Gas supply panel for artificial diamond cultivation equipment

By designing a gas supply panel in the diamond growing equipment, precise mixing and pressure regulation of the carbon source gas and carrier gas can be achieved, solving the problems of insufficient mixing and unadjustable pressure in existing equipment, and improving the diamond growth rate and quality.

CN223837642UActive Publication Date: 2026-01-27XIAN MIRROR SCREEN SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202520283493.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-02-21
Publication Date
2026-01-27
Estimated Expiration
2035-02-21

AI Technical Summary

Technical Problem

Existing diamond cultivation equipment suffers from insufficient mixing of carbon source gas and carrier gas, inaccurate gas flow control, and inability to adjust gas pressure, which affects the diamond growth rate and quality.

Method used

A gas supply panel was designed, comprising a gas mass flow controller, a preliminary mixing chamber, a static mixing cylinder, and a pressurizing chamber, to achieve precise mixing and pressure regulation of carbon source gas and carrier gas. Through the cooperation of helical blades and pressurizing plates, the precise supply of gas is ensured during different growth cycles.

Benefits of technology

It achieves precise supply of carbon source gas and carrier gas in terms of ratio and flow rate, improves diamond growth rate and quality, meets gas pressure requirements for different growth cycles, and enhances the practicality of diamond cultivation equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a gas supply panel for artificial diamond cultivation equipment, which relates to the technical field of diamond cultivation and comprises a gas supply plate and a gas supply box, a gas mass flow controller is arranged on one side wall of the gas supply plate, and a preliminary mixing cavity is arranged inside one end of the gas supply box close to the gas supply plate. A static mixing cavity is formed in the middle of the air supply box, a mixing assembly is arranged in a cavity body of the static mixing cavity, a pressurizing cavity is formed in the tail of the air supply box, and a pressurizing assembly is arranged at the top of the pressurizing cavity. According to the utility model, the gas mass flow controller is used for guaranteeing that carbon source gas, hydrogen and the like are supplied according to an accurate proportion and flow, so that the growth speed and quality of the diamond are accurately controlled, and the carbon source gas and carrier gas are fully mixed through the preliminary mixing cavity and the static mixing cylinder, so that the growth speed and quality of the diamond are improved; and the pressure of the gas is adjusted through the pressurizing cavity so as to meet different requirements of different growth periods of the diamond on the gas pressure.
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Description

Technical Field

[0001] This utility model relates to the field of lab-grown diamond technology, specifically a gas supply panel for artificially lab-grown diamond equipment. Background Technology

[0002] Diamonds are polished diamonds that combine high refractive index, high hardness, and high dispersion value, making them beautiful and rare. With the development of technology, diamonds can also be grown using techniques. Grown diamonds are synthetic diamonds that are cultivated in a laboratory to simulate the natural formation environment of natural diamonds. They are mainly synthesized using high temperature and high pressure methods and chemical vapor deposition methods, and are also known as grown diamonds. Among these, chemical vapor deposition is currently the most widely used method for preparing single-crystal diamonds both domestically and internationally.

[0003] Chinese Patent Publication No. CN220433079U discloses an MPCVD cultured diamond growth device, which includes a base, a cultivation component mounted on the top of the base, and a feeding component mounted on the top of the base. The cultivation component includes two fixed seats fixedly connected to the top of the base, an organic body fixedly connected between the tops of the two fixed seats, a fixed block fixedly connected to the inner bottom wall of the organic body, an installation groove formed on the top of the fixed block, a heating plate fixedly connected inside the installation groove, a diamond substrate fixedly connected to the top of the fixed block, a filter screen fixedly connected to the inner right side wall of the organic body, an installation block fixedly connected to the top of the base, and a sealed door hinged to the front of the organic body. This MPCVD cultured diamond growth device can provide a large amount of high-concentration carbon source gas using hair as raw material and can effectively filter the carbon source gas, thus improving the practicality of the MPCVD cultured diamond growth device.

