Hanging basket mechanism and cleaning system for wafer

Abstract

The utility model relates to a hanging basket mechanism used for wafers and a cleaning system, the hanging basket mechanism is used for being hung on a lifting hook in the cleaning system, the hanging basket mechanism comprises a basket frame and a hook, the hook is installed at the top of the basket frame and used for being connected with the lifting hook in the cleaning system in a hanging mode, and an inclined groove inclined to the horizontal direction is formed in the basket frame. The chute is configured to be in sliding connection with the outer wall of the tool, and the tool is used for bearing a wafer. The basket support is connected with a lifting hook in the cleaning system in a hanging mode through a hook, a technician can conveniently take out the basket mechanism from the cleaning system, the outer wall of the tool is in sliding connection with an inclined groove of the basket support, the tool can be easily arranged in the cleaning system in an inclined mode, and after a wafer in the tool is cleaned, the basket support is lifted upwards, so that the wafer in the tool can be conveniently taken out. Due to the fact that the tool is inclined relative to the basket frame, the cleaning liquid left on the outer wall of the tool can slide into the cleaning system in an inclined mode, and the cleaning liquid is prevented from being left on the tool.

Description

Technical Field

[0001] This disclosure relates to the field of wafer cleaning technology, and more specifically, to a basket mechanism and cleaning system for wafers. Background Technology

[0002] Sapphire crystals possess excellent optical properties, physical properties, and stable chemical properties. They are widely used in high-brightness LED substrate materials, various optical components, and scanner window materials.

[0003] When sapphire wafers are used as substrates, technicians need to tilt the fixture containing the sapphire wafers and place it in the cleaning system for cleaning. In related technologies, it is difficult to tilt the fixture in the cleaning system, which makes it easy for cleaning fluid to remain on the outer wall of the fixture. Utility Model Content

[0004] The purpose of this disclosure is to provide a basket mechanism and cleaning system for wafers to at least partially solve the problems existing in the related art.

[0005] To achieve the above objectives, this disclosure provides a basket mechanism for wafers, which is used to hang on a hook in a cleaning system. The basket mechanism includes a basket frame and a hook. The hook is installed on the top of the basket frame and is used to engage with the hook in the cleaning system. The basket frame is provided with an inclined groove that is inclined in the horizontal direction. The inclined groove is configured to slide in connection with the outer wall of a fixture. The fixture is used to support the wafer.

[0006] Optionally, one of the inner wall of the basket frame and the outer wall of the tooling is provided with a stop and the other is provided with a slot, wherein the stop can abut against the slot in the sliding direction of the tooling.

[0007] Optionally, there are two stops, which are disposed opposite each other on the outer wall of the tooling, and two slots are formed on the inner wall of the basket frame, which correspond one-to-one with the two stops.

[0008] Optionally, the outer wall of the tooling is provided with a protrusion, the protrusion is slidably connected to the inclined groove, there are two inclined grooves, and they are provided on the two opposite inner walls of the basket frame. There are two protrusions, and they are provided in a one-to-one correspondence with the two inclined grooves.

[0009] Optionally, one end of the protrusion near the inlet of the inclined groove is constructed as an inclined surface, which is used to contact the inclined groove to guide the protrusion into the inclined groove.

[0010] Optionally, the inclined groove is U-shaped, with the U-shaped openings of the two inclined grooves facing each other, and the protrusion is sandwiched between the two side walls of the U-shape to restrict the up-and-down movement of the tooling.

[0011] Optionally, the angle between the inclined groove and the horizontal direction is in the range of 5 degrees to 20 degrees.

[0012] Optionally, the basket frame is provided with a clearance area located below the inclined groove and configured to be recessed inward along the inlet / outlet direction of the tooling to avoid the lateral space of the tooling.

[0013] According to a second aspect of the present disclosure, a wafer cleaning system is provided, including a tooling and a basket mechanism for wafers as described in any of the above embodiments, wherein the tooling is slidably disposed on an inclined groove of the basket mechanism, and the basket mechanism is suspended on a hook within the cleaning system.

[0014] Optionally, the tooling includes a plurality of slots for accommodating wafers.

