Bare chip test tool based on manual probe station

Abstract

The utility model relates to a bare chip testing tool based on a manual probe station, belongs to the technical field of bare chip testing, and solves the problems that the existing bare chip is small in size and difficult to fix, and the testing efficiency and the testing effect cannot be ensured. The test fixture comprises the base, the chip groove, the vacuum groove and the communicating hole, in the detection process, the vacuum table adsorbs and fixes the bare chip to be detected in the chip groove through the vacuum groove and the connecting hole, and then the standard test table is used for testing the bare chip to be tested fixed on the base. According to the utility model, the plurality of bare chips to be detected are fixed on the base, so that the detection of the plurality of bare chips to be detected can be completed quickly and accurately.

Description

Technical Field

[0001] This utility model relates to the field of chip testing technology, and in particular to a bare chip testing fixture based on a manual probe station. Background Technology

[0002] With the development of system integration applications, there is a need to integrate active or passive components with different performance characteristics onto a single IC chip, and to integrate complex heterogeneous components. This chip is a bare die diced from a wafer, and ensuring the performance of the bare die is a prerequisite for producing qualified integrated IC chips.

[0003] The small size of the diced bare chips makes them difficult to secure, compromising testing efficiency and quality. Therefore, providing a testing fixture capable of simultaneously securing multiple bare chips is a pressing technical problem for those skilled in the art. Utility Model Content

[0004] Based on the above analysis, the present invention aims to provide a bare chip testing fixture based on a manual probe station to solve the technical problem that existing bare chips are difficult to fix after dicing, and the testing efficiency and test results cannot be guaranteed.

[0005] The objective of this utility model is mainly achieved through the following technical solutions:

[0006] A bare die testing fixture based on a manual probe station includes: a base, a chip slot, a vacuum slot, and a connecting hole; a plurality of chip slots are arranged in a matrix on the upper end face of the base, the vacuum slot is provided on the lower end face of the base, and the connecting hole connects the chip slots and the vacuum slot.

[0007] Furthermore, the connecting hole is located at the center of the chip slot.

[0008] Furthermore, the depth of the chip groove is less than the thickness of the bare chip.

[0009] Furthermore, the chip slot is a rectangular slot.

[0010] Furthermore, the size of the chip slot is equal to the size of the bare chip.

[0011] Furthermore, it also includes an extension groove disposed on the side wall of the chip slot; after the tweezers pick up the bare chip to be tested, the tweezers tip is placed into the extension groove to place the bare chip to be tested into the chip slot.

[0012] Furthermore, the number of the extension slots is two, and the two extension slots are arranged opposite to each other.

[0013] Furthermore, the four corners of the chip slot are chamfered.

[0014] Furthermore, it also includes auxiliary positioning holes formed on the base.

[0015] Furthermore, the base is made of antistatic material.

[0016] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0017] (1) The bare chip testing fixture based on the manual probe station of this utility model sets multiple bare chips to be tested in the chip slot and fixes the testing fixture on a standard manual testing stage. The standard manual testing stage has a vacuum stage. The vacuum slot is placed on the working end face of the vacuum stage. The vacuum stage applies an adsorption force to the bare chips to be tested set in the chip slot through the vacuum slot and the connecting hole in sequence. When the bare chips to be tested are tested, the position of the bare chips to be tested is fixed, ensuring testing efficiency and testing effect.

[0018] (2) The bare chip testing fixture based on the manual probe station of this utility model fixes multiple bare chips to be tested on the testing fixture at a predetermined interval, which facilitates the positioning and testing of the bare chips to be tested by the standard manual test station, and completes the testing of multiple bare chips efficiently and quickly.

[0019] (3) The bare chip testing fixture based on the manual probe station of this utility model can use tweezers to place and remove the bare chip to be tested, and fix the bare chip to be tested by the negative pressure generated by the vacuum stage, thereby minimizing damage to the chip.

[0020] In this invention, the above-described technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of this invention will be set forth in the following description, and some advantages will become apparent from the description or be learned by practicing this invention. The objectives and other advantages of this invention can be realized and obtained from the details specifically pointed out in the text and accompanying drawings. Attached Figure Description

[0021] The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of the invention. Throughout the drawings, the same reference numerals denote the same parts.

