Powder rolling coating device adopting magnetron sputtering mode
By employing a tumbling coating device in magnetron sputtering, the problem of powder particle agglomeration in a vacuum is solved by utilizing the tumbling of the drum and the vibration motor, thus achieving uniform coating of powder particles and integrity of the film layer.
Patent Information
- Application Number
- CN202423145364.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-19
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2034-12-19
AI Technical Summary
Existing technologies struggle to uniformly coat powders, particles, and microparticles with diameters ranging from 2 to 600 micrometers in magnetron sputtering, especially due to the lack of particle vibration or rotation mechanisms, which prevents each particle surface from being uniformly exposed to the sputtering beam and makes them prone to agglomeration in a vacuum.
The powder tumbling coating device using magnetron sputtering includes a vacuum coating mechanism and a tumbling mechanism. It uses a roller tumbling mechanism and a vibrating motor to tumble the powder material in a vacuum, ensuring that each particle is evenly exposed to the sputtering beam and preventing agglomeration.
Uniform powder coating was achieved, the residence time of the powder in the coating area was extended, and the uniformity and integrity of the film layer were ensured.
Smart Images
Figure CN223837540U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum coating equipment, specifically to a powder tumbling coating device using magnetron sputtering. Background Technology
[0002] Magnetron sputtering is a widely used thin film deposition technique. It can be used to manufacture almost any metal coating or metal composite as well as nitride or oxide layers, making it the most versatile coating method. Magnetron sputtering can coat large-area substrates and is easy to handle process parameters, thus enabling a wide range of important industrial applications. Although coating planar substrates is the most advanced technology, coating powders, particles and microparticles with diameters ranging from 2 to 600 micrometers using magnetron sputtering remains a very challenging task. This is mainly due to the following factors: (1) Every side of each particle must be exposed to the sputtering beam to obtain a uniform coating; therefore, a mechanism to vibrate or rotate the particles is necessary. (2) Small particles of different sizes and shapes wedge together during the mixing process, which prevents most particles from being coated because they are not exposed to the sputtering beam. (3) In a vacuum, particles tend to agglomerate, especially when the powder is coated with pure metal. This is because there is no insulating layer, i.e., air, water film or oxide layer, between the coatings of two contacting particles.
[0003] Since powder cannot be suspended in a vacuum chamber like a standard-sized workpiece, if the powder falls through the vacuum chamber, the very short falling time makes it difficult to achieve complete powder coating, even if only one powder particle falls. For powder coating to be successful, the powder must undergo sufficient movement within the vacuum chamber. Therefore, the residence time of the powder in the coating area is a crucial factor for successful powder coating. Utility Model Content
[0004] The purpose of this invention is to overcome the shortcomings and deficiencies of the existing technology and to provide a powder tumbling coating device using magnetron sputtering.
[0005] The technical solution adopted by this utility model is as follows: A device for powder tumbling coating using magnetron sputtering includes a vacuum coating mechanism, which includes a vacuum chamber and a target located inside the vacuum chamber; it also includes a tumbling mechanism, which includes a roller and a second drive mechanism for driving the roller to rotate. The roller is sleeved outside the target and located inside the vacuum chamber, and the second drive mechanism is used to drive the roller to tumble.
[0006] The target is a rotary magnet type and has a hollow structure. Inside, from the inside to the outside, there is a first rotating shaft, an annular magnet seat, and a magnetic shaft sleeve. A magnet is fixed on the annular magnet seat. The part of the first rotating shaft that extends out of the vacuum chamber and is outside the vacuum chamber is connected to the first drive mechanism through a first transmission component to form a transmission engagement. A first positioning component is provided outside the first rotating shaft so that the first rotating shaft can only rotate and cannot move.