[0004] However, the aforementioned patents use a method of directly supplying carbon source gas into the reaction chamber during diamond cultivation. In the chemical vapor deposition process, carbon source gas and carrier gases such as hydrogen must be supplied in precise proportions and flow rates to fully mix in order to effectively improve the growth rate and quality of diamonds. The aforementioned patents do not have the function of fully mixing carbon source gas and carrier gas, and the gas supply method using a fan is not convenient for controlling the gas flow rate. Furthermore, different growth stages of diamonds have different gas pressure requirements, and the aforementioned patents cannot adjust the gas pressure. Therefore, a gas supply panel for artificial diamond cultivation equipment is needed to achieve the above-mentioned effects. Utility Model Content

[0005] The purpose of this invention is to provide a gas supply panel for artificial diamond growing equipment to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a gas supply panel for artificial diamond cultivation equipment, comprising a gas supply plate and a gas supply box. A gas mass flow controller is installed on one side wall of the gas supply plate. A preliminary mixing chamber is opened inside the gas supply box at one end near the gas supply plate. The output end of the gas mass flow controller is connected to the inner cavity of the preliminary mixing chamber. A static mixing chamber is opened in the middle of the gas supply box. A mixing component is arranged in the cavity of the static mixing chamber. A pressurization chamber is opened at the tail of the gas supply box. A pressurization plate is arranged in the inner cavity of the pressurization chamber. A lifting rod is fixedly connected to the top wall of the pressurization plate. A pressurization component is arranged on the top of the pressurization chamber.

[0007] Preferably, the mixing assembly includes a static mixing cylinder installed in the inner cavity of the static mixing chamber. The two side walls of the static mixing cylinder are connected to second air guide pipes, which are respectively connected to the preliminary mixing chamber and the pressurization chamber. The inner cavity of the static mixing cylinder is equipped with helical blades.

[0008] Preferably, the pressurization assembly includes an adjustment chamber located inside the air supply box. A threaded rod is disposed within the cavity of the adjustment chamber. The bottom end of the threaded rod is rotatably connected to the bottom wall of the adjustment chamber, and the top end of the threaded rod penetrates the top wall of the air supply box. A movable plate is disposed within the cavity of the adjustment chamber and screwed onto the surface of the threaded rod. The bottom wall of the movable plate is fixedly connected to the top end of the lifting rod. The lifting rod movably penetrates the bottom wall of the adjustment chamber and extends into the cavity of the pressurization chamber.

[0009] Preferably, an adjustment knob is fixedly installed at the top end of the threaded rod.

[0010] Preferably, a first air guide pipe is provided on one side wall of the air supply box, which is connected to the cavity of the pressurization chamber.

[0011] Preferably, three gas mass flow controllers are arranged at equal intervals.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. This utility model, by installing a gas mass flow controller on the gas supply plate, can ensure that carbon source gas and hydrogen are supplied in precise proportions and flow rates during the artificial diamond growing process, such as chemical vapor deposition, thereby accurately controlling the growth rate and quality of the diamond.

[0014] 2. This utility model, by setting a preliminary mixing chamber and a static mixing cylinder in the gas supply box, allows the carbon source gas to be fully mixed in the gas supply box. The carbon source gas and carrier gas introduced by the gas mass flow controller are pre-mixed in the preliminary mixing chamber and then enter the static mixing cylinder with spiral blades. This allows the carbon source gas and carrier gas to be fully mixed in a spiral flow before entering the cultivation equipment, thereby achieving full mixing, which is beneficial to improving the growth rate and quality of diamonds.

[0015] 3. By setting up a pressurizing chamber, the volume of the pressurizing chamber can be changed by the lifting and lowering action of the threaded rod driving the pressurizing plate, thereby changing the gas flow pressure and realizing the adjustment of gas pressure to meet the different gas pressure requirements of different diamond growth stages. Attached Figure Description

[0016] Figure 1 This is a first-view structural schematic diagram of a gas supply panel for an artificial diamond growing equipment according to the present invention.

[0017] Figure 2 This is a partial cross-sectional view of the gas supply panel for an artificial diamond growing equipment according to the present invention.

[0018] Figure 3 This is a partial cross-sectional view of the gas supply panel for an artificial diamond growing equipment according to the present invention.

[0019] Figure 4 This is a partial cross-sectional view of the gas supply panel for an artificial diamond growing equipment according to the present invention.

