Precision compensation structure

Abstract

The utility model discloses a precision compensation structure, relates to the position precision compensation technical field, the precision compensation structure comprises a reading assembly and a reference assembly, the reference assembly is provided with a first reference mark arranged along the X direction and a second reference mark arranged along the Y direction, the reading assembly is arranged facing the reference assembly, and the reading assembly is arranged facing the reference assembly. One of the reading assembly and the reference assembly is fixedly arranged on the bottom plate, the other one of the reading assembly and the reference assembly is fixedly arranged on the workbench and can move along with the workbench, and the reading assembly is electrically connected with the driving unit. According to the technical scheme, the problem that an existing precision compensation structure cannot compensate errors caused by the angle between the X axis and the Y axis can be solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to position precision compensation technical field, especially relate to a precision compensation structure. BACKGROUND

[0002] The motion module can drive the workbench to move along the X-axis and Y-axis directions, in order to detect the precision of the motion module, usually laser interferometer is used to compensate the precision of the motion module, and then the error is fed back to the motion module, and the motion module compensates the precision according to the error.

[0003] Because there is a certain precision error in the installation of the motion module, the X-axis and Y-axis cannot be completely perpendicular, and the existing laser interferometer compensates the precision of the X-axis direction or Y-axis direction separately, and cannot compensate the error caused by the angle between the X-axis and Y-axis. SUMMARY

[0004] The utility model discloses a precision compensation structure, which aims to solve the problem that the existing precision compensation structure cannot compensate the error caused by the angle between the X-axis and Y-axis.

[0005] To achieve the above object, the precision compensation structure provided by the utility model is applied to a motion module, which comprises a bottom plate, a driving unit and a workbench.

[0006] The precision compensation structure comprises a reading assembly and a reference assembly, the reference assembly is provided with a first reference mark arranged along the X-axis direction and a second reference mark arranged along the Y-axis direction, the reading assembly is arranged to face the reference assembly, one of the reading assembly and the reference assembly is fixed to the bottom plate, and the other is fixed to the workbench and can move with the workbench, and the reading assembly is electrically connected with the driving unit.

[0007] In an embodiment, the reference assembly comprises a two-dimensional grating ruler.

[0008] The reading assembly comprises a reading head or a microscope.

[0009] In an embodiment, the reference assembly comprises a calibration sheet.

[0010] The reading assembly comprises a camera.

[0011] In an embodiment, the precision compensation structure further comprises a first mounting frame, and the reading assembly is fixed to the base plate through the first mounting frame.

[0012] The reference assembly is fixed to the workbench, and the reading assembly is arranged above the reference assembly.

[0013] In an embodiment, the first mounting frame comprises a first mounting rod and a second mounting rod connected with each other, the first mounting rod is fixed to the base plate, the reading assembly is fixed to the second mounting rod, and the second mounting rod is movable along the Z direction on the first mounting rod.

[0014] In an embodiment, the reference assembly is fixed to the workbench by screw locking.

[0015] In an embodiment, the precision compensation structure further comprises a second mounting frame, and the reference assembly is fixed to the base plate through the second mounting frame.

[0016] The reading assembly is fixed to the workbench, and the reference assembly is arranged above the reading assembly.

[0017] In an embodiment, the second mounting frame comprises a mounting plate and a plurality of third mounting rods, the third mounting rods are fixed to the base plate, the mounting plate is connected with the plurality of third mounting rods and is movable along the Z direction on the plurality of third mounting rods, and the reference assembly is fixed to one end of the mounting plate facing the reading assembly.

[0018] In an embodiment, the reading assembly is fixed to the workbench by screw locking.

[0019] In an embodiment, the first driving assembly is configured as a linear motor module, a screw transmission module or a synchronous belt transmission module.

[0020] And / or, the second driving assembly is configured as a linear motor module, a screw transmission module or a synchronous belt transmission module.

