Temperature-sensitive film magnetron sputtering device

Abstract

The utility model discloses a temperature-sensitive film magnetron sputtering device, and belongs to the technical field of magnetron sputtering. Comprising an isolation cylinder and a base fixed in the isolation cylinder, and further comprises an auxiliary laying cylinder, a substrate mounting seat and tinfoil, the substrate mounting seat comprises a base, a shaft rod annularly distributed on the base, an elastic piece rotationally arranged on the shaft rod and a spring fixed between the elastic piece and the shaft rod, and the base and the base are detachable. A winding cylinder is fixed to one side of the isolation cylinder, corresponding strip-shaped holes are formed in one side of the winding cylinder and one side of the isolation cylinder, the winding cylinder is detachable, the two ends of the tinfoil are wound and stored in the winding cylinder, the outer diameter of the auxiliary laying cylinder is close to the interior of the isolation cylinder, and the auxiliary laying cylinder is not attached to the interior of the isolation cylinder. And meanwhile, the technical effect of conveniently fixing the substrate is achieved.

Description

Technical Field

[0001] This application relates to the field of magnetron sputtering technology, and more specifically, to a temperature-sensitive thin-film magnetron sputtering device. Background Technology

[0002] Thermosensitive thin film magnetron sputtering is a technique that uses magnetron sputtering to deposit a thin film with temperature-sensitive properties onto a substrate.

[0003] In magnetron sputtering, high-energy ions bombard the target material, causing target atoms or molecules to be sputtered and deposited on the substrate to form a thin film. However, some impurity particles or sputtered materials may also be generated during sputtering. These particles can deposit on the inner wall of the isolation chamber, contaminating subsequent sputtering processes. To prevent contamination of the isolation chamber's inner wall during sputtering, tin foil is usually lined inside the isolation chamber. Compared to the inner wall of the isolation chamber, tin foil is easier to clean and replace. When the tin foil becomes contaminated, it can simply be removed and replaced with new tin foil, without requiring a complex cleaning of the entire vacuum chamber.

[0004] However, the current method of replacing the foil is mainly to manually tear off the foil and then stick it to the inner wall of the insulation tube. This method of replacing the foil is inconvenient to operate inside the insulation tube because of the manual sticker application.

[0005] In view of this, we propose a temperature-sensitive thin film magnetron sputtering device. Utility Model Content

[0006] 1. Technical problems to be solved

[0007] The purpose of this application is to provide a temperature-sensitive thin film magnetron sputtering device, which solves the technical problems in the background art mentioned above, and achieves the technical effect of facilitating the replacement of tin foil in the isolation cylinder and facilitating the fixation of the substrate.

[0008] 2. Technical Solution

[0009] This application provides a temperature-sensitive thin film magnetron sputtering device, including an isolation cylinder and a base fixed inside the isolation cylinder, as well as an auxiliary laying cylinder, a substrate mounting base, and tin foil. The substrate mounting base includes a base, a shaft distributed in a ring on the base, a spring piece rotatably mounted on the shaft, and a spring fixed between the spring piece and the shaft. The base and the base are detachable. A winding cylinder is fixed to one side of the isolation cylinder. Corresponding strip holes are opened on one side of both the winding cylinder and the isolation cylinder. The winding cylinder is detachable. The two ends of the tin foil are wound and stored inside the winding cylinder. The outer diameter of the auxiliary laying cylinder is close to the inside of the isolation cylinder but not in contact with it.

[0010] As an optional solution to the technical solution of this application, the upper surface of the base is provided with a plurality of positioning grooves arranged in a ring, and the side of the base away from the spring piece is provided with a plurality of positioning rods that are adapted to and correspond to the positioning grooves.

[0011] As an optional solution to the technical solution of this application, the winding cylinder includes a cylinder body with one end open, a sealing cover, a positioning shaft, a reel, and a hand crank fixed coaxially with the reel. The positioning shaft is fixed on the sealing cover. The open end of the cylinder body has multiple threaded holes. The sealing cover has multiple mounting holes corresponding to the threaded holes. The reel has insertion slots. The cylinder body has strip-shaped holes. The connection between the reel and the sealing cover is fitted with multiple sealing rings.

