Efficient vacuum pump set system

Abstract

The utility model discloses an efficient vacuum pump set system, including: initialized pump set, molecular pump set and diffusion pump set, the initialized pump set is respectively communicated with the molecular pump set, the winding chamber of vacuum coating machine and the coating chamber of vacuum coating machine, the molecular pump set is communicated with the winding chamber, and the diffusion pump set is communicated with the coating chamber of vacuum coating machine. The diffusion pump set is respectively communicated with the winding chamber and the coating chamber, and the winding chamber is communicated with the coating chamber; a first baffle valve and a fourth baffle valve are respectively arranged on a connecting pipeline of the diffusion pump set and the winding chamber, the first baffle valve is close to one end of the winding chamber, and the fourth baffle valve is close to one end of the diffusion pump set; and a third baffle valve is arranged on a connecting pipeline of the diffusion pump set and the coating chamber. Vacuum pumping is achieved through the multiple stages of pump sets, the diffusion pump sets are matched with the corresponding baffle valves, the number of times of opening and closing of the diffusion pump sets in the continuous production process can be reduced through a self-circulation air pipe channel, and production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a high-efficiency vacuum pump system. Background Technology

[0002] The deposition of a thin active layer has a significant impact on the mechanical properties of composite current collectors. In actual production processes using vacuum coating machines to deposit thin films, the diffusion pump needs to be preheated before starting operation, ensuring the oil inside the pump reaches its evaporation temperature of approximately 260°C. This preheating process requires a certain amount of time to ensure the pump can operate normally and achieve the desired vacuum level. Furthermore, when shutting down the diffusion pump, the internal temperature needs to be gradually reduced to prevent equipment damage or performance degradation due to a sudden temperature drop. This cooling process also requires a certain amount of time to ensure the pump can be shut down safely and stably.

[0003] Existing vacuum coating systems suffer from low production efficiency due to the frequent opening and closing of the cavity for vacuuming and the preheating and cooling of the diffusion pump. Utility Model Content

[0004] In view of the above problems, this utility model is proposed to provide a high-efficiency vacuum pump system that overcomes or at least partially solves the above problems.

[0005] This utility model provides a high-efficiency vacuum pump system for vacuuming a vacuum coating machine. The high-efficiency vacuum pump system includes an initialization pump group, a molecular pump group, and a diffusion pump group. The initialization pump group is connected to the molecular pump group, the winding chamber of the vacuum coating machine, and the coating chamber of the vacuum coating machine. The molecular pump group is connected to the winding chamber. The diffusion pump group is connected to both the winding chamber and the coating chamber. The winding chamber and the coating chamber are connected in series.

[0006] A first baffle valve and a fourth baffle valve are respectively installed on the connecting pipeline between the diffusion pump group and the winding chamber, wherein the first baffle valve is closer to one end of the winding chamber and the fourth baffle valve is closer to one end of the diffusion pump group.

[0007] A third baffle valve is installed on the connecting pipeline between the diffusion pump group and the coating chamber.

[0008] Optionally, the initial pump set includes a mechanical pump set and a Roots pump set connected in sequence.

[0009] Optionally, the mechanical pump set includes multiple sets of mechanical pumps connected in parallel.

[0010] Optionally, the Roots pump set includes multiple Roots pumps connected in parallel.

[0011] Optionally, the molecular pump assembly includes multiple sets of molecular pumps connected in parallel.

[0012] Optionally, the diffusion pump group includes multiple diffusion pumps arranged in parallel.

[0013] Optionally, a fifth baffle valve is provided on the connecting pipeline between the initialization pump unit and the winding chamber and the coating chamber.

[0014] Optionally, a second baffle valve is provided on the connecting pipeline between the molecular pump group and the initialization pump group.

[0015] Optionally, both the winding chamber and the coating chamber are equipped with vacuum gauges.

[0016] The technical solution provided in this embodiment of the utility model has at least the following technical effects or advantages:

[0017] The high-efficiency vacuum pump system described in this embodiment achieves vacuuming through a multi-stage pump group. By cooperating with the diffusion pump group and the corresponding baffle valve, and utilizing the self-circulating gas pipe passage, the number of times the diffusion pump group is switched on and off during continuous production can be reduced, thereby improving production efficiency.

[0018] The above description is merely an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this utility model more obvious and understandable, specific embodiments of this utility model are given below. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the principle structure of the high-efficiency vacuum pump system described in this utility model.

[0021] Explanation of reference numerals in the attached figures:

[0022] 1. Mechanical pump set; 2. Roots pump set; 3. First baffle valve; 4. Molecular pump set; 5. Diffusion pump set; 6. Vacuum gauge; 7. Second baffle valve; 8. Third baffle valve; 9. Fourth baffle valve; 10. Fifth baffle valve; 11. Winding chamber; 12. Coating chamber. Detailed Implementation

[0023] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings.

