Nitrogen detection control system with high detection precision

Abstract

The utility model discloses a nitrogen detection control system with high detection precision, which belongs to the technical field of nitrogen detection and comprises a control module, an electromagnetic valve, a nitrogen supply device, an environment detection module, a calibration module, a nitrogen purification module and an alarm module. According to the mode, the nitrogen concentration monitoring device realizes accurate environment monitoring and regulation, can monitor the nitrogen concentration of an environment detection space in real time, enables nitrogen to be recycled, saves the cost, can calibrate the fluorescent sensor, ensures the accuracy of detection data, considers other gases in the environment, and is small in measurement error.

Description

Technical Field

[0001] This utility model relates to the field of nitrogen detection technology, specifically to a nitrogen detection and control system with high detection accuracy. Background Technology

[0002] The atmospheric environment contains approximately 78% nitrogen (N2) and about 21% oxygen (O2) by volume. According to Dalton's law of partial pressures, in a closed or relatively closed system where no gases react with each other, the total pressure of the mixture is equal to the sum of the partial pressures of its components. In a relatively closed atmospheric environment, the partial pressure ratio of nitrogen, oxygen, and other gases is 78:21:1, and the volume percentage concentration of each component also follows this ratio. In other words, in a closed system, once the oxygen concentration is known, the nitrogen concentration can be calculated. Nitrogen detection has very important applications in semiconductors, power, smart agriculture, and smart warehousing.

[0003] Because nitrogen is chemically inert, common methods for detecting nitrogen include gas chromatography, mass spectrometry, thermal conductivity detectors, and indirect methods using paramagnetic oxygen sensors.

[0004] For example, gas chromatography-TCD uses a chromatographic column to separate gases and uses a thermal conductivity detector (TCD) to measure the difference in thermal conductivity of different gases to detect their concentration. However, the equipment is expensive, requires professional operation, and has a long analysis time, and requires regular calibration.

[0005] Mass spectrometry (MS) separates and detects the characteristic peaks of nitrogen by ionizing gas molecules according to their mass-to-charge ratio to obtain the nitrogen concentration value. However, the equipment is extremely expensive, requires a high vacuum environment, and is complex to maintain, making it unsuitable for on-site detection.

[0006] The thermal conductivity detector (TCD) works by directly measuring the difference in thermal conductivity of gases (nitrogen has a lower thermal conductivity than hydrogen, helium, etc.) to obtain the nitrogen concentration value. However, it is easily affected by other gases (such as oxygen, carbon dioxide, etc.) and requires stable temperature and flow rate, resulting in low accuracy.

[0007] The principle of the paramagnetic oxygen sensor indirect method is to measure the oxygen concentration in the environmental system, with the remaining gas assumed to be nitrogen (assuming that other gases can be ignored). However, the measurement error is large and does not take into account other gases in the environment, such as CO2 or Ar.

[0008] Based on this, this utility model designs a nitrogen detection and control system with high detection accuracy to solve the above problems. Utility Model Content

[0009] In view of the above-mentioned shortcomings of the existing technology, the present invention provides a nitrogen detection and control system with high detection accuracy.

[0010] To achieve the above objectives, this utility model provides the following technical solution:

[0011] A high-precision nitrogen detection and control system includes a control module, a solenoid valve, a nitrogen supply device, an environmental detection module, a calibration module, a nitrogen purification module, and an alarm module.

[0012] Nitrogen supply device, used to provide nitrogen to the environment of the environmental monitoring space;

[0013] An environmental detection module is used to detect the nitrogen concentration in the environmental detection space, and the environmental detection module is installed inside the environmental detection space.

[0014] A calibration module is used to calibrate the environmental detection module to ensure the accuracy of the detection results. The environmental detection module is connected to the calibration module.

[0015] The nitrogen purification module is used to filter and purify the gas discharged from the environmental monitoring module. The nitrogen purification module is connected to the environmental monitoring module.

[0016] The alarm module is used to notify staff of abnormal gas conditions in the environmental monitoring space.

[0017] The control module is electrically connected to the solenoid valve, environmental detection module, calibration module, nitrogen purification module, and alarm module, and controls the operation of the solenoid valve, environmental detection module, calibration module, nitrogen purification module, and alarm module respectively.

