Novel gate valve structure and annealing equipment

Abstract

The utility model provides a novel door valve structure and annealing equipment. The novel door valve structure comprises a door plate, a base arranged on the side, opposite to an opening, of the door plate, a reciprocating piece embedded in the base and a blocking piece arranged between the door plate and the base. The side, facing the door plate, of the base is provided with a containing cavity for containing the reciprocating piece, the reciprocating piece comprises a first column and a third column which are sequentially connected in the radial direction, the first column is fixedly connected with the door plate, the third column is contained in the containing cavity, and the side, back on to the first column, of the third column and the containing cavity form a gas seam. The blocking piece is arranged on the outer side of the cavity opening of the containing cavity so as to limit the first column body in the containing cavity. Compressed gas is conveyed to or output from the gas seam through the gas supply pipe, so that the reciprocating piece applies or cancels pressing force for sealing the opening to the door plate. According to the utility model, the opening formed by the annealing cabin in the annealing equipment is movably sealed.

Description

Technical Field

[0001] This utility model relates to the field of heat treatment technology, and in particular to a novel valve structure and annealing equipment. Background Technology

[0002] Wafer annealing equipment is specialized equipment used in semiconductor manufacturing to anneal wafers. The annealing process improves the electrical properties and structural characteristics of the wafer through heating and cooling. Wafer annealing equipment typically consists of a process chamber with an opening and a gate valve with a door plate. The gate valve drives the door plate to open or close the opening. When open, the opening allows a robotic arm to transfer the wafer into or out of the process chamber. When closed, it isolates the internal and external environments of the process chamber.

[0003] Wafer annealing equipment typically operates under vacuum or protective gas conditions such as nitrogen to prevent oxidation and contamination, ensuring process quality. Under vacuum conditions, the process chamber must be evacuated upon shutdown. The pressure difference between the inside and outside of the chamber forces the valve plate to adhere to the chamber, ensuring a tight seal. Under nitrogen or similar protective gas conditions, the process chamber must first be evacuated upon shutdown, followed by the introduction of nitrogen. This creates a positive pressure environment. To maintain a tight seal, the valve itself must be securely fixed, requiring a significant horizontal force to adhere it to the chamber wall. Current valve structures utilize auxiliary clamping cylinders. However, to provide sufficient clamping force, the auxiliary clamping cylinder needs a large diameter, resulting in a large space requirement and interference with the layout of other mechanisms.

[0004] In view of this, it is necessary to improve the valve structure in the existing technology to solve the above problems.

[0005] It should be noted that the above description of the background technology is only for the purpose of providing a clear and complete explanation of the technical solutions of this application and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background technology section of this application. Utility Model Content

[0006] The purpose of this invention is to solve the problem that in the existing valve structure, the auxiliary pressing cylinder is used to press the door plate. If sufficient pressing force is required, the cylinder diameter of the auxiliary pressing cylinder needs to be large, which results in a large space occupation and affects the arrangement of other mechanisms.

[0007] To achieve the above objectives, this utility model provides a novel valve structure for use in the opening formed by the movable sealed annealing chamber in an annealing equipment. The novel valve structure includes:

[0008] A door panel, a base disposed on the side of the door panel facing away from the opening, a reciprocating member embedded in the base, and a blocking member disposed between the door panel and the base;

[0009] The base has a receiving cavity on the side facing the door panel for accommodating the reciprocating component. The reciprocating component includes a first column and a third column connected radially in sequence. The first column is fixedly connected to the door panel. The third column is accommodated in the receiving cavity and forms a gas slit with the side facing away from the first column and the receiving cavity. The base is provided with a gas supply pipe communicating with the gas slit. The blocking member is provided outside the opening of the receiving cavity to restrict the first column within the receiving cavity.

[0010] Compressed gas is supplied or discharged to the gas gap through the gas supply pipe so that the reciprocating member applies or removes the clamping force that seals the opening to the door panel.

