Sampling device

Abstract

The embodiment of the utility model provides a sampling device which comprises a containing box, a cover body, a sampling pipe and a cooling pipe. The containing box is provided with a containing cavity, the cover body is movably installed on the containing box, and the cover body is configured to move to open and close the containing cavity. The sampling pipe is configured to convey liquid to be detected, the sampling pipe is installed in the containing box, and the liquid outlet end of the sampling pipe is arranged in the containing cavity. A cooling medium is arranged in the cooling pipe, and the cooling pipe is mounted in the accommodating cavity and arranged on the periphery of the sampling pipe. By adopting the technical scheme, the cooling pipe can exchange heat with the to-be-detected liquid in the sampling pipe, so that the temperature of the to-be-detected liquid is reduced, the harm caused by splashing of the to-be-detected liquid is reduced, the possibility of oxidative volatilization is reduced, and the safety of an operator during sampling is improved.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor technology, and more particularly to a sampling device. Background Technology

[0002] In semiconductor manufacturing processes, polishing slurries are required. The concentration of these slurries needs to be calibrated periodically to ensure process stability. This requires sampling and concentration testing of the slurry within the equipment.

[0003] Currently, sampling methods in related technologies typically involve manually placing the sampling bottle into the sampling device and manually taking the sample. However, grinding slurries are corrosive, and the slurry is at a high temperature during sampling, posing risks such as slurry splashing and oxidation / evaporation. Therefore, how to reduce operational risks and the risk of slurry evaporation is a question worth discussing. Utility Model Content

[0004] In view of this, the present disclosure provides a sampling device that can reduce operational risks and volatilization risks during sampling.

[0005] This disclosure provides a sampling device, including a container, a cover, a sampling tube, and a cooling tube. The container has a receiving cavity, and the cover is movably installed in the container, configured to open and close the receiving cavity. The sampling tube is configured to deliver the liquid to be tested, and is installed in the container, with its outlet end located within the receiving cavity. The cooling tube contains a cooling medium and is installed within the receiving cavity and located around the periphery of the sampling tube.

[0006] Optionally, the cooling pipe has a mounting cavity and a first mounting port and a second mounting port disposed opposite each other, and the mounting cavity contains a cooling medium. The sampling pipe passes through the first mounting port and the second mounting port, such that a portion of the sampling pipe is located within the mounting cavity.

[0007] Optionally, the sampling device further includes a heat exchanger installed in the containment chamber. The heat exchanger has a first part and a second part connected together. The first part is located inside the containment cavity and connected to a cooling pipe, while the second part is located outside the containment cavity. The thermal conductivity of the heat exchanger is greater than that of the containment chamber.

[0008] Optionally, the second part is provided with multiple heat sinks, which are arranged sequentially at intervals. The sampling device also includes a baffle and a fan. The baffle is connected to the multiple heat sinks and forms multiple heat dissipation channels with the heat sinks. The fan is installed in the receiving cavity and communicates with the multiple heat dissipation channels.

[0009] Optionally, the sampling device further includes a storage unit and a drive pump. The storage unit is used to contain the cooling medium. The cooling pipe has a first channel and a second channel. The first channel connects the mounting cavity and the storage unit, and the second channel connects the mounting cavity and the storage unit. The drive pump is installed in the first channel and is used to drive the cooling medium to flow between the mounting cavity and the storage unit.

[0010] Optionally, the sampling tube includes a cooling section, the length of which is configured to be greater than the minimum distance between the first and second mounting ports.

[0011] Optionally, the sampling device further includes a storage unit and a drive pump. The storage unit is used to contain the cooling medium. The cooling pipe includes an input section, a bend section, and an output section connected in sequence. The bend section surrounds the outer periphery of the sampling pipe and contacts the sampling pipe. Both the input section and the output section are connected to the storage unit. The drive pump is installed in the input section or the output section and is used to drive the cooling medium to flow between the bend section and the storage unit.

[0012] Optionally, the sampling device also includes a heat-conducting component, which is sleeved on the sampling tube, and a cooling tube is embedded in the heat-conducting component, with the cooling tube and the sampling tube spaced apart.