[0012] As an optional solution to the technical solution of this application, the inner bottom wall of the cylinder is provided with two shaft grooves, which correspond to and are adapted to the positioning shaft and the reel, respectively.

[0013] As an optional solution to the technical solution in this application, a handle is fixed on the spring.

[0014] As an optional solution to the technical solution of this application, the lower inner wall of the isolation cylinder is integrally formed with a first flange, the inner wall of the first flange is integrally formed with a second flange, the inner diameter of the first flange is adapted to the outer diameter of the auxiliary laying cylinder, the first flange is placed at the lower edge of the strip hole, and multiple support rods are distributed in a ring at both ends of the auxiliary laying cylinder.

[0015] 3. Beneficial effects

[0016] One or more technical solutions provided in the embodiments of this application have at least the following technical effects or advantages:

[0017] 1. This application involves loading the wound tin foil into a winding tube, shaping the portion of the tin foil in the isolation tube using an auxiliary laying tube, and then winding the tin foil using a roller. The used tin foil is wound onto the roller, while the unused tin foil is replaced into the isolation tube. This eliminates the need to cut the tin foil each time, resulting in a better overall appearance and facilitating quick replacement of the tin foil. Simultaneously, the base can be removed from the base, and the substrate can be installed on the base by rotating and moving the spring clip. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of a temperature-sensitive thin-film magnetron sputtering device disclosed in a preferred embodiment of this application;

[0019] Figure 2 This is a schematic diagram of the internal structure of the isolation cylinder of a temperature-sensitive thin-film magnetron sputtering device disclosed in a preferred embodiment of this application;

[0020] Figure 3This is a schematic diagram of the base structure of a temperature-sensitive thin-film magnetron sputtering device disclosed in a preferred embodiment of this application;

[0021] Figure 4 This is a schematic diagram of a substrate mounting base structure for a temperature-sensitive thin-film magnetron sputtering device disclosed in a preferred embodiment of this application;

[0022] Figure 5 This is a schematic diagram of the base bottom structure of a temperature-sensitive thin-film magnetron sputtering device disclosed in a preferred embodiment of this application;

[0023] Figure 6 This is a schematic diagram of the spring structure of a temperature-sensitive thin-film magnetron sputtering device disclosed in a preferred embodiment of this application;

[0024] Figure 7 This is a schematic diagram of the transverse cross-sectional structure of the isolation cylinder and winding cylinder of a temperature-sensitive thin-film magnetron sputtering device disclosed in a preferred embodiment of this application;

[0025] Figure 8 A temperature-sensitive thin-film magnetron sputtering apparatus disclosed in a preferred embodiment of this application Figure 7 Enlarged structural diagram at point A in the middle;

[0026] Figure 9 This is a schematic diagram of the cylinder and isolation cylinder structure of a temperature-sensitive thin-film magnetron sputtering device disclosed in a preferred embodiment of this application;

[0027] Figure 10 A temperature-sensitive thin-film magnetron sputtering apparatus disclosed in a preferred embodiment of this application Figure 9 Enlarged structural diagram at point B;

[0028] Figure 11 This is a schematic diagram of the structure of the roll, sealing cover and positioning shaft of a temperature-sensitive thin film magnetron sputtering device disclosed in a preferred embodiment of this application;

[0029] Figure 12 This is a schematic diagram of the roll structure of a temperature-sensitive thin-film magnetron sputtering device disclosed in a preferred embodiment of this application;

[0030] Figure 13 This is a schematic diagram of the isolation cylinder and the vertical rigid structure of the cylinder body of a temperature-sensitive thin-film magnetron sputtering device disclosed in a preferred embodiment of this application;

