Ion plating equipment with precise coating thickness control function

Abstract

The utility model provides ion plating equipment with a precise coating thickness control function, which belongs to the technical field of ion plating equipment, and structurally comprises a rack, a vacuum coating box group is arranged on the top surface of the rack, and a coating inner cylinder group is sleeved on the inner periphery of a cavity of the vacuum coating box group; a plurality of ion source generators are arranged on the inner ring of the coating inner cylinder set according to an annular array, an interferometer sensor is transversely arranged at the lower end of the left side of the coating inner cylinder set, the ion source generators of the equipment are designed at intervals according to the annular array, coating of workpieces is more comprehensive, the workpieces do not need to be rotated in the coating process, and the coating efficiency is improved. And the interferometer sensor only needs to sense the thickness of one point position of the workpiece in real time, so that the overall coating thickness of the workpiece can be accurately controlled, the coating speed does not need to be determined through a test, and the practicability is high.

Description

Technical Field

[0001] This utility model relates to an ion plating device with precise coating thickness control function, belonging to the technical field of ion plating equipment. Background Technology

[0002] Vacuum ion plating utilizes inert gas glow discharge to vaporize and ionize plating materials such as metallic titanium. The ions are then accelerated by an electric field and bombard the workpiece surface with high energy.

[0003] In existing ion plating equipment, the coating thickness is usually proportional to the coating time. The coating time is calculated and strictly controlled by a precise timing device based on the predetermined coating speed and required thickness. The above method requires experimental determination of the coating speed, which is very troublesome. In order to address the above shortcomings, this utility model proposes an ion plating equipment with precise coating thickness control function. Utility Model Content

[0004] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide an ion plating equipment with precise coating thickness control function to solve the existing problems.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an ion plating device with precise coating thickness control, comprising a frame, a vacuum coating chamber assembly on the top surface of the frame, and a coating inner cylinder assembly fitted around the periphery of the vacuum coating chamber assembly. Multiple ion source generators are arranged in a circular array within the inner ring of the coating inner cylinder assembly. An interferometer sensor is horizontally positioned at the lower left end of the coating inner cylinder assembly. A lifting base assembly is movably sealed on the bottom surface of the vacuum coating chamber assembly. A vacuum pump is connected to the top surface of the vacuum coating chamber assembly via a suction hose. A control panel is located on the left side of the frame. The ion source generators, interferometer sensor, lifting base assembly, and vacuum pump are electrically connected to the control panel.

[0006] A further improvement is that the vacuum coating chamber assembly includes an annular outer box, the top surface of which is sealed with a top cover, and a feed inlet is provided in the middle of the bottom surface of the annular outer box. A sealing groove is provided around the bottom surface of the annular outer box, and the sealing groove is circular in shape. An air extraction pipe is connected to the top cover.

[0007] A further improvement is that the coated inner cylinder assembly includes an annular base, and an annular coated inner cylinder is provided on the top surface of the annular base. Multiple cable perforations are arranged in an annular array on the annular coated inner cylinder body, and a sensor sleeve is provided through the lower left end of the annular coated inner cylinder body.

[0008] A further improvement is that the lifting base assembly includes a cross frame, and a lifter is vertically arranged in the middle of the cross frame. A lifting platform is horizontally arranged on the top surface of the lifter. A workpiece placement platform is arranged in the middle of the top surface of the lifting platform. A sealing gasket made of rubber is arranged around the top surface of the lifting platform to flexibly abut against the sealing groove. Multiple sliding rods are vertically arranged around the bottom surface of the lifting platform, and the other end of each sliding rod passes through the cross frame.

[0009] A further improvement is that the ion source generator, interferometer sensor, and control panel are all existing technologies, and their structures will not be described in detail here.

[0010] The beneficial effects of the utility model are:

[0011] This utility model provides an ion plating equipment with precise coating thickness control. Through the structural combination design of a frame, vacuum coating chamber assembly, coating inner cylinder assembly, ion source generator, interferometer sensor, lifting base assembly, vacuum pump, and control panel, an ion plating equipment with precise coating thickness control is constructed. The ion source generators of this equipment are designed in a ring array with intervals, resulting in more comprehensive coating of the workpiece. There is no need to rotate the workpiece during the coating process; instead, the interferometer sensor only needs to sense the thickness of a single point on the workpiece in real time to accurately control the overall coating thickness. There is no need to test and determine the coating speed beforehand, making it highly practical. Furthermore, the design of the lifting base assembly allows the workpiece to be picked up and placed below the vacuum coating chamber assembly, reducing the material handling height and making operation more convenient. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of an ion plating equipment with precise coating thickness control function according to the present invention;

[0013] Figure 2 This is an installation effect diagram of the coated inner cylinder assembly, ion source generator, and interferometer sensor of this utility model.

[0014] Figure 3 This is a schematic diagram of the vacuum coating box assembly structure of this utility model;

[0015] Figure 4 This is a schematic diagram of the coated inner cylinder assembly structure of this utility model;

[0016] Figure 5 This is a schematic diagram of the lifting base assembly structure of this utility model. Detailed Implementation

[0017] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0018] Please see Figure 1-5The present invention discloses a schematic diagram of an ion plating equipment with precise coating thickness control function. The equipment comprises a frame 1, with a vacuum coating chamber 2 mounted on the top surface of the frame 1. An inner coating cylinder 3 is fitted around the periphery of the cavity of the vacuum coating chamber 2. Multiple ion source generators 4 are arranged in a circular array within the inner ring of the inner coating cylinder 3. An interferometer sensor 5 is horizontally positioned at the lower left end of the inner coating cylinder 3. A lifting base 6 is movably sealed on the bottom surface of the vacuum coating chamber 2. A vacuum pump 7 is connected to the top surface of the vacuum coating chamber 2 via a suction hose. A control panel 8 is located on the left side of the frame 1. The ion source generators 4, interferometer sensor 5, lifting base 6, and vacuum pump 7 are electrically connected to the control panel 8.

