Radio frequency shielding cover and vapor deposition equipment

Abstract

The utility model belongs to the technical field of semiconductor manufacturing, and discloses a radio frequency shielding cover and vapor deposition equipment. The radio frequency shielding cover covers an emission source of the plasma source system, the radio frequency shielding cover is formed by splicing and combining at least two shielding sub-pieces, and a mounting through hole is formed in the radio frequency shielding cover in a splicing mode and used for allowing a transmission pipe of the plasma source system to penetrate through; each shielding sub-part is detachably arranged on a substrate of the vapor deposition equipment, and every two adjacent shielding sub-parts are connected through a lock catch structure. Through the arrangement of the spliced radio frequency shielding cover, the transmission tube of the plasma source system can be installed in the installation through hole, and normal transmission of plasma is not affected. Each shielding sub-component is detachably connected with the substrate, so that the single shielding sub-component can be directly detached without detaching the plasma source system. And the shielding sub-members are in splicing contact and the connecting sheets are arranged at the splicing gaps, so that the gap size at the splicing position can be reduced, radio frequency is reflected for multiple times, and a relatively good radio frequency shielding effect is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially to a radio frequency shielding cover and a vapor deposition equipment. BACKGROUND

[0002] The plasma enhanced chemical vapor deposition equipment adopts a remote plasma source to clean the deposits in the chamber, in order to ensure the cleaning efficiency and prevent the plasma from attenuating, the remote plasma source is generally located at the upper part of the PECVD spraying system (Plasma Enhanced Chemical Vapor Deposition). When depositing a thin film, radio frequency radiation will overflow into the environment, causing interference to other device signals and threatening the health of the operator.

[0003] In the prior art, the plasma enhanced chemical vapor deposition equipment using the remote plasma source for cleaning adopts a monolithic radio frequency shielding cover, which can cover the emission source of the plasma source system in the vapor deposition equipment and reduce the overflow of radio frequency radiation; when disassembling and maintaining, the plasma source system needs to be dismounted first, and then the monolithic radio frequency shielding cover can be dismounted, which is inconvenient to operate, and the large volume of the monolithic radio frequency shielding cover leads to high processing cost. The remote plasma source adopts a split radio frequency shielding cover, which uses two or more shielding covers to wrap the upper cavity of the plasma enhanced chemical vapor deposition equipment, and the shielding covers are effectively connected. Due to the large sheet metal processing tolerance of the radio frequency shielding cover, the cover plate has a long slit, and when λ / 20>slit>λ / 100 (corresponding to 13.56 mhz, wavelength is 22.13 m), the radio frequency shielding cover has poor radio frequency shielding effect.

[0004] The existing monolithic radio frequency shielding cover needs to be dismounted after the plasma source system is dismounted, which is inconvenient to disassemble and maintain and has high processing cost, and the split radio frequency shielding cover has a long cover plate slit and poor radio frequency shielding effect. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a radio frequency shielding cover and a vapor deposition equipment, which solve the problem of poor radio frequency shielding effect of the existing split radio frequency shielding cover due to the long cover plate slit.

[0006] To achieve this purpose, the utility model adopts the following technical scheme:

[0007] The utility model provides a radio frequency shielding cover, which is used for covering the emission source of a plasma source system in a vapor deposition equipment, the radio frequency shielding cover comprises at least two shielding sub-pieces, all the shielding sub-pieces are spliced and combined into the radio frequency shielding cover, and a mounting through hole is spliced on the radio frequency shielding cover, the mounting through hole is used for penetrating a transmission pipe of the plasma source system.

[0008] Each shielding sub-piece is detachably arranged on a substrate of the vapor deposition equipment, and two adjacent shielding sub-pieces are connected through a locking structure.

[0009] A connecting piece is arranged at a gap between two adjacent shielding sub-pieces, one end of the connecting piece is connected to the shielding sub-piece, and the other end of the connecting piece is overlapped with another adjacent shielding sub-piece or the connecting piece connected to the other adjacent shielding sub-piece.

[0010] As an optional technical solution of the radio frequency shielding cover, the shielding sub-piece is provided with two first and second shielding sub-pieces, the first and second shielding sub-pieces are connected, one end of the connecting piece is connected to the first shielding sub-piece, and the other end of the connecting piece is overlapped with the second shielding sub-piece or the connecting piece connected to the second shielding sub-piece.

[0011] As an optional technical solution of the radio frequency shielding cover, the connecting piece is filled with a conductive rubber shielding strip at the overlapped gap.

[0012] As an optional technical solution of the radio frequency shielding cover, the locking structure includes a locking hook and a lock catch connected to the locking hook, and the locking hook and the lock catch are detachably arranged on two adjacent shielding sub-pieces.

