Replacing mechanism for photomask placing plate of photoetching machine

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and discloses a mechanism for replacing a photomask placing plate of a photoetching machine, which comprises a photoetching machine shell, a support frame is fixedly connected to the top of the inner wall of the photoetching machine shell, and a projection objective lens mechanism is fixedly connected to the front side of the outer wall of the support frame. A control mechanism is fixedly connected to the rear side of the inner wall of the photoetching machine shell, a fixing ring is arranged at the top of the outer wall of the second gear, the fixing ring is clamped with the adjusting block, a placing disc is fixedly connected to the top of the outer wall of the fixing ring, and a clamping mechanism is fixedly connected to the middle of the inner wall of the photoetching machine shell. And the clamping mechanism is used for clamping the convenient replacement structure. According to the utility model, the photoetching enclosure serves as an integral frame and provides a mounting foundation and protection, the support frame at the top of the inner wall is connected with the projection objective lens mechanism, and the motor drives the gear I and the gear II to rotate, so that the position adjustment in the horizontal direction is realized to adapt to the replacement of different photomask placing plates.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially to a replacement mechanism of photomask placing plate of photoetching machine. BACKGROUND

[0002] The precision and quality of the photomask of the photoetching machine affect the precision and performance of chip manufacturing. With the development of chip manufacturing technology to smaller process nodes, in the photoetching process, the photomask is placed in the optical path system of the photoetching machine between the light source and the wafer to be processed. When light passes through the photomask, the light-blocking part on the photomask will block the light, while the light-transmitting part will allow the light to pass through, thereby transferring the pattern on the photomask to the photoresist on the wafer surface in a projection manner. It is a key link to convert chip design from drawings to actual physical structure.

[0003] The photomask placing plate replacement mechanism in the photoetching machine is a mechanical device for quickly and conveniently replacing the photomask placing plate, which improves the efficiency and precision of photomask replacement, reduces manual operation errors and risks, and ensures the stable operation of the photoetching machine and the smooth progress of the photoetching process. However, the machining precision of mechanical components and assembly error factors in the existing photomask placing plate replacement mechanism of the photoetching machine still cause the photomask placing plate to deviate in position during replacement. Frequent movement and operation can cause wear of the mechanical parts of the driving components. With the increase of use time, the wear will gradually increase, causing the performance of the mechanism to decrease, resulting in problems such as jamming and shaking, increasing maintenance costs and downtime, affecting the alignment accuracy of the photomask and the optical path system, and thus reducing the precision of photoetching and the yield of chip manufacturing. SUMMARY

[0004] To make up for the above shortcomings, the utility model provides a photomask placing plate replacement mechanism of photoetching machine, aiming to improve the problem that frequent movement and operation can cause wear of the mechanical parts of the driving components, with the increase of use time, causing the performance of the mechanism to decrease, affecting the alignment accuracy of the photomask and the optical path system, and thus reducing the precision of photoetching and the yield of chip manufacturing.

[0005] In order to achieve the above object, the utility model discloses the following technical scheme: a photolithography mask placing plate's replacement mechanism of photolithography machine, including the photolithography machine shell, the inner wall top of photolithography machine shell is fixedly connected with the support frame, the outer wall front side of support frame is fixedly connected with the projection objective mechanism, the inner wall rear side of photolithography machine shell is fixedly connected with control mechanism, the inner wall bottom of photolithography machine shell is fixedly connected with the fixed frame, the inner wall left and right sides of fixed frame are slidably connected with the moving rod, the bottom right side of fixed frame is fixedly connected with electric push rod, the output of electric push rod is fixedly connected with the moving plate, the outer wall top of moving plate is fixedly connected with the adjusting frame, the inner wall middle part of adjusting frame is slidably connected with a plurality of adjusting blocks, the bottom rear side of adjusting frame is fixedly connected with motor, the output of motor is fixedly connected with gear one, the top wall middle part of adjusting frame is rotatably connected with gear two, gear two is engagedly connected with gear one, the inner wall middle part of gear two is provided with a plurality of arc grooves, the arc grooves are slidably connected on the outer wall all around adjusting block, the outer wall top of gear two is provided with the fixed ring, the fixed ring is engaged with adjusting block, the outer wall top of fixed ring is fixedly connected with the placing disc, the inner wall middle part of photolithography machine shell is fixedly connected with the clamping mechanism, and the clamping mechanism is used for clamping convenient replacement structure.