[0013] Optionally, the cooling pipe includes a first confluence channel, a second confluence channel, and multiple cooling channels. Both the first and second confluence channels are connected to the outside of the heat-conducting component. The cooling medium flows into one of the first and second confluence channels and flows out of the other. Each cooling channel is connected to the first and second confluence channels.

[0014] Optionally, the sampling device further includes a first control valve, a first pipeline, a second pipeline, a first button, a second control valve, and a second button. The first control valve includes a first end, a second end, and a third end that are interconnected. The first end is connected to an external liquid path, and the second end is connected to the liquid inlet of the sampling tube. The first pipeline is connected to the third end, and the second pipeline is connected to the receiving cavity. The first button is connected to the first control valve and is configured to control the opening and closing of the first, second, and third ends of the first control valve. The second control valve is located between the receiving cavity and the second pipeline. The second button is connected to the second control valve and is configured to control the opening and closing of the second control valve.

[0015] Compared with the prior art, the technical solution of the present disclosure has the following advantages:

[0016] The sampling device disclosed herein includes a container, a cover, a sampling tube, and a cooling tube. The container has a receiving cavity, and the cover is movably installed within the container, configured to open and close the receiving cavity. The sampling tube is configured to deliver the liquid to be tested, and is installed within the container, with its outlet end located within the receiving cavity. The cooling tube contains a cooling medium and is installed within the receiving cavity and positioned around the periphery of the sampling tube. This technical solution allows the cooling tube to exchange heat with the liquid to be tested within the sampling tube, which helps lower the temperature of the liquid, thereby reducing the hazards caused by splashing and the possibility of oxidation and volatilization, thus improving the safety of operators during sampling. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this disclosure, the drawings used in the description of the embodiments of this disclosure or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the structure of a sampling device according to an embodiment of the present disclosure is shown;

[0019] Figure 2 A partial structural cross-sectional view of a sampling device according to an embodiment of the present disclosure is shown;

[0020] Figure 3 A side view of a sampling device according to an embodiment of the present disclosure is shown;

[0021] Figure 4 A side view of a heat exchanger according to an embodiment of the present disclosure is shown;

[0022] Figure 5 A schematic diagram of a partial structure of a sampling device according to an embodiment of the present disclosure is shown;

[0023] Figure 6 A partial structural cross-sectional view of a cooling pipe and a sampling pipe according to an embodiment of the present disclosure is shown;

[0024] Figure 7 A schematic diagram of a partial structure of another sampling device according to an embodiment of this disclosure is shown;

[0025] Figure 8 A schematic diagram of a partial structure of another sampling device according to an embodiment of the present disclosure is shown;

[0026] Figure 9 A schematic diagram of the liquid path for pre-rinsing and draining of a sampling device according to an embodiment of the present disclosure is shown.

[0027] Figure label:

[0028] Sampling device 100;

[0029] 110 containing box, 111 containing cavity, 112 through hole;

[0030] Cover 120;

[0031] Sampling tube 130, cooling section 131;

[0032] Cooling pipe 140, mounting cavity 141, first mounting port 142, second mounting port 143, first channel 144, second channel 145, first confluence channel 146, second confluence channel 147, cooling channel 148, input section 14a, bending section 14b, output section 14c;

[0033] Heat exchanger 150, first part 151, second part 152, heat sink 153, heat dissipation channel 154;

[0034] baffle 160;

[0035] Fan 170;

[0036] Storage component 180;

[0037] Drive pump 190;

[0038] Thermal conductive component 200;

[0039] First control valve 310, first end 311, second end 312, third end 313;

[0040] First pipeline 320, second pipeline 330, first button 340, second control valve 350, second button 360;

[0041] 400 sampling bottles. Detailed Implementation

[0042] As the background technology indicates, polishing slurry is used in semiconductor processing. The concentration of this slurry needs to be calibrated periodically to ensure process stability. Accurate calibration of the slurry concentration is crucial. To calibrate the slurry concentration, samples need to be taken from the equipment and their concentration tested. However, the slurry is characterized by high temperature and corrosiveness within the equipment. Oxidation, evaporation, or splashing onto equipment and personnel could compromise the safety of the sampling process.

