Fixing jig for holding ring mucilage glue

Abstract

The utility model discloses a fixing jig for retaining ring mucilage glue, which comprises a fixing base plate and a gluing mechanism, a plurality of limiting pins are uniformly and fixedly arranged on the surface of the upper end of the fixing base plate, a first workpiece is arranged on the surface of the upper end of the fixing base plate outside the limiting pins, and a second workpiece is arranged at the upper end of the first workpiece. An adhesion layer is arranged between the first workpiece and the second workpiece, the multiple fixing base plates are stacked together, weight pressing blocks are arranged at the upper ends of the fixing base plates, the gluing mechanism comprises a gluing scraping plate and grooves, the grooves are formed in the two sides of the surface of the lower end of the gluing scraping plate, and the fixing base plates are arranged in the grooves. And a through hole is formed in the middle of the surface of the gluing scraper. The fixing device is good in use effect, can conveniently fix a workpiece, and meanwhile can conveniently brush glue, so that the adhesion production efficiency and the production quality of the retaining ring can be greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of fixing fixture technology, specifically a fixing fixture for retaining ring adhesive. Background Technology

[0002] With the large-scale development of the IC equipment industry, the requirements for its components, both in terms of quantity and quality, are becoming increasingly stringent. Chemical mechanical polishing (CMP) equipment, used for the initial polishing of wafers, has a huge annual demand. The core component of this product is the retaining ring. The retaining ring is a critical component of wafer CMP equipment, and its consumption is enormous. Optimizing the production cycle and quality of retaining rings is therefore a top priority. The retaining ring consists of two parts: a plastic part on one side and a metal part on the other, which are bonded together using adhesive.

[0003] There are several difficulties in the existing adhesive process: (1) it is troublesome to fix the workpiece and the fixture, and the connection is inconvenient; (2) it is troublesome to apply adhesive to the workpiece, and it is difficult to apply the adhesive evenly. Therefore, an improved retaining ring adhesive fixing fixture is needed to address this problem. Utility Model Content

[0004] The purpose of this invention is to provide a fixing fixture for retaining adhesive rings, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a fixing fixture for retaining adhesive rings, comprising a fixing base and an adhesive application mechanism. A plurality of limiting pins are uniformly fixed on the upper surface of the fixing base. A first workpiece is disposed on the outer side of the limiting pins on the upper surface of the fixing base. A second workpiece is disposed on the upper end of the first workpiece. An adhesive layer is disposed between the first workpiece and the second workpiece. Multiple fixing bases are disposed and stacked together. A weight block is disposed on the upper end of the fixing base. The adhesive application mechanism includes an adhesive scraper and grooves. Grooves are formed on both sides of the lower surface of the adhesive scraper, and a through hole is formed in the center of the surface of the adhesive scraper.

[0006] Preferably, a central shaft is fixedly installed in the middle of the upper surface of the fixed chassis. The central shaft can be used to install a glue applicator. The glue applicator is fitted onto the central shaft through the through hole in the middle of its surface. This causes the groove to engage with the surface of the first workpiece. Then, glue is dripped onto the surface of the first workpiece. By simply rotating the glue applicator, the glue can be quickly and evenly applied, thereby improving the glue application efficiency of the device.

[0007] Preferably, a first handle is fixedly provided on both sides of the upper surface of the glue-applying scraper, so that the glue-applying scraper can be easily rotated through the first handle.

[0008] Preferably, a second handle is provided on the outer surface of the upper end of the weight block. The weight block can be easily lifted or placed on the uppermost fixed base surface through the second handle, so as to give all the fixed bases a heavy downward pressure, thereby ensuring the bonding stability between the first workpiece and the second workpiece. It should be noted that a connecting pin can also be provided on the lower surface of the fixed base of this device, which can be inserted into the connecting hole of the fixed base to ensure the installation stability of the fixed base.