[0018] Furthermore, the environmental monitoring module includes a fluorescence sensor, an exhaust valve, an electromagnetic radiation monitor, and a fan. The fluorescence sensor, exhaust valve, electromagnetic radiation monitor, and fan are all fixedly installed inside the environmental monitoring space, and are all electrically connected to the control module.

[0019] Furthermore, the exhaust valve is connected to the nitrogen purification module.

[0020] Furthermore, the fluorescence sensor is provided in multiple locations and is evenly distributed in different positions in the environmental detection space.

[0021] Furthermore, the electromagnetic radiation monitor is equipped with multiple sensors that are evenly distributed around the fluorescent sensor.

[0022] Furthermore, the calibration module includes a pressure reducing valve, an oxygen supply device, a sealed container, and an imaging unit. The oxygen supply device is fixedly connected to the pressure reducing valve, the outlet end of the oxygen supply device is fixedly connected to one end of a gas flow controller, the other end of the gas flow controller is fixedly connected to the sealed container, and the imaging unit is fixedly installed on the outer end of the sealed container.

[0023] Furthermore, the pressure reducing valve, oxygen supply device, gas flow controller, and imaging unit are all electrically connected to the control module.

[0024] Furthermore, the nitrogen purification module includes a filtration device and a pressure swing adsorption (PSA) purification device. One end of the filtration device is connected to an exhaust valve, and the other end of the filtration device is connected to one end of the PSA purification device. The other end of the PSA purification device is connected to a nitrogen supply device, and the PSA purification device is electrically connected to a control module.

[0025] Compared with the prior art, the advantages of this utility model are as follows: 1. The environmental detection module can monitor the nitrogen concentration in the environmental detection space in real time with the help of the fluorescence sensor. Once the monitoring data exceeds the preset threshold, the control module responds quickly and adjusts the system through the solenoid valve and nitrogen supply device, which effectively ensures the safety of the environmental detection space and reduces the risk of equipment failure and production accidents caused by environmental factors.

[0026] 2. The nitrogen purification module first filters out particulate impurities, oil stains and water vapor in the air using a filtration device, and then removes impurities such as oxygen and carbon dioxide through the pressure swing adsorption principle to ensure the output of high-purity nitrogen.

[0027] 3. The calibration module uses oxygen gas and an imaging unit to perform multi-point calibration on the fluorescence sensor, improving the sensor's measurement accuracy and ensuring that it provides accurate data in environmental monitoring, thereby enhancing the reliability and stability of the entire environmental monitoring system.

[0028] 4. The equipment used in this application is low-cost, requiring no expensive equipment like gas chromatography and mass spectrometry. It is simple to operate, has a short analysis time, and can be used for on-site testing, making it applicable to a wider range of scenarios. Compared to thermal conductivity detectors, it is less affected by interference from other gases and can detect more stably and accurately. Compared to the indirect method using paramagnetic oxygen sensors, it fully considers other gases in the environment, resulting in smaller measurement errors. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a connection block diagram of a high-precision nitrogen detection and control system according to the present invention.

[0031] Figure 2 This is a connection block diagram of the nitrogen supply device, environmental monitoring module, and nitrogen purification module of this utility model.

[0032] Figure 3 This is a connection block diagram of the calibration module of this utility model;

[0033] Figure 4 This is a connection block diagram of the control module, oxygen supply device, and nitrogen purification module of this utility model.

[0034] The labels in the diagram represent:

[0035] 1. Control module; 2. Solenoid valve; 3. Nitrogen supply device; 4. Environmental monitoring module; 41. Fluorescent sensor; 42. Exhaust valve; 43. Electromagnetic radiation monitor; 44. Fan; 5. Calibration module; 51. Pressure reducing valve; 52. Oxygen supply device; 53. Gas flow controller; 54. Sealed container; 55. Imaging unit; 6. Nitrogen purification module; 61. Filtration device; 62. Pressure swing adsorption purification device; 7. Alarm module. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0037] Example 1: In some embodiments, please refer to the accompanying drawings. Figures 1-4 A high-precision nitrogen detection and control system includes a control module 1, a solenoid valve 2, a nitrogen supply device 3, an environmental detection module 4, a calibration module 5, a nitrogen purification module 6, and an alarm module 7.

[0038] Nitrogen supply device 3 is used to provide nitrogen to the environmental monitoring space environment;

[0039] Environmental detection module 4 is used to detect the nitrogen concentration in the environmental detection space environment. The environmental detection module 4 is installed inside the environmental detection space.