[0021] The technical scheme of the utility model discloses a first reference mark and a second reference mark are arranged on the reference assembly, the first reference mark is arranged along the X direction, the second reference mark is arranged along the Y direction, when the workbench moves, the reference assembly can move relative to the reading assembly, or the reading assembly moves relative to the reference assembly, the reading assembly can obtain the two-dimensional coordinate of the actual movement of the reference assembly (workbench) according to the first reference mark and the second reference mark, the two-dimensional coordinate contains the error caused by the angle between the X axis and the Y axis, thereby solving the problem that the precision compensation structure cannot compensate the error caused by the angle between the X axis and the Y axis, and further solving the technical problems existing in the prior art. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained according to the structures shown in the drawings without creative labor.

[0023] Figure 1 The structural schematic diagram of the first embodiment of the precision compensation structure provided by the present application is shown.

[0024] Figure 2 The structural schematic diagram of the second embodiment of the precision compensation structure provided by the present application is shown.

[0025] BRIEF DESCRIPTION OF DRAWINGS

[0026] 100, motion module; 110, first driving assembly; 120, second driving assembly; 130, workbench; 140, bottom plate;

[0027] 200, precision compensation structure; 210, reading assembly; 220, reference assembly; 230, first mounting frame; 231, first mounting rod; 232, second mounting rod; 240, second mounting frame; 241, mounting plate; 242, third mounting rod; 243, fourth mounting rod.

[0028] The implementation, functional features and advantages of the present application will be further described with reference to the embodiments and the drawings. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0030] It should be noted that if the embodiments of the present application involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement condition, etc. between the components in a certain specific posture, and if the specific posture changes, the directional indications will also change accordingly.

[0031] In addition, if the description of "first", "second" and the like is involved in the embodiments of the utility model, the description of "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can be explicitly or implicitly included at least one of the features. In addition, if "and / or" or "and / or" appears throughout the text, it means that the three parallel schemes are included, for example, "A and / or B" includes A scheme, or B scheme, or A and B scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the utility model.

[0032] The motion module can drive the workbench to move along the X-axis and Y-axis directions, in order to detect the precision of the motion module, a laser interferometer is usually used to compensate the precision of the motion module, and then the error is fed back to the motion module, and the motion module compensates the precision according to the error.

[0033] Because there is a certain precision error in the installation of the motion module, the X-axis and Y-axis cannot be completely perpendicular, and the existing laser interferometer compensates the precision of the X-axis direction or Y-axis direction separately, and cannot compensate the error caused by the angle between the X-axis and Y-axis.

[0034] The utility model provides a kind of precision compensation structure 200, in the first embodiment, refer to Figure 1 , applied to motion module 100, the motion module 100 includes, bottom plate 140, drive unit, workbench 130, the drive unit includes first drive assembly 110, second drive assembly 120, the first drive assembly 110 is installed to the bottom plate 140, the second drive assembly 120 is installed to the first drive assembly 110, the workbench 130 is installed to the second drive assembly 120, the first drive assembly 110 can drive the second drive assembly 120 moves along X direction, the second drive assembly 120 can drive the workbench 130 moves along Y direction, wherein workbench 130 is used to place when material processing.

[0035] Further, refer to Figure 1The first driving assembly 110 is configured as a linear motor module or a screw transmission module or a synchronous belt transmission module. The linear motor module comprises a linear motor, a guide rail, a sliding block, a position feedback system, a control system, etc. The screw transmission module comprises a ball screw, a servo motor or a stepping motor, a guide rail, a sliding block, a coupling, a position feedback system, etc. The synchronous belt transmission module comprises a synchronous belt, a synchronous wheel, a guide rail, a sliding block, a motor, a tensioning device, a position feedback system, etc. It can be understood that the linear motor module, the screw transmission module and the synchronous belt transmission module are all linear motion modules 100. The first driving assembly 110 can drive the second driving assembly 120 to move in the X direction through any of the above structures. It can be understood that the workbench 130 is arranged on the second driving assembly 120. When the second driving assembly 120 moves in the X direction, the workbench 130 can also move in the X direction.

