Baffle structure of inner cavity of metal evaporation table

Abstract

The baffle structure of the inner cavity of the metal evaporation table comprises a baffle body, the baffle body is tightly attached to the side wall of the inner cavity of the evaporation table, and the baffle body is fixed to the inner cavity of the evaporation table through a fixing assembly. The technical scheme has the beneficial effects that the baffle body can be rapidly disassembled and fixed through the fixing assembly, and replacement of the baffle body is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of vapor deposition equipment, especially relates to a metal evaporation table inner chamber baffle structure. BACKGROUND

[0002] Metal evaporation chamber is a kind of equipment for physical vapor deposition technology, mainly used in the preparation of thin film materials in the fields such as semiconductor, optical coating, decorative coating, etc.In these applications, the metal is usually heated to its evaporation point, so that it becomes gaseous particles, and then these particles are deposited on the substrate to form a thin film.

[0003] In the metal evaporation process, due to the characteristics of the evaporation, the baffle will also be evaporated with the corresponding metal. With the accumulation of evaporation, the thermal expansion difference between the baffle and the metal film on it and the metal film will cause the deposited metal to fall off. At the same time, the metal evaporation chamber in the prior art is designed as a cuboid, and the baffle is suspended in the middle of the chamber, which cannot directly contact the chamber wall. In a vacuum environment, heat transfer mainly relies on thermal radiation, which will cause the metal deposited on the baffle to fall off during the temperature rise of the baffle. High evaporation deposition rate will bring more heat, and the temperature rise effect will be more obvious, causing vicious circle. It affects the use of the evaporation chamber. Therefore, it is necessary to replace the baffle in the metal evaporation chamber regularly. Regular replacement of the baffle is not only inconvenient, but also affects the production cycle.

[0004] At the same time, the baffle in the prior art is suspended in the middle of the chamber by buckle, which is not only not beautiful, but also not firm in connection, and there is a certain safety risk. INVENTION CONTENTS

[0005] The utility model provides a kind of metal evaporation table inner chamber baffle structure, by integrated baffle structure design, baffle and chamber are directly contacted, it is convenient to replace baffle, reduce the replacement baffle time and the influence to production cycle.

[0006] Other purposes and advantages of the utility model can be further understood from the technical features disclosed in the utility model.

[0007] To achieve one or part or all of the above purposes or other purposes, a metal evaporation table inner chamber baffle structure includes a baffle body, the baffle body is closely attached to the inner wall of the evaporation table, and the baffle body is fixed to the inner chamber of the evaporation table by a fixing assembly. The beneficial effects of this technical solution are that the baffle body can be quickly disassembled and fixed by the latch assembly, which facilitates the replacement of the baffle body.

[0008] The side cross-sectional shape of the baffle body is a right trapezoid, the lower end width of the baffle body is larger than the upper end width of the baffle body; the baffle body comprises a slope surface and a vertical surface, the vertical surface is perpendicular to the upper end and the lower end of the baffle body, and the vertical surface is close to the inner cavity side wall of the evaporation table.

[0009] A plurality of heat dissipation fins are arranged on the slope surface and are arranged obliquely towards the surface of the slope surface.

[0010] The heat dissipation fins are metal fins and are equidistantly arranged on the slope surface.

[0011] The inner cavity side wall of the evaporation table is formed with a heat dissipation chamber, the heat dissipation chamber is provided with an inlet and an outlet which are communicated with the outside, and the heat dissipation chamber circulates cooling liquid through the inlet and the outlet.

[0012] The inner cavity side wall of the evaporation table is of metal material, and the baffle body is of metal material.

[0013] The upper end of the baffle body and the lower end of the baffle body are provided with insertion holes, the inner cavity side wall of the evaporation table is provided with an insertion slot, the fixing assembly comprises a fixing rod body, after the fixing rod body passes through the insertion hole, the tail portion of the fixing rod body is fixed in the insertion slot.

[0014] The insertion hole extends inwardly from the surface of the inner cavity side wall of the evaporation table into the heat dissipation chamber of the inner cavity side wall of the evaporation table, and the insertion hole is not communicated with the heat dissipation chamber.

[0015] The size of the insertion hole is smaller than the size of the insertion slot, and the tail portion of the fixing rod body is in interference fit with the insertion slot.

[0016] The surface of the slope surface is formed with a spring placing cavity outside the insertion slot, a spring body is placed in the spring placing cavity, a baffle is arranged on the fixing rod, the fixing rod body passes through the spring placing cavity, the spring body and the insertion hole, and one end of the fixing rod body extends out of the spring placing cavity, a push rod is arranged on the fixing rod body extending out of the spring placing cavity, and the baffle abuts against the spring body.

[0017] Compared with the prior art, the beneficial effects of the utility model mainly include:

[0018] 1. The baffle body can be quickly disassembled and fixed through the fixing assembly, the replacement of the baffle body is facilitated, and meanwhile, the baffle body is an integrated baffle, so that it is more convenient and easy to place in the evaporation table.