[0009] Preferably, the upper surface of the fixed chassis has connecting grooves on both sides of the central axis, and the lower end of the fixed chassis is fixedly provided with connecting pins. The connecting pins of adjacent fixed chassis can be inserted into the connecting grooves of the lower fixed chassis, so that the adjacent fixed chassis stacked together can be stably connected together; while the bottom fixed chassis is not provided with connecting pins; the bottom fixed chassis needs to be fixedly connected to the workbench or the operating platform of the inspection retaining ring.

[0010] Preferably, a central groove is provided in the middle of the lower end of the fixed chassis, so that the central axis of the adjacent fixed chassis can be inserted into the upper fixed chassis, thus preventing interference when the adjacent fixed chassis are installed together.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] This utility model has the following advantages: 1. It can improve the efficiency of glue application, the workpiece and fixture are easy to fix and the workpiece is relatively stable during curing, and the workpiece will not occupy the fixed base, making it easy to disassemble; 2. The glue application uses a scraper fixture, the glue is evenly covered and the operation is convenient; 3. The fixed base and workpiece are fixed to ensure the flatness and parallelism requirements when the workpiece is bonded; 4. The fixtures can be stacked during the curing stage and connected by pin holes to ensure load-bearing capacity, improve curing effect, and save operating space. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of a retaining ring adhesive fixing fixture according to the present invention;

[0014] Figure 2 This is a schematic diagram of the adhesive application state of a retaining ring fixing fixture according to the present invention;

[0015] Figure 3 This is a stacked view of a retaining ring adhesive fixing fixture according to the present invention;

[0016] Figure 4 This is a separate view of the adhesive scraper in a retaining ring adhesive fixing fixture of the present invention;

[0017] Figure 5This is an installation view of adjacent fixing bases in a retaining ring adhesive fixing fixture of the present invention;

[0018] Figure 6 This utility model relates to a fixing fixture for retaining ring adhesive. Figure 5 A bottom view.

[0019] In the diagram: 1. Fixed base; 2. Limiting pin; 3. First workpiece; 4. Second workpiece; 5. Adhesive layer; 6. Weight block; 7. Glue scraper; 8. Groove; 9. Through hole; 10. Central shaft; 11. First handle; 12. Second handle; 13. Connecting groove; 14. Connecting pin; 15. Central groove. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see Figure 1-6 This utility model provides a technical solution: a fixing fixture for retaining adhesive rings, including a fixing base 1 and an adhesive application mechanism. A plurality of limiting pins 2 are uniformly fixed on the upper surface of the fixing base 1. A first workpiece 3 is provided on the upper surface of the fixing base 1 outside the limiting pins 2. A second workpiece 4 is provided on the upper end of the first workpiece 3. An adhesive layer 5 is provided between the first workpiece 3 and the second workpiece 4. Multiple fixing bases 1 are provided and stacked together. A weight block 6 is provided on the upper end of the fixing base 1. The adhesive application mechanism includes an adhesive scraper 7 and grooves 8. Grooves 8 are provided on both sides of the lower surface of the adhesive scraper 7. A through hole 9 is provided in the middle of the surface of the adhesive scraper 7.

[0022] A central shaft 10 is fixedly installed in the middle of the upper surface of the fixed base 1. The central shaft 10 can be used to install the glue scraper 7. The glue scraper 7 is fitted onto the central shaft 10 through the through hole 9 in the middle of its surface. At this time, the groove 8 will be inserted into the surface of the first workpiece 3. Then, glue is dripped onto the surface of the first workpiece 3. In this way, the glue can be quickly and evenly applied by simply rotating the glue scraper 7, thereby improving the glue application efficiency of this device.

[0023] The glue-applying scraper 7 is fixedly provided with a first handle 11 on both sides of its upper surface, and the glue-applying scraper 7 can be easily rotated through the first handle 11.

[0024] The outer surface of the upper end of the weight block 6 is provided with a second handle 12. The weight block 6 can be easily lifted or placed on the surface of the uppermost fixed base plate 1 through the second handle 12. This can give all the fixed base plates 1 a heavy downward pressure, thereby ensuring the bonding stability between the first workpiece 3 and the second workpiece 4. It should be noted that the lower end surface of the fixed base plate 1 of this device can also be provided with a connecting pin 14, which can be inserted into the connecting hole of the fixed base plate 1 to ensure the installation stability of the fixed base plate 1.