[0036] Further, referring to Figure 1 The second driving assembly 120 is configured as a linear motor module or a screw transmission module or a synchronous belt transmission module. The structures of the linear motor module, the screw transmission module and the synchronous belt transmission module are as described above. The second driving assembly 120 can select any of the structures to drive the workbench 130 to move in the Y direction. Thus, under the action of the first driving assembly 110 and the second driving assembly 120, the workbench 130 can move in the X direction and the Y direction. Specifically, the second driving assembly 120 is installed on the sliding block in the first driving assembly 110, and the workbench 130 is installed on the sliding block in the second driving assembly 120. The sliding block in the first driving assembly 110 can move in the X direction, and the sliding block in the second driving assembly 120 can move in the Y direction. However, the design is not limited thereto. In other embodiments, the linear motion module 100 can also adopt a pneumatic cylinder driving module or a hydraulic driving module, etc.

[0037] Further, referring to Figure 1The precision compensation structure 200 comprises a reading assembly 210 and a reference assembly 220, the reference assembly 220 is provided with a first reference mark arranged along the X direction and a second reference mark arranged along the Y direction, the reading assembly 210 is arranged to face the reference assembly 220, it is to be noted that the reading assembly 210 can acquire the first reference mark and the second reference mark in the reference assembly 220, one of the reading assembly 210 and the reference assembly 220 is fixed to the bottom plate 140, and the other is fixed to the workbench 130 and can move along with the workbench 130, the reading assembly 210 is electrically connected with the driving unit, it is to be noted that the bottom plate 140 is stationary relative to the workbench 130 during the working process of the motion module 100, that is, the bottom plate 140 is stationary when the driving unit drives the workbench 130 to move along the X and Y directions, at this time, one of the reading assembly 210 and the reference assembly 220 fixed to the bottom plate 140 is also stationary, and the other installed on the workbench 130 can move along with the movement of the workbench 130, since the reference assembly 220 is provided with the first reference mark and the second reference mark, at this time, the reference assembly 220 can move relative to the reading assembly 210 when the workbench 130 moves, or the reading assembly 210 moves relative to the reference assembly 220, the reading assembly 210 can obtain the two-dimensional coordinates of the actual movement of the reference assembly 220 (the workbench 130) according to the first reference mark and the second reference mark, the two-dimensional coordinates contain the error caused by the angle between the X axis and the Y axis, thereby solving the problem that the precision compensation structure 200 cannot compensate for the error caused by the angle between the X axis and the Y axis, and further solving the technical problems existing in the prior art.

[0038] Further, the above-mentioned precision compensation corresponding compensation method is as follows: the distance by which the workbench 130 is moved by the first driving assembly 110 and the second driving assembly 120 is an actual displacement value (two-dimensional coordinates of actual movement), at this time, the reading assembly 210 can acquire the actual displacement value through the reference assembly 220, the difference between the actual displacement value and a theoretical displacement value (two-dimensional coordinates of theoretical movement) is a compensation value, after the computer program is operated, the result is fed back and stored in the driver of the driving unit or the upper computer. Among them, this method is suitable for compensating the precision of a certain area of the driving unit, this area is usually a working area with precision requirements, before precision compensation, the driving unit is reset to the original point, after precision compensation, the position of the original point cannot be changed, if changed, precision compensation needs to be done again.

