Clamping jig and substrate conveying device

Abstract

The utility model relates to the technical field of film coating product transportation, and discloses a clamping jig which comprises a first clamping apparatus and a second clamping apparatus which are correspondingly arranged in the vertical direction and are respectively arranged at the top and the bottom of a piece to be clamped. A first clamping groove and a second clamping groove are formed in the first clamp and the second clamp correspondingly, and the first clamping groove and the second clamping groove are jointly clamped to a part to be clamped so as to achieve fixation. And through the first clamp and the second clamp which are correspondingly arranged in the vertical direction, the clamping effect is more reliable. The utility model further discloses a substrate conveying device with the clamping jig.

Description

TECHNICAL FIELD

[0001] The utility model relates to a coated product transportation technical field especially relates to a clamping fixture and substrate transportation device. BACKGROUND

[0002] Indium tin oxide (ITO) thin film has high transmittance in visible light band, high film hardness, chemical corrosion resistance and other characteristics, and is widely used in electrode materials of liquid crystal display devices, solar cells and other optoelectronic devices. ITO thin film is generally produced by vertical suspension, and is transported by vertical loading on a substrate trolley, and the heating and entire coating process are completed in a vacuum cavity. During coating processing, the horizontal rod rack and clamp are used for loading, and the traditional ITO coated product is generally a single-sided coated product. The clamp only needs to meet the requirements of convenient loading and unloading, and the shielding of the clamp to the coated edge meets the requirements of the film-free area, and the size of the clamp is usually small.

[0003] With the increasing demand for double-sided coated products, after one side of the product is coated, the other side needs to be coated. If the single-sided coated clamp is still used during the production of double-sided coated products, the contact part of the clamp will have a coated diffraction during the coating of the first side, and there will be a certain diffraction film layer at the edge of the substrate and the edge of the other side. The diffraction film layer has a certain probability of abnormal discharge and sparking phenomenon between the second side coating and the first side film layer, which may cause damage to the film layer and ultimately lead to a decrease in yield. At the same time, the final product may have quality problems. SUMMARY

[0004] The utility model aims at solving the problem in at least one background art. To this end, the utility model provides a clamping fixture and a substrate transportation device with the clamping fixture, which has simple structure, reasonable design and simple and convenient operation.

[0005] According to the clamping fixture of the first aspect of the utility model, the first clamp and the second clamp are correspondingly arranged in the vertical direction, the first clamp and the second clamp are arranged at the top and the bottom of the to-be-clamped part respectively, the first clamping groove and the second clamping groove are arranged in the first clamp and the second clamp respectively, and the first clamping groove and the second clamping groove jointly clamp the to-be-clamped part to achieve fixation. By arranging the first clamp and the second clamp correspondingly in the vertical direction, the clamping effect is more reliable.

[0006] According to another embodiment of the utility model, the first clamp includes a first main body, a first front end and a first rear end arranged on the first main body, and the first front end and the first rear end define the first clamping groove on the first main body. By arranging the first front end and the first rear end, the fixation effect of the to-be-clamped part is better.

[0007] According to another embodiment of the utility model, the length of the first front end part is greater than the length of the first rear end part, and the height of the first front end part is less than the height of the first rear end part. By setting the length of the first front end part greater than the length of the first rear end part, after the to-be-clamped piece completes the first surface plating, abnormal discharge phenomenon during the second surface plating is avoided, and product production yield is improved.

[0008] According to another embodiment of the utility model, the length of the first front end part is greater than the length of the first rear end part, and the height of the first front end part is less than the height of the first rear end part. By setting the length of the first front end part greater than the length of the first rear end part, after the to-be-clamped piece completes the first surface plating, abnormal discharge phenomenon during the second surface plating is avoided, and product production yield is improved.

[0009] According to another embodiment of the utility model, the second fixture comprises a second main body, and a second front end part and a second rear end part arranged on the second main body, and the second front end part and the second rear end part define the second clamping groove on the second main body. By setting the second front end part and the second rear end part, the fixing effect of the to-be-clamped piece is better.

[0010] According to another embodiment of the utility model, the length of the first front end part is greater than the length of the first rear end part, and the height of the first front end part is less than the height of the first rear end part. By setting the length of the first front end part greater than the length of the first rear end part, after the to-be-clamped piece completes the first surface plating, abnormal discharge phenomenon during the second surface plating is avoided, and product production yield is improved.