[0031] Figure 14 A temperature-sensitive thin-film magnetron sputtering apparatus disclosed in a preferred embodiment of this application Figure 13 Enlarged structural diagram at point C;

[0032] Figure 15 This is a schematic diagram of the auxiliary laying tube structure of a temperature-sensitive thin film magnetron sputtering device disclosed in a preferred embodiment of this application;

[0033] The following are the labels in the diagram: 1. Isolation cylinder; 11. Strip hole; 12. First flange; 13. Second flange; 2. Winding cylinder; 21. Cylinder body; 211. Threaded hole; 212. Shaft groove; 22. Sealing cap; 221. Mounting hole; 23. Positioning shaft; 24. Reel; 241. Insertion strip hole; 242. Sealing ring; 25. Hand crank; 3. Tin foil; 31. Reel; 4. Substrate mounting base; 41. Base; 411. Positioning rod; 42. Shaft; 43. Spring; 431. Handle; 44. Spring; 5. Auxiliary laying cylinder; 51. Support rod; 6. Base; 61. Positioning groove. Detailed Implementation

[0034] The present application will be further described in detail below with reference to the accompanying drawings.

[0035] A temperature-sensitive thin film magnetron sputtering device includes an isolation cylinder 1 and a base 6 fixed inside the isolation cylinder 1, as well as an auxiliary laying cylinder 5, a substrate mounting base 4, and tin foil 3. The substrate mounting base 4 includes a base 41, a shaft 42 annularly distributed on the base 41, a spring 43 rotatably mounted on the shaft 42, and a spring 44 fixed between the spring 43 and the shaft 42. The base 41 and the base 6 are detachable. A winding cylinder 2 is fixed on one side of the isolation cylinder 1. Corresponding strip holes 11 are opened on one side of both the winding cylinder 2 and the isolation cylinder 1. The winding cylinder 2 is detachable. The two ends of the tin foil 3 are wound and stored inside the winding cylinder 2. The outer diameter of the auxiliary laying cylinder 5 is close to the inside of the isolation cylinder 1 but not in contact with it.

[0036] Reference Figure 1 - Figure 15The rolled tin foil 3 is placed into the winding tube 2, and one end of the tin foil 3 is passed through the strip hole 11 and placed in the isolation tube 1. Then the tin foil 3 is pulled out, and the tin foil 3 is manually arranged close to the inner wall of the isolation tube 1 to form a cylindrical structure. Then it is passed through the strip hole 11 into the winding tube 2. Then the auxiliary laying tube 5 is inserted into the tube formed by the tin foil 3. Then the winding tube 2 is used to wind one end of the tin foil 3, and the rolled tin foil 3 is released. At this time, the auxiliary laying tube 5 is used to help pull out the tin foil 3 and form a cylindrical structure. Then the auxiliary laying tube 5 is slowly and rotated upwards to take it out. Then the base 41 is removed from the base 6. The spring 43 rotates around the shaft 42. By adjusting multiple springs 43, the substrate is placed on the base 41, so that the springs 43 press on the substrate. Under the elastic rebound force of the spring 44, the springs 43 press the substrate tightly. Finally, after the cover is closed and the isolation cylinder 1 is evacuated, the target atoms or molecules are sputtered out and deposited on the substrate to form a thin film. When it is necessary to replace the tin foil 3, the auxiliary laying cylinder 5 is slowly and rotated into the cylinder formed by the tin foil 3. Then the used tin foil 3 is wound around, and the new tin foil 3 is replaced in the isolation cylinder 1. This eliminates the need to cut the tin foil 3 each time, and the overall appearance is better, which facilitates the quick replacement of the tin foil 3.

[0037] The upper surface of the base 6 has a plurality of positioning grooves 61 arranged in a ring, and the side of the base 41 away from the spring piece 43 has a plurality of positioning rods 411 arranged in a ring that are adapted to and correspond to the positioning grooves 61.

[0038] Reference Figure 3 and Figure 5 Insert the positioning rod 411 into the corresponding positioning groove 61 so that the base 41 can be positioned and installed on the base 6.

