Film thickness real-time detection device

Abstract

The utility model relates to a film thickness real-time detection device, which comprises an inner ring and an outer ring annularly arranged on the periphery of the inner ring, an annular space for a film to pass through is arranged between the inner ring and the outer ring, and at least part of the positions of the inner ring and the outer ring are immersed in a cooling water area, so that the film is cooled by the cooling water area in the annular space; the multiple sensors are arranged on the outer wall of the inner ring in the circumferential direction of the inner ring, and / or the multiple sensors are arranged on the inner wall of the outer ring in the circumferential direction of the outer ring, so that thickness data of the thin film at the corresponding position are collected through the multiple sensors in the state that the thin film penetrates through the annulus. According to the utility model, the technical problems of tedious operation, long time consumption and poor real-time performance when the thickness of the film is measured are solved.

Description

Technical Field

[0001] This utility model relates to the field of thin film production, and in particular to a real-time thin film thickness detection device. Background Technology

[0002] During film production, the thickness of the produced film needs to be measured to obtain the thickness at a specific point or to check the uniformity of the overall thickness. Current technology often uses vernier calipers (such as electronic vernier calipers) for point-to-point measurement. However, this method can only measure the thickness at a single point. To measure other locations, the film or caliper must be adjusted, making the process cumbersome. Furthermore, it cannot simultaneously measure the thickness of a ring-shaped film online, thus failing to measure thickness uniformity online. Existing thickness gauges are expensive and complex, requiring continuous measurement during film production. When generating a thickness map, the interval between the first and last data points is long, requiring 3-5 minutes to form a single thickness map. Therefore, they suffer from long measurement times and poor real-time performance.

[0003] Currently, there is no effective solution to the problem that measuring the thickness of thin films in related technologies is cumbersome, time-consuming, and lacks real-time performance.

[0004] Therefore, this utility model proposes a real-time film thickness detection device to overcome the shortcomings of the prior art. Utility Model Content

[0005] The purpose of this invention is to provide a real-time film thickness detection device that is easy to operate and can measure the thickness of a whole circle of film online in the same time and generate a thickness map, which greatly shortens the measurement time and has better real-time performance.

[0006] The objective of this utility model can be achieved through the following solutions:

[0007] This utility model provides a real-time film thickness detection device, the real-time film thickness detection device comprising:

[0008] An inner ring and an outer ring disposed around the outer periphery of the inner ring, with an annular space between the inner ring and the outer ring for a thin film to pass through, and at least a portion of the inner ring and the outer ring being immersed in a cooling water body so that the thin film is cooled by the cooling water body as it passes through the annular space;

[0009] Multiple sensors are arranged circumferentially on the outer wall of the inner ring, and / or multiple sensors are arranged circumferentially on the inner wall of the outer ring, so as to collect thickness data of the film at corresponding positions by means of the multiple sensors when the film passes through the annular gap.

[0010] In a preferred embodiment of the present invention, a plurality of said sensors are spaced apart and evenly arranged on the outer wall of the inner ring along its circumference, and / or, a plurality of said sensors are spaced apart and evenly arranged on the inner wall of the outer ring along its circumference.

[0011] In a preferred embodiment of this utility model, the sensor is an ultrasonic sensor, and a plurality of ultrasonic sensors are disposed on the lower outer wall of the inner ring or the lower inner wall of the outer ring.

[0012] When multiple ultrasonic sensors are in the detection state, the multiple ultrasonic sensors are submerged below the surface of the cooling water.

[0013] In a preferred embodiment of this utility model, the sensor is a laser ranging sensor, and a plurality of the laser ranging sensors are disposed on the upper outer wall of the inner ring and the upper inner wall of the outer ring;

[0014] When multiple laser ranging sensors are in the detection state, the multiple laser ranging sensors are positioned above the liquid surface of the cooling water area.

[0015] In a preferred embodiment of the present invention, the real-time film thickness detection device further includes a plurality of micro-displays, each of which corresponds to a plurality of sensors, and the signal output terminals of the plurality of sensors are electrically connected to the signal receiving terminals of the corresponding micro-displays.

[0016] In a preferred embodiment of the present invention, a plurality of the microdisplays are disposed at the top of the inner ring along the circumference of the inner ring, or a plurality of the microdisplays are disposed at the top of the outer ring along the circumference of the outer ring.

