Structure for improving rapid vacuumizing of high-temperature machine table
By optimizing the segmented vacuum system and butterfly valve design, the problems of long vacuuming time and tailpipe blockage in high-temperature low-pressure diffusion furnaces have been solved, enabling rapid vacuuming and efficient production on high-temperature machines.
Patent Information
- Application Number
- CN202423160650.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-20
- Publication Date
- 2026-01-23
- Estimated Expiration
- 2034-12-20
AI Technical Summary
The long vacuuming time of the high-temperature low-pressure diffusion furnace limits the increase in production capacity, and the tailpipe is prone to blockage.
A segmented vacuum system is adopted. A large vacuum pump is used to quickly remove air from the furnace tube to reach the set vacuum base pressure. Then, a small vacuum pump is used to maintain the pressure required for the reaction process. Combined with the design of parallel and series butterfly valves, the use of vacuum pumps is optimized, reducing equipment costs and maintenance frequency.
It shortened the process time, increased equipment capacity, reduced process gas emissions, solved the problem of tailpipe blockage, and reduced equipment costs.
Smart Images
Figure CN223826793U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of tubular machine tool technology, specifically to a structure for improving the rapid vacuuming of high-temperature machine tools. Background Technology
[0002] Compared with traditional high-temperature atmospheric-pressure diffusion furnaces, high-temperature low-pressure diffusion furnaces have advantages such as high output, good uniformity of process wafers, fewer lattice defects, significantly reduced chemical and specialty gas losses, and longer maintenance cycles.
[0003] High-temperature low-pressure diffusion furnaces employ a high-temperature negative pressure (approximately 0.2 bar) process, making the airtightness of the quartz reaction chamber particularly critical. Inadequate sealing will lead to contamination of the quartz tube, quartz boat, and silicon wafers during the high-temperature process. With the increasing size of silicon wafers, the diameter of the quartz tube in high-temperature low-pressure diffusion / oxidation furnaces has exceeded φ300mm. Furthermore, at temperatures reaching 1000℃, the sealing of the quartz tube opening must be repeatedly sealed and unsealed before and after each process, placing even higher demands on the sealing of the quartz tube opening in high-temperature low-pressure diffusion furnaces.
[0004] However, in existing technologies, high-temperature and low-pressure diffusion furnaces have limited capacity increases due to the long vacuuming time of tubular machines and the tendency for tailpipes to become clogged. Utility Model Content
[0005] The purpose of this invention is to provide a structure that improves the rapid vacuuming of high-temperature machines, so as to solve the problems mentioned in the background art.
[0006] To achieve the above objectives, this utility model provides the following technical solution: a structure for improving the rapid vacuuming of a high-temperature machine, comprising a waste discharge pipe EX1 and furnace tubes T1, T2, and T3 connected in parallel. The actual number of furnace tubes can be selected according to requirements, generally 6-12. The furnace tubes T1, T2, and T3 are connected in series to small vacuum pumps VP1, VP2, and VP3 via butterfly valves BV11, BV21, and BV31, respectively, and are connected to the waste discharge pipe EX1 via butterfly valves BV13, BV23, and BV33, respectively.
[0007] Furnace tubes T1, T2, and T3 are each connected to a large vacuum pump VPM1 via butterfly valve BVM1. The large vacuum pump VPM1 is connected to the waste discharge pipe EX1 via butterfly valve BVM2.
[0008] Preferably, butterfly valves BV12, BV22, and BV32 are respectively installed on furnace tubes T1, T2, and T3.
[0009] Preferably, the furnace tubes T1, T2, and T3 are connected in parallel via a pipe fitting, and butterfly valves BV12, BV22, and BV32 are respectively installed on the pipe fitting of the furnace tubes T1, T2, and T3.
[0010] Preferably, three pipe fittings are connected to the pipe fittings of furnace tubes T1, T2 and T3 respectively, and the three pipe fittings are connected to small vacuum pumps VP1, VP2 and VP3 respectively. Butterfly valves BV11, BV21 and BV31 are respectively mounted on the three pipe fittings.
