mechanisms are connected in sequence to form a ring-shaped moving member.

[0017] Furthermore, the surfaces of both the first and second elastic plates of the elastic component are planar, and the ring of the fixing member is larger than the ring of the moving member. Alternatively, the surfaces of both the first and second elastic plates of the elastic component are curved, and the rings of the fixing member and the moving member are the same size.

[0018] Furthermore, the motion device also includes multiple ejector pins, which are distributed circumferentially along the first platform and / or the second platform. One end of each ejector pin is fixedly mounted on the second platform, and the other end is a free end. The axial direction of each ejector pin is parallel to a preset direction, so that when the first platform moves in the preset direction, the free end of the ejector pin lifts the material on the first platform.

[0019] According to another aspect of the present invention, a detection device is provided, which includes the above-described motion device.

[0020] The motion device, using the technical solution of this utility model, includes a fixed base, a platform assembly, a first driving member, a second driving member, and a decoupling member.

[0021] The platform component includes a first platform section, a second platform section, and an elastic mechanism; the elastic mechanism includes a fixed end and a movable end, the movable end being movably disposed relative to the fixed end along a preset direction, and the movable end and the fixed end being relatively fixed relative to each other in a direction perpendicular to the preset direction; the movable end is connected to the first platform section, and the fixed end is connected to the second platform section, so that the first platform section is movably disposed relative to the second platform section along the preset direction, and the first platform section and the second platform section are relatively fixed relative to each other in a direction perpendicular to the preset direction.

[0022] The fixing part of the first driving member is fixedly connected to the fixing seat; the output part of the first driving member is connected to the second platform part to drive the platform assembly to rotate around a preset axis; the extension direction of the preset axis is parallel or the same as the preset direction.

[0023] The fixing part of the second driving member is fixedly connected to the fixing base; the output part of the second driving member is connected to the first platform part to drive the first platform part to move relative to the second platform part in a preset direction.

[0024] A decoupling component is disposed between the output portion of the second drive member and the first platform portion, so that the first platform portion is rotatably disposed relative to the second drive member about a preset axis. That is, the second drive member drives the first platform portion to move in a preset direction through the decoupling component, and the decoupling component eliminates the influence of the rotation of the first platform portion on the second drive member.

[0025] This application enables the first and second driving components to be arranged side-by-side on the fixed base, thereby avoiding the size and weight increases caused by the stacking arrangement in the prior art, and also avoiding the problem of increased load mass. In other words, the motion device of this application has a smaller size and weight, enhancing the application advantages of the device; and reduces the motion load mass, improving control performance.

[0026] In addition, electrical components can be arranged on the second platform or at the fixed end to reduce wiring complexity. Attached Figure Description

[0027] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0028] Figure 1 A schematic diagram of the motion device according to the present invention is shown;

[0029] Figure 2 It shows Figure 1 A longitudinal sectional view of the motion device in the middle;

[0030] Figure 3 A schematic diagram of the cooperative structure of the elastic mechanism, the moving member, and the fixing member according to one embodiment of the motion device of the present invention is shown;

[0031] Figure 4 It shows Figure 3 A schematic diagram of the elastic mechanism of the motion device in the diagram;

[0032] Figure 5 A schematic diagram of the cooperative structure of the elastic mechanism, the moving member, and the fixing member according to another embodiment of the motion device of the present invention is shown;

[0033] Figure 6 It shows Figure 5 A schematic diagram of the elastic mechanism of the motion device in the diagram.

[0034] The above figures include the following reference numerals:

[0035] 40. Second driving component; 50. First driving component; 61. Connecting component; 62. Decoupling component; 70. Fixing base; 71. Mounting groove; 80. Ejector pin portion;

[0036] 91. First platform section; 92. Second platform section; 93. Elastic mechanism; 930. Elastic component; 931. Moving end; 9310. Moving part; 932. Fixed end; 9320. Fixed part; 933. First elastic piece; 934. Second elastic piece; 935. First pressing part; 936. Second pressing part; 937. Third pressing part; 9371. Fourth pressing part; 9372. Fifth pressing part; 9373. Third locking part. Detailed Implementation

[0037] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0038] It should be noted that the following detailed descriptions are illustrative and intended to provide further explanation of this application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0039] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0040] This utility model provides a motion device; please refer to it. Figures 1 to 6 The motion device includes a fixed base 70, a platform assembly, a first drive component 50, a second drive component 40, and a decoupling component 62.