[0006] As a further description of the above technical solution:

[0007] The clamping mechanism includes a slide rod, the slide rod is fixedly connected to the inner wall middle part of the support frame, the outer wall front side of the slide rod is slidably connected with a moving block, the outer wall front side of the moving block is fixedly connected with a fixed rod, the outer wall bottom of the two fixed rods is fixedly connected with a gasket, the outer wall top of the fixed rod is threadedly connected with a threaded rod, the outer wall bottom of the threaded rod is threadedly connected with a clamping plate one, the outer wall front side of the clamping plate one is fixedly connected with a clamping plate two, and the clamping plate two is fixedly connected to the outer wall front side of the electric push rod.

[0008] As a further description of the above technical solution:

[0009] The bottom four corners of the fixed frame are fixedly connected with fixed blocks, and the outer wall top of the fixed blocks is threadedly connected with a bolt one.

[0010] As a further description of the above technical solution:

[0011] The inner wall left and right sides of the photolithography machine shell are provided with sealing grooves, and the bottom front side of the photolithography machine shell is provided with a ventilation plate.

[0012] As a further description of the above technical solution:

[0013] The outer wall left side of the photolithography machine shell is provided with a switch, and the outer wall right side of the photolithography machine shell is provided with a socket.

[0014] As a further description of the above technical solutions:

[0015] The top front side of the photoetching machine shell is fixedly connected with a rotating shaft, and the outer wall of the rotating shaft is rotatably connected with a cover plate.

[0016] As a further description of the above technical solutions:

[0017] The top rear side of the photoetching machine shell is fixedly connected with an exhaust fan, and the rear side of the outer wall of the photoetching machine shell is fixedly connected with a ventilation board.

[0018] As a further description of the above technical solutions:

[0019] The outer wall of the support frame is fixedly connected with sliding blocks around, and the outer wall of the plurality of sliding blocks is threadedly connected with bolts two.

[0020] The utility model has the advantages of the following beneficial effects:

[0021] 1. In the utility model, the photoetching machine shell serves as an overall frame, provides installation foundation and protection, the support frame at the top of the inner wall is connected with the projection objective lens mechanism, when the photo mask placing plate is replaced, the projection objective lens mechanism needs to be kept stable, the photoetching machine shell and the support frame ensure that it is not disturbed, the electric push rod serves as a vertical movement power source, the control mechanism drives its action through a signal, pushes the moving plate to move up and down, the moving rod provides guiding and stabilizing effects, the motor drives gear one and gear two to rotate, the adjusting block slides in the arc-shaped groove, horizontal position adjustment is realized, the adjusting block cooperates with the fixed ring, and the position of the placing disc is determined to adapt to the replacement of different photo mask placing plates.

[0022] 2. In the utility model, the sliding rod is fixed in the inner wall of the support frame, provides a stable track for the moving block, the moving block slides along the sliding rod, the outer wall of the moving block is connected with the fixed rod, the fixed rod is connected with the gasket at the bottom, the contact stability and the sealing property are increased, wear and collision are prevented, the fixed rod is threadedly connected with the threaded rod at the top, the clamping plate one and the clamping plate two drive clamping and releasing through the rotation of the threaded rod, effective clamping and fixing of the projection objective lens mechanism are realized, and the adjustment stability and accuracy are ensured. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 A perspective view of a photo mask placing plate replacement mechanism of a photoetching machine is provided for the utility model;

[0024] Figure 2 A partial structure schematic view of a photo mask placing plate replacement mechanism of a photoetching machine is provided for the utility model;

[0025] Figure 3 A structure split view of a photo mask placing plate replacement mechanism of a photoetching machine is provided for the utility model;

[0026] Figure 4A partial structure disassembly view of the replacement mechanism of the photomask placing plate of the photoetching machine is provided in the utility model.

[0027] Figure 5 A clamping mechanism disassembly view of the replacement mechanism of the photomask placing plate of the photoetching machine is provided in the utility model.