[0011] As a further improvement of this utility model, the reciprocating member further includes a second column disposed between the first column and the third column. The second column is at least partially housed in the receiving cavity, and an elastic member is sleeved on the outer side of the portion housed in the receiving cavity. The elastic member is restricted within the receiving cavity by the blocking member and the third column.

[0012] As a further improvement of this utility model, the cross-section of the third column is larger than the cross-section of the second column, which is larger than the cross-section of the first column.

[0013] As a further improvement of this utility model, the side of the third column is recessed inward to form a groove, and a first sealing ring that contacts the receiving cavity is embedded in the groove.

[0014] As a further improvement of this utility model, the reciprocating parts are configured as at least two and are evenly embedded in the base on the side facing the door panel.

[0015] As a further improvement of this utility model, the door panel is provided with a mounting hole on the side facing the base for connecting the first column;

[0016] An external thread is formed on the outer side of the first column, and an internal thread that matches the external thread is formed on the inner side of the mounting hole.

[0017] As a further improvement of this utility model, the novel valve structure further includes: a mounting bracket supporting the base and a driving member fixedly connected to the mounting bracket to drive the base to move axially, the driving member extending axially through the base to form a driving shaft, the mounting bracket being provided with a guide rod passing through the base, and the guide rod being parallel to the driving shaft.

[0018] As a further improvement of this utility model, the mounting bracket also includes: a first sensor and a limiting block disposed on the top of the base, and a second sensor disposed on the side of the base.

[0019] As a further improvement of this utility model, a second sealing ring adapted to the edge of the opening is provided on the side of the door panel facing the opening.

[0020] Based on the same idea, this utility model also discloses an annealing apparatus, comprising:

[0021] An annealing chamber forming an opening and a novel valve structure as described in any of the above inventions disposed on the side of the annealing chamber.

[0022] Compared with the prior art, the beneficial effects of this utility model are:

[0023] In this utility model, the novel valve structure includes: a door panel, a base disposed on the side of the door panel facing away from the opening, a reciprocating member embedded in the base, and a blocking member disposed between the door panel and the base. The base has a receiving cavity on the side facing the door panel for accommodating the reciprocating member. The reciprocating member includes a first column and a third column connected radially in sequence. The first column is fixedly connected to the door panel. The third column is housed in the receiving cavity, and its side facing away from the first column forms a gas slit with the receiving cavity. The base is provided with a gas supply pipe communicating with the gas slit. The blocking member is disposed outside the opening of the receiving cavity to confine the first column within the receiving cavity. Compressed gas is supplied or output to the gas slit through the gas supply pipe, so that the reciprocating member applies or removes the pressure force sealing the opening on the door panel. Compressed gas is supplied to the gas slit through a gas supply pipe. A pressure difference is created between the compressed gas pressure and the pressure inside the annealing chamber, with the compressed gas pressure being greater than the pressure inside the annealing chamber. This compressed gas exerts a force on the reciprocating mechanism towards the annealing chamber, thereby applying a sealing force to the door plate. The compressed gas is then discharged from the gas slit through the gas supply pipe, removing the force exerted on the reciprocating mechanism towards the annealing chamber and thus removing the sealing force applied to the door plate. This achieves the active sealing (i.e., sealing or opening) of the opening formed in the annealing chamber through the novel valve structure. By supplying or discharging compressed gas to the gas slit and applying or removing the sealing force through the reciprocating mechanism, the pressure can be adjusted simply by changing the compressed gas pressure. This satisfies the pressure requirements of wafers under various special conditions and solves the problem of existing valve structures occupying large spaces and affecting the arrangement of other mechanisms. Attached Figure Description

[0024] Figure 1 This is a perspective view of the novel valve structure shown in this utility model.