[0017] In a preferred embodiment of the present invention, the real-time film thickness detection device includes a central processing unit and a display terminal. The signal receiving end of the central processing unit is electrically connected to the signal output ends of the plurality of microdisplays. The central processing unit is used to generate a thickness map of the film based on the thickness data transmitted by the plurality of microdisplays, and to display the thickness map through the display terminal.

[0018] In a preferred embodiment of the present invention, the real-time film thickness detection device includes a central processing unit (CPU). The signal receiving end of the CPU is electrically connected to the signal output ends of a plurality of sensors. The CPU is used to generate a thickness map of the film based on the thickness data collected by the plurality of sensors.

[0019] In a preferred embodiment of this utility model, the film is an annular film, so that the film, the inner ring and the outer ring are coaxial during the process of the film passing through the annular space.

[0020] In a preferred embodiment of this utility model, the film is a sheet-like film, and during the process of bending the sheet-like film into a ring shape and passing it through the annular space, the film, the inner ring, and the outer ring are coaxial.

[0021] As described above, the features and advantages of the real-time film thickness detection device of this utility model are:

[0022] An annular space is formed between the inner and outer rings, through which the produced film can pass. At least a portion of the inner and outer rings are immersed in a cooling water area. As the film is produced and passes through the annular space immersed in the cooling water area, the cooling water area cools the film. In addition, since multiple sensors are circumferentially arranged on the outer wall of the inner ring and / or the inner wall of the outer ring, during the cooling process of the film through the annular space, the thickness data of the film at the corresponding positions of each sensor can be collected by multiple sensors. Thus, without affecting the normal film production (i.e., the normal cooling process after film production), the thickness of the entire film can be measured online at the same time. This is convenient, greatly shortens the measurement time, and has better real-time performance. Attached Figure Description

[0023] The following figures are intended only to illustrate and explain the present invention and do not limit the scope of the present invention. Wherein:

[0024] Figure 1 This is one of the structural schematic diagrams of the real-time film thickness detection device of this utility model;

[0025] Figure 2 This is a partially enlarged view of the location of the ultrasonic sensor in the real-time film thickness detection device of this utility model;

[0026] Figure 3 This is the second schematic diagram of the structure of the real-time film thickness detection device of this utility model;

[0027] Figure 4 This is a schematic diagram of the signal transmission of the real-time film thickness detection device of this utility model;

[0028] Figure 5This is a flowchart illustrating the detection process of the real-time film thickness detection device of this utility model.

[0029] Figure 6 This is a thickness map generated by the real-time film thickness detection device of this utility model.

[0030] The reference numerals in the accompanying drawings of this utility model are:

[0031] 1. Inner ring; 2. Outer ring;

[0032] 3. Sensors; 4. Miniature displays;

[0033] 5. Central processing unit; 6. Display terminal. Detailed Implementation

[0034] The technical solution of this utility model will be described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that these embodiments are only used to illustrate this utility model and are not intended to limit the scope of this utility model. After reading this utility model, any modifications of this utility model in various equivalent forms by those skilled in the art will fall within the scope defined by the appended claims.

[0035] It should be noted that when an element is referred to as being "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0037] Implementation Method 1

[0038] like Figure 1 and Figure 2As shown, this utility model provides a real-time film thickness detection device, which includes an inner ring 1 and an outer ring 2 in the shape of a ring, and a plurality of sensors 3. The outer ring 2 is arranged around the outer periphery of the inner ring 1. There is an annular gap between the inner ring 1 and the outer ring 2 for the film (not shown) to pass through (i.e., there is an annular gap between the outer wall of the inner ring 1 and the inner wall of the outer ring 2). At least a portion of the inner ring 1 and the outer ring 2 are immersed in a cooling water area so that the film is cooled by the cooling water area when passing through the annular gap. The plurality of sensors 3 are arranged on the outer wall of the inner ring 1 along the circumference of the inner ring 1, and / or the plurality of sensors 3 are arranged on the inner wall of the outer ring 2 along the circumference of the outer ring 2, so as to collect the film thickness data at the corresponding position through the plurality of sensors 3 when the film passes through the annular gap.