[0039] Further, with reference to Figure 1 , the reference assembly 220 comprises a two-dimensional grating ruler (with reference to Figure 1), it is to be noted that the two-dimensional grating ruler is provided with first reference marks arranged along the X direction and second reference marks arranged along the Y direction. Further, when the reference assembly 220 comprises a two-dimensional grating ruler, the reading assembly 210 comprises a reading head or a microscope, the reading head or the microscope is arranged facing the two-dimensional grating ruler, the reading head or the microscope can simultaneously acquire the first reference marks and the second reference marks on the two-dimensional grating ruler, thereby obtaining a two-dimensional coordinate value, i.e. an actual coordinate value, wherein the reading head or the microscope is electrically connected with the driving unit. Further, in some embodiments, in order to improve the detection accuracy, the two-dimensional grating ruler needs to be kept as parallel as possible with the bottom plate 140. Further, in some embodiments, if the reading assembly 210 adopts a microscope, the microscope is configured as a tool microscope or a measuring microscope at this time.

[0040] Further, with reference to Figure 1 , the accuracy compensation structure 200 further comprises a first mounting bracket 230, the reading assembly 210 is fixedly arranged on the bottom plate 140 through the first mounting bracket 230; the reference assembly 220 is fixedly arranged on the workbench 130, and the reading assembly 210 is arranged above the reference assembly 220. It can be understood that at this time, the driving unit can move the reference assembly 220 together with the workbench 130, and the reading assembly 210 is fixedly arranged on the bottom plate 140, and the reading assembly 210 is stationary relative to the reference assembly 220. Further, in some embodiments, when the reference assembly 220 comprises a two-dimensional grating ruler, the two-dimensional grating ruler is fixedly arranged on the workbench 130, and the reading head or the microscope is fixedly arranged on the bottom plate 140 through the first mounting bracket 230. When the reference assembly 220 comprises a calibration sheet, the calibration sheet is fixedly arranged on the workbench 130, and the camera is fixedly arranged on the bottom plate 140 through the first mounting bracket 230.

[0041] Further, with reference to Figure 1The first mounting frame 230 comprises a first mounting rod 231 and a second mounting rod 232 connected with each other, the first mounting rod 231 is fixedly arranged on the bottom plate 140, in some embodiments, the first mounting rod 231 can be fixedly arranged on the bottom plate 140 by screw locking, in some embodiments, the bottom of the first mounting rod 231 can be provided with a magnetic adsorption device, and the third mounting rod 242 can be fixedly arranged on the bottom plate 140 by the magnetic adsorption device (similar to a magnetic force lifting device); further, the reading assembly 210 is fixedly arranged on the second mounting rod 232, the second mounting rod 232 can move along the Z direction on the first mounting rod 231, it should be noted that when the second mounting plate 241 moves along the Z direction on the first mounting rod 231, at this time, the reading assembly 210 can also move along the Z direction, it can be understood that in this way, the distance between the reading assembly 210 and the reference assembly 220 can be conveniently adjusted, so that the reading assembly 210 can accurately acquire information on the reference assembly 220. Further, in some embodiments, the reading assembly 210 is detachably connected with the second mounting rod 232 through a clamp structure, the second mounting rod 232 is detachably connected with the first mounting rod 231 through the clamp structure, if the second mounting rod 232 needs to be lifted, the clamp structure is only loosened, and then the second mounting rod 232 can be manually adjusted to move along the Z direction on the first mounting rod 231. Similarly, if the reading assembly 210 needs to move along the second mounting rod 232, the clamp structure connected between the second mounting rod 232 and the reading assembly 210 can also be used to achieve the movement.

[0042] Further, with reference to Figure 1 The reference assembly 220 is fixedly arranged on the workbench 130 by screw locking, in this way, on the one hand, the reference assembly 220 can be more stable when moving with the workbench 130, and on the other hand, the reference assembly 220 can be conveniently detached from the workbench 130, it should be noted that when the reference assembly 220 comprises a two-dimensional grating ruler, the two-dimensional grating ruler is fixedly arranged on the workbench 130 by screw locking, when the reference assembly 220 comprises a calibration sheet, the calibration sheet is fixedly arranged on the workbench 130 by screw locking.