[0015] The technical solutions provided by the embodiments of this disclosure may include the following beneficial effects:

[0016] The basket frame is connected to the hook in the cleaning system via hooks, making it easy for technicians to remove the basket mechanism from the cleaning system. The outer wall of the fixture is slidably connected to the inclined groove of the basket frame, allowing the fixture to be easily tilted and placed in the cleaning system. After the wafers in the fixture are cleaned, as the basket frame is lifted upwards, the residual cleaning fluid on the outer wall of the fixture will tilt and slide into the cleaning system because the fixture is tilted relative to the basket frame, thus preventing the cleaning fluid from remaining on the fixture.

[0017] Other features and advantages of this disclosure will be described in detail in the following detailed description section. Attached Figure Description

[0018] The accompanying drawings are provided to further illustrate the present disclosure and form part of the specification. They are used together with the following detailed description to explain the present disclosure, but do not constitute a limitation thereof. In the drawings:

[0019] Figure 1 This is a schematic diagram illustrating a wafer cleaning system in a first state according to an exemplary embodiment of the present disclosure.

[0020] Figure 2 This is a schematic diagram illustrating a wafer cleaning system in a second state according to an exemplary embodiment of the present disclosure.

[0021] Figure 3 yes Figure 2 A magnified view of part A in the middle.

[0022] Figure 4 This is a cross-sectional view of a basket frame in a basket mechanism for a wafer, according to an exemplary embodiment of the present disclosure.

[0023] Explanation of reference numerals in the attached figures

[0024] 10. Tooling; 11. Stop; 12. Protrusion; 13. Inclined surface; 100. Basket frame; 110. Inclined groove; 120. Slot; 130. Clearance area; 200. Hook; 210. Mounting hole. Detailed Implementation

[0025] The specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit this disclosure.

[0026] In this disclosure, unless otherwise stated, directional terms such as "up," "down," "left," "right," "top," and "bottom" are used for ease of description based on the drawing orientation of the corresponding figures, while "inner" and "outer" are defined based on the contour of the corresponding component itself. The horizontal direction is... Figure 4 The directions shown are as indicated. Terms such as "first," "second," etc., used in this disclosure are for distinguishing one element from another and do not indicate sequence or importance. Furthermore, when the following description refers to the accompanying drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements.

[0027] Please see Figure 1 and Figure 4 This disclosure provides a basket mechanism for wafers, used to hang on hooks within a cleaning system (not shown). The basket mechanism includes a basket frame 100 and hooks 200. Hooks 200 can be installed on the top of the basket frame 100. Both hooks 200 and the basket frame 100 have mounting holes 210. Hooks 200 and the basket frame 100 are detachably connected by fasteners passing through the mounting holes 210 of the hooks 200 and the basket frame 100, respectively. The fasteners can be screws or bolts, etc. The hooks 200 can be used to engage with hooks within the cleaning system. This detachable connection facilitates the removal of the basket mechanism from the cleaning system by technicians. The basket frame 100 may have an inclined groove 110 arranged in a horizontal direction. The inclined groove 110 can be configured to slide with the outer wall of a fixture 10, which can be used to hold wafers (not shown). Fixture 10 is prior art and will not be described in detail here. The wafers can be sapphire wafers or ruby ​​wafers, etc.

[0028] Understandably, the outer wall of fixture 10 is slidably connected to the inclined groove 110 of basket 100, allowing fixture 10 to be easily tilted and placed within the cleaning system. After the wafers inside fixture 10 are cleaned, as basket 100 is lifted upwards, the residual cleaning fluid on the outer wall of fixture 10 will tilt and slide into the cleaning system due to the tilt of fixture 10 relative to basket 100, preventing cleaning fluid from remaining on fixture 10. Specifically, residual cleaning fluid on the top surface of fixture 10 will flow down along the tilt direction, ensuring that cleaning fluid does not adhere to the top surface, thereby preventing fixture 10 from being corroded.

[0029] In one implementation, please refer to Figure 2 and Figure 4 One of the inner wall of the basket frame 100 and the outer wall of the tooling 10 may be provided with a stop part 11, and the other may be provided with a groove 120. The stop part 11 can abut against the groove 120 in the sliding direction of the tooling 10 to prevent the tooling 10 from sliding down the inclined groove 110 during the tilting process. The positioning is more reliable, ensuring the stability and reliability of the cleaning process.

[0030] In one implementation, please refer to Figure 2 There can be two stop portions 11, which can be disposed opposite each other on the outer wall of the tooling 10. The stop portions 11 are integrally formed with the tooling 10, or they can be pins or plates, etc. Two slots 120 are formed on the inner wall of the basket frame 100, and they can be configured one-to-one with the two stop portions 11. Of course, in other embodiments, the stop portions 11 can also be installed on the inner wall of the basket frame 100, and the slots 120 can be formed on the outer wall of the tooling 10. By providing two sets of slots 120 and stop portions 11, the positioning effect of the tooling 10 can be enhanced, preventing the tooling 10 from sliding down relative to the inclined groove 110 during the cleaning process.