[0025] The upper surface of the fixed base 1 has connecting grooves 13 on both sides of the central shaft 10. The lower end of the fixed base 1 is fixedly provided with connecting pins 14. The connecting pins 14 of adjacent fixed bases 1 can be inserted into the connecting grooves 13 of the lower fixed base 1, so that the adjacent fixed bases 1 stacked together can be stably connected together. The bottom fixed base 1 is not provided with connecting pins 14. The bottom fixed base 1 needs to be fixedly connected to the workbench or the operating platform of the inspection retaining ring.

[0026] A central groove 15 is provided in the middle of the lower end of the fixed chassis 1. The central groove 15 allows the central shaft 10 of the adjacent fixed chassis 1 to be inserted into the upper fixed chassis 1, which can prevent interference when the adjacent fixed chassis 1 are installed together.

[0027] Working principle: When using this device, combine it with the attached... Figure 1-6 The markings provide a detailed description of this utility model;

[0028] First, connect the bottom fixed base 1 to the operating platform or workbench, and ensure that the connection is secure;

[0029] The second step is to movably mount the first workpiece 3 to be coated with glue onto the surface of the limiting pin 2, and install it together with the fixed base plate 1 through the limiting pin 2. The first workpiece 3 is automatically and stably fixed and can be ensured to be concentric with the fixed base plate 1.

[0030] The third step is to apply glue to the surface of the first workpiece 3, then connect the glue application scraper 7 to the central shaft 10 of the fixed base 1, and then push the first handle 11 to make the glue application scraper 7 rotate, so that the glue can be applied evenly quickly.

[0031] Step 4: After applying the adhesive, place the second workpiece 4 on the first workpiece 3 and bond them together.

[0032] Step 5: After gluing, install the next fixed base plate 1 using the connecting pin 14, and repeat steps 2 and 3 above.

[0033] Step 6: Stack multiple fixed base plates 1 and workpieces, with a maximum of five pieces stacked. Use a heavy weight block 6 to press the top down and let it stand for 24 hours.

[0034] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0035] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A retaining ring adhesive fixing fixture, comprising a fixing base (1) and an adhesive application mechanism, characterized in that: The upper surface of the fixed base (1) is uniformly fixed with a number of limiting pins (2). The upper surface of the fixed base (1) is provided with a first workpiece (3) outside the limiting pins (2). The upper end of the first workpiece (3) is provided with a second workpiece (4). An adhesive layer (5) is provided between the first workpiece (3) and the second workpiece (4). The fixed base (1) is provided with multiple fixed bases, which are stacked together. The upper end of the fixed base (1) is provided with a weight block (6). The glue application mechanism includes a glue application scraper (7) and a groove (8). The lower surface of the glue application scraper (7) is provided with grooves (8) on both sides. The middle part of the surface of the glue application scraper (7) is provided with a through hole (9).

2. The retaining ring adhesive fixing fixture according to claim 1, characterized in that: A central shaft (10) is fixedly installed in the middle of the upper surface of the fixed chassis (1).

3. The retaining ring adhesive fixing fixture according to claim 1, characterized in that: The glue-applying scraper (7) has a first handle (11) fixedly installed on both sides of its upper surface.

4. The retaining ring adhesive fixing fixture according to claim 1, characterized in that: A second handle (12) is provided on the outer surface of the upper end of the weight block (6).

5. A retaining ring adhesive fixing fixture according to claim 2, characterized in that: The upper surface of the fixed chassis (1) has connecting grooves (13) on both sides of the central shaft (10), and the lower end of the fixed chassis (1) is fixedly provided with connecting pins (14).

6. The retaining ring adhesive fixing fixture according to claim 1, characterized in that: The fixed chassis (1) has a central groove (15) at the lower middle part.

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