[0028] Legend:

[0029] 1, photoetching machine shell; 2, clamping mechanism; 201, sliding rod; 202, moving block; 203, fixed rod; 204, gasket; 205, threaded rod; 206, clamping plate one; 207, clamping plate two; 3, support frame; 4, projection objective mechanism; 5, fixed frame; 6, moving rod; 7, electric push rod; 8, moving plate; 9, control mechanism; 10, adjusting frame; 11, adjusting block; 12, motor; 13, gear one; 14, gear two; 15, arc-shaped groove; 16, fixed ring; 17, placing disc; 18, fixed block; 19, bolt one; 20, sealing groove; 21, ventilation plate; 22, switch; 23, socket; 24, rotating shaft; 25, cover plate; 26, exhaust fan; 27, louvre; 28, sliding block; 29, bolt two. Specific implementation

[0030] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0031] Reference Figure 1 , Figure 3 and Figure 4The utility model provides a kind of replacement mechanism of photomask placing plate of photolithography machine, including photolithography machine shell 1, the inner wall top of photolithography machine shell 1 is fixedly connected with support frame 3, the outer wall front side of support frame 3 is fixedly connected with projection objective mechanism 4, the inner wall rear side of photolithography machine shell 1 is fixedly connected with control mechanism 9, the inner wall bottom of photolithography machine shell 1 is fixedly connected with fixed frame 5, the inner wall left and right sides of fixed frame 5 are slidably connected with moving rod 6, the bottom right side of fixed frame 5 is fixedly connected with electric push rod 7, the output end of electric push rod 7 is fixedly connected with moving plate 8, the outer wall top of moving plate 8 is fixedly connected with adjusting frame 10, the inner wall middle part of adjusting frame 10 is slidably connected with multiple adjusting blocks 11, the bottom rear side of adjusting frame 10 is fixedly connected with motor 12, the output end of motor 12 is fixedly connected with gear one 13, the top wall middle part of adjusting frame 10 is rotatably connected with gear two 14, gear two 14 is engagedly connected with gear one 13, multiple arc grooves 15 are arranged in the inner wall middle part of gear two 14, arc groove 15 is slidably connected in the outer wall all around of adjusting block 11, the outer wall top of gear two 14 is provided with fixed ring 16, fixed ring 16 is engaged with adjusting block 11, the outer wall top of fixed ring 16 is fixedly connected with placing disc 17, the inner wall middle part of photolithography machine shell 1 is fixedly connected with clamping mechanism 2, clamping mechanism 2 is used to clamp convenient replacement structure, the bottom four corner places of fixed frame 5 are fixedly connected with fixed block 18, the outer wall top of fixed block 18 is all threadedly connected with bolt one 19;

[0032] Specifically, photolithography machine shell 1 is used as overall framework, provides installation base and protection, support frame 3 connected with projection objective mechanism 4 on the inner wall top is the key component for realizing photolithography, projection objective mechanism 4 needs to keep stable when photomask placing plate is replaced, photolithography machine shell 1 and support frame 3 ensure that it is not disturbed, maintain optical performance, electric push rod 7 is used as vertical movement power source, control mechanism 9 drives its action through signal, moving plate 8 is pushed to move up and down, moving rod 6 provides guiding and stabilizing effect, motor 12 is horizontal adjustment power source, drives gear one 13 and gear two 14 to rotate, adjusting block 11 is slid in arc groove 15, realizes horizontal direction position adjustment, adjusting block 11 cooperates with fixed ring 16, determines the position of placing disc 17, to adapt to the replacement of different photomask placing plate, the inner wall middle part of photolithography machine shell 1 is fixedly connected with clamping mechanism 2, clamping mechanism 2 is used to clamp convenient replacement structure, fixed block 18 is connected at the bottom four corner places of fixed frame 5, fixed block 18 not only supports the whole structure, and the outer wall top of them is all connected closely with bolt one 19, ensure that the connection between fixed block 18 and bolt one 19 is firm and reliable, to enhance the stability and durability of whole fixed frame 5.

