Rotating cathode magnetic bar forming device

Abstract

The utility model discloses a rotating cathode magnetic bar forming device, and belongs to the field of magnetic bar production. The rotating cathode magnetic bar forming device comprises a workbench, wherein a first clamping plate capable of synchronously and reversely sliding is arranged at the upper end of the workbench and is used for centering and clamping a magnet yoke bottom plate; a limiting baffle is arranged on the workbench and is in contact with one side of the magnet yoke bottom plate for limiting; a supporting frame capable of sliding in the length direction of the magnet yoke bottom plate is arranged at the upper end of the workbench, a sliding block capable of being adjusted in a sliding mode is arranged at the upper end of the supporting frame, the sliding direction of the sliding block is perpendicular to the sliding direction of the supporting frame, an air cylinder is arranged at the lower end of the sliding block, and a clamping plate assembly is arranged at the lower end of a driving shaft of the air cylinder and used for positioning and clamping a permanent magnet. Therefore, the permanent magnets are installed at the designated positions of the upper end of the magnet yoke bottom plate and are bonded and fixed by glue which is coated in advance, and multi-column installation and arrangement of the permanent magnets can be achieved in cooperation with sliding of the upper supporting frame and sliding adjustment of the sliding blocks.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the magnetic rod production field, concretely relates to a rotating cathode magnetic rod forming device. BACKGROUND

[0002] Rotating cathode magnetic rod is mainly used in the field of vacuum coating, especially in the process of magnetron sputtering coating. It plays a key role in the coating process, optimizes the etching groove of the target material by controlling the magnetic field intensity distribution, improves the utilization rate of the target material, and thus reduces the coating cost.

[0003] The rotating cathode magnetic rod is usually provided with a magnetic yoke bottom plate, and the magnetic yoke bottom plate is arrayed with multiple columns of permanent magnets along the length direction (such as the utility model patent with the publication number CN 217459573U: a rotating cathode magnetic rod for magnetron sputtering and a magnetron with the same); the permanent magnets can be fixed by adhesive, and during the assembly and forming process of the rotating cathode magnetic rod, the permanent magnets need to be fixed and installed on the magnetic yoke bottom plate first, and then the magnetic yoke bottom plate with the permanent magnets is assembled with other components; however, there is a lack of a device for installing the permanent magnets on the magnetic yoke bottom plate in the prior art, and therefore the rotating cathode magnetic rod forming device is proposed. SUMMARY

[0004] In view of the deficiencies in the prior art, the purpose of the utility model is to provide a rotating cathode magnetic rod forming device to solve the problems in the prior art.

[0005] The purpose of the utility model can be achieved through the following technical solutions:

[0006] A rotating cathode magnetic rod forming device, comprising a workbench, a first clamping plate capable of synchronous reverse sliding is arranged on the upper end of the workbench to center and clamp the magnetic yoke bottom plate; and a limiting baffle is arranged on the workbench to contact and limit one side of the magnetic yoke bottom plate;

[0007] A support frame capable of sliding along the length direction of the magnetic yoke bottom plate is arranged on the upper end of the workbench, a sliding block capable of sliding adjustment is arranged on the upper end of the support frame, the sliding direction of the sliding block is perpendicular to the sliding direction of the support frame, a cylinder is arranged on the lower end of the sliding block, a clamping plate assembly is arranged on the lower end of the driving shaft of the cylinder to position and clamp the permanent magnet, so as to install the permanent magnet on the specified position on the upper end of the magnetic yoke bottom plate and fix it by adhesive, and the sliding of the support frame and the sliding adjustment of the sliding block can realize the installation and arrangement of multiple columns of permanent magnets.

[0008] Further, the clamping plate assembly comprises an installation plate fixed on the end of the driving shaft of the cylinder, a positioning groove is arranged on the lower end of the installation plate, and the permanent magnet is positioned in cooperation with the positioning groove; two second clamping plates capable of synchronous reverse sliding are arranged on the installation plate and can clamp the permanent magnet positioned in the positioning groove.

[0009] Further, the two second clamping plates are in sliding connection with the mounting plate, two second fixing plates are arranged on the mounting plate, a second screw rod capable of rotating is arranged between the two second fixing plates, opposite third external threads and fourth external threads with equal pitches are arranged at two ends of the second screw rod respectively, the third external threads and the fourth external threads pass through the two second clamping plates respectively and are in threaded connection with the two second clamping plates.

[0010] Further, the thread angles of the third external threads and the fourth external threads are all less than the equivalent friction angle.