[0043] In a specific sampling scenario, when sampling the test fluid (grinding slurry), the operator needs to first put on PPE (Personal Protective Equipment), then manually place the sampling bottle into the sampling device 100, and then align the sampling tube 130 in the sampling device 100 with the sampling bottle to complete the manual sampling. Because it is a manual sampling operation, the operator's force, speed, and accuracy in handling the sampling tube 130 and aligning it with the sampling bottle may lead to risks such as slurry splashing and oxidation / evaporation. High-temperature slurry splashing onto the equipment or the operator, and the evaporation of the slurry, will both affect the safety of the sampling.

[0044] To address the aforementioned technical problems, this disclosure provides a sampling device comprising a container, a cover, a sampling tube, and a cooling tube. The container has a receiving cavity, and the cover is movably installed within the container, configured to open and close the receiving cavity. The sampling tube is configured to deliver the liquid to be tested, and is installed within the container, with its outlet end located within the receiving cavity. The cooling tube contains a cooling medium and is installed within the receiving cavity and positioned around the periphery of the sampling tube. This technical solution allows the cooling tube to exchange heat with the liquid to be tested within the sampling tube, which helps lower the temperature of the liquid, thereby reducing the hazards caused by splashing and the possibility of oxidation and volatilization, thus improving the safety of operators during sampling.

[0045] To make the above-mentioned objectives, features and beneficial effects of this disclosure more apparent and understandable, specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings.

[0046] Please refer to Figure 1 , Figure 1 A schematic diagram of a sampling device 100 according to an embodiment of the present disclosure is shown. The sampling device 100 in this embodiment includes a housing 110, a cover 120, and a sampling tube 130. The cover 120 is movably installed in the housing 110, and the sampling tube 130 is installed in the housing 110.

[0047] In some embodiments, please refer to Figure 1The container 110 has a receiving cavity 111, and the outlet end of the sampling tube 130 is located in the receiving cavity 111. The sampling tube 130 is configured to deliver the liquid to be tested, and the cap 120 is configured to be movable to open and close the receiving cavity 111. During sampling, the cap 120 can be operated to open the receiving cavity 111; then the sampling bottle 400 for sampling is placed into the receiving cavity 111; then the outlet end of the sampling tube 130 in the receiving cavity 111 is connected to the sampling bottle 400; then the cap 120 is closed, and the liquid to be tested flows out from the outlet end of the delivery tube and into the sampling bottle 400, allowing the sampling bottle 400 to complete the sampling within the closed receiving cavity 111. This helps to limit the scope of spillage, splashing, and evaporation of the liquid to be tested during the sampling process, thereby improving sampling safety.

[0048] In some embodiments, the shape of the receiving cavity 111 can be any one or more combinations of square, circular or trapezoidal shapes, which will not be listed here.

[0049] In some embodiments, please refer to Figure 1 The container 110 is provided with a through hole 112 that penetrates its body. The through hole 112 connects to the receiving cavity 111. The sampling tube 130 passes through the through hole 112. A sealing ring (unmarked) is provided at the through hole 112. The sealing ring is sealed to both the sampling tube 130 and the container 110, which helps to improve the stability of the sampling tube 130 installed in the container 110 and also helps to improve the sealing of the receiving cavity 111.

[0050] In some examples, the sealing ring can be a rubber sealing ring or a fluororubber sealing ring; no specific limitation is made here.

[0051] In some embodiments, the outlet end of the sampling tube 130 is made of a rigid material, which facilitates easier and more convenient operation for the operator when connecting the sampling tube 130 and the sampling bottle 400, and helps reduce the risk of polishing fluid overflowing, splashing, or evaporating when the sampling tube 130 and the sampling bottle 400 are connected. Optionally, the sampling tube 130 is made of any one or a combination of metal, hard rubber, or ceramic that does not react with the polishing fluid.