[0033] Refer to Figure 1 , Figure 2 And Figure 5The clamping mechanism 2 comprises a sliding rod 201 fixedly connected to the middle of the inner wall of the support frame 3, a moving block 202 slidingly connected to the front side of the outer wall of the sliding rod 201, a fixed rod 203 fixedly connected to the front side of the outer wall of the moving block 202, a gasket 204 fixedly connected to the bottom of the outer wall of each of the two fixed rods 203, a threaded rod 205 threadedly connected to the top of the outer wall of the fixed rod 203, a clamping plate one 206 threadedly connected to the bottom of the outer wall of the threaded rod 205, a clamping plate two 207 fixedly connected to the front side of the outer wall of the clamping plate one 206, and the clamping plate two 207 is fixedly connected to the front side of the outer wall of the projection objective mechanism 4. The inner wall of the lithography machine shell 1 is provided with a sealing groove 20 on the left and right sides, and the bottom front side of the lithography machine shell 1 is provided with a ventilation plate 21. The outer wall of the lithography machine shell 1 is provided with a switch 22 on the left side, and the outer wall of the lithography machine shell 1 is provided with a socket 23 on the right side.

[0034] Specifically, the sliding rod 201 is fixed in the inner wall of the support frame 3 to provide a stable track for the moving block 202. The moving block 202 slides along the sliding rod 201 to limit its straight-line movement path, ensuring accuracy and stability of movement. The moving block 202 is connected to the fixed rod 203 on the outer wall. After moving to the appropriate position, the fixed rod 203 is also in place. The fixed rod 203 is connected to the gasket 204 at the bottom to increase contact stability and sealing to prevent wear or collision. The fixed rod 203 is threadedly connected to the threaded rod 205 at the top. By rotating the threaded rod 205, the clamping plate one 206 and the clamping plate two 207 drive the electric push rod 7 to clamp or release, achieving effective clamping and fixing, ensuring the stability and accuracy of the electric push rod 7. The inner wall of the lithography machine shell 1 is provided with a sealing groove 20 on the left and right sides to ensure the stability and sealing of the equipment during operation. The bottom front side of the lithography machine shell 1 is provided with a ventilation plate 21 to facilitate heat dissipation inside the equipment, thereby ensuring the continuous and stable operation of the lithography machine. To facilitate user operation, an easy-to-operate switch 22 is installed on the left side of the outer wall of the lithography machine shell 1, and the user can easily turn on and off the equipment. A socket 23 is provided on the right side of the outer wall of the lithography machine shell 1, which conveniently connects various external devices, ensuring the multifunctionality and expandability of the lithography machine.

[0035] Referring to Figure 1 , Figure 2 and Figure 3 , the top front side of the lithography machine shell 1 is fixedly connected with a rotating shaft 24, the outer wall of one side of the rotating shaft 24 is rotatably connected with a cover plate 25, the top rear side of the lithography machine shell 1 is fixedly connected with an exhaust fan 26, the rear side of the outer wall of the lithography machine shell 1 is fixedly connected with a ventilation plate 27, the outer wall of the support frame 3 is fixedly connected with a sliding block 28, and the front side of the outer wall of a plurality of sliding blocks 28 is threadedly connected with a bolt two 29.

[0036] Specifically, the top front side of the photoetching machine shell 1 is connected with the cover plate 25 through the rotating shaft 24, and the cover plate 25 can rotate around the rotating shaft 24, so as to open or close the top of the photoetching machine shell 1, and facilitate internal maintenance and other operations. After the exhaust fan 26 at the rear side of the top is started, the heat and other gases in the shell can be exhausted, and the internal heat dissipation and air circulation conditions are improved. The louvers 27 at the rear side of the outer wall can guide the exhaust air flow to be more reasonably diffused, so as to avoid causing adverse effects on the surrounding environment. The support frame 3 is connected with the internal structure of the photoetching machine shell 1 by means of the sliding blocks 28 around the support frame 3. By tightening or loosening the bolts 29, the position of the support frame 3 can be adjusted and fixed, so as to adapt to different assembly or use requirements, and ensure that the parts of the photoetching machine work cooperatively.

