Transmission structure for evaporation transmission arm

Abstract

The utility model relates to a transmission structure for an evaporation transmission arm, which comprises a rotary table, a telescopic arm and a transmission mechanism, the rotary table is of a rectangular structure, the transmission mechanism drives the telescopic arm to move along the length direction of the rotary table, and the transmission mechanism comprises a driving motor, a driving gear, two driven gears and a synchronous belt, the driving gear and the driven gears are arranged on the upper surface of the rotary table in a mode of rotating around vertical shafts respectively, the driving motor is fixed below the rotary table, a rotating shaft of the driving motor penetrates through the rotary table and drives the driving gear to rotate, the two driven gears are located at the two ends of the rotary table in the length direction respectively, and the synchronous belt is wound outside the driving gear and the two driven gears. The stretching section is directly connected between the two driven gears in the length direction, the turning section bypasses the driving gear, and the tail of the telescopic arm is fixed to the stretching section through a connecting block. According to the structure, the gas storage structure of the driving motor can be prevented from being located in the evaporation chamber, so that the purity of the evaporation environment is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of vapor deposition technology, and in particular to a transfer structure for a vapor deposition transfer arm. Background Technology

[0002] In the current field of cluster-based vacuum coating technology, articulated transfer robotic arms used for handling large substrates are facing several significant limitations. These arms generally have limited load-bearing capacity, making it difficult to cope with increasing load demands, while robotic arms with enhanced load-bearing capacity often come with high manufacturing costs. Furthermore, these robotic arms need to integrate multiple complex functions such as lifting, rotation, and extension, further increasing the technical difficulty and cost.

[0003] Chinese patent CN110085534A discloses a robotic arm for material handling. This robotic arm has a drive pulley and a driven pulley on the front and rear of the same side of its base, respectively. These pulleys work in conjunction with a synchronous belt, and a drive motor drives the synchronous conveyor belt located on the drive pulley. In this structure, the drive motor must always rotate with the substrate, which confines it to the inside of the vapor deposition chamber. However, the drive motor has many structures that easily trap gas. During the vacuuming process in the vapor deposition chamber, the gas trapped in these structures is difficult to expel, easily compromising the stability and purity of the high vacuum environment.

[0004] Therefore, it is necessary to design a dedicated transmission structure to solve the above problems. Utility Model Content

[0005] The main objective of this invention is to provide a transfer structure for a vapor deposition transfer arm that avoids the gas trapping structure of the drive motor being located inside the vapor deposition chamber, thereby ensuring the purity of the vapor deposition environment and preventing any impact on the vapor deposition quality.

[0006] This utility model achieves the above-mentioned objective through the following technical solution: a transmission structure for a vapor deposition transfer arm, comprising a turntable, a telescopic arm, and a transmission mechanism. The turntable is a rectangular structure. The transmission mechanism drives the telescopic arm to move along the length direction of the turntable. The transmission mechanism includes a drive motor, a driving gear, two driven gears, and a synchronous belt. The driving gear and the driven gears are each rotatably mounted on the upper surface of the turntable around a vertical axis. The drive motor is fixed below the turntable. The shaft of the drive motor passes through the turntable and drives the driving gear to rotate. The two driven gears are located at opposite ends of the turntable along its length. The synchronous belt wraps around the driving gear and the two driven gears, forming a straight section directly connecting the two driven gears along the length direction and a turning section bypassing the driving gear. The tail of the telescopic arm is fixed to the straight section by a connecting block. The gap between the shaft of the drive motor and the turntable is sealed.

[0007] Specifically, a pair of slide rails are provided along the length of the turntable, and the tail of the telescopic arm is provided with guide blocks that cooperate with the two slide rails. Each slide rail has a stop at both ends to prevent the guide block from disengaging from the slide rail. The components of the transmission mechanism are all located between the two slide rails, and the drive gear is located at the center of the turntable.

[0008] Specifically, the turntable is also provided with two axially vertical driven shafts, which are located on opposite sides of the driving gear, and the two driven shafts press against the toothless surface of the turning section.

[0009] Furthermore, the turntable is provided with a rectangular slide groove, and a tension fine-tuning mechanism is provided in the slide groove. The tension fine-tuning mechanism includes a slider and two fixing screws. The slider slides along the length direction of the slide groove. The slider is provided with two waist holes parallel to the length direction of the slide groove. The bottom surface of the slide groove is provided with two threaded holes. The two fixing screws pass vertically through the two waist holes and engage with the two threaded holes. One of the screws is rotatably connected to the slider.

[0010] Furthermore, the tension fine-tuning mechanism also includes a fixed block and an adjusting screw. The slider has a protrusion, the fixed block is located at one end of the slide groove, the adjusting screw passes through the fixed block, and the protrusion has a threaded adjusting hole that mates with the end of the adjusting screw.

[0011] Furthermore, the adjusting screw is also provided with a set nut, and the nut of the adjusting screw and the set nut clamp the two sides of the fixing block.