[0039] In this invention, an annular space is formed between the inner ring 1 and the outer ring 2, through which the produced film can pass. At least a portion of the inner ring 1 and the outer ring 2 are immersed in a cooling water area. When the film is produced and passes through the annular space immersed in the cooling water area, the cooling water area can cool the film. In addition, since multiple sensors 3 are circumferentially arranged on the outer wall of the inner ring 1 and / or the inner wall of the outer ring 2, during the process of the film passing through the annular space and being cooled by the water area, the thickness data of the film at the corresponding positions of each sensor 3 can be collected by the multiple sensors 3. Thus, without affecting the normal production of the film (i.e., the normal cooling process after the film is produced), the thickness of the film can be measured online in the same time. This is convenient, greatly shortens the measurement time, and has better real-time performance.

[0040] In this invention, the inner ring 1 and the outer ring 2 form a water-cooling ring for cooling the film. Generally, a cooling water environment (i.e., a cooling water area) is provided at the lower part of the water-cooling ring. The lower or lower-middle part of the inner ring 1 and the outer ring 2 are immersed in the cooling water environment. At this time, the annular space between the inner ring 1 and the outer ring 2 is filled with cooling water. After the film is produced, it is passed from top to bottom through the annular space between the inner ring 1 and the outer ring 2, thereby cooling the film.

[0041] In this utility model, such as Figure 1 As shown, multiple sensors 3 can be evenly arranged and spaced along the circumference of the inner ring 1 on the outer wall of the inner ring 1, thereby uniformly acquiring the thickness of the film around its circumference and realizing the detection of the film thickness uniformity. Of course, in other embodiments, multiple sensors 3 can also be evenly arranged and spaced along the circumference of the outer ring 2 on the inner wall of the outer ring 2, which can still realize the detection of the thickness at corresponding positions of the film. The number of sensors 3 can be set according to the diameter of the inner ring 1 or the outer ring 2. Since each sensor 3 corresponds to the detection of a position point on the film, the more sensors 3 there are and the smaller the interval between two adjacent sensors 3, the higher the detection accuracy and the more accurate the overall thickness data of the film obtained.

[0042] In one optional embodiment of this utility model, such as Figure 1 and Figure 2 As shown, sensor 3 is an ultrasonic sensor. Multiple ultrasonic sensors are arranged circumferentially on the lower outer wall of the inner ring 1, or multiple ultrasonic sensors are arranged circumferentially on the lower inner wall of the outer ring 2. The positioning of the ultrasonic sensors must meet the following condition: when multiple ultrasonic sensors are in detection mode, multiple ultrasonic sensors 3 are immersed below the surface of the cooling water, using cooling water as the medium for ultrasonic wave transmission, to achieve the detection of film thickness.

[0043] In another optional embodiment of this utility model, sensor 3 is a laser rangefinder. Multiple laser rangefinders need to be simultaneously installed on the upper outer wall of the inner ring 1 and the upper inner wall of the outer ring 2. The multiple laser rangefinders on the inner ring 1 correspond one-to-one with the multiple laser rangefinders on the outer ring 2 in the circumferential direction. That is, when detecting the thickness of the film, the two laser rangefinders on the inner ring 1 and the outer ring 2 work together. One laser rangefinder detects the first distance between the inner ring 1 and one side wall of the film, and the other laser rangefinder detects the second distance between the outer ring 2 and the other side wall of the film. After measuring and knowing the total distance between the outer wall of the inner ring 1 and the inner wall of the outer ring 2, the thickness of the film at that location is obtained by subtracting the first distance and the second distance from the total distance.

[0044] In this embodiment, when multiple laser rangefinders are in the detection state, the multiple laser rangefinders 3 are arranged above the surface of the cooling water to avoid the fluctuation of the cooling water from interfering with the detection of the laser rangefinders and to ensure the accuracy of the detection.

[0045] In one optional embodiment of this utility model, such as Figure 3 As shown, the real-time film thickness detection device also includes multiple microdisplays 4, each corresponding to a specific sensor 3. The sensors 3 can be numbered, and their signal output terminals are electrically connected to the signal receiving terminals of their corresponding microdisplays 4. After the sensor 3 obtains the thickness data at a corresponding location on the film, it is directly displayed on the corresponding microdisplay 4. This allows operators to directly determine the film thickness at the corresponding location by viewing the microdisplays 4. Furthermore, the uniformity of the film thickness can be directly determined by examining the data displayed on the multiple microdisplays 4.

[0046] Specifically, such as Figure 3As shown, multiple microdisplays 4 are arranged circumferentially around the top of the inner ring 1 to prevent them from coming into contact with cooling water and causing damage. Of course, the multiple microdisplays 4 can also be arranged circumferentially around the top of the outer ring 2 or in other positions, so that the operators can know the correspondence between the multiple microdisplays 4 and the multiple sensors 3.