[0031] In one embodiment, the stop 11 is provided on the inlet side of the tooling 10 near the inclined groove 110, in conjunction with... Figure 2 The stop part 11 is located on the right side of the tooling 10 to prevent the stop part 11 from interfering with the downward flow of the cleaning fluid along the inclined groove 110. Of course, the stop part 11 can also be located on the side of the tooling 10 away from the inlet of the inclined groove 110, that is, on the left side of the tooling 10. In this case, the stop part 11 needs to be located away from the inclined groove 110 in the height direction to prevent the stop part 11 from interfering with the flow of the cleaning fluid out of the inclined groove 110.

[0032] In one implementation, please refer to Figure 2The outer wall of the tooling 10 may be provided with protrusions 12, which can be slidably connected to the inclined grooves 110. There can be two inclined grooves 110, which can be provided on the two opposite inner walls of the basket frame 100. There can also be two protrusions 12, which can be arranged one-to-one with the two inclined grooves 110. The two protrusions 12 are inserted into the inclined grooves 110 along the extension direction of the two inclined grooves 110 respectively to achieve the sliding connection between the basket frame 100 and the tooling 10.

[0033] Furthermore, the protrusion 12 can extend along the extension direction of the inclined groove 110 to increase the contact area between the tooling 10 and the inclined groove 110. When the pressure of the tooling 10 on the inclined groove 110 is constant, the larger the contact area between the two, the smaller the pressure of the tooling 10 on the inclined groove 110, thus avoiding the inclined groove 110 being damaged and deformed.

[0034] In one implementation, please refer to Figure 2 The two protrusions 12 can be respectively disposed on opposite side walls of the tooling 10. Of course, in other embodiments, the two protrusions 12 can be disposed on the bottom of the tooling 10. The specific arrangement of the protrusions 12 is not limited here.

[0035] In one implementation, please refer to Figure 2 and Figure 3 The end of the protrusion 12 near the inlet of the inclined groove 110 can be constructed as an inclined surface 13. The inclined surface 13 can be used to contact the inclined groove 110 so as to guide the protrusion 12 into the inclined groove 110. The protrusion 12 can be inserted into the inclined groove 110 without the protrusion 12 being aligned with the inclined groove 110, thereby improving the insertion efficiency of the protrusion 12 and the inclined groove 110.

[0036] Understandably, the inclined surface 13 of the protrusion 12 can abut against the side wall of the inclined groove 110, and the side wall of the inclined groove 110 can provide a resisting force to the inclined surface 13. At this time, the protrusion 12 is also subjected to a thrust along the extension direction of the inclined groove 110. Under the combined action of the thrust and the resisting force, the protrusion 12 can move laterally, so that the two protrusions 12 can be aligned with the two inclined grooves 110 respectively, avoiding one of the two protrusions 12 from not being connected to the inclined groove 110, and ensuring that the inclined groove 110 can provide a stable supporting force for the protrusion 12.

[0037] In one embodiment, the inclined groove 110 can be constructed as a U-shape, with the U-shaped openings of the two inclined grooves 110 facing each other. The protrusion 12 can be clamped between the two side walls of the U-shape to restrict the up-and-down movement of the fixture 10, ensuring that the fixture 10 can remain stationary relative to the basket 100 during the cleaning process, thereby ensuring the cleaning effect.

[0038] In one implementation, please refer to Figure 4The angle between the inclined groove 110 and the horizontal direction can range from 5 degrees to 20 degrees. For example, the angle between the inclined groove 110 and the horizontal direction can be 5 degrees, 10 degrees, 15 degrees, or 20 degrees. When the angle between the inclined groove 110 and the horizontal direction is less than 5 degrees, the cleaning fluid adhering to the outer wall of the fixture 10 is not easy to slide off; when the angle between the inclined groove 110 and the horizontal direction is greater than 20 degrees, the cleaning fluid in the slot at the higher position (described below) of the fixture 10 can easily enter the slot at the lower position, causing the wafer in the slot at the lower position to be contaminated.