[0012] The beneficial effects of this utility model's technical solution are:

[0013] There is no lubrication issue between the driving gear and the synchronous belt, or between the driven gear and the synchronous belt, in this structure. Therefore, this transmission method can avoid the use of lubricants. It can also prevent the gas-collecting structure of the drive motor from being located in the vapor deposition chamber, thereby ensuring the purity of the vapor deposition environment and avoiding affecting the vapor deposition quality. Attached Figure Description

[0014] Figure 1 This is a perspective view of the transfer structure of the vapor deposition transfer arm in an embodiment;

[0015] Figure 2 This is a right view of the transfer structure used in the vapor deposition transfer arm of the embodiment;

[0016] Figure 3 This is a diagram showing the assembly relationship between the support block, the insulating carrier plate, and the insulating block.

[0017] Figure 4 for Figure 3 A partial sectional view at position A in the middle.

[0018] The numbers in the diagram represent:

[0019] 1-Turntable, 11-Slide rail, 12-Stop block, 13-Slide groove

[0020] 2-Telescopic arm, 21-Guide block, 22-Connecting block,

[0021] 3-Transmission mechanism, 31-Drive motor, 32-Driving gear, 33-Driven gear, 34-Synchronous belt, 341-Straightening section, 342-Bending section, 35-Driven shaft;

[0022] 4-Tension fine-tuning mechanism, 41-Slider, 411-Waist hole, 412-Protrusion, 42-Fixing screw, 43-Fixing block, 44-Adjusting screw, 441-Nut, 442-End, 45-Set nut. Detailed Implementation

[0023] The present invention will be further described in detail below with reference to specific embodiments.

[0024] Example:

[0025] like Figures 1 to 3 As shown, the present invention discloses a transmission structure for a vapor deposition transfer arm, comprising a turntable 1, a telescopic arm 2, and a transmission mechanism 3. The turntable 1 has a rectangular structure. The transmission mechanism 3 drives the telescopic arm 2 to move along the length of the turntable 1. The transmission mechanism 3 includes a drive motor 31, a drive gear 32, two driven gears 33, and a synchronous belt 34. The drive gear 32 and the driven gears 33 are each rotatably mounted on the upper surface of the turntable 1 around a vertical axis. The drive motor 31 is fixed below the turntable 1. The shaft of the drive motor 31 passes through the center of the turntable 1 and drives the drive gear 32 to rotate. The two driven gears 33 are located at both ends of the turntable 1 along its length. The synchronous belt 34 is wrapped around the drive gear 32 and the two driven gears 33, forming a straight section 341 that is directly connected between the two driven gears 33 along its length and a turning section 342 that passes around the drive gear 32. The tail of the telescopic arm 2 is fixed to the straight section 341 by a connecting block 22. The gap between the shaft of the drive motor 31 and the turntable 1 is sealed.

[0026] The transmission mechanism 3 here does not use a conventional linear module because this method often requires lubricating oil for the screw, which would compromise the purity of the vapor deposition environment. Instead, a gear-synchronous belt transmission structure is used to achieve the linear movement of the telescopic arm 2. Since the synchronous belt 34 is a flexible component and needs to generate cyclical motion, the straight section 341 and the turning section 342 are distinguished by the state of the synchronous belt 34 at that position. The direction of the straight section 341 is along the length of the turntable 1. The tail of the telescopic arm 2 is always fixed at a position on the straight section 341, so when the synchronous belt 34 moves in the forward direction, the telescopic arm 2 is also carried along the length of the turntable 1, thus achieving the telescopic movement of the telescopic arm 2. There is no lubrication issue between the driving gear 32 and the synchronous belt 34, or between the driven gear 33 and the synchronous belt 34, so this transmission method avoids the use of lubricant; it also prevents the gas-collecting structure of the drive motor 31 from being located within the vapor deposition chamber, thereby ensuring the purity of the vapor deposition environment and avoiding affecting the vapor deposition quality.

[0027] like Figure 1 and Figure 2 As shown, a pair of slide rails 11 are arranged along the length direction on the turntable 1. The tail of the telescopic arm 2 is provided with guide sliders 21 that cooperate with the two slide rails 11. Each slide rail 11 has a stop block 12 at both ends to prevent the guide slider 21 from disengaging from the slide rail 11. The components of the transmission mechanism 3 are all located between the two slide rails 11, and the drive gear 32 is located at the center of the turntable 1.

[0028] The cooperation between the slide rail 11 and the guide slider 21 not only supports the telescopic arm 2 but also guides it to move in a straight line along the length of the turntable 1. Since all components of the transmission mechanism 3 are located between the two slide rails 11, the synchronous belt 34 will not intersect with the slide rails 11. Because the drive gear 32 is located at the center of the turntable 1 and the drive motor 31 is located below the center of the turntable 1, the center of gravity will not shift due to the drive motor 31 when the turntable 1 rotates. This allows for faster turning speed of the vapor deposition transmission arm, increasing the transfer speed of the vapor deposition substrate.