[0040] The calibration module 5 is used to calibrate the environmental detection module 4 to ensure the accuracy of the detection results. The environmental detection module 4 is connected to the calibration module 5.

[0041] Nitrogen purification module 6 is used to filter and purify the gas discharged from environmental monitoring module 4, so that nitrogen can be recycled. Nitrogen purification module 6 is connected to environmental monitoring module 4.

[0042] Alarm module 7 is used to notify staff of abnormal gas conditions in the environmental monitoring space.

[0043] The control module 1 is electrically connected to the solenoid valve 2, the environmental detection module 4, the calibration module 5, the nitrogen purification module 6, and the alarm module 7, respectively controlling the operation of the solenoid valve 2, the environmental detection module 4, the calibration module 5, the nitrogen purification module 6, and the alarm module 7.

[0044] This invention enables precise environmental monitoring and control, allowing real-time monitoring of nitrogen concentration in the environmental detection space, and enabling nitrogen recycling to save costs. It also calibrates the fluorescence sensor 41 to ensure the accuracy of the detection data.

[0045] The environmental monitoring module 4 will detect abnormal data and transmit it to the control module 1. The control module 1 will control the alarm module 7 to immediately issue an alarm signal and simultaneously activate corresponding emergency measures, such as closing the solenoid valve 2, opening the exhaust valve 42 and the fan 44, and evacuating personnel. Operators should wear protective equipment, quickly locate the leak source and seal it. After the leak is dealt with, the gas concentration in the environmental monitoring space should be tested to ensure that it returns to normal before the system is restored to operation, thus ensuring the production safety and operation of the environmental monitoring space.

[0046] This utility model uses low-cost equipment, eliminating the need for expensive equipment like gas chromatography and mass spectrometry. It is also simple to operate, has a short analysis time, and can be used for on-site testing, making it applicable to a wider range of scenarios. Compared to thermal conductivity detectors, it is less affected by interference from other gases, resulting in more stable and accurate detection. Compared to the indirect method using paramagnetic oxygen sensors, it fully considers other gases in the environment, leading to smaller measurement errors.

[0047] Example 2: In some embodiments, such as Figure 2 , Figure 3 and Figure 4 As shown, in a preferred embodiment of the present invention, the environmental detection module 4 includes a fluorescence sensor 41, an exhaust valve 42, an electromagnetic radiation monitor 43, and a fan 44. The fluorescence sensor 41, exhaust valve 42, electromagnetic radiation monitor 43, and fan 44 are all fixedly installed inside the environmental detection space. The fluorescence sensor 41, exhaust valve 42, electromagnetic radiation monitor 43, and fan 44 are all electrically connected to the control module 1.

[0048] The exhaust valve 42 is connected to the nitrogen purification module 6.

[0049] The fluorescence sensor 41 is provided in multiple locations and is evenly distributed in different positions in the environmental detection space.

[0050] The electromagnetic radiation monitor 43 is provided with multiple sensors that are evenly distributed around the fluorescent sensor 41.

[0051] Preferably, for small environmental monitoring spaces or local areas, if only one or a few fluorescence sensors 41 are set up, one or two electromagnetic radiation monitors 43 can usually basically cover the monitoring needs. They can be placed in the center of the area or in a place where the sensors are relatively concentrated.

[0052] For medium-sized environmental monitoring spaces, depending on the distribution of the fluorescence sensors 41, three to five electromagnetic radiation monitors 43 are generally set up. They can be evenly distributed in the area, or one can be set up in each of the different distribution areas of the sensors, depending on the layout of the fluorescence sensors 41.

[0053] For large production environment monitoring spaces, more than five electromagnetic radiation monitors 43 need to be set up, arranged in combination with the distribution of fluorescence sensors 41 and the functional division of the area. At the same time, the distribution of electromagnetic radiation sources that may exist in the area should be taken into account, and the number of monitors should be appropriately increased near the radiation sources.

[0054] The working principle of the environmental detection module 4 is as follows: First, the fan 44 is started, and the fan 44 makes the air in the environmental detection space circulate to ensure that the gas distribution in the environment is uniform. Then, the fluorescent sensors 41 at multiple locations monitor the oxygen concentration in the environmental detection space in real time at a certain frequency (such as once per second) and transmit the data to the control module 1. The control module 1 calculates the nitrogen concentration at the current location based on the oxygen concentration.