[0013] As an optional technical solution of the radio frequency shielding cover, it further includes a shielding spring, the shielding spring is arranged on the inner side of the shielding sub-piece, and the shielding sub-piece can be in close contact with the substrate through the shielding spring.

[0014] As an optional technical solution of the radio frequency shielding cover, it further includes a limiting support, the limiting support is protruded on the inner top surface of the shielding sub-piece, and the limiting support is arranged on the substrate to support the shielding sub-piece.

[0015] As an optional technical solution of the radio frequency shielding cover, the limiting support and the shielding sub-piece are both provided with a through hole for a fastener, and the shielding sub-piece is connected to the substrate through the fastener.

[0016] As an optional technical solution of the radio frequency shielding cover, it further includes a first shielding gasket, the first shielding gasket is arranged on the shielding sub-piece, and the first shielding gasket is located on the periphery of the mounting through hole to closely contact with the transmission pipe.

[0017] As an optional technical solution of the radio frequency shielding cover, the shielding sub-piece is made of aluminum material, copper material, or beryllium copper alloy material.

[0018] The utility model provides a kind of vapor deposition equipment, including above-mentioned radio frequency shielding cover.

[0019] Beneficial effects:

[0020] The utility model provides a kind of radio frequency shielding cover, which is used for covering the emission source of the plasma source system in the vapor deposition equipment. The radio frequency shielding cover includes at least two shielding sub-components. All the shielding sub-components are spliced and combined into the radio frequency shielding cover. An installation through-hole is spliced on the radio frequency shielding cover. The installation through-hole is used for the transmission pipe of the plasma source system to pass through. Each shielding sub-component can be detachably arranged on the substrate of the vapor deposition equipment. The adjacent two shielding sub-components are connected through a lock catch structure. By splicing and combining the at least two shielding sub-components into the radio frequency shielding cover, the volume of each shielding sub-component is small, which helps to reduce the processing cost. The shielding sub-components are spliced into the installation through-hole. The transmission pipe of the plasma source system can be installed in the installation through-hole without affecting the normal transmission of the plasma. Each shielding sub-component is detachably connected with the substrate. The adjacent two shielding sub-components are connected through the lock catch structure. Therefore, each shielding sub-component can be directly detached without the need to detach the plasma source system, which is simple to disassemble and maintain.

[0021] The utility model provides a kind of vapor deposition equipment, which includes the radio frequency shielding cover described above. By setting the radio frequency shielding cover spliced by the shielding sub-components, each shielding sub-component can be independently detached, which effectively improves the maintenance efficiency and saves the maintenance cost. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is the structural schematic diagram of the radio frequency shielding cover from the first perspective according to the utility model embodiment;

[0023] Figure 2 is the first split diagram of the radio frequency shielding cover according to the utility model embodiment;

[0024] Figure 3 is the structural schematic diagram of the radio frequency shielding cover from the second perspective according to the utility model embodiment;

[0025] Figure 4 is the second split diagram of the radio frequency shielding cover according to the utility model embodiment;

[0026] Figure 5 is the partial structural schematic diagram of the vapor deposition equipment according to the utility model embodiment.

[0027] In the drawings:

[0028] 10, radio frequency shielding cover;

[0029] 11, shielding sub-piece; 11a, first shielding sub-piece; 11b, second shielding sub-piece; 111, notch;

[0030] 12, lock catch structure; 121, lock catch hook; 122, lock catch;

[0031] 13, connecting piece; 14, shielding spring piece; 15, limiting support piece; 16, first shielding gasket; 17, support plate;

[0032] A, base plate. DETAILED DESCRIPTION

[0033] The utility model will be described in further detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model and are not limited to the utility model. In addition, it should be noted that only the parts related to the utility model are shown in the drawings for ease of description, not all the structures.

[0034] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0035] In the utility model, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature can include that the first and second features are in direct contact, or it can include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the "upper", "upper" and "upper" of the first feature to the second feature include that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "below", "below" and "below" of the first feature to the second feature include that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0036] In the description of the embodiment, the terms "upper", "lower", "left", "right" and other orientation or position relationship are based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation of the utility model. In addition, the terms "first", "second" are only used to distinguish in description and have no special meaning.