[0025] Figure 2 for Figure 1The perspective view of the door panel is omitted in [Figure 0];

[0026] Figure 3 is Figure 2 the cross-sectional view shown in the A-A direction in [Figure 0];

[0027] Figure 4 is the perspective view of the door panel in one perspective;

[0028] Figure 5 is the perspective view of the base in which part of the reciprocating member is omitted in one perspective;

[0029] Figure 6 is the perspective view of part of the reciprocating member in one perspective;

[0030] Figure 7 is the perspective view of part of the annealing chamber and the new valve structure in one perspective Detailed implementation manners

[0031] The present utility model will be described in detail below in conjunction with the embodiments shown in the drawings. However, it should be noted that these embodiments are not limitations on the present utility model. Any equivalent transformation or substitution in terms of function, method, or structure made by those of ordinary skill in the art based on these embodiments shall fall within the protection scope of the present utility model.

[0032] It should be understood that in this application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the technical solution and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the technical solution of the present application.

[0033] Please refer to Figures 1 to 6 As shown, the present utility model shows a specific implementation manner of a new valve structure 10. The new valve structure 10 is used to actively seal an opening 21 formed by an annealing chamber 20 of an annealing device (not shown). When a wafer (not shown) is transported from the opening 21 into the interior of the annealing chamber 20, the opening 21 is sealed by the new valve structure 10 to ensure that the wafer is annealed under special conditions (for example, in a protective gas condition such as vacuum or nitrogen), thereby ensuring the final annealing effect of the wafer.

[0034] Refer to Figures 1 to 3 and Figure 5 and Figure 6As shown, the novel valve structure 10 includes: a door panel 11, a base 12 disposed on the side of the door panel 11 facing away from the opening 21, a reciprocating member 13 embedded in the base 12, and a blocking member 14 disposed between the door panel 11 and the base 12. The base 12 has a receiving cavity 121 on the side facing the door panel 11 for accommodating the reciprocating member 13. The reciprocating member 13 includes a first column 131 and a third column 133 connected radially in sequence. The first column 131 is fixedly connected to the door panel 11. The third column 133 is accommodated in the receiving cavity 121 and forms a gas slit 122 with the side of the third column 133 facing away from the first column 131. The base 12 is provided with a gas supply pipe 123 communicating with the gas slit 122. The blocking member 14 is disposed outside the opening of the receiving cavity 121 to restrict the first column 131 within the receiving cavity 121. Compressed gas is supplied or discharged to the gas slit 122 via the gas supply pipe 123, so that the pressing force of the sealing opening 21 is applied or removed by the reciprocating member 13 to the door panel 11.

[0035] In this invention, compressed gas is supplied to the gas slit 122 via the gas supply pipe 123. The pressure of the compressed gas and the pressure inside the annealing chamber 20 create a pressure difference, and the pressure of the compressed gas is greater than the pressure inside the annealing chamber 20. As a result, the compressed gas exerts a force toward the annealing chamber 20 on the reciprocating member 13, so that the reciprocating member 13 applies a pressing force to the door plate 11 to seal the opening 21. The compressed gas in the gas slit 122 is output through the gas supply pipe 123 to remove the force exerted by the compressed gas toward the annealing chamber 20 on the reciprocating member 13, thereby removing the pressing force of the reciprocating member 13 on the door plate 11 to seal the opening 21. Thus, the opening 21 formed by the annealing chamber 20 is dynamically sealed (i.e., sealed or opened) by the novel door valve structure 10. By supplying or outputting compressed gas to the gas slit 122, the clamping force of the sealing opening 21 is applied or removed by the reciprocating component 13. The clamping force can be adjusted simply by adjusting the gas pressure of the compressed gas. This can meet the clamping force requirements of the wafer under different special conditions and solve the problem that the valve structure in the prior art occupies a large space and affects the arrangement of other mechanisms.