[0011] Further, the two first clamping plates are in sliding connection with the workbench, two first fixing plates are fixed at a lower end of the workbench, a first screw rod capable of rotating is arranged between the two first fixing plates, opposite first external threads and second external threads with equal pitches are arranged at two ends of the first screw rod respectively, the first external threads and the second external threads pass through the two first clamping plates respectively and are in threaded connection with the two first clamping plates.

[0012] Further, the thread angles of the first external threads and the second external threads are all less than the equivalent friction angle.

[0013] Further, the slide block is in sliding connection with the support frame, two third fixing plates are arranged at an upper end of the support frame, a third screw rod capable of rotating is arranged between the two third fixing plates, the third screw rod passes through the slide block and is in threaded connection with the slide block.

[0014] Further, the thread angles of the third screw rod are all less than the equivalent friction angle.

[0015] Further, the support frame is in sliding connection with the workbench, two fourth fixing plates are arranged at an upper end of the workbench, a fourth screw rod capable of rotating is arranged between the two fourth fixing plates, the fourth screw rod passes through the support frame and is in threaded connection with the support frame.

[0016] Further, the thread angle of the fourth screw rod is less than the equivalent friction angle.

[0017] The beneficial effects of the utility model are as follows:

[0018] The magnetic yoke bottom plate is positioned and fixed through the centering and clamping assembly and the limiting baffle arranged on the workbench, the support frame capable of sliding along the length direction of the magnetic yoke bottom plate is arranged on the workbench, the slide block capable of sliding adjustment is arranged on the support frame, the sliding direction is perpendicular to the sliding direction of the support frame, the cylinder is arranged at the lower end of the slide block to drive the clamping plate assembly to lift, the clamping plate assembly can position and clamp the permanent magnet, the permanent magnet is installed at the specified position on the upper end of the magnetic yoke bottom plate and is fixed through the glue applied in advance, and the sliding of the support frame and the sliding adjustment of the slide block can realize the multi-row installation and arrangement of the permanent magnet. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced as follows. Obviously, for those skilled in the art, other drawings can also be obtained based on these drawings without any creative effort.

[0020] Figure 1 is a schematic diagram of the overall structure of the forming device of the present application;

[0021] Figure 2 is a schematic diagram of the workbench structure of the present application;

[0022] Figure 3 is a schematic diagram of the centering and clamping assembly structure of the present application;

[0023] Figure 4 is a schematic diagram of the clamping plate assembly structure of the present application;

[0024] Figure 5 is a schematic diagram of the mounting plate structure of the present application;

[0025] Figure 6 is a schematic diagram of the second lead screw structure of the present application. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without any creative effort fall within the scope of protection of the present application.

[0027] As shown in Figure 1 , a rotary cathode magnetic rod forming device comprises a workbench 1, and the upper end of the workbench 1 is provided with a centering and clamping assembly 2 for centering and clamping and fixing the magnetic yoke bottom plate.

[0028] As shown in Figure 3 , the centering and clamping assembly 2 comprises two first clamping plates 21 capable of synchronous reverse sliding, and the two first clamping plates 21 are capable of synchronously approaching to center and clamp the magnetic yoke bottom plate at the upper end of the workbench 1. Figure 2 As shown in Figure 2 , the upper end of the workbench 2 is provided with a limiting baffle 11, one end of the magnetic yoke bottom plate is tightly attached to the limiting baffle 11, and then the two first clamping plates 21 are controlled to synchronously approach, so as to realize the positioning and fixing of the magnetic yoke bottom plate, thereby ensuring the installation precision when the permanent magnet is installed subsequently.

[0029] In the embodiment, the two first clamping plates 21 are in sliding connection with the workbench 1, the lower end of the workbench 1 is fixed with two first fixed plates 22, the first fixed plates 22 are rotatably connected with a first lead screw 23 between the two first fixed plates 22, the first lead screw 23 is provided with a first external thread 231 and a second external thread 232 with opposite rotation directions and equal pitches at two ends thereof, the first external thread 231 and the second external thread 232 pass through the two first clamping plates 21 and are in threaded connection with the two first clamping plates 21, and the first lead screw 23 is driven to rotate by the motor arranged on one of the first fixed plates 22, so that the two first clamping plates 21 are synchronously and reversely slid, and the magnetic yoke bottom plate is centered and clamped.

[0030] The first lead screw 23 has self-locking property, i.e., the thread angles of the first external thread 231 and the second external thread 232 are smaller than the equivalent friction angle, so that the magnetic yoke bottom plate is stably clamped.

[0031] In other embodiments, two air cylinders can be arranged on the workbench 1 to synchronously and reversely drive the two first clamping plates 21.