[0047] In one optional embodiment of this utility model, such as Figure 4 and Figure 6 As shown, the real-time film thickness detection device includes a central processing unit 5 and a display terminal 6. The signal receiving end of the central processing unit 5 is electrically connected to the signal output end of multiple micro-displays 4. The central processing unit 5 can generate a thickness map of the film based on the thickness data transmitted by the multiple micro-displays 4 (the thickness map is obtained by connecting the thicknesses of multiple locations), and display the thickness map through the display terminal 6.

[0048] In another optional embodiment of this utility model, the real-time film thickness detection device includes a central processing unit 5. The signal receiving end of the central processing unit 5 is electrically connected to the signal output end of multiple sensors 3. The central processing unit 5 can also directly generate a thickness map of the film based on the thickness data collected by the multiple sensors 3.

[0049] The features and advantages of this utility model's real-time film thickness detection device are:

[0050] I. This real-time film thickness detection device can detect the film thickness during the film cooling process without affecting the normal film production process, making the film thickness detection more efficient.

[0051] Second, this real-time film thickness detection device can complete the detection of the thickness of the entire film circumference online at one time. The measurement operation is convenient, greatly shortens the measurement time, and has better real-time performance.

[0052] Third, this real-time film thickness detection device uses sensor 3 to acquire thickness data, which significantly reduces the cost compared to existing film thickness detection equipment. For example, the price of one ultrasonic sensor is about 200 yuan, and the price of 180 ultrasonic sensors is 36,000 yuan, while the price of existing film thickness detection equipment (such as thickness gauges) is about 300,000 yuan. It can be seen that this device can greatly reduce equipment costs.

[0053] Fourth, the real-time film thickness detection device uses sensor 3, which has a fast data acquisition speed, capable of acquiring one data point per second. Therefore, it can generate thickness maps more quickly. The data acquisition frequency can be set according to the measurement needs, which can rapidly improve the collection and processing of data to generate thickness maps.

[0054] Implementation Method 2

[0055] like Figure 5 As shown, this utility model provides a method for real-time detection of film thickness, which uses the aforementioned real-time film thickness detection device to detect the thickness of the film. The method for real-time detection of film thickness includes the following steps:

[0056] Step S1: Immerse at least a portion of the inner ring 1 and outer ring 2 in the cooling water.

[0057] Step S2: Pass the produced film through the annular space between the inner ring 1 and the outer ring 2 from top to bottom until the film is submerged in the cooling water.

[0058] In step S2, during the process of the thin film passing through the annulus, multiple sensors 3 arranged circumferentially on the outer wall of the inner ring 1 and / or arranged circumferentially on the inner wall of the outer ring 2 collect the thickness data of the thin film at the corresponding positions.

[0059] The real-time film thickness detection method of this invention can be used to detect the thickness of annular films as well as sheet films. When the produced film is annular, its thickness can be detected directly as it passes through the annular opening. When the produced film is sheet-like, it can be bent into an annular shape, and its thickness can be detected as it passes through the annular opening. Regardless of the type of film being detected, it is essential to ensure that the film, inner ring 1, and outer ring 2 are coaxial to improve detection accuracy.

[0060] In an optional embodiment of this utility model, in step S2, while multiple sensors 3 collect thickness data of the film at corresponding positions, multiple microdisplays 4 corresponding one-to-one with the multiple sensors 3 respectively display the thickness data of the film at the corresponding positions.

[0061] In one optional embodiment of this utility model, such as Figure 4 and Figure 6 As shown, after step S2, the following steps are also included:

[0062] Step S3': Multiple microdisplays 4 transmit thickness data to the central processing unit 5. The central processing unit 5 generates a thickness map of the thin film based on the thickness data corresponding to multiple detection points along the circumference of the thin film (e.g., ...). Figure 6 (The broken line portion of the middle ring);

[0063] Step S4': Display the thickness map through display terminal 6.

[0064] In this embodiment, after the sensor 3 obtains the thickness data of the corresponding position point on the film, it is directly displayed on the corresponding micro display 4 so that the staff can directly obtain the thickness of the film at the corresponding position by looking at the micro display 4. The uniformity of the film thickness can also be directly known by the data displayed by multiple micro displays 4.