[0037] AsFigures 1 to 5 As shown, the embodiment provides a radio frequency shielding cover 10 and a vapor deposition device, the vapor deposition device comprising the radio frequency shielding cover 10 for covering an emission source of a plasma source system in the vapor deposition device, the radio frequency shielding cover 10 comprising at least two shielding sub-pieces 11, all the shielding sub-pieces 11 being combined into the radio frequency shielding cover 10, and a mounting through hole being combined on the radio frequency shielding cover 10 for a transmission pipe of the plasma source system to pass through; each shielding sub-piece 11 is detachably arranged on a substrate of the vapor deposition device, and two adjacent shielding sub-pieces 11 are connected through a lock catch structure 12; a connecting piece 13 is arranged at a joint gap between two adjacent shielding sub-pieces 11, one end of the connecting piece 13 is connected to a shielding sub-piece 11, and the other end of the connecting piece 13 is overlapped with another adjacent shielding sub-piece 11 or a connecting piece 13 connected to the other adjacent shielding sub-piece 11.

[0038] At least two shielding sub-pieces 11 are combined into the radio frequency shielding cover 10, the volume of a single shielding sub-piece 11 is small, which helps to reduce the processing cost; the shielding sub-pieces 11 are combined into the mounting through hole, the transmission pipe of the plasma source system can pass through and be mounted in the mounting through hole, which does not affect the normal transmission of the plasma; each shielding sub-piece 11 is detachably connected to the substrate, and two adjacent shielding sub-pieces 11 are connected through the lock catch structure 12, so that a single shielding sub-piece 11 can be directly detached without detaching the plasma source system, which is simple to disassemble and maintain, effectively improves the maintenance efficiency and saves the maintenance cost. The shielding sub-pieces 11 are combined and contacted, and the connecting piece 13 is arranged at the joint gap, which can reduce the gap size at the overlapping part, the radio frequency can be reflected multiple times, and the radio frequency shielding effect is good.

[0039] Specifically, the plasma source system comprises a system body, an emission source, and a transmission pipe arranged between the system body and the emission source, the system body is used for remotely generating plasma, the emission source is used for generating radio frequency, and the transmission pipe is used for transmitting plasma to the emission source. The specific structure and working principle of the plasma source system can refer to the prior art, which will not be described here.

[0040] In the embodiment, taking the substrate A as an example, the vapor deposition device comprises the substrate A, the emission source is arranged on the substrate A, and the radio frequency shielding cover 10 is also arranged on the substrate A; the substrate A, the radio frequency shielding cover 10, and the emission source jointly enclose a cavity, the emission source can generate a radio frequency electric field, the radio frequency shielding cover 10 covers the emission source to absorb the energy of the reflected radio frequency electric field and prevent the radio frequency from overflowing. The connecting piece 13 is arranged at the joint gap of the shielding sub-pieces 11, the connecting piece 13 can block the joint gap, and the radio frequency leakage at the joint gap of the two adjacent shielding sub-pieces 11 is avoided.

[0041] In the embodiment, two shielding sub-members 11 are provided, the two shielding sub-members 11 are respectively a first shielding sub-member 11a and a second shielding sub-member 11b, the first shielding sub-member 11a is butted with the second shielding sub-member 11b, one end of the connecting piece 13 is connected to the first shielding sub-member 11a, the other end of the connecting piece 13 is connected to the second shielding sub-member 11b or the connecting piece 13 connected to the second shielding sub-member 11b. The connecting piece 13 is fixed at one end and overlapped at the other end, when the first shielding sub-member 11a and the second shielding sub-member 11b are butted, the connecting piece 13 connected to the first shielding sub-member 11a is overlapped on the second shielding sub-member 11b or the other connecting piece 13 connected to the second shielding sub-member 11b, which is convenient to disassemble and assemble.

[0042] In the embodiment, a connecting piece 13 is arranged at the joint between the two adjacent shielding sub-members 11, one end of the connecting piece 13 is welded to the inner side of the first shielding sub-member 11a, and the other end is overlapped on the second shielding sub-member 11b. It can be understood that two connecting pieces 13 can also be arranged at the joint between the two adjacent shielding sub-members 11, one connecting piece 13 is welded to the inner side of the first shielding sub-member 11a, and the other connecting piece 13 is welded to the inner side of the second shielding sub-member 11, and the two connecting pieces 13 are overlapped together; more than two shielding sub-members 11 can also be arranged to form the radio frequency shielding cover 10, for example, three shielding sub-members 11 or four shielding sub-members 11.

[0043] Optionally, the shielding sub-member 11 is made of aluminum material, or copper material, or beryllium copper alloy material. By using aluminum material, or copper material, or beryllium copper alloy material, the shielding sub-member 11 can have higher electrical conductivity.

[0044] Optionally, the connecting piece 13 is overlapped at the gap, and the gap is filled with a conductive rubber shielding strip. By arranging the conductive rubber shielding strip at the gap overlapped by the connecting piece 13, the size of the gap at the overlapped part of the connecting piece 13 can be reduced, and the radio frequency shielding effect can be further improved.