[0039] The winding cylinder 2 includes a cylinder body 21 with one end open, a sealing cover 22, a positioning shaft 23, a reel 24, and a hand crank 25 fixed coaxially with the reel 24. The positioning shaft 23 is fixed on the sealing cover 22. The open end of the cylinder body 21 has multiple threaded holes 211. The sealing cover 22 has multiple mounting holes 221 corresponding to the threaded holes 211. The reel 24 has a strip insertion hole 241. The cylinder body 21 has a strip hole 11. The connection part between the reel 24 and the sealing cover 22 is fitted with multiple sealing rings 242.

[0040] Reference Figure 7 - Figure 14The lower end of the insertion hole 241 is open, and the sealing cover 22 is adapted to the open end of the cylinder 21. A sealing gasket is placed at the edge of the opening of the cylinder 21 to increase the sealing performance between the sealing cover 22 and the cylinder 21. Bolts are installed into the mounting hole 221 and connected to the threaded hole 211 by the bolts to facilitate the assembly and disassembly of the sealing cover 22 and the cylinder 21. Unused tin foil 3 is wound on the drum 31, which can be inserted into the positioning shaft 23. After the foil 3 is laid in a cylindrical shape inside the isolation cylinder 1, the end is inserted into the insertion strip hole 241. At this time, the tin foil 3 can be wound by rotating the roller 24. The roller 24 is rotated by the hand crank 25. The roller 24 improves the sealing performance with the sealing cover 22 through multiple sealing rings 242. The roller 24 is placed at one end of the sealing ring 242 and the limiting ring is symmetrically fixed. The roller 24 passes through the sealing cover 22 and is prevented from moving axially under the action of the limiting ring.

[0041] Two shaft grooves 212 are provided on the bottom wall of the inner cylinder 21. The two shaft grooves 212 correspond to and are adapted to the positioning shaft 23 and the winding shaft 24, respectively.

[0042] Reference Figure 13 and Figure 14 After the sealing cover 22 is closed with the cylinder 21, the positioning shaft 23 and the reel 24 are respectively inserted into the corresponding shaft groove 212, thereby improving the stability of the positioning shaft 23 and the reel 24 through the shaft groove 212.

[0043] A handle 431 is fixed on the spring 43.

[0044] Reference Figure 6 By using the handle 431, pinching the handle 431, lifting the spring 43 upward and moving the spring 43, the substrate can be pressed onto the spring 43 or removed from under the spring 43.

[0045] The lower end of the isolation cylinder 1 has an integrally formed first flange 12 on its inner wall, and the inner wall of the first flange 12 has an integrally formed second flange 13. The inner diameter of the first flange 12 is adapted to the outer diameter of the auxiliary laying cylinder 5. The first flange 12 is placed at the lower edge of the strip hole 11. Multiple support rods 51 are distributed in a ring at both ends of the auxiliary laying cylinder 5.

[0046] Reference Figure 13 - Figure 15The inner diameter of the first flange 12 is smaller than the inner diameter of the isolation cylinder 1. The rolled-up tin foil 3 can be supported on the first flange 12 to improve the stability of the tin foil 3. The inner diameter of the second flange 13 is smaller than the inner diameter of the first flange 12 and forms a stepped groove. The auxiliary laying cylinder 5 is inserted into the barrel-shaped tin foil 3 and supported at the stepped groove on the second flange 13. At this time, the auxiliary laying cylinder 5 and the inner wall of the isolation cylinder 1 form an annular channel to facilitate the rolling of the tin foil 3. The tin foil 3 is shaped by the auxiliary laying cylinder 5. At the same time, the two ends of the auxiliary laying cylinder 5 are supported by multiple support rods 51 to avoid the problem that the two ends of the cylinder cannot be inserted into the stepped groove due to deformation.