[0052] In some embodiments, the cover 120 is made of a transparent material, which allows operators to clearly and promptly monitor the sampling within the receiving cavity 111, thus reducing safety risks. Optionally, the cover 120 may be made of glass or plastic.

[0053] In some embodiments, please refer to Figure 1 and Figure 2 , Figure 2A partial structural cross-sectional view of a sampling device according to an embodiment of this disclosure is shown. The sampling device 100 also includes a cooling pipe 140, which contains a cooling medium (not shown). The cooling pipe 140 is installed in the receiving cavity 111 and located on the outer periphery of the sampling tube 130. This arrangement allows the cooling pipe 140 to exchange heat with the test liquid in the sampling tube 130, which helps to reduce the temperature of the test liquid, thereby reducing the hazards caused by splashing of the test liquid and reducing the possibility of oxidation and volatilization, thus improving the safety of the operator during sampling.

[0054] In some embodiments, please refer to Figure 2 The cooling pipe 140 has a mounting cavity 141 and a first mounting port 142 and a second mounting port 143 disposed opposite to each other. A cooling medium is provided inside the mounting cavity 141. A sampling pipe 130 passes through the first mounting port 142 and the second mounting port 143, with a portion of the sampling pipe 130 located within the mounting cavity 141. The sampling pipe 130 located within the mounting cavity 141 is in direct contact with the cooling medium, allowing heat exchange between the sampling pipe 130, the liquid to be tested within the sampling pipe 130, and the cooling medium. The cooling medium carries away some of the heat from the sampling pipe 130 and the liquid to be tested within the sampling pipe 130, thereby lowering the temperature of the liquid to be tested.

[0055] In some embodiments, sealing rings are provided at both the first mounting port 142 and the second mounting port 143. The sealing rings are sealed to both the cooling pipe 140 and the sampling pipe 130, which helps to improve the sealing performance of the mounting cavity 141 and reduce the risk of cooling medium leakage.

[0056] In some embodiments, the cooling medium may be water or a phase change coolant, without specific limitations.

[0057] In some embodiments, please refer to Figure 2 The sampling device 100 also includes a heat exchanger 150, which is installed in the housing 110 and connected to the cooling pipe 140 for heat exchange. The heat from the sampling tube 130 is transferred to the cooling pipe 140, and the heat exchanger 150 removes some of the heat from the cooling pipe 140, thereby improving the heat exchange effect on the sampling tube 130.

[0058] In some embodiments, please refer to Figure 2 and Figure 3 , Figure 3A side view of a sampling device according to an embodiment of this disclosure is shown. The heat exchanger 150 has a first portion 151 and a second portion 152 connected together. The first portion 151 is located inside a receiving cavity 111 and connected to a cooling pipe 140, while the second portion 152 is located outside the receiving cavity 111. The cooling pipe 140 exchanges heat with the first portion 151 of the heat exchanger 150. The first portion 151 carries away some of the heat from the cooling pipe 140 and transfers the heat to the second portion 152. The second portion 152 then exchanges heat with the external environment outside the receiving cavity 111, thereby improving the heat exchange efficiency of the heat exchanger 150 to the cooling pipe 140, and consequently improving the heat exchange efficiency to the sampling tube, which is beneficial for reducing the temperature of the liquid to be tested inside the sampling tube.

[0059] In some embodiments, the heat exchanger 150 and the container 110 are made of different materials, and the thermal conductivity of the heat exchanger 150 is greater than that of the container 110, which is beneficial to improving the heat exchange efficiency of the liquid to be tested.

[0060] For example, the heat exchanger 150 is made of aluminum, and the housing 110 is made of plastic.

[0061] In some embodiments, please refer to Figure 4 , Figure 4 A side view of a heat exchanger according to an embodiment of the present disclosure is shown. The second portion 152 is provided with a plurality of heat sinks 153, which are arranged sequentially at intervals. The heat sinks 153 increase the heat exchange area between the second portion 152 and the external environment, which is beneficial to further improving the heat exchange efficiency of the heat exchanger 150.