[0043] The utility model provides a kind of precision compensation structure 200, in second embodiment, with reference to Figure 2, applied to a motion module 100, the motion module 100 comprising a bottom plate 140, a driving unit, a workbench 130, the driving unit comprising a first driving assembly 110, a second driving assembly 120, the first driving assembly 110 being mounted on the bottom plate 140, the second driving assembly 120 being mounted on the first driving assembly 110, the workbench 130 being mounted on the second driving assembly 120, the first driving assembly 110 being capable of driving the second driving assembly 120 to move along an X direction, the second driving assembly 120 being capable of driving the workbench 130 to move along a Y direction, wherein the workbench 130 is used for placing materials for processing.

[0044] Further, referring to Figure 2 , the first driving assembly 110 is configured as a linear motor module or a screw transmission module or a synchronous belt transmission module. The linear motor module comprises a linear motor, a guide rail, a sliding block, a position feedback system, a control system, etc. The screw transmission module comprises a ball screw, a servo motor or a stepper motor, a guide rail, a sliding block, a shaft coupling, a position feedback system, etc. The synchronous belt transmission module comprises a synchronous belt, a synchronous pulley, a guide rail, a sliding block, a motor, a tensioning device, a position feedback system, etc. It can be understood that the above-mentioned linear motor module, screw transmission module and synchronous belt transmission module are all linear motion modules 100. At this time, the first driving assembly 110 can drive the second driving assembly 120 to move along the X direction through any of the above-mentioned structures. It can be understood that the workbench 130 is arranged on the second driving assembly 120, and when the second driving assembly 120 moves along the X direction, the workbench 130 can also move along the X direction.

[0045] Further, referring to Figure 2 , the second driving assembly 120 is configured as a linear motor module or a screw transmission module or a synchronous belt transmission module, wherein the structures of the linear motor module, the screw transmission module and the synchronous belt transmission module are as described above. At this time, the second driving assembly 120 can select any of the structures to drive the workbench 130 to move along the Y direction. In this way, under the action of the first driving assembly 110 and the second driving assembly 120, the workbench 130 can move along the X direction and the Y direction. Specifically, the sliding block in the first driving assembly 110 can move along the X direction, and the sliding block in the second driving assembly 120 can move along the Y direction. However, the design is not limited thereto, and in other embodiments, the linear motion module 100 can also adopt a pneumatic cylinder driving module or a hydraulic driving module, etc.

[0046] Further, referring to Figure 2The precision compensation structure 200 comprises a reading assembly 210 and a reference assembly 220, the reference assembly 220 is provided with a first reference mark arranged along the X direction and a second reference mark arranged along the Y direction, the reading assembly 210 is arranged to face the reference assembly 220, it is to be noted that the reading assembly 210 can acquire the first reference mark and the second reference mark in the reference assembly 220, one of the reading assembly 210 and the reference assembly 220 is fixed to the bottom plate 140, and the other is fixed to the workbench 130 and can move along with the workbench 130, the reading assembly 210 is electrically connected with the driving unit, it is to be noted that the bottom plate 140 is stationary relative to the workbench 130 during the working process of the motion module 100, that is, the bottom plate 140 is stationary when the driving unit drives the workbench 130 to move along the X and Y directions, at this time, one of the reading assembly 210 and the reference assembly 220 fixed to the bottom plate 140 is also stationary, and the other installed on the workbench 130 can move along with the movement of the workbench 130, since the reference assembly 220 is provided with the first reference mark and the second reference mark, at this time, the reference assembly 220 can move relative to the reading assembly 210 when the workbench 130 moves, or the reading assembly 210 moves relative to the reference assembly 220, the reading assembly 210 can obtain the two-dimensional coordinates of the actual movement of the reference assembly 220 (the workbench 130) according to the first reference mark and the second reference mark, the two-dimensional coordinates contain the error caused by the angle between the X axis and the Y axis, thereby solving the problem that the precision compensation structure 200 cannot compensate for the error caused by the angle between the X axis and the Y axis, and further solving the technical problems existing in the prior art.