[0065] In another optional embodiment of this utility model, such as Figure 4 and Figure 6 As shown, after step S2, the following steps are also included:

[0066] Step S3”: Multiple sensors 3 transmit thickness data to the central processing unit 5, and the central processing unit 5 generates a thickness map of the film based on the thickness data corresponding to multiple detection points in the circumferential direction of the film.

[0067] Step S4”: Display the thickness map through display terminal 6.

[0068] The real-time film thickness detection method of this invention has the same features and advantages as the aforementioned real-time film thickness detection device, and will not be repeated here.

[0069] It should be noted that in the description of this application, the terms "first," "second," etc., are used only for descriptive purposes and to distinguish similar objects; there is no order between them, nor should they be construed as indicating or implying relative importance. Furthermore, in the description of this application, unless otherwise stated, "multiple" means two or more.

[0070] The various embodiments described in this specification are presented in a progressive manner. The same or similar parts between the embodiments can be referred to each other. Each embodiment focuses on the differences from other embodiments.

[0071] The above are merely several embodiments of this utility model. Although the embodiments disclosed in this utility model are as described above, the content is only for the purpose of facilitating understanding of this utility model and is not intended to limit this utility model. Any equivalent changes and modifications made by those skilled in the art without departing from the concept and principles of this utility model should fall within the protection scope of this utility model.

Claims

1. A real-time film thickness detection device, characterized in that, The real-time film thickness detection device includes: An inner ring and an outer ring disposed around the outer periphery of the inner ring, with an annular space between the inner ring and the outer ring for a thin film to pass through, and at least a portion of the inner ring and the outer ring being immersed in a cooling water body so that the thin film is cooled by the cooling water body as it passes through the annular space; Multiple sensors are arranged circumferentially on the outer wall of the inner ring, and / or multiple sensors are arranged circumferentially on the inner wall of the outer ring, so as to collect thickness data of the film at corresponding positions by means of the multiple sensors when the film passes through the annular gap.

2. The real-time film thickness detection device as described in claim 1, characterized in that, The plurality of said sensors are spaced apart and evenly arranged circumferentially on the outer wall of the inner ring, and / or the plurality of said sensors are spaced apart and evenly arranged circumferentially on the inner wall of the outer ring.

3. The real-time film thickness detection device as described in claim 1 or 2, characterized in that, The sensor is an ultrasonic sensor, and multiple ultrasonic sensors are disposed on the lower outer wall of the inner ring or the lower inner wall of the outer ring. When multiple ultrasonic sensors are in the detection state, the multiple ultrasonic sensors are submerged below the surface of the cooling water.

4. The real-time film thickness detection device as described in claim 1 or 2, characterized in that, The sensor is a laser ranging sensor, and multiple laser ranging sensors are disposed on the upper outer wall of the inner ring and the upper inner wall of the outer ring; When multiple laser ranging sensors are in the detection state, the multiple laser ranging sensors are positioned above the liquid surface of the cooling water area.

5. The real-time film thickness detection device as described in claim 1, characterized in that, The real-time film thickness detection device also includes multiple micro-displays, each corresponding to one of the multiple sensors, and the signal output terminals of the multiple sensors are electrically connected to the signal receiving terminals of the corresponding micro-displays.

6. The real-time film thickness detection device as described in claim 5, characterized in that, The plurality of microdisplays are disposed at the top of the inner ring along the circumference of the inner ring, or the plurality of microdisplays are disposed at the top of the outer ring along the circumference of the outer ring.

7. The real-time film thickness detection device as described in claim 5 or 6, characterized in that, The real-time film thickness detection device includes a central processing unit and a display terminal. The signal receiving end of the central processing unit is electrically connected to the signal output ends of the multiple microdisplays. The central processing unit is used to generate a thickness map of the film based on the thickness data transmitted by the multiple microdisplays, and to display the thickness map through the display terminal.

8. The real-time film thickness detection device as described in claim 1, characterized in that, The real-time film thickness detection device includes a central processing unit (CPU). The signal receiving end of the CPU is electrically connected to the signal output ends of multiple sensors. The CPU is used to generate a thickness map of the film based on the thickness data collected by the multiple sensors.

9. The real-time film thickness detection device as described in claim 1, characterized in that, The film is an annular film, so that the film, the inner ring, and the outer ring are coaxial during the process of the film passing through the annular space.

10. The real-time film thickness detection device as described in claim 1, characterized in that, The film is a sheet-like film. When the sheet-like film is bent into a ring shape and then passed through the annular space, the film, the inner ring, and the outer ring are coaxial.

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