[0062] In some embodiments, the heat sink 153 and the second part 152 are integrally formed, which can be integrally die-cast or injection molded, or the heat sink 153 and the second part 152 can be welded together.

[0063] In some other embodiments, the heat sink 153 and the second part 152 are manufactured independently, and the heat sink 153 and the second part 152 are assembled and connected by means of bolts, snap-fits or adhesives.

[0064] In some embodiments, please refer to Figure 3 and Figure 4 The sampling device 100 also includes a baffle 160 and a fan 170. The baffle 160 is connected to multiple heat sinks 153 and forms multiple heat dissipation channels 154 with the heat sinks 153. The fan 170 is installed in the receiving cavity 111, and the air outlet of the fan 170 is connected to the multiple heat dissipation channels 154. When cooling the liquid to be tested, the fan 170 can be started, so that airflow flows from the air outlet of the fan 170 into the heat dissipation channels 154, and then flows out from the outlet of the heat dissipation channels 154, carrying away some of the heat from the second part 152 and the heat sinks 153, thereby improving the cooling effect of the liquid to be tested.

[0065] In some embodiments, the sampling device 100 further includes a temperature sensor (not shown) and a control circuit board (not shown). The temperature sensor is installed in the receiving cavity 111 and is used to detect the temperature of the liquid to be tested after heat exchange through the cooling pipe 140. The control circuit board is electrically connected to the temperature sensor and controls the opening and closing of the fan 170 and the speed of the fan 170 according to the temperature detected by the temperature sensor.

[0066] It should be noted that the temperature of the test solution is not necessarily better the lower it is. When the temperature of the test solution is too low, there is a risk of crystallization. Considering the influence of ambient temperature, setting up a temperature sensor and control circuit board is beneficial to maintaining the temperature of the test solution within a more suitable temperature range.

[0067] In some embodiments, please refer to Figure 5 , Figure 5 A schematic diagram of a partial structure of a sampling device according to an embodiment of the present disclosure is shown. The sampling device 100 further includes a storage unit 180 and a drive pump 190. The storage unit 180 is used to contain a cooling medium. The cooling pipe 140 has a first channel 144 and a second channel 145. The first channel 144 connects the mounting cavity 141 and the storage unit 180, and the second channel 145 connects the mounting cavity 141 and the storage unit 180. The drive pump 190 is mounted in the first channel 144 and is used to drive the cooling medium to flow between the mounting cavity 141 and the storage unit 180.

[0068] It should be noted that when the drive pump 190 is running, the cooling medium is driven from the storage unit 180 into one of the first channel 144 and the second channel 145, then enters the mounting cavity 141, and after passing through the mounting cavity 141, enters the other of the first channel 144 and the second channel 145, and then returns to the storage unit 180, thus achieving the circulation of the cooling medium. By driving the cooling medium to circulate, it is beneficial to increase the heat carried away by the cooling medium from the liquid under test, thereby helping to reduce the temperature of the liquid under test.

[0069] For example, the first channel 144 is a cooling medium input channel and the second channel 145 is a cooling medium output channel. When the drive pump 190 is running, the cooling medium is driven and flows from the storage device into the first channel 144, the mounting cavity 141 and the second channel 145 in sequence, and then flows back to the storage device 180.

[0070] As another example, the first channel 144 is a cooling medium output channel and the second channel 145 is a cooling medium input channel. When the drive pump 190 is running, the cooling medium is driven and flows from the storage unit 180 into the second channel 145, the mounting cavity 141 and the first channel 144 in sequence, and then flows back to the storage unit 180.

[0071] It is worth mentioning that the sampling device 100 includes a storage unit 180 and a drive pump 190. The cooling pipe 140 has a first channel 144 and a second channel 145 in one embodiment, which can be combined with the embodiments related to the heat exchanger 150 described above, so that the heat exchanger 150 is connected to the cooling pipe 140 based on the embodiment with cooling medium circulation. The embodiment with cooling medium circulation can also be combined with other embodiments with heat exchanger 150; specifically, based on the embodiment with cooling medium circulation, the heat exchanger 150 is connected to the storage unit 180, so that the heat exchanger 150 directly exchanges heat with the cooling medium in the storage unit 180. It can also be equipped with heat sinks 153, baffles 160, and fans 170; the specific configurations will not be described in detail here.