[0029] like Figure 3 and Figure 4 As shown, the turntable 1 is also provided with two axially vertical driven shafts 35. The two driven shafts 35 are located on opposite sides of the driving gear 32, and the two driven shafts 35 press against the toothless surface of the turning section 342.

[0030] The driven shaft 35 acts on the synchronous belt 34 from the outside, deforming it and increasing the turning point, so that the synchronous belt 34 has a larger arc to fit against the surface of the drive gear 32, preventing the synchronous belt 34 from slipping relative to the drive gear 32 during operation.

[0031] like Figure 4As shown, a rectangular slide 13 is provided on the turntable 1. A tension fine-tuning mechanism 4 is provided in the slide 13. The tension fine-tuning mechanism 4 includes a slider 41, two fixing screws 42, a fixing block 43, an adjusting screw 44, and a set nut 45. The slider 41 slides along the length of the slide 13. The slider 41 is provided with two waist holes 411 parallel to the length of the slide 13. The bottom surface of the slide 13 is provided with two threaded holes (not exposed). The two fixing screws 42 pass vertically through the two waist holes 411 and engage with the two threaded holes. One of the driven shafts 35 is rotatably connected to the slider 41.

[0032] When the driven shaft 35 moves together with the slider 41, it changes the pressure on the synchronous belt 34, thereby adjusting the tension of the synchronous belt 34. When the fixing screw 42 is loosened, the slider 41 can slide along the slide groove 13. After the position of the slider 41 is adjusted, the fixing screw 42 is tightened to maintain the position of the driven shaft 35.

[0033] like Figure 4 As shown, the slider 41 has a protrusion 412, the fixing block 43 is located at one end of the slide groove 13, the adjusting screw 44 passes through the fixing block 43, and the protrusion 412 has a threaded adjusting hole that mates with the end 442 of the adjusting screw 44. The set nut 45 is located on the adjusting screw 44, and the nut 441 of the adjusting screw 44 and the set nut 45 clamp the two sides of the fixing block 43.

[0034] The adjusting screw 44 finely adjusts the position of the slider 41 by engaging with the threaded part 412, allowing for more precise adjustment. After adjustment, the set nut 45 is tightened to prevent the adjusting nut 44 from rotating unnecessarily.

[0035] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.

Claims

1. A transfer structure for a vapor deposition transfer arm, comprising a turntable, a telescopic arm, and a transfer mechanism, wherein the turntable is a rectangular structure, and the transfer mechanism drives the telescopic arm to move along the length direction of the turntable, characterized in that: The transmission mechanism includes a drive motor, a driving gear, two driven gears, and a synchronous belt. The driving gear and the driven gears are each rotatably mounted on the upper surface of the turntable around a vertical axis. The drive motor is fixed below the turntable, and its shaft passes through the turntable and drives the driving gear to rotate. The two driven gears are located at opposite ends of the turntable along its length. The synchronous belt wraps around the driving gear and the two driven gears, forming a straight section that connects directly between the two driven gears along the length and a turning section that bypasses the driving gear. The tail of the telescopic arm is fixed to the straight section by a connecting block. The connection between the drive motor shaft and the turntable is sealed.

2. The transfer structure for a vapor deposition transfer arm according to claim 1, characterized in that: A pair of slide rails are arranged along the length of the turntable. The tail of the telescopic arm is provided with guide blocks that cooperate with the two slide rails. Each slide rail has a stop at both ends to prevent the guide block from disengaging from the slide rail. The components of the transmission mechanism are all located between the two slide rails. The drive gear is located at the center of the turntable.

3. The transfer structure for a vapor deposition transfer arm according to claim 2, characterized in that: The turntable is also provided with two axially vertical driven shafts, which are located on opposite sides of the driving gear and press against the toothless surface of the turning section.

4. The transfer structure for a vapor deposition transfer arm according to claim 3, characterized in that: The turntable is provided with a rectangular slide groove, and a tension fine-tuning mechanism is provided in the slide groove. The tension fine-tuning mechanism includes a slider and two fixing screws. The slider slides along the length direction of the slide groove. The slider is provided with two waist holes parallel to the length direction of the slide groove. The bottom surface of the slide groove is provided with two threaded holes. The two fixing screws pass vertically through the two waist holes and engage with the two threaded holes. One of the screws is rotatably connected to the slider.

5. The transfer structure for a vapor deposition transfer arm according to claim 4, characterized in that: The tension fine-tuning mechanism also includes a fixed block and an adjusting screw. The slider has a protrusion. The fixed block is located at one end of the slide groove. The adjusting screw passes through the fixed block. The protrusion has a threaded adjusting hole that mates with the end of the adjusting screw.

6. The transfer structure for a vapor deposition transfer arm according to claim 5, characterized in that: The adjusting screw is also provided with a set nut, and the nut of the adjusting screw and the set nut clamp the two sides of the fixing block.

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