[0041] The platform component includes a first platform section 91, a second platform section 92, and an elastic mechanism 93. The elastic mechanism 93 includes a fixed end 932 and a movable end 931. The movable end 931 is movably disposed relative to the fixed end 932 along a preset direction, and the movable end 931 and the fixed end 932 are fixed relative to each other in a direction perpendicular to the preset direction. The movable end 931 is connected to the first platform section 91, and the fixed end 932 is connected to the second platform section 92, so that the first platform section 91 is movably disposed relative to the second platform section 92 along the preset direction, and the first platform section 91 and the second platform section 92 are fixed relative to each other in a direction perpendicular to the preset direction.

[0042] The fixing part of the first driving member 50 is fixedly connected to the fixing base 70; the output part of the first driving member 50 is connected to the second platform part 92 to drive the platform assembly to rotate around a preset axis; the extension direction of the preset axis is parallel or the same as the preset direction.

[0043] The fixing part of the second driving member 40 is fixedly connected to the fixing base 70; the output part of the second driving member 40 is connected to the first platform part 91 to drive the first platform part 91 to move relative to the second platform part 92 in a preset direction.

[0044] The decoupling member 62 is disposed between the output portion of the second drive member 40 and the first platform portion 91, so that the first platform portion 91 is rotatably disposed relative to the second drive member 40 about a preset axis. That is, the second drive member 40 drives the first platform portion 91 to move in a preset direction through the decoupling member 62, and the decoupling member 62 eliminates the influence of the rotation of the first platform portion 91 on the second drive member 40.

[0045] Optionally, the decoupling element 62 is a bearing. For example, the decoupling element 62 is a double-row angular contact ball bearing. Specifically, the output portion of the second drive element 40 is connected to the inner ring of the bearing in the decoupling element 62, and the first platform portion 91 is connected to the outer ring of the bearing in the decoupling element 62.

[0046] Optionally, the first drive unit 50 is a torque motor.

[0047] Optionally, the second drive element 40 includes a voice coil motor or a lead screw structure.

[0048] Optionally, when the second drive unit 40 includes a voice coil motor, the second drive unit 40 also includes a guide rail or guide post structure to guide the movement in a preset direction. For example, the guide rail is a crossed roller guide rail.

[0049] Optionally, the preset direction is parallel to the vertical direction.

[0050] Optionally, the mounting base 70 is a housing structure.

[0051] In existing stacked motion devices, the linear drive component rotates following the rotary drive component, or the rotary drive component moves following the linear drive component. This application, however, arranges the first drive component 50 and the second drive component 40 side-by-side on the fixed base 70, and uses an elastic mechanism 93 and a decoupling member 62 to decouple the two drive components. That is, compared to stacked motion devices, when the first platform portion 91 of this application moves along a preset direction, the first drive component 50 will not move in the same direction, and when the first platform portion 91 rotates around a preset axis, the second drive component 40 will not rotate around the preset axis. Furthermore, arranging the first drive component 50 and the second drive component 40 side-by-side on the fixed base 70 avoids the increased size and weight problems caused by stacking in the prior art, and also avoids the problem of increased load mass. In other words, the motion device of this application has a smaller size and weight, enhancing its application advantages; and it reduces the motion load mass, improving control performance.

[0052] In addition, electrical components can be arranged in the second platform section 92 or the fixed end 932 to reduce wiring complexity.

[0053] Optionally, in this application, the mounting base 70 has a mounting groove 71, the first driving member 50 is disposed in the peripheral part of the mounting groove 71, and the fixing part of the first driving member 50 is fixedly connected to the groove side wall of the mounting groove 71; the second driving member 40 is disposed in the central part of the mounting groove 71, and the fixing part of the second driving member 40 is fixedly connected to the groove bottom wall of the mounting groove 71.