[0047] Further, the above-mentioned precision compensation corresponding compensation method is as follows: the distance by which the workbench 130 is moved by the first driving assembly 110 and the second driving assembly 120 is an actual displacement value (two-dimensional coordinates of actual movement), at this time, the reading assembly 210 can acquire the actual displacement value through the reference assembly 220, the difference between the actual displacement value and a theoretical displacement value (two-dimensional coordinates of theoretical movement) is a compensation value, after the computer program is operated, the result is fed back and stored in the driver of the driving unit or the upper computer. Among them, this method is suitable for compensating the precision of a certain area of the driving unit, this area is usually a working area with precision requirements, before precision compensation, the driving unit is reset to the original point, after precision compensation, the position of the original point cannot be changed, if changed, precision compensation needs to be done again.

[0048] Further, the reference assembly 220 comprises a calibration sheet (reference Figure 2), at this time the first reference mark and the second reference mark can be arranged on the calibration sheet, wherein the first reference mark is arranged along the X direction and the second reference mark is arranged along the Y direction, further when the reference assembly 220 comprises the calibration sheet, the reading assembly 210 comprises a camera, wherein the camera can acquire any position pattern on the calibration sheet, wherein the pattern contains the first reference mark and the second reference mark, that is, each pattern corresponds to a pair of two-dimensional coordinate values, that is, actual coordinate values.

[0049] Further, with reference to Figure 2 , the precision compensation structure 200 further comprises a second mounting frame 240, the reference assembly 220 is fixedly arranged on the bottom plate 140 through the second mounting frame 240; the reading assembly 210 is fixedly arranged on the workbench 130, and the reference assembly 220 is arranged above the reading assembly 210. It can be understood that the reading assembly 210 can move with the workbench 130 when the workbench 130 moves, and the reference assembly 220 is fixedly arranged on the bottom plate 140 through the second mounting frame 240, and the reference assembly 220 is stationary relative to the reading assembly 210 at this time. Further, in some embodiments, when the reference assembly 220 comprises a two-dimensional grating ruler, at this time the two-dimensional grating ruler is fixedly arranged on the bottom plate 140 through the second mounting frame 240, and the reading head or the microscope is fixedly arranged on the workbench 130. When the reference assembly 220 comprises a calibration sheet, the calibration sheet is fixedly arranged on the bottom plate 140 through the second mounting frame 240, and the camera is fixedly arranged on the workbench 130.

[0050] Further, with reference to Figure 2The second mounting frame 240 comprises a mounting plate 241 and a plurality of third mounting rods 242, the third mounting rods 242 are fixed to the bottom plate 140, in some embodiments, the third mounting rods 242 can be fixed to the bottom plate 140 by screw locking, in some embodiments, the bottom of the third mounting rod 242 can be provided with a magnetic attraction device, and the third mounting rod 242 can be fixed to the bottom plate 140 by the magnetic attraction device (similar to a magnetic force); further, the mounting plate 241 is connected with the plurality of third mounting rods 242 and can move along the Z direction on the plurality of third mounting rods 242, the reference component 220 is fixed to one end of the mounting plate 241 facing the reading component 210, further, the third mounting rod 242 is configured as four and is distributed in a rectangular shape, the mounting plate 241 can move along the Z direction on the four third mounting rods 242, by adjusting the position of the mounting plate 241, the distance between the reading component 210 and the reference component 220 can be adjusted, so that the reading component 210 can accurately obtain the information on the reference component 220. Further, in some embodiments, the reference is mounted on the mounting plate 241 by pasting, that is, the calibration sheet or two-dimensional grating ruler is mounted on the mounting plate 241 by pasting, further, in some embodiments, the mounting plate 241 is provided with two fourth mounting rods 243, the fourth mounting rods 243 are connected with the two third mounting rods 242 respectively, and the fourth mounting rod 243 is connected with the third mounting rod 242 by a clamp structure, when it is needed to adjust the mounting plate 241, the clamp structure between the fourth mounting rod 243 and the third mounting rod 242 is only loosened, and the adjustment can be realized.