[0037] Working principle: in the replacement mechanism of the mask placing plate of the photoetching machine, the photoetching machine shell 1 is used as the overall frame to provide the installation base and protection for the internal components, the support frame 3 fixed on the inner wall top of the photoetching machine shell 1 and the projection objective mechanism 4 connected to the outer wall front side of the support frame 3 are one of the main components of the photoetching machine to realize photoetching, during the replacement of the mask placing plate, the projection objective mechanism 4 needs to keep stable working state and accurate position, the photoetching machine shell 1 and the support frame 3 jointly guarantee that the projection objective mechanism 4 is not affected by external interference and displacement, maintain its optical performance, ensure that the pattern on the mask can be accurately projected onto the wafer surface through light before and after the replacement of the mask placing plate, realize high-precision photoetching, lay the foundation for the subsequent chip manufacturing link, the electric push rod 7 is the power source for the vertical movement of the whole mechanism, when the operation of replacing the mask placing plate is needed, the control mechanism 9 sends a signal to the electric push rod 7, the output end of the electric push rod 7 starts to act, pushes the moving plate 8 to move up and down, since the moving rod 6 is slidably connected to the inner wall left and right sides of the fixed frame 5, it can guide and stabilize the moving plate 8, ensure that the moving plate 8 moves more stably and accurately in the vertical direction, prevent shaking or deviation, the motor 12 is the power source for horizontal adjustment, after starting, it drives the gear one 13 to rotate, the gear one 13 is meshed and connected with the gear two 14, so the rotation of the gear one 13 drives the gear two 14 to rotate in the middle of the top wall of the adjusting frame 10, the inner wall middle part of the gear two 14 is provided with a plurality of arc grooves 15, the outer wall of the adjusting block 11 is slidably connected with the arc grooves 15, when the gear two 14 rotates, the shape of the arc grooves 15 makes the adjusting block 11 slide horizontally in the middle of the inner wall of the adjusting frame 10 along the track of the arc grooves 15 during the rotation of the gear two 14, realizes the position adjustment of the adjusting block 11, after the adjusting block 11 slides horizontally to the appropriate position, the fixing ring 16 is engaged with the adjusting block 11, so as to fix the position of the adjusting block 11, since the outer wall top of the fixing ring 16 is fixedly connected with the placing disc 17, the determination of the position of the adjusting block 11 also determines the position of the placing disc 17, so that the placing disc 17 can accurately place and fix the mask placing plate, through the cooperation of the adjusting block 11, the arc grooves 15 and the fixing ring 16, the accurate adjustment and positioning of the placing disc 17 in the horizontal direction can be realized to adapt to the replacement operation of the mask placing plate with different sizes or different position requirements;

[0038] The sliding rod 201 is fixed in the middle of the inner wall of the support frame 3, and provides a stable sliding track for the moving block 202. Since the moving block 202 is slidingly connected to the front side of the outer wall of the sliding rod 201, the moving block 202 can move along the direction of the sliding rod 201, which limits the moving path of the sliding rod 201 and makes the sliding rod 201 move in the straight direction determined by the sliding rod 201, thereby playing a positioning and guiding role, ensuring the accuracy and stability of the movement of the related components. The outer wall of the front side of the fixed rod 203 is fixedly connected to the outer wall of the front side of the moving block 202. When the moving block 202 moves to the appropriate position on the sliding rod 201, the fixed rod 203 will also reach the corresponding position. The outer wall bottom of the two fixed rods 203 is fixedly connected with the gasket 204. The main function of the gasket 204 is to increase the stability and sealing performance when contacting with the components, and also can play a buffering role, preventing the components from being worn or collided due to direct contact, protecting the components and making the whole structure more stable. The outer wall top of the fixed rod 203 is screwedly connected with the threaded rod 205, and the outer wall bottom of the threaded rod 205 is screwedly connected with the clamping plate one 206. By rotating the threaded rod 205, the threaded rod 205 will move up and down along the fixed rod 203 due to the function of the thread, thereby driving the clamping plate one 206 to move up and down. The outer wall front side of the clamping plate one 206 is fixedly connected with the clamping plate two 207, which is fixedly connected to the outer wall front side of the projection objective mechanism 4. When the clamping plate one 206 is driven by the threaded rod 205 to move downward, the clamping plate two 207 will generate downward pressure on the outer wall front side of the projection objective mechanism 4, thereby tightly clamping the relevant parts of the projection objective mechanism 4. When the threaded rod 205 is reversely rotated to drive the clamping plate one 206 to move upward, the clamping force will be reduced, facilitating the installation, disassembly and adjustment of the projection objective mechanism 4. In this way, the threaded rod 205, the clamping plate one 206 and the clamping plate two 207 can cooperate to effectively clamp and fix the projection objective mechanism 4, ensuring the stability and accuracy of the electric push rod 7 during the working process.