[0032] The workbench 1 is provided with a support frame 3 capable of sliding along the length direction of the magnetic yoke bottom plate at the upper end of the workbench 1, the support frame 3 is provided with a sliding block 4 capable of sliding at the upper end of the support frame 3, the sliding direction of the sliding block 4 is perpendicular to the sliding direction of the support frame 3, the lower end of the sliding block 4 is fixed with an air cylinder 5, the lower end of the air cylinder 5 is provided with a clamping plate assembly 6 capable of positioning and clamping a permanent magnet (rectangular block), and the permanent magnet is installed at a specified position on the upper end of the magnetic yoke bottom plate under the driving of the air cylinder 5 (the upper end of the magnetic yoke bottom plate is coated with glue in advance to facilitate bonding of the permanent magnet and the magnetic yoke bottom plate); then the support frame 3 is controlled to slide, so that the permanent magnet is arranged in a row, and the sliding adjustment of the sliding block 4 can realize multi-row arrangement of the permanent magnet.

[0033] As shown in Figure 4 and Figure 5 , the clamping plate assembly 6 comprises a mounting plate 61 fixed at the driving shaft end of the air cylinder 5, the lower end of the mounting plate 61 is provided with a positioning groove 611 matched with the permanent magnet, and the mounting plate 61 is provided with two second clamping plates 62 capable of synchronously and reversely sliding, so that the permanent magnet positioned in the positioning groove 611 is clamped and fixed.

[0034] In the embodiment, the two second clamping plates 62 are in sliding connection with the mounting plate 61, the mounting plate 61 is provided with two second fixed plates 612, and the second fixed plates 612 are rotatably connected with a second lead screw 63 between the two second fixed plates 612, as shown in Figure 6As shown, the two ends of the second screw rod 63 are respectively provided with third external threads 631 and fourth external threads 632 which are opposite in rotation direction and equal in pitch, the third external threads 631 and the fourth external threads 632 are respectively threaded through the two second clamping plates 62 and are in threaded connection with the same, the second screw rod 63 is driven to rotate by arranging a motor on one of the second fixed plates 612, synchronous reverse sliding of the two second clamping plates 62 can be realized, and clamping and fixing of the permanent magnet is realized in turn.

[0035] In order to ensure stable clamping of the permanent magnet, the second screw rod 63 has self-locking property, that is, the thread angles of the third external threads 631 and the fourth external threads 632 are all less than the equivalent friction angle.

[0036] In other embodiments, the clamping of the permanent magnet can also be realized by arranging two air cylinders on the mounting plate 61 to drive the two second clamping plates 62 to synchronously slide reversely.

[0037] In the embodiment, the sliding block 4 is in sliding connection with the support frame 3, the upper end of the support frame 3 is provided with two third fixed plates 31, the third screw rod 7 is rotatably connected between the two third fixed plates 31, the third screw rod 7 is threaded through the sliding block 4 and is in threaded connection with the same, the third screw rod 7 is driven to rotate by arranging a motor on one of the third fixed plates 31, and adjustment of the sliding position of the sliding block 4 can be realized; and in order to ensure that the sliding block 4 remains stable after position adjustment, the third screw rod 7 needs to have self-locking property, that is, the thread angles of the third screw rod 7 are all less than the equivalent friction angle.

[0038] In other embodiments, the sliding block 4 can also be directly driven to slide by arranging linear driving components such as air cylinders and telescopic rods on the support frame 3.

[0039] In the embodiment, the support frame 3 is in sliding connection with the workbench 1, the upper end of the workbench 1 is provided with two fourth fixed plates 12, the fourth screw rod 8 is rotatably connected between the two fourth fixed plates 12, the fourth screw rod 8 is threaded through the support frame 3 and is in threaded connection with the same, the fourth screw rod 8 is driven to rotate by arranging a motor on one of the fourth fixed plates 12, and adjustment of the sliding position of the support frame 3 can be realized.

[0040] In order to ensure that the support frame 3 remains stable after position adjustment, the fourth screw rod 8 needs to have self-locking property, that is, the thread angle of the fourth screw rod 8 is less than the equivalent friction angle.

[0041] In other embodiments, the support frame 3 can also be directly driven to slide by arranging linear driving components such as air cylinders and telescopic rods on the workbench 1.