[0019] The vacuum coating chamber 2 includes an annular outer box 21, and a top cover 22 is sealed on the top surface of the annular outer box 21. A feed inlet 23 is opened in the middle of the bottom surface of the annular outer box 21. A sealing groove 24 is opened around the bottom surface of the annular outer box 21, and the sealing groove 24 is circular. An air extraction pipe 25 is connected to the top cover 22.

[0020] The coated inner cylinder assembly 3 includes an annular base 31, and an annular coated inner cylinder 32 is provided on the top surface of the annular base 31. Multiple cable perforations 33 are arranged in an annular array on the cylinder body of the annular coated inner cylinder 32. A sensor sleeve 34 is provided through the lower left end of the cylinder body of the annular coated inner cylinder 32.

[0021] The lifting base assembly 6 includes a cross frame 61, and a lifter 62 is vertically arranged in the middle of the cross frame 61. A lifting platform 63 is horizontally arranged on the top surface of the lifter 62. A workpiece placement platform 64 is arranged in the middle of the top surface of the lifting platform 63. A sealing gasket 65 is arranged around the top surface of the lifting platform 63 to flexibly abut against the sealing groove 24. The sealing gasket 65 is made of rubber. Multiple sliding rods 66 are vertically arranged around the bottom surface of the lifting platform 63. The other end of each sliding rod 66 passes through the cross frame 61.

[0022] Working principle:

[0023] First, the workpiece is placed on the workpiece placement platform 64, and then raised by the lifter 62, causing the lifting platform 63 and the workpiece placement platform 64 to rise vertically. At this time, the sealing gasket 65 will softly abut against the sealing groove 24, so that the lifting platform 63 seals the feed port 23. The workpiece on the workpiece placement platform 64 will be located in the middle between the various ion source generators 4 in the annular array. Then, the vacuum pump 7 evacuates the cavity of the annular outer box 21 through the suction pipe 25. After completion, the interferometer sensor 5 initializes the optical sensing workpiece and senses the coating progress in real time. Then, each ion source generator 4 starts to generate ion beams to bombard the workpiece for coating. When the interferometer sensor 5 senses that the working coating thickness has reached the set value, it transmits a signal to the control panel 8, and the control panel 8 issues an instruction to each ion source generator 4 to stop, thereby obtaining a workpiece with a precise coating thickness. Then, the lifter 62 descends to replace the workpiece on the workpiece placement platform 64.

[0024] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0025] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. An ion plating apparatus with precise coating thickness control function, characterized in that: Its structure includes a frame (1), and a vacuum coating box assembly (2) is provided on the top surface of the frame (1). A coating inner cylinder assembly (3) is sleeved around the cavity of the vacuum coating box assembly (2). Multiple ion source generators (4) are arranged in a ring array in the inner circle of the coating inner cylinder assembly (3). An interferometer sensor (5) is arranged horizontally at the lower left end of the coating inner cylinder assembly (3). A lifting base assembly (6) is provided in a movable sealing sleeve on the bottom surface of the vacuum coating box assembly (2). A vacuum pump (7) is connected to the top surface of the vacuum coating box assembly (2) through a vacuum hose. A control panel (8) is provided on the left side of the frame (1). The ion source generator (4), the interferometer sensor (5), the lifting base assembly (6) and the vacuum pump (7) are electrically connected to the control panel (8).

2. The ion plating apparatus with precise film thickness control function according to claim 1, characterized in that: The vacuum coating box assembly (2) includes an annular outer box (21), and the top surface of the annular outer box (21) is sealed with a top cover (22). A feed inlet (23) is opened in the middle of the bottom surface of the annular outer box (21). A sealing groove (24) is opened around the bottom surface of the annular outer box (21), and the sealing groove (24) is circular. An air extraction pipe (25) is connected to the top cover (22).

3. The ion plating apparatus having a precise film thickness control function according to claim 2, characterized in that: The coated inner cylinder assembly (3) includes an annular base (31), and an annular coated inner cylinder (32) is provided on the top surface of the annular base (31). Multiple cable perforations (33) are arranged in an annular array on the cylinder body of the annular coated inner cylinder (32). A sensor sleeve (34) is provided through the lower left side of the cylinder body of the annular coated inner cylinder (32).

4. The ion plating apparatus having a precise film thickness control function according to claim 3, wherein: The lifting base assembly (6) includes a cross frame (61), and a lifter (62) is vertically arranged in the middle of the cross frame (61). A lifting platform (63) is horizontally arranged on the top surface of the lifter (62). A workpiece placement platform (64) is arranged in the middle of the top surface of the lifting platform (63). A sealing gasket (65) is arranged around the top surface of the lifting platform (63) to flexibly abut against the sealing groove (24). The sealing gasket (65) is made of rubber. Multiple sliding rods (66) are vertically arranged around the bottom surface of the lifting platform (63). The other end of each sliding rod (66) passes through the cross frame (61).

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