[0011] According to another embodiment of the utility model, the length of the first front end part is greater than the length of the first rear end part, and the height of the first front end part is less than the height of the first rear end part. By setting the length of the first front end part greater than the length of the first rear end part, after the to-be-clamped piece completes the first surface plating, abnormal discharge phenomenon during the second surface plating is avoided, and product production yield is improved.

[0012] According to another embodiment of the utility model, the first fixture and the second fixture are one of stainless steel material, titanium alloy, aluminum alloy or red copper.

[0013] According to the substrate conveying device of the second aspect of the utility model, the clamping fixture is arranged on the rack.

[0014] According to another embodiment of the utility model, the first fixture and the second fixture of each clamping fixture are respectively arranged on the top and bottom of the rack, and the first fixture and the second fixture are provided with elastic connecting pieces at the connection positions with the rack.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] The utility model discloses a kind of clamping fixtures, the clamping fixture includes the first fixture and the second fixture being correspondingly arranged in vertical direction, first fixture and the second fixture are respectively arranged at the top and bottom of the piece to be clamped, first fixture and the second fixture are respectively provided with first clamping groove and second clamping groove inside, first clamping groove and second clamping groove are fixed to the piece to be clamped to realize clamping together. By being correspondingly arranged in vertical direction first fixture and the second fixture, so that clamping effect is more reliable. The utility model further discloses a substrate transport device with the above-mentioned clamping fixture.

[0017] Additional aspects and advantages of the utility model will be partially given in the following description, some will become obvious from the following description, or be understood by the practice of the utility model. BRIEF DESCRIPTION OF DRAWINGS

[0018] The accompanying drawings are included to provide a further understanding of the embodiments, and are incorporated in and constitute apart of this specification. The drawings illustrate embodiments of the utility model and, together with the description, serve to explain the principles of the utility model. In the drawings:

[0019] Figure 1 It is the schematic view of the embodiment of first fixture of clamping fixture provided for the present application;

[0020] Figure 2 It is the front view of the embodiment of first fixture of clamping fixture; Figure 1

[0021] Figure 3 It is the left view of the embodiment of first fixture of clamping fixture; Figure 1

[0022] It is the schematic view of the embodiment of second fixture of clamping fixture provided for the present application; Figure 4

[0023] It is the front view of the embodiment of first fixture of clamping fixture; Figure 5 Figure 4

[0024] It is the left view of the embodiment of first fixture of clamping fixture; Figure 6 Figure 4

[0025] Figure 7 It is the schematic view of the embodiment of substrate transport device provided for the present application;

[0026] The meaning of the mark in the figure is:

[0027] 10, substrate transport device;11, rack;12, elastic connecting piece;

[0028] ​​​​100, clamping jig; 110, first clamping jig; 111, first main body; 112, first front end portion;

[0029] 113, first rear end portion; 114, first clamping groove; 120, second clamping jig; 121, second main body;

[0030] 122, second front end portion; 123, second rear end portion; 124, second clamping groove;

[0031] 200, to-be-clamped member. DETAILED DESCRIPTION

[0032] The embodiments of the present application are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary only, and are used only for explaining the present application, and cannot be understood as limiting the present application.

[0033] In the description of the present application, it is to be understood that the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0034] In the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounting", "connecting", "connection" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] To illustrate the clamping jig and the substrate conveying device provided by the present application, the following detailed description is made in conjunction with the accompanying drawings and the textual description of the embodiments.

[0036] The following reference is made to Figures 1-7 A clamping jig 100 according to the first aspect of the present application is described as follows, Figures 1-7As shown, the clamping jig 100 comprises a first clamping jig 110 and a second clamping jig 120 arranged correspondingly in the vertical direction, and the first clamping jig 110 and the second clamping jig 120 are arranged at the top and the bottom of the to-be-clamped piece 200 respectively, and specifically, the first clamping jig 110 and the second clamping jig 120 are respectively provided with a first clamping groove 114 and a second clamping groove 124, and the first clamping groove 114 and the second clamping groove 124 jointly clamp the to-be-clamped piece 200 to achieve fixation, so it can be seen that the clamping jig 100 is arranged with the first clamping jig 110 and the second clamping jig 120 correspondingly in the vertical direction, so that the top and the bottom of the to-be-clamped piece 200 are respectively matched with the first clamping jig 110 and the second clamping jig 120 to achieve fixation, so that the clamping effect is more reliable.