[0036] In one implementation, the reference Figure 3 and Figure 5As shown, the reciprocating member 13 also includes a second column 132 disposed between the first column 131 and the third column 133. The second column 132 is at least partially housed in the receiving cavity 121, and an elastic member 134 is sleeved on the outer side of the portion housed in the receiving cavity 121. The elastic member 134 is constrained within the receiving cavity 121 by the blocking member 14 and the third column 133. Specifically, the reciprocating member 13 is formed by sequentially connecting the first column 131, the second column 132, and the third column 133, and the first column 131, the second column 132, and the third column 133 preferably form an integral structure. When the elastic member 134 is sleeved on the outside of the second column 132, the side of the third column 133 near the second column 132 abuts against one side of the elastic member 134; at the same time, the part of the elastic member 134 sleeved on the second column 132 that is housed in the receiving cavity 121, and the blocking member 14 is disposed at the opening of the receiving cavity 121 and abuts against the other side of the elastic member 134, thereby restricting the elastic member 134 in the receiving cavity 121 under the combined action of the blocking member 14 and the third column 133. When the reciprocating component 13 applies a pressing force to the door panel 11, the reciprocating component 13 moves toward the annealing chamber 20, and the third column 133 moves toward the blocking component 14 along with the reciprocating component 13 as a whole, causing the elastic component 134 to be compressed under the clamping of the blocking component 14 and the third column 133; when the reciprocating component 13 removes the pressing force applied to the door panel 11, the elastic component 134 pushes the third column 133 to move away from the blocking component 14 under the rebound action, thereby causing the entire reciprocating component 13 to move away from the annealing chamber 20, so that the new valve structure 10 realizes the reset of the reciprocating component 13 when the pressing force applied to the door panel 11 is removed.

[0037] It should be noted that if the second column 132 is partially housed in the receiving cavity 121, the elastic member 134 is sleeved on the outer side of the portion of the second column 132; if the second column 132 is entirely housed in the receiving cavity 121, the elastic member 134 is sleeved on the entire outer side of the second column 132. This embodiment does not specifically limit this. Furthermore, the aforementioned elastic member 134 can be, for example, a spring or other component with elastic deformation.

[0038] In one embodiment, the cross-section of the third column 133 is larger than the cross-section of the second column 132, which is larger than the cross-section of the first column 131. The outer surface contours of the third column 133, the second column 132, and the first column 131 can be regular or irregular shapes, as long as they can ensure that one side of the third column 133 and the second column 132 abuts against one side of the elastic member 134.

[0039] In one implementation, the reference Figure 3 , Figure 5 and Figure 6As shown, the side of the third column 133 is recessed inward to form a groove 135. A first sealing ring 136, which contacts the receiving cavity 121, is embedded within the groove 135. This first sealing ring 136 seals the gas gap 122 formed between the side of the third column 133 facing away from the first column 131 and the receiving cavity 121, preventing leakage of compressed gas from the gas gap 122 and subsequent depressurization. The groove 135 can be configured to have at least one, such as... Figure 3 The third column 133 shown is recessed inward on its side to form two grooves 135, which are not specifically limited in this embodiment. In another specific embodiment, the grooves 135 are configured as at least three. The grooves 135 on both sides are fitted with first sealing rings 136 that contact the receiving cavity 121. The groove 135 in the middle is provided with a lubricating element (not shown, such as lubricating oil or other lubricating components). The first sealing rings 136 not only seal the gas gap 122, but also seal the lubricating element to prevent it from dripping. The lubricating oil is provided in the grooves 135 to facilitate the reciprocating component 13 to move back and forth in the receiving cavity 121 (i.e., moving towards the annealing chamber 20 and moving away from the annealing chamber 20), thereby preventing the reciprocating component 13 from getting stuck due to friction during its movement in the receiving cavity 121.