[0055] The electromagnetic radiation monitor 43 periodically (e.g., every five minutes) measures the electromagnetic radiation intensity in the environmental detection space, records the measurement data and transmits it to the control module 1 to ensure that the electromagnetic radiation in the environmental detection space is within the normal range and has no impact on the detection of the fluorescence sensor 41.

[0056] If the nitrogen concentration values ​​detected by multiple fluorescence sensors 41 are within the allowable range set by the system, the control module 1 determines that the detection results of multiple fluorescence sensors 41 are all normal.

[0057] Staff pre-set nitrogen concentration thresholds in control module 1. After calculating the nitrogen concentration at different locations, control module 1 judges the nitrogen concentration in the environment based on the preset nitrogen concentration thresholds.

[0058] If the control module 1 calculates that the nitrogen concentration detected by multiple fluorescence sensors 41 is within the threshold allowable range, then the control module 1 will not take any action.

[0059] If the control module 1 calculates that the nitrogen concentration detected by multiple fluorescence sensors 41 is lower than the threshold allowable range, the control module 1 controls the solenoid valve 2 to open and introduce nitrogen into the environmental detection space until the nitrogen concentration detected by the fluorescence sensors 41 is within the threshold allowable range, then the control module 1 controls the solenoid valve 2 to close.

[0060] If the control module 1 calculates that the nitrogen concentration detected by multiple fluorescence sensors 41 is higher than the threshold allowable range, the control module 1 controls the exhaust valve 42 to open, and discharges the gas inside the environmental detection space to the nitrogen purification module 6 until the nitrogen concentration detected by the fluorescence sensors 41 is within the threshold allowable range, then the control module 1 controls the exhaust valve 42 to close.

[0061] If the control module 1 calculates that the difference between the nitrogen concentration value detected by a certain fluorescence sensor 41 and the nitrogen concentration value detected by other fluorescence sensors 41 is not within the allowable range set by the system, the control module 1 determines that the detection result of the current fluorescence sensor 41 is abnormal and needs to be corrected.

[0062] The calibration module 5 includes a pressure reducing valve 51, an oxygen supply device 52, a sealed container 54, and an imaging unit 55. The oxygen supply device 52 is fixedly connected to the pressure reducing valve 51, and the outlet end of the oxygen supply device 52 is fixedly connected to one end of the gas flow controller 53. The other end of the gas flow controller 53 is fixedly connected to the sealed container 54, and the imaging unit 55 is fixedly installed on the outer end of the sealed container 54.

[0063] The pressure reducing valve 51, oxygen supply device 52, gas flow controller 53, and imaging unit 55 are all electrically connected to the control module 1.

[0064] Preferably, the sealed container 54 is a transparent cover.

[0065] During calibration, the problematic fluorescence sensor 41 is removed from the environmental detection space and placed in a sealed container 54. The gas pressure inside the oxygen supply device 52 is adjusted to a stable value through the pressure reducing valve 51. The gas flow rate is set using the gas flow controller 53, and the gas is introduced into the sealed container 54 to ensure that the gas is evenly distributed in the sealed container 54 and can fully contact the fluorescence sensor 41. The imaging unit 55 is turned on, and the imaging unit 55 clearly records the fluorescence change of the fluorescence sensor 41 during the calibration process and uploads the change to the control module 1.

[0066] The control module 1 adjusts the measurement parameters of the fluorescence sensor 41, such as zero point and sensitivity, based on the image data uploaded by the imaging unit 55 and the preset calibration algorithm within the control module 1. During calibration, different concentrations of standard gas (such as standard gas with 5%, 10%, and 20% oxygen concentration) can be used multiple times for multi-point calibration to improve calibration accuracy. After calibration, the pressure reducing valve 51 is closed, the sealed container 54 is opened, the fluorescence sensor 41 is removed, and it is reinstalled in its original position in the environmental detection space to continue monitoring the oxygen concentration in the environment.