[0011] Preferably, the small vacuum pumps VP1, VP2, and VP3 are respectively connected to the waste discharge pipe EX1 through three pipe fittings, and butterfly valves BV13, BV23, and BV33 are respectively installed on the three pipe fittings.
[0012] Preferably, the large vacuum pump VPM1 is provided with pipe fittings four at its input and output ends, and butterfly valve BVM1 is installed on pipe fitting four at the input end of the large vacuum pump VPM1, while butterfly valve BVM2 is installed on pipe fitting four at the output end of the large vacuum pump VPM1.
[0013] Compared with the prior art, the beneficial effects of this utility model are:
[0014] 1. Compared with traditional processes, the process mainly utilizes segmented vacuuming. First, a large vacuum pump is used to quickly evacuate the gas (mainly air) inside the furnace tube to achieve the set vacuum base pressure. Then, a small vacuum pump is used to evacuate (mainly process gas) to maintain the pressure required for normal reaction inside the furnace tube. Overall, this shortens the process time and improves the equipment capacity utilization rate.
[0015] 2. Unlike traditional large vacuum pumps that pump externally drawn-in air and process gases and require high-frequency maintenance, the large vacuum pump in this invention mainly pumps externally drawn-in air, can be used for a long time and requires only low-frequency maintenance (or even no maintenance at all). In addition, the small vacuum pump with medium and low pumping speed mainly pumps process gases into the low-pressure state inside the pipe. Unlike the high-pumping-speed exhaust gas emission of traditional solutions, this device can be matched with a local exhaust gas treatment device at the back end according to the relatively low pumping speed, thereby reducing the amount of process gas emitted and solving the problem of tailpipe blockage.
[0016] 3. The novel vacuum system of this utility model, which combines a large vacuum pump with a small vacuum pump, can significantly reduce the manufacturing cost of equipment that traditionally requires a large vacuum pump for each tube. Attached Figure Description
[0017] Figure 1 This is a schematic diagram of the structure of this utility model. Detailed Implementation
[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0019] Please see Figure 1 This utility model provides a technical solution: a structure for improving the rapid vacuuming of a high-temperature machine, including a waste discharge pipe EX1 and furnace tubes T1, T2 and T3 connected in parallel. The number of furnace tubes can be selected according to the actual needs, generally 6-8. The furnace tubes T1, T2 and T3 are connected in series to small vacuum pumps VP1, VP2 and VP3 through butterfly valves BV11, BV21 and BV31, respectively, and are connected to the waste discharge pipe EX1 through butterfly valves BV13, BV23 and BV33, respectively.
[0020] Furnace tubes T1, T2, and T3 are each connected to a large vacuum pump VPM1 via butterfly valve BVM1. The large vacuum pump VPM1 is connected to the waste discharge pipe EX1 via butterfly valve BVM2.
[0021] In this utility model, butterfly valves BV12, BV22, and BV32 are respectively installed on furnace tubes T1, T2, and T3.
[0022] In this utility model, the furnace tubes T1, T2, and T3 are connected in parallel via a pipe fitting, and butterfly valves BV12, BV22, and BV32 are respectively installed on the pipe fitting of the furnace tubes T1, T2, and T3.
[0023] In this utility model, three pipe fittings are connected to the first fitting of the furnace tube T1, furnace tube T2 and furnace tube T3 respectively, and the three pipe fittings are connected to the small vacuum pump VP1, small vacuum pump VP2 and small vacuum pump VP3 respectively. Butterfly valves BV11, BV21 and BV31 are respectively mounted on the three pipe fittings.
[0024] In this utility model, the small vacuum pumps VP1, VP2, and VP3 are respectively connected to the waste discharge pipe EX1 through three pipe fittings, and the butterfly valves BV13, BV23, and BV33 are respectively installed on the three pipe fittings.
[0025] In this utility model, the input end and output end of the large vacuum pump VPM1 are respectively provided with pipe fittings four, and butterfly valve BVM1 is installed on the input end pipe fitting four of the large vacuum pump VPM1, and butterfly valve BVM2 is installed on the output end pipe fitting four of the large vacuum pump VPM1.