[0054] Optionally, the second platform part 92 is fitted onto the outside of the fixing part of the second drive member 40.

[0055] Optionally, the motion device further includes a connector 61, which is a crossed roller collar or a bearing. The connector 61 is disposed between the fixed base 70 and the second platform portion 92, so that the second platform portion 92 is rotatably disposed relative to the fixed base 70 about a preset axis. Specifically, the outer ring of the connector 61 is connected to the fixed base 70, and the second platform portion 92 is connected to the inner ring of the connector 61.

[0056] Furthermore, the connector 61 is located within the mounting groove 71, and the outer ring of the connector 61 is connected to the groove sidewall of the mounting groove 71.

[0057] Optionally, the connector 61 is located above the first drive member 50.

[0058] Optionally, in this application, the elastic mechanism 93 is a ring-shaped spring structure, with the outer ring of the elastic mechanism 93 connected to the second platform portion 92 and the inner ring of the elastic mechanism 93 connected to the first platform portion 91.

[0059] In this application, the elastic mechanism 93 includes an elastic component 930; the elastic component 930 includes a first elastic sheet 933 and a second elastic sheet 934, the first end of the first elastic sheet 933 is fixedly connected to the moving end 931; the second end of the first elastic sheet 933 is fixedly connected to the first end of the second elastic sheet 934, and the second end of the second elastic sheet 934 is fixedly connected to the fixed end 932; the first elastic sheet 933 and the second elastic sheet 934 are arranged at an acute angle, so that the first elastic sheet 933 and the second elastic sheet 934 are elastic in a preset direction and rigid in a direction perpendicular to the preset direction, so that the first end of the first elastic sheet 933 is movably arranged relative to the second end of the second elastic sheet 934 along the preset direction, and the first end of the first elastic sheet 933 and the second end of the second elastic sheet 934 are relatively fixed in a direction perpendicular to the preset direction, thereby making the moving end 931 movably arranged relative to the fixed end 932 along the preset direction, and the moving end 931 and the fixed end 932 are relatively fixed in a direction perpendicular to the preset direction.

[0060] The first elastic plate 933 and the second elastic plate 934 are set at an acute angle, which can improve the elasticity of the elastic mechanism 93 in the preset direction, and at the same time maintain good rigidity in the direction perpendicular to the preset direction. This can effectively ensure the movement and stroke of the motion device in the preset direction.

[0061] Specifically, the elastic mechanism 93 further includes a first pressing part 935, which is used to press and fix the first end of the first elastic piece 933 to the moving end 931.

[0062] Optionally, by having the first locking member pass through the first pressing part 935, the first end of the first elastic piece 933, and the moving end 931, the first pressing part 935, the first end of the first elastic piece 933, and the moving end 931 are all relatively fixed.

[0063] Optionally, the first locking element is a bolt, screw, or bolt.

[0064] Specifically, the elastic mechanism 93 further includes a second pressing part 936, which is used to press and fix the second end of the second elastic piece 934 to the fixed end 932.

[0065] Optionally, by having the second locking member pass through the second pressing part 936, the second end of the second elastic piece 934, and the fixed end 932, the second pressing part 936, the second end of the second elastic piece 934, and the fixed end 932 are all relatively fixed.

[0066] Optionally, the second locking element is a bolt, screw, or bolt.

[0067] Specifically, the elastic component 930 also includes a third pressing part 937, where the second end of the first elastic piece 933 and the first end of the second elastic piece 934 are both connected to the third pressing part 937, so that the third pressing part 937 presses and fixes the second end of the first elastic piece 933 and the first end of the second elastic piece 934 together.

[0068] Specifically, the third pressing part 937 includes a fourth pressing part 9371 and a fifth pressing part 9372. The second end of the first elastic piece 933 and the first end of the second elastic piece 934 are both disposed between the fourth pressing part 9371 and the fifth pressing part 9372, so that the fourth pressing part 9371 and the fifth pressing part 9372 press and fix the second end of the first elastic piece 933 and the first end of the second elastic piece 934 together.