[0072] In some embodiments, the storage element 180 is disposed outside the receiving cavity 111, which helps to save space occupied by the receiving cavity 111. In embodiments where the heat exchange element 150 is connected to the storage element 180, the heat exchange element 150 is also disposed outside the receiving cavity 111.

[0073] In some embodiments, please refer to Figure 6 , Figure 6 A partial cross-sectional view of a cooling tube and a sampling tube according to an embodiment of the present disclosure is shown. The sampling tube 130 includes a cooling section 131, the length of which is configured to be greater than the minimum distance between the first mounting port 142 and the second mounting port 143. The scheme of this embodiment of the present disclosure is advantageous in extending the contact area between the sampling tube 130 and the cooling medium, which is beneficial in improving the heat exchange effect on the sampling tube 130 and the liquid to be tested within the sampling tube 130, thereby helping to reduce the temperature to be tested.

[0074] In some embodiments, the cooling section 131 is configured to extend in a spiral shape; in other embodiments, the cooling pipe 140 is configured to extend in an "S" or "Z" shape. Of course, the cooling section 131 can also be configured to extend in other ways, which will not be listed here.

[0075] In some embodiments, please refer to Figure 7 , Figure 7 A schematic diagram of a partial structure of another sampling device according to an embodiment of this disclosure is shown. The sampling device 100 further includes a storage unit 180 and a drive pump 190. The storage unit 180 is used to contain a cooling medium. The cooling pipe 140 includes an input section 14a, a curved section 14b, and an output section 14c connected in sequence. The curved section 14b surrounds the outer periphery of the sampling pipe 130 and contacts the sampling pipe 130. Both the input section 14a and the output section 14c are connected to the storage unit 180. The drive pump 190 is installed in the input section 14a or the output section 14c and is used to drive the cooling medium to flow between the curved section 14b and the storage unit 180.

[0076] It should be noted that when the drive pump 190 is running, the cooling medium is driven from the storage unit 180 to the input section 14a, then enters the curved section 14b via the input section 14a, and after passing through the curved section 14b, enters the output section 14c, and then flows back to the storage unit 180 via the output section 14c. Driving the cooling medium to circulate helps to increase the heat carried away by the cooling medium from the liquid to be tested. The curved section 14b, which is arranged around the outer periphery of the sampling tube 130 and in contact with the sampling tube 130, helps to further increase the heat exchange area between the cooling tube 140 and the sampling tube, thereby helping to reduce the temperature of the liquid to be tested.

[0077] In some embodiments, please refer to Figure 8 , Figure 8 A schematic diagram of a partial structure of another sampling device according to an embodiment of this disclosure is shown. The sampling device 100 further includes a heat-conducting element 200, which is connected to the sampling tube 130. A cooling tube 140 is embedded within the heat-conducting element 200, and the cooling tube 140 is spaced apart from the sampling tube 130. This arrangement serves two purposes: firstly, the heat-conducting element 200 protects the cooling tube 140, reducing the risk of damage to the cooling tube 140 and the possibility of cooling medium leakage; secondly, the cooling tube 140 does not need to directly contact the sampling tube 130, as an adapter structure for convenient fixing of the sampling tube 130 can be directly provided on the heat-conducting element 200, saving the installation process of the cooling tube 140 and improving installation efficiency.

[0078] In some embodiments, please refer to Figure 8 The heat-conducting component 200 is fitted onto the sampling tube 130, which helps to increase the heat exchange area between the heat-conducting component 200 and the sampling tube 130, thereby helping to reduce the temperature of the liquid to be tested.