[0007] The first positioning assembly includes a positioning sleeve, a flange, a sleeve, and a mounting plate. The flange and the mounting plate are fitted over the positioning sleeve, and the sleeve is located between the mounting plate and the positioning sleeve. The flange and the mounting plate are connected on both sides of the positioning sleeve and the sleeve by screws, which fix the positioning sleeve and the sleeve together. Between the positioning sleeve and the first rotating shaft, there is a first bearing, a skeleton oil seal, a bushing, and a second bearing arranged axially in sequence, and bearing end caps are fixed on both sides.
[0008] The outer end of the flange is fixedly connected to the first motor mounting plate by long bolts, and the first drive mechanism is fixed to the first motor mounting plate.
[0009] The first rotating shaft is hollow and has a hollow water pipe inside. The hollow water pipe extends out of the vacuum chamber and connects to a cooling device, which is used to introduce a cooling medium into the inner cavity of the hollow water pipe.
[0010] The second drive mechanism is a rotary motor. A second rotating shaft is fixedly connected to one end of the roller. The second rotating shaft extends out of the vacuum chamber and is connected to the second drive mechanism through a second transmission assembly to form a transmission engagement. A second positioning assembly is provided outside the second rotating shaft so that the second rotating shaft can only rotate and cannot move. The first drive mechanism and the second drive mechanism are located on both sides of the vacuum chamber.
[0011] The roller has a structure that is larger in the middle and smaller at both ends. One end of the roller is open and the other end is closed. The open end allows the first rotating shaft to pass through, and the closed end cooperates with the second drive mechanism.
[0012] The roller has a feeding port in the middle and a cover plate that can be detachably connected.
[0013] The drum is equipped with a scraper.
[0014] A vibration motor is connected to the roller.
[0015] The beneficial effects of this utility model are as follows: By setting up a tumbling mechanism, the powder material is loaded into the drum, and the second driving mechanism is used to drive the drum to rotate, so that the powder material can be coated while being continuously rotated, so that the powder can be better coated with a film layer. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, obtaining other drawings based on these drawings without creative effort still falls within the scope of this utility model.
[0017] Figure 1 This is an exploded view of one embodiment of the present invention;
[0018] Figure 2 This is a partial cross-sectional view of one embodiment of the present invention;
[0019] Figure 3 This is a cross-sectional view of the middle part of the target column according to an embodiment of the present invention;
[0020] Figure 4 for Figure 2 A magnified view of part I.
[0021] Figure 5 for Figure 2 A magnified view of part II.
[0022] Figure 6 Cross-sectional view of the middle part of the roller
[0023] In the diagram, the components are: cooling device-1, hollow water pipe-101, first drive mechanism-2, first motor mounting plate-3, positioning sleeve-4, skeleton oil seal-5, flange-6, sleeve-7, mounting plate-8, vacuum chamber housing-9, fixing sleeve-10, second drive mechanism-11, second rotating shaft-12, roller-13, cover plate-1301, target-14, annular magnet seat-1401, magnetic shaft sleeve-1402, first rotating shaft-16, second motor mounting plate-17, scraper-18, first bearing-19, bushing-20, second bearing-21. Detailed Implementation
[0024] To make the objectives, technical solutions and advantages of this utility model clearer, the utility model will be described in further detail below with reference to the accompanying drawings.
[0025] It should be noted that all uses of "first" and "second" in the embodiments of this utility model are for the purpose of distinguishing two entities or parameters with the same name but different names. It is clear that "first" and "second" are only for the convenience of expression and should not be construed as limiting the embodiments of this utility model. Subsequent embodiments will not explain this in detail.
[0026] The directional and positional terms used in this utility model, such as up, down, front, back, left, right, inside, outside, top, bottom, side, etc., are only for reference to the accompanying drawings. Therefore, the directional and positional terms used are for the purpose of explaining and understanding this utility model, and not for limiting the scope of protection of this utility model.
[0027] Example 1:
[0028] An apparatus for powder tumbling coating using magnetron sputtering, such as... Figure 1 , Figure 2 As shown, it includes a vacuum coating mechanism and a tumbling mechanism.