[0069] Optionally, by having the third locking member 9373 pass through the fourth pressing part 9371, the second end of the first elastic piece 933, the first end of the second elastic piece 934, and the fifth pressing part 9372, the fourth pressing part 9371, the second end of the first elastic piece 933, the first end of the second elastic piece 934, and the fifth pressing part 9372 are all relatively fixed.

[0070] Optionally, the third locking element 9373 is a bolt, screw, or bolt.

[0071] By setting a clamping part, the connection between the first elastic sheet 933 and the second elastic sheet 934 can be changed from partial contact to surface contact, which enhances the stability of the connection and prevents deformation in non-preset directions, thereby affecting the stiffness perpendicular to the preset direction. In addition, it makes the connection points of the first elastic sheet 933 and the second elastic sheet 934 less prone to damage and extends the service life of the elastic sheet.

[0072] In this application, the elastic mechanism 93 includes one or more elastic components 930.

[0073] When the elastic mechanism 93 includes multiple elastic components 930, the first ends of the first elastic sheets 933 of the multiple elastic components 930 are all connected to the first pressing part 935, so that the first ends of the first elastic sheets 933 of the multiple elastic components 930 are pressed and fixed on the moving end 931 by the first pressing part 935; the second ends of the second elastic sheets 934 of the multiple elastic components 930 are all connected to the second pressing part 936, so that the second ends of the second elastic sheets 934 of the multiple elastic components 930 are pressed and fixed on the fixed end 932 by the second pressing part 936.

[0074] In this application, the surfaces of the first elastic sheet 933 and the second elastic sheet 934 are both flat; this facilitates the processing and installation of the first elastic sheet 933 and the second elastic sheet 934. Alternatively, the surfaces of the first elastic sheet 933 and the second elastic sheet 934 are both curved surfaces, which helps to reduce the space occupied by the elastic mechanism 93.

[0075] Optionally, the first elastic sheet 933 is a rectangular sheet, and the second elastic sheet 934 is a rectangular sheet.

[0076] In this application, optionally, there are multiple elastic mechanisms 93, and the multiple elastic mechanisms 93 are distributed circumferentially along the first platform portion 91 and / or the second platform portion 92.

[0077] Specifically, the fixed ends 932 of multiple elastic mechanisms 93 are connected in sequence to form a ring-shaped fixing member 9320; the moving ends 931 of multiple elastic mechanisms 93 are connected in sequence to form a ring-shaped moving member 9310.

[0078] Optionally, such as Figure 3 As shown, when the surfaces of the first elastic sheet 933 and the second elastic sheet 934 of the elastic component 930 are both planar, the ring of the fixing member 9320 is larger than the ring of the moving member 9310. Specifically, the first pressing part 935 is disposed on the edge of the ring of the moving member 9310, the second pressing part 936 is disposed on the edge of the ring of the fixing member 9320, and the third pressing part 937 is located on the outside of the ring of the fixing member 9320.

[0079] Optionally, such as Figure 5As shown, when the surfaces of the first elastic plate 933 and the second elastic plate 934 of the elastic component 930 are both curved surfaces, the ring body of the fixing member 9320 is the same size as the ring body of the moving member 9310. Specifically, the ring body of the fixing member 9320 is a circular ring, and the ring body of the moving member 9310 is a circular ring. Specifically, the first pressing part 935, the second pressing part 936, and the third pressing part 937 can all be projected onto the ring body of the fixing member 9320 along a preset direction, and the first pressing part 935, the second pressing part 936, and the third pressing part 937 can all be projected onto the ring body of the moving member 9310 along a preset direction. This is beneficial for the compactness of the structure, for reducing the volume of the platform components, and thus for reducing the overall volume of the motion device.

[0080] Optionally, the first elastic sheet 933 is a spring, and the second elastic sheet 934 is a spring.

[0081] In this application, the motion device further includes a plurality of ejector pins 80, which are distributed circumferentially along the first platform portion 91 and / or the second platform portion 92. One end of each ejector pin 80 is fixedly mounted on the second platform portion 92, and the other end is a free end. The axial direction of each ejector pin 80 is parallel to a preset direction, so that when the first platform portion 91 moves along the preset direction, the free ends of the plurality of ejector pins 80 together lift the material on the first platform portion 91. The ejector pins 80 are capable of rotating around a preset axis along with the platform assembly.