[0024] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. The accompanying drawings show preferred embodiments of the present invention. The present invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to make the disclosure of the present invention more thorough and complete.

[0025] Unless otherwise specified, all raw materials, instruments and equipment used in this invention can be purchased from the market or prepared by existing methods.

[0026] Figure 1 This is a schematic diagram of the structure of a high-efficiency vacuum pump system provided in an embodiment of this utility model. (See attached diagram.) Figure 1 As shown, the high-efficiency vacuum pump system is used for vacuuming in a vacuum coating machine. The high-efficiency vacuum pump system includes an initialization pump group, a molecular pump group 4, and a diffusion pump group 5. The initialization pump group is connected to the molecular pump group 4, the winding chamber 11 of the vacuum coating machine, and the coating chamber 12 of the vacuum coating machine. The molecular pump group 4 is connected to the winding chamber 11. The diffusion pump group 5 is connected to both the winding chamber 11 and the coating chamber 12. The winding chamber 11 and the coating chamber 12 are connected together.

[0027] In this embodiment of the present invention, the initialization pump set includes a mechanical pump set 1 and a Roots pump set 2 connected in sequence. The mechanical pump set 1 is used as a primary pump for initial vacuuming, and the Roots pump set 2 is used as a secondary pump to start vacuuming after the primary pump has reached a set pressure.

[0028] The molecular pump group 4 is used as a three-stage pump for high vacuum pumping; the diffusion pump group 5 is used as a three-stage pump for high vacuum pumping.

[0029] The mechanical pump group 1 includes multiple sets of mechanical pumps connected in parallel; the Roots pump group 2 includes multiple sets of Roots pumps connected in parallel; the molecular pump group 4 includes multiple sets of molecular pumps connected in parallel; and the diffusion pump group 5 includes multiple sets of diffusion pumps connected in parallel. The number of mechanical pumps, Roots pumps, molecular pumps, and diffusion pumps can be selected according to actual application requirements, and this utility model does not limit this.

[0030] In this embodiment of the invention, a fifth baffle valve 10 is provided on the connecting pipeline between the initialization pump group and the winding chamber 11 and the coating chamber 12. The fifth baffle valve 10 is used to control the communication state between the initialization pump group and the winding chamber 11 and the coating chamber 12 respectively.

[0031] In this embodiment of the present invention, a second baffle valve 7 is provided on the connecting pipeline between the molecular pump group 4 and the initialization pump group. The second baffle valve 7 is used to control the connection state between the molecular pump group 4 and the initialization pump group.

[0032] In this embodiment of the present invention, a first baffle valve 3 and a fourth baffle valve 9 are respectively provided on the connecting pipeline between the diffusion pump group 5 and the winding chamber 11. The first baffle valve 3 is close to one end of the winding chamber 11, and the fourth baffle valve 9 is close to one end of the diffusion pump group 5. The first baffle valve 3 and the fourth baffle valve 9 are used to control the communication state between the diffusion pump group 5 and the winding chamber 11.

[0033] A third baffle valve 8 is provided on the connecting pipeline between the diffusion pump group 5 and the coating chamber 12. The third baffle valve 8 is used to control the communication state between the diffusion pump group 5 and the coating chamber 12.

[0034] In this embodiment of the present invention, both the winding chamber 11 and the coating chamber 12 are equipped with a vacuum gauge 6, which is used to collect vacuum data corresponding to the winding chamber 11 and the coating chamber 12.

[0035] The specific working process of the high-efficiency vacuum pump system described in this embodiment of the invention is as follows:

[0036] When the vacuum chamber of the vacuum coating machine is closed and vacuuming begins, the first-stage pump group (i.e., mechanical pump group 1) in the initialization pump group is started first for preliminary vacuuming. When the vacuum gauge 6 in the chamber shows that the vacuum degree has reached the set pressure of the second-stage pump group (i.e., Roots pump group 2), the second-stage pump group is started for vacuuming. When the vacuum degree in the chamber reaches the set pressure of the third-stage pump group (including molecular pump group 4 and diffusion pump group 5), molecular pump group 4 is started for high vacuum vacuuming. At the same time, diffusion pump group 5 is started. It takes a long time for the pump oil in diffusion pump group 5 to go from preheating to evaporation temperature. It can only work normally when the oil temperature in diffusion pump group 5 is close to the evaporation temperature of 260℃. During this preheating time, the third baffle valve 8 connected to the coating chamber 12 and the fourth baffle valve 9 connected to the winding chamber 11 need to be closed.