[0029] The vacuum coating mechanism includes a vacuum chamber housing 9, a target 14 located inside the vacuum chamber housing 9, a cooling device 1 connected to the end of the target 14, and a first drive mechanism 2. The target 14 is of the gyromagnetic type; specifically, the target 14 has a hollow structure, such as... Figure 3 As shown, the vacuum chamber 9 contains, from the inside out, a hollow water pipe 101, a hollow first rotating shaft 16, an annular magnet seat 1401, and a magnetic shaft sleeve 20 tube 1402. A magnet is fixed to the annular magnet seat 1401. Both the hollow water pipe 101 and the hollow first rotating shaft 16 extend out of the vacuum chamber 9. The cooling device 1 is connected to the hollow water pipe 101 and has an inlet and an outlet for introducing a cooling medium into the inner cavity of the hollow water pipe 101. The first driving mechanism 2 drives the target 14 to rotate circumferentially relative to the vacuum chamber 9. Specifically, the first driving mechanism 2 is a rotary motor. The portion of the hollow first rotating shaft 16 extending out of the vacuum chamber 9 and outside the vacuum chamber 9 is connected to the first driving mechanism 2 via a first transmission assembly to form a transmission engagement. Specifically, in this embodiment, the first transmission assembly is a gear transmission pair.
[0030] A first positioning component is provided outside the hollow first rotating shaft 16 to ensure that the hollow first rotating shaft 16 can only rotate and cannot move. Specifically, as shown in the figure... Figure 4 As shown, the first positioning assembly includes a positioning sleeve 4, a flange 6, a sleeve 7, and a mounting plate 8. The flange 6 and the mounting plate 8 are sleeved on the outside of the positioning sleeve 4, and the sleeve 7 is located between the mounting plate 8 and the positioning sleeve 4. The flange 6 and the mounting plate 8 are connected on both sides of the positioning sleeve 4 and the sleeve 7 by screws, which fix the positioning sleeve 4 and the sleeve 7 together. Between the positioning sleeve 4 and the hollow first rotating shaft 16, there is a first bearing 19, a skeleton oil seal 5, a bushing 20, and a second bearing 21 arranged axially in sequence, and bearing end caps are fixed on both sides.
[0031] The outer end of the flange 6 is fixedly connected to the first motor mounting plate 3 by long bolts, and the cooling device 1 and the first drive mechanism 2 are both fixed on the first motor mounting plate 3.
[0032] The tumbling mechanism includes a roller 13 and a second drive mechanism 11 for driving the roller 13 to rotate. The roller 13 is sleeved outside the target 14 and located inside the vacuum chamber 9. The powder material is loaded inside the roller 13. The second drive mechanism 11 is used to drive the roller 13 to tumble, so that the powder material can be coated while tumbling continuously, so that the powder can be better coated with a film layer.
[0033] The first drive mechanism 2 and the second drive mechanism 11 are located on both sides of the vacuum chamber 9, respectively.
[0034] The roller 13 has a structure that is larger in the middle and smaller at both ends. One end of the roller 13 is open and the other end is closed. The open end allows the first rotating shaft 16 to pass through, and the closed end cooperates with the second drive mechanism 11. A feed port is opened in the middle of the roller 13, and a cover plate 1301 is detachably connected to it by screws.
[0035] Specifically, the second drive mechanism 11 is a rotary motor, and a second rotating shaft 12 is fixedly connected to one end of the roller 13. The second rotating shaft 12 extends out of the vacuum chamber 9 and is connected to the second drive mechanism 11 through a second transmission assembly to form a transmission engagement. Specifically, in this embodiment, the second transmission assembly is a gear transmission pair.