[0037] It should be noted that the number of the first clamping jig 110 and the second clamping jig 120 can be one or more than one, for example, the number of the first clamping jig 110 and the second clamping jig 120 is one, at this time the first clamping jig 110 and the second clamping jig 120 are located on the same straight line in the vertical direction, or the number of the first clamping jig 110 is one and the number of the second clamping jig 120 is two, at this time the first clamping jig 110 is located on the vertical straight line at the midpoint of the horizontal connecting line of the two second clamping jigs 120, that is, the connecting line pattern of the first clamping jig 110 and the two second clamping jigs 120 is an isosceles triangle, or the number of the first clamping jig 110 and the second clamping jig 120 is two, at this time one first clamping jig 110 and one second clamping jig 120 are located on the same straight line in the vertical direction, it can be understood that the number of the first clamping jig 110 and the second clamping jig 120 can be determined according to the specific use scene, which is not limited here.

[0038] It should be noted that the to-be-clamped piece 200 can be an ITO film product that needs to be double-sided plated.

[0039] According to another embodiment of the present application, Figures 1-3 As shown, the first clamping jig 110 comprises a first main body 111, a first front end 112 and a first rear end 113 arranged on the first main body 111, and the first front end 112 and the first rear end 113 define a first clamping groove 114 on the first main body 111, and the top of the to-be-clamped piece 200 is matched with the first clamping groove 114 to achieve clamping fixation.

[0040] It should be noted that the shape of the first front end 112 and the first rear end 113 can be a cube, a cuboid or a cylinder, etc., which can be determined according to the specific use scene, which is not limited here.

[0041] It should be noted that in some embodiments, the first clamping groove 114 can be provided with a flexible piece (not shown in the figure), which is in contact with the to-be-clamped piece 200, avoiding direct contact between the relatively hard first clamping groove 114 and the to-be-clamped piece 200, which maycause damage due to knocking and the like.

[0042] According to another embodiment of the present application, as shown in Figures 1-3 The length of the first front end portion 112 is greater than the length of the first rear end portion 113, and the height of the first front end portion 112 is less than the height of the first rear end portion 113. By setting the length of the first front end portion 112 to be greater than the length of the first rear end portion 113, after the to-be-clamped piece 200 is completed with the first surface coating, the second surface coating is performed. Since the to-be-clamped piece 200 corresponding to the first rear end portion 113 is effectively shielded, abnormal discharge phenomenon during the second surface coating is avoided, and the product production yield is improved.

[0043] According to another embodiment of the present application, as shown in Figures 1-3 The ratio of the length of the first front end portion 112 to the length of the first rear end portion 113 is greater than 10, so as to further improve the shielding effect of the first rear end portion 113. Preferably, the length of the first front end portion 112 is 2-5 cm, and the length of the first rear end portion 113 is 30-50 cm. Further, the height of the first front end portion 112 is greater than the height of the first rear end portion 113. Preferably, the height of the first front end portion 112 is 5-10 cm, and the height of the first rear end portion 113 is 4-8 cm.

[0044] According to another embodiment of the present application, as shown in Figures 4-6 The second fixture 120 includes a second main body 121, and a second front end portion 122 and a second rear end portion 123 provided on the second main body 121. The second front end portion 122 and the second rear end portion 123 define a second clamping groove 124 on the second main body 121. The top of the to-be-clamped piece 200 cooperates with the second clamping groove 124 to realize clamping and fixing.

[0045] It should be noted that the shape of the second front end portion 122 and the second rear end portion 123 can be a cube, a cuboid, or a cylinder, etc. It can be determined according to the specific use scenario, which is not limited here.

[0046] It should be noted that in some embodiments, the second clamping groove 124 can be provided with a flexible piece (not shown in the figure), which is in contact with the to-be-clamped piece 200, avoiding direct contact between the relatively hard second clamping groove 124 and the to-be-clamped piece 200, which maycause damage due to knocking and the like.

