Signal transmission mechanism in vacuum chamber

Abstract

The utility model belongs to the field of vacuum coating, and particularly relates to a signal transmission mechanism in a vacuum chamber, which comprises a transmission rod, a first transmission end, a second transmission end and a signal transmission mechanism, the triggering piece is used for corresponding to the position of a goods shelf in the film coating cavity and is arranged on the first transmission end; a travel switch; the travel switch is fixedly arranged on the insulation sleeve, the insulation sleeve is rotatably arranged on the transmission rod in a sleeving mode, the other end of the transmission rod penetrates through the insulation sleeve to form a second transmission end used for triggering the travel switch, and the second transmission end corresponds to the position of the travel switch. According to the utility model, when the goods shelf is conveyed to enter the next coating cavity, the trigger piece is pushed to drive the transmission rod to rotate through the trigger piece, and then the travel switch is triggered through the second transmission end at the other end of the transmission rod, so that the position information of the goods shelf during transmission between the coating cavities is obtained; therefore, the goods shelf can be conveyed more accurately.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum coating, and specifically relates to a signal transmission mechanism in a vacuum chamber. Background Technology

[0002] Vacuum coating technology is an important branch of vacuum application technology. It involves the application of a series of new technologies such as electron beam, molecular beam, ion beam, plasma beam, radio frequency, and magnetron sputtering. It is a method of evaporating or sputtering metals, alloys, or compounds in a vacuum, causing them to condense and deposit on the surface of a workpiece to form a thin film. In vacuum coating, the workpiece is usually mounted on a rack, which carries the workpiece in the coating chamber of the coating equipment for coating. However, most existing vacuum coating equipment is a single-chamber equipment. This type of equipment can only meet a single coating process. When the workpiece needs to be coated by multiple coating processes, the rack needs to be manually moved between multiple single-chamber coating equipment, resulting in poor coating efficiency.

[0003] To improve the efficiency of coating processes, existing technologies have innovatively proposed a continuous vacuum coating equipment concept equipped with multiple coating chambers. However, this type of continuous vacuum coating equipment has encountered challenges in practice: as the rack moves between coating chambers, it is difficult to accurately capture its position information. This shortcoming directly threatens the stability and reliability of the rack's transport between chambers. Therefore, how to obtain the rack's position information during transport between coating chambers to ensure more accurate rack transport is an urgent problem to be solved. Utility Model Content

[0004] The purpose of this invention is to provide a signal transmission mechanism inside a vacuum chamber, which can acquire the position information of the shelf when it is transferred between coating chambers, so as to ensure more accurate transport of the shelf.

[0005] To achieve the above objectives, the technical solution of this utility model is as follows.

[0006] A signal transmission mechanism for a vacuum chamber, comprising:

[0007] A transfer rod, one end of which is formed with a first transfer end for extending into the coating cavity;

[0008] A trigger element is used to correspond to the shelf position inside the coating cavity, the trigger element being disposed on the first transmission end;

[0009] Limit switch;

[0010] An insulating sleeve is used to fix the limit switch on the surface of the coating equipment. The insulating sleeve is rotatably fitted onto the transmission rod, and the other end of the transmission rod passes through the insulating sleeve to form a second transmission end for triggering the limit switch. The second transmission end corresponds to the position of the limit switch.

[0011] In this mechanism, when the shelf is conveyed to the next coating chamber, a trigger is pushed, which drives the transmission rod to rotate. This triggers a limit switch through the second transmission end at the other end of the transmission rod, thereby obtaining the position information of the shelf during its transfer between coating chambers to ensure more accurate conveying of the shelf. Furthermore, the insulating sleeve effectively prevents current from being transmitted to the limit switch, ensuring its reliability.

[0012] Furthermore, the mechanism also includes a switch control component for triggering the limit switch, one end of which is fixedly sleeved on the second transmission end, and the other end of which corresponds to the position of the limit switch.