[0036] The second rotating shaft 12 is provided with a second positioning component, which allows the second rotating shaft 12 to rotate but not move. Specifically, the second rotating shaft 12 is fitted with a fixing sleeve 10, and a bearing is provided between the second rotating shaft 12 and the fixing sleeve 10. The fixing sleeve 10 is fixedly connected to the second motor mounting plate 17 by long bolts, and the second drive mechanism 11 is fixed on the second motor mounting plate 17.
[0037] The inside of the drum 13 is equipped with 4 scraper blades to prevent powder from sticking to the wall of the drum 13.
[0038] The implementation principle of this application embodiment is as follows: During feeding, the powder is fed through the feeding port on the outer wall of the roller 13. The vacuum chamber door is closed, and vacuuming begins. After waiting for the vacuum to reach the required target pressure, the required gas is introduced, and the first drive mechanism 2 is activated. Through a pair of gears, the hollow first rotating shaft 16 is driven to rotate in place. The hollow first rotating shaft 16 drives the cylindrical target 14 on the right side to rotate. At the same time, the second drive mechanism 11 is activated, which drives the second rotating shaft 12 to rotate through a pair of gears. The second rotating shaft 12 drives the roller 13 to rotate. The powder can continuously tumble due to the rotation of the roller 13, and the rotation of the scraper 18 can also prevent the powder from agglomerating and sticking to the wall of the roller 13, prolonging the residence time of the powder in the coating area. The continuous rotation of the target material can also ensure that the powder is coated with a better and more uniform film layer.
[0039] The implementation principle of this embodiment is as follows: During feeding, the powder is fed through the feeding port on the outer wall of the roller 13. The vacuum chamber door is closed, and vacuuming begins. After waiting for the vacuum to reach the required target pressure, the required gas is introduced, and the first drive mechanism 2 is activated. Through a pair of gears, the first rotating shaft 16 rotates in place. The first rotating shaft 16 drives the target 14 on the right side to rotate. At the same time, the second drive mechanism 11 is activated, which drives the second rotating shaft 12 to rotate through a pair of gears. The second rotating shaft 12 drives the roller 13 to rotate. The powder can continuously tumble due to the rotation of the roller 13, and the rotation of the scraper 18 can also prevent the powder from agglomerating and sticking to the wall of the roller 13, prolonging the residence time of the powder in the coating area. The continuous rotation of the target material can also ensure that the powder is coated with a better and more uniform film layer.
[0040] During installation in this embodiment, the mounting plate 8 and the fixing sleeve 10 need to be fixedly installed.
[0041] Example 2:
[0042] This embodiment has a structure that is roughly the same as that of embodiment 1. The only difference is that the tumbling device also includes a vibration motor, which is directly connected to the bottom of the roller 13. This allows the roller 13 to both rotate and vibrate, thereby better improving the problem of powder agglomeration and enabling the powder to be more evenly coated with the film layer.
[0043] The implementation principle of this embodiment is as follows: During feeding, the powder is fed through the feeding port on the outer wall of the roller 13. The vacuum chamber door is closed, and vacuuming begins. After waiting for the vacuum to reach the required target pressure, the required gas is introduced, and the first drive mechanism 2 is activated. The hollow first rotating shaft 16 is driven to rotate in place through a pair of gears. The hollow first rotating shaft 16 drives the target 14 on the right side to rotate. At the same time, the vibration motor is activated to drive the roller 13 to rotate and generate vibration. The powder can continuously tumble due to the rotation of the roller 13, and the generated vibration can also prevent the powder from agglomerating and sticking to the wall of the roller 13, prolonging the residence time of the powder in the coating area. The continuous rotation of the target material can also ensure that the powder is coated with a film layer better and more uniformly.
[0044] The above-disclosed embodiments are merely preferred embodiments of the present utility model and should not be construed as limiting the scope of the present utility model. Therefore, any equivalent variations made in accordance with the claims of the present utility model shall still fall within the scope of the present utility model.