[0047] Working principle: Remove the bolt from the threaded hole 211 counterclockwise through the mounting hole 221, allowing the sealing cap 22 to be removed from the cylinder 21. Then, place the roll 31 wrapped with tin foil 3 into the cylinder 21. Pull one end of the tin foil 3 outwards and through the slot 11 into the isolation cylinder 1. The tin foil 3 will adhere to the inner wall of the isolation cylinder 1. Then, insert the tin foil 3 back into the cylinder 21 through the slot 11, ensuring the end is positioned to one side of the roll 24. Finally, install the sealing cap 22 onto the cylinder 21. The positioning shaft 23 is inserted into the roll 31, and the end of the tin foil 3 is inserted into the insertion strip hole 241. The sealing cover 22 and the cylinder 21 are fixed by bolts. Then, the auxiliary laying tube 5 is installed into the isolation tube 1 and inserted into the cylindrical tin foil 3, while being supported on the second flange 13. At this time, the hand crank 25 can be turned to wind the tin foil 3 onto the roll 24, and the tin foil 3 is shaped by the auxiliary laying tube 5. After the shaping is completed, the auxiliary laying tube 5 is slowly and rotated out of the isolation tube 1.

Claims

1. A temperature-sensitive thin film magnetron sputtering device, comprising an isolation cylinder (1) and a base (6) fixed inside the isolation cylinder (1), characterized in that: It also includes an auxiliary laying tube (5), a substrate mounting base (4), and tin foil (3). The substrate mounting base (4) includes a base (41), a shaft (42) distributed in a ring on the base (41), a spring (43) rotatably mounted on the shaft (42), and a spring (44) fixed between the spring (43) and the shaft (42). The base (41) and the base (6) are detachable. A winding tube (2) is fixed on one side of the isolation tube (1). Corresponding strip holes (11) are opened on one side of both the winding tube (2) and the isolation tube (1). The winding tube (2) is detachable. The two ends of the tin foil (3) are wound and stored in the winding tube (2). The outer diameter of the auxiliary laying tube (5) is close to the inside of the isolation tube (1) but not in contact with it.

2. The temperature-sensitive thin film magnetron sputtering apparatus according to claim 1, characterized in that: The upper surface of the base (6) is provided with a plurality of positioning grooves (61) arranged in a ring. On the side of the base (41) away from the spring piece (43), a plurality of positioning rods (411) that are adapted to and correspond to the positioning grooves (61) are arranged in a ring.

3. The temperature-sensitive thin film magnetron sputtering apparatus according to claim 1, characterized in that: The winding cylinder (2) includes a cylinder (21) with one end open, a sealing cover (22), a positioning shaft (23), a reel (24), and a hand crank (25) coaxially fixed with the reel (24). The positioning shaft (23) is fixed on the sealing cover (22). The open end of the cylinder (21) is provided with multiple threaded holes (211). The sealing cover (22) is provided with multiple mounting holes (221) corresponding to the threaded holes (211). The reel (24) is provided with a strip insertion hole (241). The cylinder (21) is provided with a strip-shaped hole (11). The connection part between the reel (24) and the sealing cover (22) is fitted with multiple sealing rings (242).

4. The temperature-sensitive thin film magnetron sputtering apparatus according to claim 3, characterized in that: The inner bottom wall of the cylinder (21) has two shaft grooves (212), which correspond to and are adapted to the positioning shaft (23) and the reel (24) respectively.

5. The temperature-sensitive thin film magnetron sputtering apparatus according to claim 2, characterized in that: A handle (431) is fixed on the spring (43).

6. The temperature-sensitive thin film magnetron sputtering apparatus according to claim 1, characterized in that: The lower end of the isolation cylinder (1) has an integrally formed first flange (12) on its inner wall, and the inner wall of the first flange (12) has an integrally formed second flange (13). The inner diameter of the first flange (12) is adapted to the outer diameter of the auxiliary laying cylinder (5). The first flange (12) is placed at the lower edge of the strip hole (11). Multiple support rods (51) are distributed in a ring at both ends of the auxiliary laying cylinder (5).

Images