[0051] Further, with reference to Figure 2 The reading component 210 is fixed to the workbench 130 by screw locking, in this way, on the one hand, the reading component 210 can be more stable when the workbench 130 moves, and on the other hand, the reading component 210 and the workbench 130 can be conveniently disassembled and assembled. When the reading component 210 comprises a camera, the camera is fixed to the workbench 130 by screw locking. When the reading component 210 comprises a reading head or a microscope, the reading head or the microscope is fixed to the workbench 130 by screw locking. Further, in an embodiment, the reading component 210 is fixed to the workbench 130 by a third mounting frame, and the reading component 210 is mounted on the third mounting frame.

[0052] The above only describes exemplary embodiments of the present application, and does not limit the patent scope of the present application, any equivalent structural transformation made by referring to the content of the present application and the drawings, or direct / indirect application in other related technical fields is included in the patent protection scope of the present application.

Claims

1. A precision compensation structure, characterized by, The application is applied to a motion module, which comprises a bottom plate, a driving unit and a workbench. The driving unit comprises a first driving assembly and a second driving assembly. The first driving assembly is installed on the bottom plate, the second driving assembly is installed on the first driving assembly, and the workbench is installed on the second driving assembly. The first driving assembly can drive the second driving assembly to move in the X direction, and the second driving assembly can drive the workbench to move in the Y direction. The precision compensation structure comprises a reading assembly and a reference assembly. The reference assembly is provided with a first reference mark arranged in the X direction and a second reference mark arranged in the Y direction. The reading assembly is arranged to face the reference assembly. One of the reading assembly and the reference assembly is fixed to the bottom plate, and the other is fixed to the workbench and can move with the workbench. The reading assembly is electrically connected to the driving unit.

2. The precision compensation structure of claim 1, wherein, The reference assembly comprises a two-dimensional grating ruler. The reading assembly comprises a reading head or a microscope.

3. The precision compensation structure of claim 1, wherein, The reference assembly comprises a calibration sheet. The reading assembly comprises a camera.

4. The accuracy compensation structure of any one of claims 1 to 3, wherein, The precision compensation structure further comprises a first mounting bracket, and the reading assembly is fixed to the bottom plate through the first mounting bracket. The reference assembly is fixed to the workbench, and the reading assembly is arranged above the reference assembly.

5. The precision compensation structure of claim 4, wherein, The first mounting bracket comprises a first mounting rod and a second mounting rod connected to each other. The first mounting rod is fixed to the bottom plate, and the reading assembly is fixed to the second mounting rod. The second mounting rod can move in the Z direction on the first mounting rod.

6. The precision compensation structure of claim 5, wherein, The reference assembly is fixed to the workbench by screw locking.

7. The accuracy compensating structure of any one of claims 1 to 3, wherein, The precision compensation structure further comprises a second mounting bracket, and the reference assembly is fixed to the bottom plate through the second mounting bracket. The reading assembly is fixed to the workbench, and the reference assembly is arranged above the reading assembly.

8. The precision compensation structure of claim 7, wherein, The second mounting bracket comprises a mounting plate and a plurality of third mounting rods. The third mounting rods are fixed to the bottom plate. The mounting plate is connected to the plurality of third mounting rods and can move in the Z direction on the plurality of third mounting rods. The reference assembly is fixed to one end of the mounting plate facing the reading assembly.

9. The precision compensation structure of claim 8, wherein, The reading assembly is fixed to the workbench by screw locking.

10. The accuracy compensating structure of any one of claims 1 to 3, wherein, The first driving assembly is configured as a linear motor module, a screw transmission module or a synchronous belt transmission module. And / or, the second driving assembly is configured as a linear motor module, a screw transmission module or a synchronous belt transmission module.

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