[0020] Figure 5 This is a partial cross-sectional schematic diagram of the static mixing cylinder of a gas supply panel for an artificial diamond growing equipment according to the present invention.

[0021] In the diagram: 1. Gas supply plate; 2. Gas supply box; 3. Gas mass flow controller; 4. Adjustment knob; 5. Threaded rod; 6. First gas guide pipe; 7. Static mixing chamber; 8. Static mixing cylinder; 9. Second gas guide pipe; 10. Pressurization chamber; 11. Pressurization plate; 12. Lifting rod; 13. Preliminary mixing chamber; 14. Adjustment chamber; 15. Moving plate; 16. Spiral blade. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 This utility model provides a technical solution: a gas supply panel for artificial diamond cultivation equipment, comprising a gas supply plate 1 and a gas supply box 2, which together constitute the gas supply panel. A gas mass flow controller 3 is installed on the left side wall of the gas supply plate 1. The carbon source gas and carrier gas required in the chemical vapor deposition process can be connected to the input end of the gas mass flow controller 3, which controls the flow and mass. A preliminary mixing chamber 13 is located inside the gas supply box 2 near the gas supply plate 1. The output end of the gas mass flow controller 3 is connected to the inner cavity of the preliminary mixing chamber 13, which allows the carbon source gas and carrier gas to enter the preliminary mixing chamber 13 for pre-mixing, thereby improving the mixing degree of the carbon source gas and carrier gas. A static mixing chamber 7 is located in the middle of the gas supply box 2. The static mixing chamber 7 is equipped with a mixing component for secondary mixing of the gas in the preliminary mixing chamber 13, further improving the mixing degree. The pressurization chamber 10 is located at the rear of the gas supply box 2. The pressurization plate 11 is installed in the inner cavity of the pressurization chamber 10. A lifting rod 12 is welded to the top wall of the pressurization plate 11. A pressurization assembly is provided at the top of the pressurization chamber 10 to cooperate with the lifting rod 12 and drive the pressurization plate 11 to move up and down in the pressurization chamber 10, thereby changing the gas pressure.

[0024] The mixing assembly includes a static mixing cylinder 8 installed inside the static mixing chamber 7. Second gas guide pipes 9 are connected to both the left and right side walls of the static mixing cylinder 8. These second gas guide pipes 9 are respectively connected to the preliminary mixing chamber 13 and the pressurizing chamber 10, facilitating gas flow. Spiral blades 16 are installed inside the static mixing cylinder 8, allowing the carbon source gas and carrier gas to undergo thorough spiral flow mixing before entering the cultivation equipment, thereby achieving sufficient mixing and improving the diamond growth rate and quality. The pressurization assembly includes an adjustment chamber 14 located inside the gas supply box 2. A threaded rod 5 is installed in the chamber of the adjustment chamber 14. The bottom end of the threaded rod 5 is rotatably connected to the bottom wall of the chamber of the adjustment chamber 14 via a bearing, and the top end of the threaded rod 5 passes through the top wall of the gas supply box 2 via a bearing. A movable plate 15 is installed in the chamber of the adjustment chamber 14 and screwed onto the surface of the threaded rod 5. The bottom wall of the movable plate 15 is welded to the top end of the lifting rod 12. That is, the lifting rod 12 moves through the bottom wall of the chamber of the adjustment chamber 14 and extends into the chamber of the pressurization chamber 10. Its main purpose is to drive the movable plate 15 down along the threaded rod 5 by rotating the threaded rod 5, and then drive the lifting rod 12 to lower the pressurization plate 11 in the pressurization chamber 10, so that the volume of the pressurization chamber 10 can be changed, thereby changing the gas flow pressure and realizing the adjustment of the gas pressure to meet the different gas pressure requirements of different diamond growth stages. An adjustment knob 4 is welded to the top of the threaded rod 5 to facilitate rotation of the threaded rod 5 via the adjustment knob 4. A first gas guide pipe 6, connected to the chamber of the pressurization chamber 10, is provided on the right side wall of the gas supply box 2. The mixed gas can be introduced into the reaction chamber of the diamond cultivation equipment through the first gas guide pipe 6. Three gas mass flow controllers 3 are arranged equidistantly to facilitate the delivery of various carbon source gases.