[0079] In some embodiments, a sealing ring (not shown) is provided between the heat-conducting element 200 and the sampling tube 130, which is beneficial to the stability of the installation between the heat-conducting element 200 and the cooling tube 140.

[0080] In some embodiments, please refer to Figure 8 The cooling pipe 140 is embedded in the heat-conducting component 200. The cooling pipe 140 includes a first confluence channel 146, a second confluence channel 147, and a plurality of cooling channels 148. The first confluence channel 146 and the second confluence channel 147 are both connected to the outside of the heat-conducting component 200. The cooling medium flows into one of the first confluence channel 146 and the second confluence channel 147 and flows out in the other of the first confluence channel 146 and the second confluence channel 147. Each cooling channel 148 is connected to the first confluence channel 146 and the second confluence channel 147.

[0081] It should be noted that the arrangement of the first confluence channel 146, the second confluence channel 147 and multiple cooling channels 148 is beneficial to increasing the heat exchange area between the cooling pipe 140 and the heat-conducting component 200, which is beneficial to improving the cooling effect of the liquid to be tested.

[0082] In some embodiments, please refer to Figure 8 Multiple cooling channels 148 are arranged around the sampling tube 130.

[0083] In some embodiments, the cooling channel 148 is a straight pipe; in other embodiments, the cooling channel 148 is a curved pipe, a serpentine pipe, or a pipe of other shapes, which facilitates further cooling of the heat exchange area between the pipe 140 and the heat conductor 200.

[0084] In some embodiments, please refer to Figure 9 and in conjunction with reference Figure 1 , Figure 9 A schematic diagram of the liquid path for pre-rinsing and draining of a sampling device according to an embodiment of this disclosure is shown. The sampling device 100 further includes a first control valve 310, a first pipeline 320, a second pipeline 330, a first button 340, a second control valve 350, and a second button 360. The first control valve 310 includes a first end 311, a second end 312, and a third end 313 that are interconnected. The first end 311 is connected to an external liquid path, and the second end 312 is connected to the inlet end of the sampling tube 130. The first pipeline 320 is connected to the third end 313, and the second pipeline 330 is connected to the receiving cavity 111. The first button 340 is connected to the first control valve 310 and is configured to control the opening and closing of the first end 311, the second end 312, and the third end 313 of the first control valve 310. The second control valve 350 is located between the receiving cavity 111 and the second pipeline 330. The second button 360 is connected to the second control valve 350 and is configured to control the opening and closing of the second control valve 350.

[0085] Before sampling, a pre-rinsing step is performed to flush out any residual grinding fluid or crystals in the sampling tube 130. This is done by pressing the first button 340 to open one or both of the first control valve 310's first end 311 and the second and third ends 313. Specifically, when the second end 312 is open, the grinding fluid flows from the external liquid path into the first end 311 of the first control valve 310, then through the second end 312 into the sampling tube 130, and finally through the outlet of the sampling tube 130 into the receiving cavity 111, completing the pre-rinsing. When the third end 313 is open, the grinding fluid flows from the external liquid path into the first end 311 of the first control valve 310, then through the third end 313 into the first pipeline 320, which discharges the incoming grinding fluid, completing the pre-rinsing.

[0086] Before sampling, a drainage step is performed to drain the liquid in the receiving cavity 111. At this time, the second button 360 can be pressed to control the second control valve 350 to open, so that the liquid in the receiving cavity 111 enters the second pipeline 330. The second pipeline 330 drains the entering grinding fluid, thus completing the drainage step.

[0087] In some embodiments, the end of the second pipe 330 away from the receiving cavity 111 is connected to the first pipe 320, which allows the first pipe 320 to complete the drainage in a unified manner.

[0088] It is understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0089] It is understood that, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly in this application. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0090] It is understood that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0091] It is understandable that the term "and / or" in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this article indicates that the preceding and following related objects have an "or" relationship.

[0092] It is understood that the above description provides multiple embodiment solutions, and the optional methods described in each embodiment solution can be combined and cross-referenced with each other without conflict, thereby extending to a variety of possible embodiment solutions, all of which can be considered as the embodiment solutions disclosed in this disclosure.