[0042] Working principle:

[0043] The magnetic yoke bottom plate is positioned and fixed by setting the centering and clamping assembly 2 and the limiting baffle 11 on the workbench 1, and the support frame 3 capable of sliding along the length direction of the magnetic yoke bottom plate is set on the workbench 1, the sliding block 4 capable of sliding adjustment is set on the support frame 3, the sliding direction is perpendicular to the sliding direction of the support frame 3, the air cylinder 5 is set on the lower end of the sliding block 4 to drive the clamping plate assembly 6 to lift, the clamping plate assembly 6 can position and clamp the permanent magnet, install the permanent magnet on the specified position on the upper end of the magnetic yoke bottom plate, and be bonded and fixed by the glue coated in advance, and the sliding of the support frame 3 and the sliding adjustment of the sliding block 4 can realize the multi-column installation and arrangement of the permanent magnet.

[0044] In the description of the present specification, the description referring to the terms "one embodiment", "an example", "a specific example" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are contained in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0045] The basic principles, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above embodiments, and the above embodiments and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application.

Claims

1. A rotating cathode magnetic rod shaping device comprising a worktable (1), characterized in that, The upper end of the workbench (1) is provided with first clamping plates (21) capable of synchronous reverse sliding to center and clamp the yoke bottom plate; and the workbench (1) is provided with a limiting baffle (11) in contact with one side of the yoke bottom plate for limiting. The upper end of the workbench (1) is provided with a support frame (3) capable of sliding along the length direction of the yoke bottom plate, the upper end of the support frame (3) is provided with a sliding block (4) capable of sliding adjustment, the sliding direction of the sliding block (4) is perpendicular to the sliding direction of the support frame (3), the lower end of the sliding block (4) is provided with a cylinder (5), the driving shaft of the cylinder (5) is provided with a clamping plate assembly (6) at the lower end for positioning and clamping the permanent magnet.

2. A magnetic rod forming device for a rotary cathode according to claim 1, wherein The clamping plate assembly (6) comprises a mounting plate (61) fixed at the end of the driving shaft of the cylinder (5), the lower end of the mounting plate (61) is provided with a positioning groove (611) for positioning the permanent magnet, two second clamping plates (62) capable of synchronous reverse sliding are arranged on the mounting plate (61) and can clamp the permanent magnet positioned in the positioning groove (611).

3. A magnetic rod forming device for a rotary cathode according to claim 2, wherein Both the second clamping plates (62) are in sliding connection with the mounting plate (61), two second fixed plates (612) are arranged on the mounting plate (61), a second screw rod (63) capable of rotating is arranged between the two second fixed plates (612), third external threads (631) and fourth external threads (632) with opposite rotation directions and equal pitches are arranged at both ends of the second screw rod (63), the third external threads (631) and the fourth external threads (632) respectively penetrate through the two second clamping plates (62) and are in threaded connection with the second clamping plates (62).

4. A magnetic rod forming device for a rotary cathode according to claim 3, wherein The thread angles of the third external threads (631) and the fourth external threads (632) are all less than the equivalent friction angle.

5. A magnetic rod forming device for a rotary cathode according to claim 1, wherein Both the first clamping plates (21) are in sliding connection with the workbench (1), two first fixed plates (22) are fixed at the lower end of the workbench (1), a first screw rod (23) capable of rotating is arranged between the two first fixed plates (22), first external threads (231) and second external threads (232) with opposite rotation directions and equal pitches are arranged at both ends of the first screw rod (23), the first external threads (231) and the second external threads (232) respectively penetrate through the two first clamping plates (21) and are in threaded connection with the first clamping plates (21).

6. A magnetic rod forming device for a rotary cathode as defined in claim 5, wherein The thread angles of the first external threads (231) and the second external threads (232) are all less than the equivalent friction angle.

7. A magnetic rod forming device for a rotary cathode as defined in claim 1, wherein The sliding block (4) is in sliding connection with the support frame (3), two third fixed plates (31) are arranged at the upper end of the support frame (3), a third screw rod (7) capable of rotating is arranged between the two third fixed plates (31), the third screw rod (7) penetrates through the sliding block (4) and is in threaded connection with the sliding block (4).

8. A magnetic rod shaping device for a rotary cathode according to claim 7, wherein The thread angles of the third screw rod (7) are all less than the equivalent friction angle.

9. The magnetic rod forming device of claim 1, wherein, The support frame (3) is in sliding connection with the workbench (1), two fourth fixed plates (12) are arranged at the upper end of the workbench (1), a fourth screw rod (8) capable of rotating is arranged between the two fourth fixed plates (12), the fourth screw rod (8) penetrates through the support frame (3) and is in threaded connection with the support frame (3).

10. A magnetic rod shaping device for a rotary cathode as defined in claim 9, wherein The thread angle of the fourth screw rod (8) is less than the equivalent friction angle.

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