[0045] Optionally, the locking structure 12 includes a locking hook 121 and a locking buckle 122, the locking hook 121 and the locking buckle 122 are respectively detachably arranged on the two adjacent shielding sub-members 11, and the locking hook 121 is clamped with the locking buckle 122. In the embodiment, the locking buckle 122 is detachably arranged on the first shielding sub-member 11a, and the locking hook 121 is detachably arranged on the second shielding sub-member 11b; the locking hook 121 and the locking buckle 122 are both fixed by bolts.

[0046] When a larger gap is generated at the joint of the first shielding sub-piece 11a and the second shielding sub-piece 11b, the locking buckle 122 gives the second shielding sub-piece 11b a back-pulling counterforce, avoiding the generation of a larger gap, ensuring that the first shielding sub-piece 11a and the second shielding sub-piece 11b can be tightly butted and fixed firmly, and the locking buckle structure 12 can be quickly disassembled, facilitating maintenance and cleaning.

[0047] Further, the radio frequency shielding cover 10 further comprises shielding spring sheets 14, which are arranged on the inner side of the shielding sub-piece 11, and the shielding sub-piece 11 can be in close contact with the substrate A through the shielding spring sheets 14. By arranging the shielding spring sheets 14 between the shielding sub-piece 11 and the substrate A, the shielding spring sheets 14 have excellent electrical conductivity and elasticity, and the elasticity of the shielding spring sheets 14 can adapt to a certain displacement and vibration, so as to eliminate the installation error and processing error of the radio frequency shielding cover 10, and ensure that the radio frequency shielding cover 10 can be in close contact with the substrate A, thereby realizing radio frequency shielding.

[0048] Optionally, the shielding sub-piece 11 is provided with a detachable support plate 17, one side of the shielding spring sheet 14 is connected to the support plate 17, and the other side of the shielding spring sheet 14 is used to abut against the substrate A. In this embodiment, the support plate 17 has an L-shaped cross section, and the support plate 17 can be fixed to the inner side of the shielding sub-piece 11 by bolts or clamping; the inner side of the bottom of the first shielding sub-piece 11a and the second shielding sub-piece 11b is provided with the shielding spring sheet 14; the shielding spring sheet 14 is made of beryllium copper material, and the shielding spring sheet 14 is adhered to the support plate 17 by conductive adhesive; by arranging the shielding spring sheet 14, the bottom of the radio frequency shielding cover 10 can be in close contact with the substrate A.

[0049] Further, the radio frequency shielding cover 10 further comprises a first shielding gasket 16, which is arranged on the shielding sub-piece 11 and located at the periphery of the mounting through hole for closely abutting against the transmission pipe. By arranging the first shielding gasket 16 at the periphery of the mounting through hole of the radio frequency shielding cover 10, the first shielding gasket 16 can fill the gap between the radio frequency shielding cover 10 and the transmission pipe, thereby avoiding radio frequency leakage.

[0050] In this embodiment, the first shielding gasket 16 is made of conductive rubber with a temperature resistance of 160℃; the first shielding gasket 16 is adhered to the mounting through hole of the radio frequency shielding cover 10 by conductive adhesive, and the first shielding gasket 16 has excellent electrical conductivity and a certain elasticity, and can fill the gap between the transmission pipe and the mounting through hole.

[0051] In the embodiment, the radio frequency shielding cover 10 also has a notch 111 for the gas supply pipeline of the plasma source system to pass through, and a second shielding gasket is arranged at the notch 111, which is also made of temperature-resistant conductive rubber and is attached to the notch 111 by conductive adhesive.

[0052] Optionally, the radio frequency shielding cover 10 also includes a limiting support 15 protruding from the inner top surface of the shielding sub-piece 11, which is arranged on the base plate A to support the shielding sub-piece 11.

[0053] In the embodiment, the emission source of the plasma source system is arranged on the base plate A, and an insulating plate is arranged on the top of the emission source. The radio frequency shielding cover 10 can cover the emission source and the insulating plate, and the insulating plate is arranged in parallel and spaced apart from the base plate A. When the shielding sub-piece 11 is placed on the base plate A, the limiting support 15 is located between the surface of the insulating plate and the inner top surface of the shielding sub-piece 11, and the shielding sub-piece 11 is supported on the insulating plate by the limiting support 15. At this time, the bottom of the shielding sub-piece 11 can be in close contact with the base plate A through the shielding spring sheet 14.