[0037] During the vacuum coating process, the pumps at each stage work efficiently, and the maximum vacuum level of the winding chamber 11 can reach 5*10-2 Pa, while the maximum vacuum level of the coating chamber 12 can reach 1*10-2 Pa. The specific gas extraction pipeline first opens the fifth baffle valve group 10. After the mechanical pump group 1 is turned on, the gas pipeline extracts gas from multiple mechanical pumps in the mechanical pump group 1. When the gas pressure in the vacuum chamber reaches the set gas pressure of 4000Pa for the secondary pump group, the Roots pump group 2 is turned on. At this time, since the second baffle valve group 7, the first baffle valve 3, and the fourth baffle valve 9 are closed, the vacuum chamber is evacuated through the first and second pump groups. When the gas pressure in the vacuum chamber reaches the set gas pressure of 50Pa for the tertiary pump group, the second baffle valve group 7 is opened to turn on the molecular pump group 4. At the same time, when the pump oil of the diffusion pump group 5 is preheated to the evaporation temperature, the third and fourth baffle valves 9 are opened to connect the diffusion pump group 5 with the coating chamber 12, so as to achieve the purpose of the diffusion pump group 5 to evacuate the coating chamber 12. The first and fourth baffle valves 9 are opened to connect the winding chamber 11 with the diffusion pump group 5, so as to achieve the purpose of the diffusion pump group 5 to evacuate the winding chamber 11.

[0038] The diffusion pump group 5 was started on the first startup. After the coating was completed, it was shut down in sequence according to the startup order of each pump group. After the first, third and fourth baffle valve groups 9 were closed, the diffusion pump group 5 achieved self-circulation and did not need to be shut down, thus saving the preheating time of the diffusion pump group 5 and the cooling time after shutdown when it was started again.

[0039] The high-efficiency vacuum pump system described in this embodiment achieves vacuuming through a multi-stage pump group. By cooperating with the diffusion pump group 5 and the corresponding baffle valve, and utilizing the self-circulating gas pipe passage, the number of times the diffusion pump group 5 is switched on and off during continuous production can be reduced, thereby improving production efficiency.

[0040] Numerous specific details are set forth in the specification provided herein. However, it will be understood that embodiments of the present invention may be practiced without these specific details. In some instances, well-known methods, structures, and techniques have not been shown in detail so as not to obscure the understanding of this specification.

[0041] Similarly, it should be understood that, in order to simplify this disclosure and aid in understanding one or more of the various aspects of the invention, in the above description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together in a single embodiment, figure, or description thereof. However, this method of disclosure should not be construed as reflecting an intention that the claimed invention requires more features than expressly recited in each claim. Rather, as reflected in the claims, the inventive aspect lies in fewer than all features of a single foregoing disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of the invention.

[0042] It should be noted that the above embodiments are illustrative of the present invention and not restrictive of the present invention, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims.

Claims

1. A high-efficiency vacuum pump system for vacuuming in a vacuum coating machine, characterized in that, The high-efficiency vacuum pump system includes: an initialization pump group, a molecular pump group, and a diffusion pump group. The initialization pump group is connected to the molecular pump group, the winding chamber of the vacuum coating machine, and the coating chamber of the vacuum coating machine. The molecular pump group is connected to the winding chamber. The diffusion pump group is connected to the winding chamber and the coating chamber. The winding chamber and the coating chamber are connected. A first baffle valve and a fourth baffle valve are respectively installed on the connecting pipeline between the diffusion pump group and the winding chamber, wherein the first baffle valve is closer to one end of the winding chamber and the fourth baffle valve is closer to one end of the diffusion pump group. A third baffle valve is installed on the connecting pipeline between the diffusion pump group and the coating chamber.

2. The high-efficiency vacuum pump system according to claim 1, characterized in that: The initialization pump set includes a mechanical pump set and a Roots pump set connected in sequence.

3. The high-efficiency vacuum pump system according to claim 2, characterized in that: The mechanical pump set includes multiple sets of mechanical pumps connected in parallel.

4. The high-efficiency vacuum pump system according to claim 2, characterized in that: The Roots pump set includes multiple Roots pumps connected in parallel.

5. The high-efficiency vacuum pump system according to claim 1, characterized in that: The molecular pump assembly includes multiple sets of molecular pumps connected in parallel.

6. The high-efficiency vacuum pump system according to claim 1, characterized in that: The diffusion pump group includes multiple diffusion pumps connected in parallel.

7. The high-efficiency vacuum pump system according to claim 1, characterized in that: A fifth baffle valve is installed on the connecting pipeline between the initialization pump unit and the winding chamber and the coating chamber.

8. The high-efficiency vacuum pump system according to claim 1, characterized in that: A second baffle valve is installed on the connecting pipeline between the molecular pump group and the initialization pump group.

9. The high-efficiency vacuum pump system according to claim 1, characterized in that: Both the winding chamber and the coating chamber are equipped with vacuum gauges.

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