[0039] Finally, it should be noted that the above description is only a preferred embodiment of the present application and is not intended to limit the present application. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or equivalently replace some technical features, as long as they are within the spirit and principles of the present application. Any modification, equivalent replacement, improvement, etc. made within the scope of the present application shall be included in the protection scope of the present application.

Claims

1. A replacement mechanism for a reticle placement plate of a lithography machine, comprising a housing (1) of the lithography machine, characterized in that: The inner wall top of the photoetching machine shell (1) is fixedly connected with a support frame (3), the outer wall front side of the support frame (3) is fixedly connected with a projection objective mechanism (4), the inner wall rear side of the photoetching machine shell (1) is fixedly connected with a control mechanism (9), the inner wall bottom of the photoetching machine shell (1) is fixedly connected with a fixed frame (5), the inner wall left and right sides of the fixed frame (5) are both slidably connected with a moving rod (6), the bottom right side of the fixed frame (5) is fixedly connected with an electric push rod (7), the output end of the electric push rod (7) is fixedly connected with a moving plate (8), the outer wall top of the moving plate (8) is fixedly connected with an adjusting frame (10), the inner wall middle part of the adjusting frame (10) is slidably connected with a plurality of adjusting blocks (11), the bottom rear side of the adjusting frame (10) is fixedly connected with a motor (12), the output end of the motor (12) is fixedly connected with a gear one (13), the top wall middle part of the adjusting frame (10) is rotatably connected with a gear two (14), the gear two (14) is meshedly connected with the gear one (13), a plurality of arc-shaped grooves (15) are formed in the inner wall middle part of the gear two (14), the arc-shaped grooves (15) are slidably connected around the outer wall of the adjusting block (11), the outer wall top of the gear two (14) is provided with a fixed ring (16), the fixed ring (16) is clamped with the adjusting block (11), the outer wall top of the fixed ring (16) is fixedly connected with a placing disc (17), the inner wall middle part of the photoetching machine shell (1) is fixedly connected with a clamping mechanism (2), and the clamping mechanism (2) is used for clamping the convenient replacement structure.

2. The mask exchange mechanism of claim 1, wherein: The clamping mechanism (2) comprises a sliding rod (201), the sliding rod (201) is fixedly connected to the inner wall middle part of the support frame (3), the outer wall front side of the sliding rod (201) is slidably connected with a moving block (202), the outer wall front side of the moving block (202) is fixedly connected with a fixed rod (203), the outer wall bottom of the two fixed rods (203) is fixedly connected with a gasket (204), the outer wall top of the fixed rod (203) is threadedly connected with a threaded rod (205), the outer wall bottom of the threaded rod (205) is threadedly connected with a clamping plate one (206), the outer wall front side of the clamping plate one (206) is fixedly connected with a clamping plate two (207), and the clamping plate two (207) is fixedly connected to the outer wall front side of the projection objective mechanism (4).

3. The mask exchange mechanism of claim 1, wherein: The bottom four corners of the fixed frame (5) are fixedly connected with fixed blocks (18), and the outer wall top of the fixed blocks (18) is threadedly connected with bolts one (19).

4. The mask exchange mechanism of claim 1, wherein: The inner wall left and right sides of the photoetching machine shell (1) are provided with sealing grooves (20), and the bottom front side of the photoetching machine shell (1) is provided with a ventilation plate (21).

5. The mask exchange mechanism of claim 1, wherein: The outer wall left side of the photoetching machine shell (1) is provided with a switch (22), and the outer wall right side of the photoetching machine shell (1) is provided with a socket (23).

6. The mask exchange mechanism of claim 1, wherein: The top front side of the photoetching machine shell (1) is fixedly connected with a rotating shaft (24), and the outer wall one side of the rotating shaft (24) is rotatably connected with a cover plate (25).

7. The mask exchange mechanism of claim 1, wherein: The top rear side of the photoetching machine shell (1) is fixedly connected with an exhaust fan (26), and the rear side of the outer wall of the photoetching machine shell (1) is fixedly connected with a ventilation board (27).

8. The mask exchange mechanism of claim 1, wherein: The outer wall of the support frame (3) is fixedly connected with a sliding block (28), and the front side of the outer wall of a plurality of sliding blocks (28) is threadedly connected with a bolt two (29).

Images