[0082] Optionally, when the ring of the fixing member 9320 is larger than the ring of the moving member 9310, a plurality of ejector pins 80 can be disposed on the fixing member 9320, that is, one end of the ejector pin 80 is fixedly disposed on the fixing member 9320.

[0083] Optionally, when the ring of the fixing member 9320 is the same size as the ring of the moving member 9310, the first platform part 91 is provided with a plurality of through holes, each through hole penetrating the first platform part 91 in a preset direction; the plurality of through holes are provided in a one-to-one correspondence with a plurality of ejector pin parts 80; when the first platform part 91 moves in the preset direction, the free end of each ejector pin part 80 passes through the corresponding through hole, so that the free ends of the plurality of ejector pin parts 80 together lift the material on the first platform part 91.

[0084] Optionally, the material is a semiconductor film or a silicon wafer.

[0085] This utility model also provides a detection device, which includes the above-mentioned motion device.

[0086] Optionally, the detection equipment is a semiconductor film thickness detection device, and the material is a semiconductor film.

[0087] As can be seen from the above description, the embodiments of this utility model achieve the following technical effects:

[0088] The motion device provided by this utility model includes a fixed base 70, a platform assembly, a first driving member 50, a second driving member 40, and a decoupling member 62.

[0089] The platform component includes a first platform section 91, a second platform section 92, and an elastic mechanism 93. The elastic mechanism 93 includes a fixed end 932 and a movable end 931. The movable end 931 is movably disposed relative to the fixed end 932 along a preset direction, and the movable end 931 and the fixed end 932 are fixed relative to each other in a direction perpendicular to the preset direction. The movable end 931 is connected to the first platform section 91, and the fixed end 932 is connected to the second platform section 92, so that the first platform section 91 is movably disposed relative to the second platform section 92 along the preset direction, and the first platform section 91 and the second platform section 92 are fixed relative to each other in a direction perpendicular to the preset direction.

[0090] The fixing part of the first driving member 50 is fixedly connected to the fixing base 70; the output part of the first driving member 50 is connected to the second platform part 92 to drive the platform assembly to rotate around a preset axis; the extension direction of the preset axis is parallel or the same as the preset direction.

[0091] The fixing part of the second driving member 40 is fixedly connected to the fixing base 70; the output part of the second driving member 40 is connected to the first platform part 91 to drive the first platform part 91 to move relative to the second platform part 92 in a preset direction.

[0092] The decoupling member 62 is disposed between the output portion of the second drive member 40 and the first platform portion 91, so that the first platform portion 91 is rotatably disposed relative to the second drive member 40 about a preset axis. That is, the second drive member 40 drives the first platform portion 91 to move in a preset direction through the decoupling member 62, and the decoupling member 62 eliminates the influence of the rotation of the first platform portion 91 on the second drive member 40.

[0093] This application enables the first driving member 50 and the second driving member 40 to be arranged side by side on the fixed base 70, thereby avoiding the size and weight increase problems caused by the stacking arrangement in the prior art, and also avoiding the problem of increased load mass. That is, the motion device of this application has a smaller size and weight, which enhances the application advantages of the device; and reduces the motion load mass, which improves the control performance.

[0094] In addition, electrical components can be arranged in the second platform section 92 or the fixed end 932 to reduce wiring complexity.

[0095] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0096] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0097] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A motion device, characterized by, The motion device comprises: a fixed seat (70); a platform assembly comprising a first platform part (91), a second platform part (92) and an elastic mechanism (93); the elastic mechanism (93) comprises a fixed end (932) and a movable end (931), the movable end (931) is movably arranged relative to the fixed end (932) along a preset direction, the movable end (931) and the fixed end (932) are fixed relative to each other in a direction perpendicular to the preset direction; the movable end (931) is connected with the first platform part (91), and the fixed end (932) is connected with the second platform part (92), so that the first platform part (91) is movably arranged relative to the second platform part (92) along the preset direction, and the first platform part (91) and the second platform part (92) are fixed relative to each other in a direction perpendicular to the preset direction; a first driving member (50), a fixed part of the first driving member (50) is fixedly connected with the fixed seat (70); an output part of the first driving member (50) is connected with the second platform part (92) to drive the platform assembly to rotate around a preset axis; the extension direction of the preset axis is parallel to or the same as the preset direction; a second driving member (40), a fixed part of the second driving member (40) is fixedly connected with the fixed seat (70); an output part of the second driving member (40) is connected with the first platform part (91) to drive the first platform part (91) to move along the preset direction; a decoupling member (62) arranged between the output part of the second driving member (40) and the first platform part (91) to make the first platform part (91) rotatably arranged relative to the second driving member (40).