[0013] Furthermore, the other end of the switch control component is provided with a support post, a switch frame is fixedly provided on the insulating sleeve, and the limit switch is fixedly provided on the switch frame and corresponds to the position of the support post.

[0014] Furthermore, a reset torsion spring is sleeved on the second transmission end, and a reset part is provided on the insulating sleeve. One end of the reset torsion spring abuts against or connects with the reset part.

[0015] Furthermore, the insulating sleeve is provided with a receiving cavity, in which a first bearing, one or more oil seals, and a second bearing are sequentially arranged. The other end of the transmission rod passes through the receiving cavity of the insulating sleeve, and the first bearing, one or more oil seals, and the second bearing are sleeved on one side of the transmission rod.

[0016] Furthermore, the trigger includes a rotating part and trigger teeth corresponding to the shelf position inside the coating cavity. The trigger teeth are fixedly disposed on the rotating part, and the rotating part is fixedly sleeved on the first transmission end.

[0017] Furthermore, one side of the trigger tooth is provided with an arc-shaped trigger surface corresponding to the position of the shelf inside the coating cavity.

[0018] The beneficial effects of this utility model are that, in this mechanism, when the shelf is conveyed to enter the next coating chamber, the trigger will be pushed, so that the transmission rod will be rotated by the trigger, and then the limit switch will be triggered through the second transmission end of the other end of the transmission rod, thereby realizing the position information of the shelf when it is transferred between coating chambers, so as to ensure more accurate conveying of the shelf; and based on the setting of the insulating sleeve, the current can be effectively prevented from being transmitted to the limit switch, so as to ensure the reliability of the limit switch. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the signal transmission mechanism and the shell of the coating equipment inside the vacuum chamber.

[0020] Figure 2 This is a schematic diagram of the signal transmission mechanism inside the vacuum chamber.

[0021] Figure 3 This is a cross-sectional view of the signal transmission mechanism inside the vacuum chamber.

[0022] Icon labels:

[0023] 1. Passing rod; 11. First passing end; 12. Second passing end;

[0024] 2. Trigger element; 21. Rotating part; 22. Trigger tooth; 23. Arc-shaped trigger surface;

[0025] 3. Limit switch;

[0026] 4. Insulating sleeve; 41. Receiving cavity; 42. First bearing; 43. Oil seal; 44. Second bearing; 45. Switch frame;

[0027] 5. Return torsion spring;

[0028] 6. Reset section;

[0029] 7. Switch control components; 71. Support post;

[0030] 8. Coating equipment;

[0031] 9. Coating cavity. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0033] See Figure 1-3 This embodiment provides a signal transmission mechanism for a vacuum chamber, comprising:

[0034] The transfer rod 1 has a first transfer end 11 formed at one end for extending into the coating cavity 9;

[0035] Trigger 2 is used to correspond to the shelf position inside the coating chamber 9, and trigger 2 is disposed on the first transmission end 11;

[0036] Limit switch 3;

[0037] An insulating sleeve 4 is used to fix the coating equipment 8 on the surface. A limit switch 3 is fixedly mounted on the insulating sleeve 4. The insulating sleeve 4 is rotatably mounted on the transmission rod 1. The other end of the transmission rod 1 passes through the insulating sleeve 4 to form a second transmission end 12 for triggering the limit switch 3. The second transmission end 12 corresponds to the position of the limit switch 3.

[0038] In this mechanism, when the shelf is conveyed to enter the next coating chamber 9, the trigger 2 is pushed, which drives the transmission rod 1 to rotate. Then, the second transmission end 12 at the other end of the transmission rod 1 triggers the limit switch 3, thereby obtaining the position information of the shelf when it is transferred between coating chambers 9, so as to ensure more accurate conveying of the shelf. Moreover, based on the setting of the insulating sleeve 4, current can be effectively prevented from being transmitted to the limit switch 3, so as to ensure the reliability of the limit switch 3.