Claims
1. A powder tumbling coating apparatus employing magnetron sputtering, comprising a vacuum coating mechanism, wherein the vacuum coating mechanism includes a vacuum chamber housing (9) and a target (14) located within the vacuum chamber housing (9); characterized in that: It also includes a tumbling mechanism, which includes a roller (13) and a second drive mechanism (11) for driving the roller (13) to rotate. The roller (13) is sleeved outside the target (14) and located inside the vacuum chamber (9). The second drive mechanism (11) is used to drive the roller (13) to tumble.
2. The powder tumbling coating apparatus using magnetron sputtering as described in claim 1, characterized in that: The target (14) is a gyromagnetic type and has a hollow structure. Inside, from the inside to the outside, there are a first rotating shaft (16), an annular magnet seat (1401), and a magnetic shaft sleeve (1402). A magnet is fixed on the annular magnet seat (1401). The part of the first rotating shaft (16) that passes through the vacuum chamber box (9) and is outside the vacuum chamber box (9) is connected to the first drive mechanism (2) through the first transmission assembly to form a transmission cooperation. A first positioning assembly is provided outside the first rotating shaft (16) so that the first rotating shaft (16) can only rotate and cannot move.
3. The powder tumbling coating apparatus using magnetron sputtering as described in claim 2, characterized in that: The first positioning component includes a positioning sleeve (4), a flange (6), a sleeve (7), and a mounting plate (8). The flange (6) and the mounting plate (8) are fitted over the positioning sleeve (4), and the sleeve (7) is located between the mounting plate (8) and the positioning sleeve (4). The flange (6) and the mounting plate (8) are connected on both sides of the positioning sleeve (4) and the sleeve (7) by screws, which fix the positioning sleeve (4) and the sleeve (7) together. Between the positioning sleeve (4) and the first rotating shaft (16), there are arranged a first bearing (19), a skeleton oil seal (5), a bushing (20), and a second bearing (21) arranged axially in sequence, and bearing end caps are fixed on both sides.
4. The powder tumbling coating apparatus using magnetron sputtering as described in claim 3, characterized in that: The outer end of the flange (6) is fixedly connected to the first motor mounting plate (3) by long bolts, and the first drive mechanism (2) is fixed on the first motor mounting plate (3).
5. The powder tumbling coating apparatus using magnetron sputtering according to any one of claims 2-4, characterized in that: The first rotating shaft (16) is hollow and has a hollow water pipe (101) inside. The hollow water pipe (101) passes through the vacuum chamber box (9) and connects to the cooling device (1). The cooling device (1) is used to introduce a cooling medium into the inner cavity of the hollow water pipe (101).
6. The powder tumbling coating apparatus using magnetron sputtering as described in claim 2, characterized in that: The second drive mechanism (11) is a rotary motor. A second rotating shaft (12) is fixedly connected to one end of the roller (13). The second rotating shaft (12) extends out of the vacuum chamber (9) and is connected to the second drive mechanism (11) through a second transmission assembly to form a transmission engagement. A second positioning assembly is provided outside the second rotating shaft (12) so that the second rotating shaft (12) can only rotate and cannot move. The first drive mechanism (2) and the second drive mechanism (11) are located on both sides of the vacuum chamber (9).
7. The powder tumbling coating apparatus using magnetron sputtering as described in claim 6, characterized in that: The roller (13) has a structure that is large in the middle and small at both ends. One end of the roller (13) is open and the other end is closed. The open end is for the first rotating shaft (16) to pass through, and the closed end is engaged with the second driving mechanism (11).
8. The powder tumbling coating apparatus using magnetron sputtering as described in claim 7, characterized in that: The roller (13) has a feeding port in the middle and is detachably connected to a cover plate (1301).
9. The powder tumbling coating apparatus using magnetron sputtering as described in claim 6, characterized in that: The roller (13) is equipped with a scraper (18).
10. The powder tumbling coating apparatus using magnetron sputtering as described in claim 1, characterized in that: A vibration motor is connected to the roller (13).