[0047] According to another embodiment of the present application, as shown in Figures 4-6As shown, the length of the second front end portion 122 is greater than the length of the second rear end portion 123, and the height of the second front end portion 122 is less than the height of the second rear end portion 123, by setting the length of the second front end portion 122 greater than the length of the second rear end portion 123, so that after the first surface of the to-be-clamped piece 200 is plated, the second surface is plated, and the to-be-clamped piece 200 is effectively shielded corresponding to the second rear end portion 123, avoiding abnormal discharge phenomenon when the second surface is plated, and improving the production yield of the product.

[0048] According to another embodiment of the utility model, as Figures 4-6 As shown, the length of the second front end portion 122 is greater than the length of the second rear end portion 123, and the height of the second front end portion 122 is less than the height of the second rear end portion 123, by setting the length of the second front end portion 122 greater than the length of the second rear end portion 123, so that after the first surface of the to-be-clamped piece 200 is plated, the second surface is plated, and the to-be-clamped piece 200 is effectively shielded corresponding to the second rear end portion 123, avoiding abnormal discharge phenomenon when the second surface is plated, and improving the production yield of the product.

[0049] According to another embodiment of the utility model, as Figures 1-6 As shown, the first clamp 110 and the second clamp 120 are one of stainless steel material, titanium alloy, aluminum alloy or red copper, and it can be understood that the first clamp 110 and the second clamp 120 need to be not easily oxidized under vacuum conditions and have a certain hardness of material.

[0050] It should be noted that the first clamp 110 and the second clamp 120 can also be other materials that are not easily oxidized under vacuum conditions.

[0051] Next, referring to Figure 7 A substrate conveying device 10 according to the second aspect of the utility model is described, as Figure 7 As shown, the substrate conveying device 10 comprises a rack 11, and the rack 11 is provided with a clamping jig 100.

[0052] According to another embodiment of the utility model, as Figure 7 As shown, the first clamp 110 and the second clamp 120 of each clamping jig 100 are respectively arranged at the top and bottom of the rack 11, and the first clamp 110 and the second clamp 120 are provided with an elastic connecting piece 12 at the connection with the rack 11, by setting the elastic connecting piece 12, the first clamp 110 and the second clamp 120 are elastically connected with the rack 11, so as to facilitate the loading and unloading of the to-be-clamped piece 200.

[0053] The clamping jig and the substrate conveying device provided by the present application are preferred embodiments, and should not be understood as a limitation on the protection scope of the present application. Those skilled in the art should know that, without departing from the concept of the present application, various improvements or replacements can be made, and all the improvements or replacements should be within the protection scope of the present application, i.e., the protection scope of the present application should be subject to the claims.

[0054] The above-mentioned embodiments and features in the embodiments can be combined with each other without conflict.

Claims

1. A clamping jig characterized by, The first clamp and the second clamp are arranged correspondingly in the vertical direction, and are arranged at the top and the bottom of the to-be-clamped member respectively.

2. The clamping jig of claim 1, wherein The first clamp comprises a first main body, and a first front end and a first rear end arranged on the first main body.

3. The clamping jig of claim 2, wherein The length of the first front end is greater than the length of the first rear end, and the height of the first front end is less than the height of the first rear end.

4. The clamping jig of claim 3, wherein The ratio of the length of the first front end to the length of the first rear end is greater than 10.

5. The clamping jig according to claim 1, wherein The second clamp comprises a second main body, and a second front end and a second rear end arranged on the second main body.

6. The clamping jig of claim 5, wherein The length of the second front end is greater than the length of the second rear end, and the height of the second front end is less than the height of the second rear end.

7. The clamping jig according to claim 6, wherein The ratio of the length of the second front end to the length of the second rear end is greater than 5.

8. The clamping jig of claim 1, wherein The first clamp and the second clamp are made of one of stainless steel, titanium alloy, aluminum alloy and red copper.

9. A substrate transport apparatus, characterized by, The clamping jig comprises a rack, and the clamping jig is arranged on the rack.

10. The substrate transport apparatus of claim 9, wherein, The first clamp and the second clamp of each clamping jig are arranged correspondingly at the top and the bottom of the rack respectively, and the first clamp and the second clamp are connected with the rack through elastic connectors.

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