[0026] This invention can be applied to tubular PECVD coating equipment, where the process pressure is 10-100 Pa.
[0027] The present invention is implemented as follows:
[0028] 1) Before the furnace tube T1 completes the process, the control system sends a command to start the large vacuum pump VPM1 and open the butterfly valves BVM1 and BVM2.
[0029] 2) When furnace tube T1 completes the process, turn on BV12. At this time, furnace tube T1 is connected to the large vacuum pump VPM1 for rapid vacuuming.
[0030] 3) Before the furnace tube T1 reaches the set pressure 1, the control system sends a command to start the vacuum pump VP1 and open the butterfly valve BV13;
[0031] 4) When the furnace tube T1 reaches the set pressure, the control system sends a command to start the vacuum pump VP1 and open the butterfly valve BV13.
[0032] 5) When furnace tube T1 reaches the set pressure, the control system sends a command to shut down vacuum pump VPM1 and butterfly valves BV12, BVM1, and BVM2;
[0033] 6) When the furnace tube T1 reaches the set pressure, the control system sends a command to shut down the vacuum pump VP1 and close the butterfly valve BV13;
[0034] 7) The control methods for the remaining furnace tubes are the same as T1;
[0035] 8) If two or more furnace tubes require the use of a large vacuum pump VPM1, the pressure inside the tubes can be adjusted by controlling the corresponding butterfly valves.
[0036] This invention uses a low-power, low-speed vacuum pump on each of the N (2-12) parallel furnace tubes, and then connects them in series with a high-power, high-speed vacuum pump. Front and rear butterfly valves are set on the corresponding vacuum pumps. The front and rear butterfly valves are opened and closed according to the machine requirements to effectively maintain the low pressure state in the furnace tubes. At the same time, the power of the high-power vacuum pump can be adjusted according to the machine requirements to meet the needs of the production line.
[0037] The contents not described in detail in this specification are prior art known to those skilled in the art. Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A structure for improving the rapid vacuum-pumping of a high-temperature machine, characterized by: It includes a waste discharge pipe EX1 and furnace tubes T1, T2 and T3 connected in parallel. The furnace tubes T1, T2 and T3 are connected in series to small vacuum pumps VP1, VP2 and VP3 via butterfly valves BV11, BV21 and BV31, respectively, and are connected to the waste discharge pipe EX1 via butterfly valves BV13, BV23 and BV33, respectively. Furnace tubes T1, T2, and T3 are each connected to a large vacuum pump VPM1 via butterfly valve BVM1. The large vacuum pump VPM1 is connected to the waste discharge pipe EX1 via butterfly valve BVM2.
2. The structure for improving rapid vacuuming of high-temperature machines according to claim 1, characterized in that: The furnace tubes T1, T2, and T3 are respectively equipped with butterfly valves BV12, BV22, and BV32.
3. The structure for improving rapid vacuuming of high-temperature machines according to claim 1, characterized in that: The furnace tubes T1, T2, and T3 are connected in parallel via fitting one, and butterfly valves BV12, BV22, and BV32 are respectively installed on fitting one of the furnace tubes T1, T2, and T3.
4. The structure for improving rapid vacuuming of high-temperature machines according to claim 1, characterized in that: Three fittings are connected to fittings one of the furnace tubes T1, T2 and T3 respectively, and the three fittings two are respectively connected to small vacuum pumps VP1, VP2 and VP3. Butterfly valves BV11, BV21 and BV31 are respectively installed on the three fittings two.
5. The structure for improving rapid vacuuming of high-temperature machines according to claim 1, characterized in that: The small vacuum pumps VP1, VP2, and VP3 are respectively connected to the waste discharge pipe EX1 through three pipe fittings. Butterfly valves BV13, BV23, and BV33 are respectively installed on the three pipe fittings.
6. The structure for improving rapid vacuuming of high-temperature machines according to claim 1, characterized in that: The large vacuum pump VPM1 has four pipe fittings at its input and output ends, and butterfly valve BVM1 is installed on the four pipe fittings at the input end of the large vacuum pump VPM1, while butterfly valve BVM2 is installed on the four pipe fittings at the output end of the large vacuum pump VPM1.