[0019] 2. The side wall of the evaporation table inner cavity is provided with a heat dissipation chamber, circulating cooling liquid is circulated in the heat dissipation chamber, the metal baffle is tightly attached to the metal evaporation table inner cavity side wall, and the heat on the baffle can be taken away through the circulating cooling liquid, and the plurality of heat dissipation fins arranged on the baffle can enhance the heat dissipation effect.

[0020] In order to make the above and other objects, features and advantages of the present application more apparent, a preferred embodiment will be described below with reference to the accompanying drawings, and will be described in detail as follows. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the specific embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced as follows. Obviously, the drawings described below are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0022] Figure 1 The metal evaporation table inner cavity baffle structure provided by the present application is shown in the schematic diagram.

[0023] Figure 2 For Figure 1 The local enlarged schematic view of A in the device.

[0024] 1. Vapor deposition equipment; 11, evaporation table inner cavity; 2, baffle body; 21, upper end; 22, lower end; 23, heat dissipation fin; 24, insertion hole; 3, heat dissipation chamber; 31, outlet; 32, inlet; 33, insertion slot; 4, fixed rod body; 41, lever; 42, baffle; 5, spring cavity; 6, spring body. DETAILED DESCRIPTION

[0025] The foregoing and other technical contents, features and effects of the present application will be clearly presented in the following detailed description of a preferred embodiment with reference to the drawings. The directions mentioned in the following embodiments, such as up, down, left, right, front or back, are only the directions of the drawings. Therefore, the directions used are used to illustrate and not to limit the present application.

[0026] The metal evaporation table inner cavity baffle structure provided by the present application is shown in the schematic diagram. Figure 1 .

[0027] See Figure 1 As can be seen, the vapor deposition apparatus 1 of the present invention has an evaporation stage cavity 11. The baffle structure of the evaporation stage cavity 11 includes a baffle body 2, which includes an upper end 21 and a lower end 22. The side cross-section of the baffle body 2 is a right-angled trapezoid, and the width of the lower end 22 is larger than the width of the upper end 21 (see...). Figure 1 The side view shows that the horizontal distance from the vertical surface of the upper or lower end to the slope surface is defined as the width of the lower or upper end (where the end position of the upper or lower end is the maximum width of the upper or lower end). The lower end 22 is wider and thicker, making it easier to stand stably in the evaporation platform cavity 11. The baffle body 2 has a vertical surface that fits against the side wall of the evaporation platform cavity 11 and a slope surface that contacts the gas in the evaporation platform cavity 11. The vertical surface is perpendicular to the lower end 22 of the baffle body 2. When the baffle body 2 is placed in the evaporation platform cavity 11, the vertical surface can fit better against the side wall of the evaporation platform cavity 11, ensuring the heat dissipation effect of the baffle body 2.

[0028] A heat dissipation chamber 3 is formed on the side wall of the evaporation platform inner cavity 11. The heat dissipation chamber 3 is a single, integral chamber that allows coolant to circulate inside. An inlet 32 ​​is located at the lower end of the heat dissipation chamber 3, and an outlet 31 is located at the upper end. The inlet 32 ​​and outlet 31 work together to circulate the coolant within the heat dissipation chamber 3, carrying away heat and achieving a heat dissipation effect. The inlet 31 is located at the lower end, and a water pump pumps circulating coolant into it. The heat dissipation chamber 3 is a single, integral piece, and its area is at least the same as the vertical surface area of ​​the baffle body 2, ensuring a sufficiently large contact area and thus guaranteeing good heat dissipation.

[0029] To better ensure the heat dissipation effect of the baffle body 2, the side wall material of the evaporation platform inner cavity 11 and the material of the baffle body 2 can both be made of metal with good thermal conductivity, such as copper. Multiple heat dissipation fins 23 are arranged at equal intervals on the slope surface of the baffle body 2. The heat dissipation fins can be at a certain angle to the slope surface, but in order to ensure that the heat dissipation fins 23 do not occupy the internal space of the evaporation platform inner cavity 11 as much as possible, the heat dissipation fins 23 should be tilted towards the surface of the slope surface as much as possible.

[0030] To facilitate the fixing of the baffle body 2 within the evaporator cavity 11 and for easy disassembly and replacement, this utility model employs a fixing assembly to secure the baffle body 2. Specifically, four symmetrical insertion holes 24 are formed at the upper end 21 and lower end 22 of the baffle body 2. The fixing rod body 4 enters through the insertion holes 24 and its tail end is fixed in a slot 33 on the side wall of the evaporator cavity 11.