[0025] By installing a gas mass flow controller 3 on the gas supply plate 1, the gas mass flow controller 3 can be a high-precision mass flow controller (MFC) with an accuracy of ±0.5% or even higher. This high-precision flow control ensures that during the artificial diamond growing process, such as chemical vapor deposition (CVD), the carbon source gas and carrier gas, such as hydrogen, are supplied in precise proportions and flow rates, thereby accurately controlling the diamond growth rate and quality. By setting a preliminary mixing chamber 13 and a static mixing cylinder 8 in the gas supply box 2, the carbon source gas can be fully mixed in the gas supply box 2. The carbon source gas and carrier gas introduced by the gas mass flow controller 3 are pre-mixed in the preliminary mixing chamber 13 and then enter the static mixing cylinder 8 with spiral blades 16. This allows the carbon source gas and carrier gas to undergo sufficient spiral flow mixing before entering the growing equipment, thereby achieving thorough mixing and improving the diamond growth rate and quality. By adjusting the knob 4 to rotate the threaded rod 5, the threaded rod 5 can drive the pressure plate 11 to rise and fall, thereby changing the volume of the pressure chamber 10, which in turn changes the gas flow pressure, thus achieving the adjustment of gas pressure to meet the different gas pressure requirements of different diamond growth stages.

[0026] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0027] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A gas supply panel for an artificial diamond growing device, comprising a gas supply plate (1) and a gas supply box (2), characterized in that: A gas mass flow controller (3) is installed on one side wall of the gas supply plate (1). A preliminary mixing chamber (13) is opened inside the gas supply box (2) near the gas supply plate (1). The output end of the gas mass flow controller (3) is connected to the inner cavity of the preliminary mixing chamber (13). A static mixing chamber (7) is opened in the middle of the gas supply box (2). A mixing component is provided in the cavity of the static mixing chamber (7). A pressurizing chamber (10) is opened at the tail of the gas supply box (2). A pressurizing plate (11) is provided in the inner cavity of the pressurizing chamber (10). A lifting rod (12) is fixedly connected to the top wall of the pressurizing plate (11). A pressurizing component is provided on the top of the pressurizing chamber (10).

2. The gas supply panel for artificial diamond growing equipment according to claim 1, characterized in that: The mixing assembly includes a static mixing cylinder (8) installed in the inner cavity of the static mixing chamber (7). The two side walls of the static mixing cylinder (8) are connected to second air guide pipes (9). The second air guide pipes (9) on both sides are connected to the preliminary mixing chamber (13) and the pressurizing chamber (10) respectively. The inner cavity of the static mixing cylinder (8) is equipped with a spiral blade (16).

3. The gas supply panel for artificial diamond growing equipment according to claim 1, characterized in that: The pressurization assembly includes an adjustment chamber (14) located inside the air supply box (2). A threaded rod (5) is provided in the cavity of the adjustment chamber (14). The bottom end of the threaded rod (5) is rotatably connected to the bottom wall of the cavity of the adjustment chamber (14). The top end of the threaded rod (5) penetrates the top wall of the air supply box (2). A movable plate (15) is provided in the cavity of the adjustment chamber (14) and screwed onto the surface of the threaded rod (5). The bottom wall of the movable plate (15) is fixedly connected to the top end of the lifting rod (12). The rod of the lifting rod (12) moves through the bottom wall of the cavity of the adjustment chamber (14) and extends into the cavity of the pressurization chamber (10).

4. The gas supply panel for artificial diamond growing equipment according to claim 3, characterized in that: An adjustment knob (4) is fixedly installed at the top of the threaded rod (5).

5. The gas supply panel for artificial diamond growing equipment according to claim 1, characterized in that: The gas supply box (2) has a first air guide pipe (6) on one side wall that is connected to the cavity of the pressurization chamber (10).

6. The gas supply panel for artificial diamond growing equipment according to claim 1, characterized in that: The gas mass flow controllers (3) are arranged in three equidistant positions.

Citation Information

Patent Citations

  • MPCVD cultivation diamond growth equipment

    CN220433079U