[0039] In one implementation, please refer to Figure 1 The basket rack 100 may be provided with a clearance area 130, which may be located below the inclined groove 110 and may be configured to be recessed inward along the inlet / outlet direction of the tooling 10 to avoid lateral space of the tooling 10. This ensures that the tooling 10 can be smoothly pushed into the basket rack 100, saving space occupied by the tooling 10 and the basket rack 100 within the cleaning system.

[0040] Furthermore, the sidewalls of the clearance area 130 extend inward toward the basket 100 along the inlet / outlet direction of the fixture 10. After the basket 100 is removed from the cleaning system, it facilitates contact between the user and the two sidewalls of the fixture 10, allowing the fixture 10 to be quickly pulled out of the basket 100, thereby improving the cleaning efficiency of the wafers and facilitating the remanufacturing of the wafers.

[0041] Please see Figures 1 to 4 According to a second aspect of the present disclosure, a wafer cleaning system is provided, which may include a fixture 10 and a wafer-hanging basket mechanism of any of the above embodiments. The fixture 10 is slidably disposed on the inclined groove 110 of the basket mechanism, and the basket mechanism can be hung on a hook within the cleaning system. The cleaning system can have all the beneficial effects of the wafer-hanging basket mechanism described above, which will not be repeated here. The cleaning system may include a cleaning machine.

[0042] In one implementation, please refer to Figure 2 The fixture 10 can have multiple compartments for accommodating wafers. The number of slots can be three, four, five, or more; no specific limit is imposed here. Having multiple slots allows the cleaning system to clean multiple wafers simultaneously, increasing the cleaning speed.

[0043] The preferred embodiments of the present disclosure have been described in detail above with reference to the accompanying drawings. However, the present disclosure is not limited to the specific details of the above embodiments. Within the scope of the technical concept of the present disclosure, various simple modifications can be made to the technical solutions of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0044] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, this disclosure will not describe the various possible combinations separately.

[0045] Furthermore, various different embodiments of this disclosure can be combined in any way, as long as they do not violate the spirit of this disclosure, they should also be regarded as the content disclosed in this disclosure.

Claims

1. A basket mechanism for a wafer for hanging on a hook in a cleaning system, characterized in that, The hanging basket mechanism comprises a basket frame and a hook, the hook is installed on the top of the basket frame, the hook is used for hanging with the hook in the cleaning system, the basket frame is provided with an inclined chute which is inclined to the horizontal direction, the chute is configured to be in sliding connection with the outer wall of the tooling, and the tooling is used for containing the wafer.

2. The basket mechanism of claim 1, wherein, One of the inner wall of the basket frame and the outer wall of the tooling is provided with a stop portion, and the other is provided with a clamping groove, the stop portion can abut against the clamping groove in the sliding direction of the tooling.

3. The basket mechanism of claim 2, wherein, The number of the stop portions is two, and the stop portions are oppositely arranged on the outer wall of the tooling, the clamping grooves are arranged on the inner wall of the basket frame, and the number of the clamping grooves is two and corresponds to the two stop portions one by one.

4. The basket mechanism of claim 1, wherein, The outer wall of the tooling is provided with a protrusion, the protrusion is in sliding connection with the chute, the number of the chutes is two and is arranged on the opposite two inner walls of the basket frame, and the number of the protrusions is two and corresponds to the two chutes one by one.

5. The basket mechanism of claim 4, wherein, One end of the protrusion close to the inlet of the chute is configured as an inclined surface, the inclined surface is used for contacting the chute to guide the protrusion into the chute.

6. The basket mechanism of claim 4, wherein, The chute is configured as a U shape, the U-shaped openings of the two chutes are opposite, and the protrusion is clamped between the two side walls of the U shape to limit the up-down movement of the tooling.

7. The basket mechanism of claim 1, wherein, The included angle between the chute and the horizontal direction ranges from 5 degrees to 20 degrees.

8. The basket mechanism of claim 1, wherein, The basket frame is provided with a avoiding area, the avoiding area is located below the chute, and is configured to be recessed to the inside of the basket frame along the in-out direction of the tooling, so as to avoid the lateral space of the tooling.

9. A wafer cleaning system, comprising: The hanging basket mechanism for the wafer comprises a tooling and the hanging basket mechanism for the wafer, the tooling is in sliding connection with the chute of the hanging basket mechanism, and the hanging basket mechanism is hung on the hook in the cleaning system.

10. The cleaning system of claim 9, wherein, The tooling is provided with a plurality of insertion grooves, and the insertion grooves are used for containing the wafer.

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