[0093] While the embodiments disclosed herein are as described above, this disclosure is not limited thereto. Any person skilled in the art can make various alterations and modifications without departing from the spirit and scope of this disclosure; therefore, the scope of protection of this disclosure should be determined by the scope defined in the claims.

Claims

1. A sampling device, characterized in that, include: A receiving box, wherein the receiving box is provided with a receiving cavity; A cover, movably mounted to the receiving box, configured to open and close the receiving cavity; A sampling tube configured to deliver the liquid to be tested is installed in the container, and the outlet end of the sampling tube is located inside the receiving cavity. A cooling pipe containing a cooling medium is installed inside the receiving cavity and located on the outer periphery of the sampling tube.

2. The sampling device according to claim 1, characterized in that, The cooling pipe has an installation cavity and a first installation port and a second installation port disposed opposite to each other, and the cooling medium is disposed inside the installation cavity; The sampling tube is inserted through the first mounting port and the second mounting port, such that a portion of the sampling tube is located within the mounting cavity.

3. The sampling device according to claim 2, characterized in that, The sampling device further includes a heat exchanger, which is installed in the container. The heat exchanger has a first part and a second part connected to each other. The first part is located inside the receiving cavity and is connected to the cooling pipe, while the second part is located outside the receiving cavity. The thermal conductivity of the heat exchanger is greater than that of the container.

4. The sampling device according to claim 3, characterized in that, The second part is provided with multiple heat sinks, which are arranged in sequence at intervals. The sampling device further includes a baffle and a fan. The baffle is connected to the plurality of heat sinks and forms a plurality of heat dissipation channels with the plurality of heat sinks. The fan is installed in the receiving cavity and communicates with the plurality of heat dissipation channels.

5. The sampling device according to claim 2, characterized in that, The sampling device further includes a storage unit and a drive pump, the storage unit being used to contain the cooling medium; The cooling pipe has a first channel and a second channel. The first channel connects the mounting cavity and the storage device, and the second channel connects the mounting cavity and the storage device. The drive pump is installed in the first channel and is used to drive the cooling medium to circulate between the mounting cavity and the storage device.

6. The sampling device according to claim 5, characterized in that, The sampling tube includes a cooling section, the length of which is configured to be greater than the minimum distance between the first mounting port and the second mounting port.

7. The sampling device according to claim 1, characterized in that, The sampling device further includes a storage unit and a drive pump, the storage unit being used to contain the cooling medium; The cooling pipe includes an input section, a curved section, and an output section connected in sequence. The curved section surrounds the outer periphery of the sampling pipe and contacts the sampling pipe. Both the input section and the output section are connected to the storage device. The drive pump is installed in the input section or the output section and is used to drive the cooling medium to circulate between the curved section and the storage device.

8. The sampling device according to claim 1, characterized in that, The sampling device also includes a heat-conducting component, which is sleeved on the sampling tube. A cooling tube is embedded in the heat-conducting component and is spaced apart from the sampling tube.

9. The sampling device according to claim 8, characterized in that, The cooling pipe includes a first confluence channel, a second confluence channel, and multiple cooling channels. The first confluence channel and the second confluence channel are both connected to the outside of the heat-conducting component. The cooling medium flows into one of the first confluence channel and the second confluence channel and flows out of the other of the first confluence channel and the second confluence channel. Each cooling channel is connected to the first confluence channel and the second confluence channel.

10. The sampling device according to any one of claims 1 to 9, characterized in that, The sampling device further includes: A first control valve, comprising a first end, a second end, and a third end that are interconnected, wherein the first end is connected to an external liquid circuit, and the second end is connected to the liquid inlet of the sampling tube; The first pipeline is connected to the third end; The second pipeline is connected to the receiving cavity; A first button is connected to the first control valve and is configured to control the opening and closing of the first end, the second end, and the third end of the first control valve. A second control valve is disposed between the receiving cavity and the second pipeline; A second button is connected to the second control valve and is configured to control the opening and closing of the second control valve.

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