[0040] In this invention, at least two reciprocating members 13 are configured and evenly embedded in the base 12 on the side facing the door panel 11. This allows multiple reciprocating members 13 to apply a uniform pressing force to the door panel 11, ensuring uniform force distribution. Compared to existing valve structures, the reciprocating members 13 in this application are embedded in the central region of the base 12 and apply a uniform pressing force to the central region of the door panel 11. This force, combined with the reaction force generated inside the annealing chamber 20, allows the door panel 11 to more reliably fit against the annealing chamber 20, ensuring the sealing of the opening 21 formed by the new valve structure 10 within the annealing chamber 20. Preferably, three reciprocating members 13 are configured to apply pressing forces to the door panel 11 from both sides and the center, respectively.

[0041] In one implementation, the reference Figure 4 As shown, the door panel 11 has a mounting hole 111 on the side facing the base 12 for connecting the first column 131. The first column 131 and the door panel 11 are fixedly connected through the mounting hole 111. For the specific connection method, for example, an external thread (not shown) is formed on the outer side of the first column 131, and an internal thread that matches the external thread is formed on the inner side of the mounting hole 111, thereby achieving the connection by screwing the external thread and the internal thread; or it can be achieved by locking parts such as bolts and nuts. This embodiment does not specifically limit this.

[0042] In one implementation, the reference Figure 1 and Figure 2 As shown, the novel valve structure 10 further includes: a mounting bracket 15 supporting the base 12 and a driving member 16 fixedly connected to the mounting bracket 15 to drive the base 12 to move axially. The driving member 16 extends axially through a driving shaft 161 penetrating the base 12. The mounting bracket 15 is provided with a guide rod 151 for mounting the base 12, and the guide rod 151 is parallel to the driving shaft 161. Specifically, the mounting bracket 15 includes a first plate 155 located above the base 12, a second plate 156 located below the base 12, and a third plate 157 and a fourth plate 158 respectively connecting the two ends of the first plate 155 and the second plate 156. Thus, the first plate 155, the second plate 156, the third plate 157, and the fourth plate 158 are arranged to enclose the base 12. The first plate 155 and the second plate 156 are arranged opposite each other, and a guide rod 151 is provided between the first plate 155 and the second plate 156, penetrating the base 12; the third plate 157 and the fourth plate 158 are arranged opposite each other to fix the first plate 155 and the second plate 156.

[0043] In one embodiment, the driving member 16 is disposed at the bottom of the second plate 156 and fixedly connected to the side of the second plate 156 facing away from the first plate 155. The driving member 16 extends a driving shaft 161 that connects and passes through the second plate 156 and the base 12. In another embodiment, the driving member 16 is disposed at the bottom of the base 12 and fixedly connected to the side of the second plate 156 facing the first plate 155. The driving member 16 extends a driving shaft 161 that passes through the base 12. This embodiment does not limit the specific structure, as long as it can realize the axial movement of the driving shaft 161 driven by the driving member 16, so as to drive the base 12 to move axially along the guide rod 151, thereby adjusting the position of the whole formed by the base 12 and the door panel 11 relative to the annealing chamber 20, so as to facilitate the movable sealing of the opening 21 formed by the annealing chamber 20. In order to further ensure the stability of the base 12 during the movement, two guide rods 151 are provided opposite to each other and pass through both sides of the base 12, so as to further ensure the stability of the base 12 when adjusting its position under the driving action of the driving member 16.

[0044] In one implementation, reference 1 and Figure 2As shown, the mounting bracket 15 further includes: a first sensor 152 and a limiting block 154 disposed on the top of the base 12, and a second sensor 153 disposed on the side of the base 12. The limiting block 154 is disposed on the side of the first plate 155 facing the second plate 156. When the driving member 16 drives the base 12 to move axially, the limiting block 154 moves to abut against the top of the base 12 to limit the axial position of the base 12. The first sensor 152 is disposed on the side of the first plate 155 facing away from the second plate 156 and is used to detect the longitudinal position (i.e., the axial position) of the base 12. The second sensor 153 is disposed on the side of the third plate 157 facing the fourth plate 158 or the side of the fourth plate 158 facing the third plate 157 and is used to detect the lateral position of the base 12, so that the base 12 can be positioned by the first sensor 152 and the second sensor 153.