[0054] By protruding the limiting support 15 from the inner top surface of the shielding sub-piece 11, the supporting effect is achieved, which can effectively prevent the permanent deformation of the shielding spring sheet 14 and the first shielding gasket 16 caused by excessive compression due to excessive force of the installer.

[0055] In the embodiment, the inner top surface of the first shielding sub-piece 11a and the second shielding sub-piece 11b is provided with a limiting support 15; and the limiting support 15 can be one or more.

[0056] Optionally, the limiting support 15 and the shielding sub-piece 11 are both provided with a through hole for the fastener to pass through, and the shielding sub-piece 11 is connected to the base plate A by the fastener. By arranging the fastener, each shielding sub-piece 11 can be individually detached; and by arranging the fastener to pass through the limiting support 15, the reinforcing effect is achieved to prevent the radio frequency shielding cover 10 from being severely deformed during installation.

[0057] In the embodiment, the fastener is a bolt; the fastener is arranged in the vertical direction, one end of the fastener abuts against the shielding sub-piece 11, the other end passes through the shielding sub-piece 11 and the limiting support 15, and is threadedly connected with the insulating plate; by detachably fixing the shielding sub-piece 11 on the insulating plate, the bottom of the shielding sub-piece 11 can be in close contact with the base plate A through the shielding spring sheet 14; when it is necessary to detach, the fastener is loosened to detach the shielding sub-piece 11 from the base plate A and the insulating plate.

[0058] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, various obvious changes, re-adjustments and replacements can be made without departing from the protection scope of the present application. Here, it is not necessary and also impossible to enumerate all the implementation modes. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application claim.

Claims

1. An RF shielding cover, characterized in that, The radio frequency shielding cover is used to cover the emission source of the plasma source system in the vapor deposition equipment. The radio frequency shielding cover includes at least two shielding sub-components (11). All the shielding sub-components (11) are spliced ​​together to form the radio frequency shielding cover, and are spliced ​​together to form a mounting through hole on the radio frequency shielding cover. The mounting through hole is used for the transmission tube of the plasma source system to pass through. Each of the shielding sub-components (11) can be detachably mounted on the substrate of the vapor deposition equipment, and two adjacent shielding sub-components (11) are connected by a locking structure (12); A connecting piece (13) is disposed at the gap where two adjacent shielding sub-components (11) are spliced. One end of the connecting piece (13) is connected to the shielding sub-component (11), and the other end of the connecting piece (13) overlaps with another adjacent shielding sub-component (11) or overlaps with a connecting piece (13) connected to another adjacent shielding sub-component (11).

2. The radio frequency shielding cover according to claim 1, characterized in that, The shielding sub-component (11) is provided in two parts, namely a first shielding sub-component (11a) and a second shielding sub-component (11b). The first shielding sub-component (11a) is connected to the second shielding sub-component (11b). One end of the connecting piece (13) is connected to the first shielding sub-component (11a), and the other end of the connecting piece (13) overlaps the second shielding sub-component (11b) or overlaps the connecting piece (13) connected to the second shielding sub-component (11b).

3. The radio frequency shielding cover according to claim 2, characterized in that, The slits where the connecting pieces (13) overlap are filled with conductive rubber shielding strips.

4. The radio frequency shielding cover according to claim 1, characterized in that, The locking structure (12) includes a locking hook (121) and a locking buckle (122) that engages with the locking hook (121). The locking hook (121) and the locking buckle (122) are respectively detachably mounted on two adjacent shielding sub-components (11).

5. The radio frequency shielding cover according to claim 1, characterized in that, It also includes a shielding spring (14), which is disposed on the inner side of the shielding sub-component (11), and the shielding sub-component (11) can be in close contact with the substrate through the shielding spring (14).

6. The radio frequency shielding cover according to claim 1, characterized in that, It also includes a limiting support member (15), which protrudes from the inner top surface of the shielding sub-component (11) and is used to be disposed on the substrate to support the shielding sub-component (11).

7. The radio frequency shielding cover according to claim 6, characterized in that, Both the limiting support (15) and the shielding sub-component (11) are provided with through holes for fasteners to pass through, and the shielding sub-component (11) is connected to the substrate through the fasteners.

8. The radio frequency shielding cover according to claim 1, characterized in that, It also includes a first shielding gasket (16), which is disposed on the shielding sub-component (11) and is located on the periphery of the mounting through hole for close contact with the transmission pipe.

9. The radio frequency shielding cover according to any one of claims 1-8, characterized in that, The shielding component (11) is made of aluminum, copper, or beryllium copper alloy.

10. A vapor deposition apparatus, characterized in that, Includes the radio frequency shielding cover as described in any one of claims 1-9.

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