2. The motion device according to claim 1, wherein: the decoupling member (62) is a bearing; and / or the first driving member (50) is a torque motor; and / or the second driving member (40) comprises a voice coil motor or a screw structure.

3. The motion device of claim 1, wherein, the elastic mechanism (93) comprises an elastic assembly (930), and the elastic assembly (930) comprises: a first elastic sheet (933), a first end of the first elastic sheet (933) is fixedly connected with the movable end (931); a second elastic sheet (934), a second end of the first elastic sheet (933) is fixedly connected with a first end of the second elastic sheet (934), and a second end of the second elastic sheet (934) is fixedly connected with the fixed end (932); the first elastic sheet (933) and the second elastic sheet (934) are arranged at an acute angle to make the first elastic sheet (933) and the second elastic sheet (934) have elasticity in the preset direction and rigidity in a direction perpendicular to the preset direction, so that the first end of the first elastic sheet (933) is movably arranged relative to the second end of the second elastic sheet (934) along the preset direction.

4. The motion device according to claim 3, wherein: The elastic mechanism (93) further comprises a first pressing part (935) for fixing a first end of the first elastic sheet (933) to the moving end (931); and / or The elastic mechanism (93) further comprises a second pressing part (936) for fixing a second end of the second elastic sheet (934) to the fixed end (932); and / or The elastic assembly (930) further comprises a third pressing part (937) to which the second end of the first elastic sheet (933) and the first end of the second elastic sheet (934) are connected.

5. The motion device according to claim 4, wherein The elastic mechanism (93) comprises one elastic assembly (930); or The elastic mechanism (93) comprises a plurality of elastic assemblies (930), the first ends of the first elastic sheets (933) of the plurality of elastic assemblies (930) are connected to the first pressing part (935), and the second ends of the second elastic sheets (934) of the plurality of elastic assemblies (930) are connected to the second pressing part (936).

6. The motion device according to claim 3, wherein The plate surfaces of the first elastic sheet (933) and the second elastic sheet (934) are both planar; or The plate surfaces of the first elastic sheet (933) and the second elastic sheet (934) are both arc-shaped.

7. The motion device of any one of claims 3 to 6, wherein, The elastic mechanism (93) is a plurality of elastic mechanisms (93) distributed along the circumferences of the first platform part (91) and / or the second platform part (92); The fixed ends (932) of the plurality of elastic mechanisms (93) are sequentially connected to form a ring-shaped fixed part (9320), and the moving ends (931) of the plurality of elastic mechanisms (93) are sequentially connected to form a ring-shaped moving part (9310).

8. The motion device according to claim 7, wherein The plate surfaces of the first elastic sheet (933) and the second elastic sheet (934) of the elastic assembly (930) are both planar, and the ring body of the fixed part (9320) is larger than the ring body of the moving part (9310); or The plate surfaces of the first elastic sheet (933) and the second elastic sheet (934) of the elastic assembly (930) are both arc-shaped, and the ring body of the fixed part (9320) is equal in size to the ring body of the moving part (9310).

9. The motion device of claim 1, wherein, The motion device further comprises a plurality of ejector parts (80) distributed along the circumferences of the first platform part (91) and / or the second platform part (92); One end of the ejector part (80) is fixedly arranged on the second platform part (92), and the other end is a free end; the axial direction of the ejector part (80) is parallel to the preset direction, so that when the first platform part (91) moves along the preset direction, the free end of the ejector part (80) lifts the material on the first platform part (91).

10. A detection device, characterized by The motion device according to any one of claims 1 to 9.

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