[0039] In this embodiment, the mechanism also includes a switch control component 7 for triggering the limit switch 3. One end of the switch control component 7 is fixedly sleeved on the second transmission end 12, and the other end of the switch control component 7 corresponds to the position of the limit switch 3.

[0040] In this embodiment, a support post 71 is provided at the other end of the switch control component 7, a switch frame 45 is fixedly provided on the insulating sleeve 4, and the limit switch 3 is fixedly provided on the switch frame 45 and corresponds to the position of the support post 71.

[0041] In this embodiment, a reset torsion spring 5 is sleeved on the second transmission end 12, and a reset part 6 is provided on the insulating sleeve 4. One end of the reset torsion spring 5 abuts against or connects with the reset part 6.

[0042] In this embodiment, the insulating sleeve 4 is provided with a receiving cavity 41, and a first bearing 42, one or more oil seals 43, and a second bearing 44 are sequentially arranged in the receiving cavity 41. The other end of the transmission rod 1 passes through the receiving cavity 41 of the insulating sleeve 4, and the first bearing 42, one or more oil seals 43, and the second bearing 44 are sleeved on one side of the transmission rod 1.

[0043] In this embodiment, the trigger 2 includes a rotating part 21 and a trigger tooth 22 corresponding to the shelf position inside the coating cavity 9. The trigger tooth 22 is fixedly disposed on the rotating part 21, and the rotating part 21 is fixedly sleeved on the first transmission end 11.

[0044] In this embodiment, an arc-shaped trigger surface 23 corresponding to the shelf position inside the coating cavity 9 is provided on one side of the trigger tooth 22.

[0045] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A signal transmission mechanism for a vacuum chamber, characterized in that, include: A transfer rod, one end of which is formed with a first transfer end for extending into the coating cavity; A trigger element is used to correspond to the shelf position inside the coating cavity, the trigger element being disposed on the first transmission end; Limit switch; An insulating sleeve is used to fix the limit switch on the surface of the coating equipment. The insulating sleeve is rotatably fitted onto the transmission rod, and the other end of the transmission rod passes through the insulating sleeve to form a second transmission end for triggering the limit switch. The second transmission end corresponds to the position of the limit switch.

2. The signal transmission mechanism in a vacuum chamber according to claim 1, characterized in that, The mechanism also includes a switch control component for triggering the limit switch. One end of the switch control component is fixedly sleeved on the second transmission end, and the other end of the switch control component corresponds to the position of the limit switch.

3. The signal transmission mechanism in a vacuum chamber according to claim 2, characterized in that, The other end of the switch control component is provided with a support post, and a switch frame is fixedly provided on the insulating sleeve. The limit switch is fixedly provided on the switch frame and corresponds to the position of the support post.

4. The signal transmission mechanism in a vacuum chamber according to claim 1, characterized in that, A reset torsion spring is sleeved on the second transmission end, and a reset part is provided on the insulating sleeve. One end of the reset torsion spring abuts against or is connected to the reset part.

5. A signal transmission mechanism for a vacuum chamber according to claim 1, characterized in that, The insulating sleeve has a receiving cavity, in which a first bearing, one or more oil seals, and a second bearing are sequentially arranged. The other end of the transmission rod passes through the receiving cavity of the insulating sleeve, and the first bearing, one or more oil seals, and the second bearing are sleeved on one side of the transmission rod.

6. A signal transmission mechanism for a vacuum chamber according to claim 1, characterized in that, The triggering element includes a rotating part and trigger teeth corresponding to the position of the shelf inside the coating cavity. The trigger teeth are fixedly disposed on the rotating part, and the rotating part is fixedly sleeved on the first transmission end.

7. A signal transmission mechanism for a vacuum chamber according to claim 6, characterized in that, One side of the trigger tooth is provided with an arc-shaped trigger surface corresponding to the position of the shelf inside the coating cavity.

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