[0045] In one implementation, the reference Figure 1 As shown, a second sealing ring 112 adapted to the edge of the opening 21 is provided on the side of the door panel 11 facing the opening 21. When the door panel 11 seals the opening 21, the second sealing ring 112 is arranged around the opening 21 to further ensure the sealing effect of the door panel 11 on the opening 21.

[0046] Based on the same idea, participants Figure 7 As shown, this utility model also discloses an annealing apparatus (not shown), which includes an annealing chamber 20 forming an opening 21 and a novel valve structure 10 disposed on the side of the annealing chamber 20. Specific embodiments of the novel valve structure 10 can be found above and will not be repeated here.

[0047] The detailed descriptions listed above are merely specific descriptions of feasible implementations of this utility model, and are not intended to limit the scope of protection of this utility model. All equivalent implementations or modifications made without departing from the spirit of this utility model should be included within the scope of protection of this utility model.

[0048] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A novel valve structure for use in the opening formed by a movable sealed annealing chamber in an annealing equipment, characterized in that, The novel valve structure includes: A door panel, a base disposed on the side of the door panel facing away from the opening, a reciprocating member embedded in the base, and a blocking member disposed between the door panel and the base; The base has a receiving cavity on the side facing the door panel for accommodating the reciprocating component. The reciprocating component includes a first column and a third column connected radially in sequence. The first column is fixedly connected to the door panel. The third column is accommodated in the receiving cavity and forms a gas slit with the side facing away from the first column and the receiving cavity. The base is provided with a gas supply pipe communicating with the gas slit. The blocking member is provided outside the opening of the receiving cavity to restrict the first column within the receiving cavity. Compressed gas is supplied or discharged to the gas gap through the gas supply pipe so that the reciprocating member applies or removes the clamping force that seals the opening to the door panel.

2. The novel valve structure according to claim 1, characterized in that, The reciprocating component further includes a second column disposed between the first column and the third column. The second column is at least partially housed in the receiving cavity, and an elastic element is sleeved on the outer side of the portion housed in the receiving cavity. The elastic element is confined within the receiving cavity by the blocking component and the third column.

3. The novel valve structure according to claim 2, characterized in that, The cross-section of the third column is larger than the cross-section of the second column, which is larger than the cross-section of the first column.

4. The novel valve structure according to claim 1, characterized in that, The third column is recessed inward to form a groove, and a first sealing ring that contacts the receiving cavity is embedded in the groove.

5. The novel valve structure according to claim 1, characterized in that, The reciprocating components are configured in at least two and are evenly embedded in the base on the side facing the door panel.

6. The novel valve structure according to claim 1, characterized in that, The door panel has mounting holes on the side facing the base for connecting the first column. An external thread is formed on the outer side of the first column, and an internal thread that matches the external thread is formed on the inner side of the mounting hole.

7. The novel valve structure according to claim 1, characterized in that, The novel valve structure further includes: a mounting bracket supporting the base and a driving member fixedly connected to the mounting bracket to drive the base to move axially, the driving member extending axially through the base to form a driving shaft, and the mounting bracket being provided with a guide rod passing through the base, the guide rod being parallel to the driving shaft.

8. The novel valve structure according to claim 7, characterized in that, The mounting bracket also includes: a first sensor and a limiting block disposed on the top of the base, and a second sensor disposed on the side of the base.

9. The novel valve structure according to claim 1, characterized in that, A second sealing ring adapted to the edge of the opening is provided on the side of the door panel facing the opening.

10. An annealing apparatus, characterized in that, include: An annealing chamber forming an opening and a novel valve structure as described in any one of claims 1 to 9 disposed on the side of the annealing chamber.

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