[0031] The tail end of the fixing rod body 4 is fixed in the slot 33. In this embodiment, one implementation adopts an interference fit method (not shown in the figure). The size of the slot 33 is set to be smaller than that of the insertion hole 24. At this time, the size of the fixing rod body 4 is comparable to that of the insertion hole 24, but larger than that of the slot 33. When the tail end of the fixing rod body 4 enters the slot 33, it can be fixed in the slot by interference fit. At the same time, the baffle body 2 can be disassembled by directly pulling out the fixing rod body 4.

[0032] Another implementation method in this embodiment uses, as follows: Figure 1 as well as Figure 2 The elastic fixing method at point A secures the fixing rod body 4. (See also...) Figure 2 The enlarged view at point A shows a spring placement cavity 5 located outside the slot 33. The spring placement cavity 5 is fixed to the slope surface and parallel to the lower end 22. A spring body 6 is located inside the spring placement cavity 5. The fixing rod body 4 passes through the spring placement cavity 5, the spring body 6, and the insertion hole 24. A baffle 42 is provided on the fixing rod body 4, positioned inside the spring placement cavity 5, and abuts against the spring body 6. The spring body 6 applies a spring force to the baffle 42, ensuring that the end of the fixing rod body 4 is securely inserted into the slot 33. This eliminates the need for the slot 33 to be smaller than the fixing rod body 4, reducing interference fit wear and increasing service life.

[0033] To facilitate the pulling of the fixing rod body 4 and allow it to easily move out of the slot 33, so that the baffle body 2 can be easily disassembled, a lever 41 is provided at the end of the fixing rod body 4 after it extends out of the spring placement cavity 5. The size of the lever 41 is larger than the size of the spring placement cavity 5. At this time, the upper and lower ends of the lever 41 extend relative to the upper and lower ends of the spring placement cavity 5, so that the lever 41 can be easily pulled when it abuts against the spring placement cavity 5.

[0034] The above provides a detailed description of the baffle structure inside the metal evaporation stage provided by this utility model. Specific examples have been used to illustrate the structure and working principle of this utility model. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core idea of ​​this utility model. It should be noted that those skilled in the art can make several improvements and modifications to this utility model without departing from the principle of this utility model, and these improvements and modifications also fall within the scope of protection of the claims of this utility model.

Claims

1. A baffle structure for the inner cavity of a metal evaporation stage, characterized in that, The baffle structure includes a baffle body, which is in close contact with the inner wall of the evaporation stage cavity, and the baffle body is fixed to the inner cavity of the evaporation stage by a fixing component; The upper and lower ends of the baffle body are provided with insertion holes, the inner wall of the evaporation platform is provided with a slot, and the fixing assembly includes a fixing rod body. After the fixing rod body passes through the insertion hole, the tail of the fixing rod body is fixed in the slot.

2. The metal evaporation stage inner cavity baffle structure according to claim 1, characterized in that, The side cross-section of the baffle body is a right trapezoid, and the width of the lower end of the baffle body is greater than the width of the upper end of the baffle body. The baffle body includes a sloping surface and a vertical surface. The vertical surface is perpendicular to the upper and lower ends of the baffle body and is close to the inner wall of the evaporation platform.

3. The metal evaporation stage inner cavity baffle structure according to claim 2, characterized in that, A number of heat dissipation fins are provided on the slope surface, and the heat dissipation fins are inclined toward the slope surface.

4. The baffle structure for the inner cavity of a metal evaporation stage according to claim 3, characterized in that, The heat dissipation fins are metal fins, and the heat dissipation fins are equidistantly arranged on the slope surface.

5. The baffle structure for the inner cavity of a metal evaporation stage according to claim 2, characterized in that, The side wall of the evaporation platform's inner cavity forms a heat dissipation chamber, which is provided with an inlet and an outlet communicating with the outside. Coolant is circulated in the heat dissipation chamber through the inlet and outlet.

6. The metal evaporation stage inner cavity baffle structure according to claim 5, characterized in that, The side walls of the evaporation platform's inner cavity are made of metal, and the baffle body is also made of metal.

7. The baffle structure for the inner cavity of a metal evaporation stage according to claim 1, characterized in that, The insertion hole extends inward from the surface of the inner wall of the evaporation platform into the heat dissipation chamber of the inner wall of the evaporation platform, and the insertion hole is not connected to the heat dissipation chamber.

8. The baffle structure of the inner cavity of a metal evaporation stage according to claim 1, characterized in that, The size of the insertion hole is smaller than the size of the slot, and the tail of the fixing rod body is interference-fitted with the slot.

9. The baffle structure for the inner cavity of a metal evaporation stage according to claim 1, characterized in that, The outside of the slot has a spring placement cavity formed on the surface of the sloping surface, and the spring body is placed in the spring placement cavity; a baffle is provided on the fixing rod, the fixing rod body passes through the spring placement cavity, the spring body and the insertion hole, and one end extends out of the spring placement cavity, a lever is provided on the fixing rod body extending out of the spring placement cavity, and the baffle abuts against the spring body.

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