[0067] Example 3: In some embodiments, such as Figure 2 As shown, in a preferred embodiment of the present invention, the nitrogen purification module 6 includes a filter device 61 and a pressure swing adsorption purification device 62. One end of the filter device 61 is connected to the exhaust valve 42, and the other end of the filter device 61 is connected to one end of the pressure swing adsorption purification device 62. The other end of the pressure swing adsorption purification device 62 is connected to the nitrogen supply device 3, and the pressure swing adsorption purification device 62 is electrically connected to the control module 1.

[0068] Preferably, the pressure swing adsorption purification device 62 can be the Ailike PSA pressure swing adsorption high-purity fully automatic nitrogen purification device produced by Shandong Ailike Engineering Machinery Co., Ltd.

[0069] The gas discharged from the exhaust valve 42 is filtered by the filter device 61 to remove particulate impurities, oil stains and water vapor from the nitrogen. The gas then enters the pressure swing adsorption purification device 62. The pressure swing adsorption purification device 62 has a strong adsorption capacity for impurity gases such as oxygen, carbon dioxide and water vapor. The pressure swing adsorption purification device 62 adsorbs the impurity gases, and high-purity nitrogen is obtained and discharged into the nitrogen supply device 3 to realize the recycling of nitrogen.

[0070] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A nitrogen detection control system with high detection accuracy, comprising a control module (1), characterized in that, The electromagnetic valve (2), the nitrogen supply device (3), the environment detection module (4), the calibration module (5), the nitrogen purification module (6) and the alarm module (7) are further included. The nitrogen supply device (3) is used for providing nitrogen for the environment detection space. The environment detection module (4) is used for detecting the nitrogen concentration in the environment detection space, and is installed inside the environment detection space. The calibration module (5) is used for calibrating the environment detection module (4) to ensure the accuracy of the detection result, and is connected with the environment detection module (4). The nitrogen purification module (6) is used for filtering and purifying the gas discharged from the environment detection module (4), and is connected with the environment detection module (4). The alarm module (7) is used for notifying the staff of the gas anomaly in the environment detection space. The control module (1) is electrically connected with the electromagnetic valve (2), the environment detection module (4), the calibration module (5), the nitrogen purification module (6) and the alarm module (7), and controls the operation of the electromagnetic valve (2), the environment detection module (4), the calibration module (5), the nitrogen purification module (6) and the alarm module (7) respectively.

2. The nitrogen detection control system with high detection accuracy according to claim 1, characterized by, The environment detection module (4) includes a fluorescent sensor (41), an exhaust valve (42), an electromagnetic radiation monitor (43) and a fan (44), which are fixedly installed inside the environment detection space, and are electrically connected with the control module (1).

3. The nitrogen detection control system with high detection accuracy according to claim 2, characterized by, The exhaust valve (42) is connected with the nitrogen purification module (6).

4. The nitrogen detection control system with high detection accuracy according to claim 2, characterized by, The fluorescent sensor (41) is provided with a plurality of sensors which are uniformly distributed at different positions of the environment detection space.

5. The nitrogen detection control system with high detection accuracy according to claim 4, characterized by, The electromagnetic radiation monitor (43) is provided with a plurality of monitors which are uniformly distributed around the fluorescent sensor (41).

6. The nitrogen detection control system with high detection accuracy according to claim 1, characterized by, The calibration module (5) includes a pressure reducing valve (51), an oxygen supply device (52), a gas flow controller (53), a sealed container (54) and a shooting unit (55), the oxygen supply device (52) is fixedly connected with the pressure reducing valve (51), the outlet end of the oxygen supply device (52) is fixedly connected with one end of the gas flow controller (53), the other end of the gas flow controller (53) is fixedly connected with the sealed container (54), and the shooting unit (55) is fixedly installed at the outer end of the sealed container (54).

7. The nitrogen detection control system with high detection accuracy according to claim 6, characterized by, The pressure reducing valve (51), the oxygen supply device (52), the gas flow controller (53) and the shooting unit (55) are electrically connected with the control module (1).

8. The nitrogen detection control system with high detection accuracy according to claim 3, characterized by, The nitrogen purification module (6) includes a filtering device (61) and a pressure swing adsorption purification device (62), one end of the filtering device (61) is connected with the exhaust valve (42), the other end of the filtering device (61) is connected with one end of the pressure swing adsorption purification device (62), the other end of the pressure swing adsorption purification device (62) is connected with the nitrogen supply device (3), and the pressure swing adsorption purification device (62) is electrically connected with the control module (1).

Images