[0022] Figure 1 This is a schematic diagram of the upper surface of a bare chip testing fixture based on a manual probe station, according to a specific embodiment.

[0023] Figure 2 This is a schematic diagram of the lower end face of a bare chip testing fixture based on a manual probe station, according to a specific embodiment.

[0024] Figure 3This is a three-dimensional structural diagram of a bare chip testing fixture based on a manual probe station, according to a specific embodiment.

[0025] Figure label:

[0026] 1-Base; 2-Chip slot; 3-Vacuum slot; 4-Connecting hole; 5-Extension slot; 6-Auxiliary positioning hole. Detailed Implementation

[0027] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.

[0028] A specific embodiment of this utility model is as follows: Figure 1 As shown, a bare chip testing fixture based on a manual probe station is disclosed, comprising: a base 1, a chip slot 2, a vacuum slot 3, and a connecting hole 4; as shown Figure 1 As shown in the schematic diagram of the upper surface of the base 1, multiple chip slots 2 are arranged in a matrix on the upper surface of the base 1; Figure 2 As shown, the vacuum groove 3 has the lower end face of the base 1, and the connecting hole 4 connects the chip groove 2 and the vacuum groove 3.

[0029] During testing, multiple bare chips to be tested are placed in chip slot 2, such as... Figure 1 As shown, a 4*2 matrix arrangement of chip slots 2 is provided on the upper surface of the base 1, which can complete the testing of 8 bare chips to be tested at one time. The vacuum slot 3 on the lower end of the test fixture is placed on the working end surface of the vacuum stage. The vacuum stage applies an adsorption force to the bare chips to be tested in the chip slots 2 through the vacuum slots 3 and the connecting holes 4 in sequence to ensure that the position of the bare chips to be tested is fixed. After the test of one bare chip to be tested is completed, it can be moved a predetermined distance to start the test of the next chip to be tested, ensuring testing efficiency and test effect.

[0030] In this embodiment, the connecting hole 4 is located at the center of the chip slot 2.

[0031] The vacuum stage generates an adsorption force on the center of the bare chip to be tested, which is placed in the chip slot 2, resulting in a good fixation effect.

[0032] In this embodiment, the depth of the chip groove 2 is less than the thickness of the bare chip.

[0033] The test surface of the bare chip to be tested protrudes from the surface of the base 1, making it easy for a standard manual test bench to test the test surface of the bare chip to be tested.

[0034] In this embodiment, the chip slot 2 is a rectangular slot.

[0035] The dimensions of the chip slot 2 are matched with the dimensions of the bare chip to be tested.

[0036] In this embodiment, the size of the chip slot 2 is equal to the size of the bare chip.

[0037] In this embodiment, an extension groove 5 is also included. After the tweezers pick up the bare chip to be tested, the tweezers tip is placed into the extension groove 5, and the bare chip to be tested is placed into the chip slot 2.

[0038] In this embodiment, there are two extension slots 5, and the two extension slots 5 are respectively connected to two opposite sidewalls of the chip slot 2.

[0039] When placing and removing the bare chip to be tested, use tweezers to pick up the bare chip and place the tweezers into the extension slot 5. Release the tweezers and the bare chip to be tested will be placed into the chip slot 2. The operation is convenient and will not damage the bare chip to be tested.

[0040] In this embodiment, the four corners of the chip slot 2 are chamfered.

[0041] When the bare chip under test is in chip slot 2, it will not rub or collide with the four corners of chip slot 2, thus avoiding damage to the bare chip under test.

[0042] In the embodiments, Figure 1 and Figure 3 As shown, the test fixture also includes auxiliary positioning holes 6 formed on the base 1. When there is no vacuum stage on the standard manual test bench, the auxiliary positioning holes 6 can be used to assist in positioning the base 1.

[0043] In this embodiment, the base is made of an antistatic material.

[0044] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model should be included within the protection scope of the present utility model.

Claims

1. A bare chip testing fixture based on a manual probe station, characterized in that, It includes a base (1), a chip slot (2), a vacuum slot (3) and a connecting hole (4); a plurality of chip slots (2) are arranged in a matrix on the upper end face of the base (1), the vacuum slot (3) is provided on the lower end face of the base (1), and the connecting hole (4) connects the chip slot (2) and the vacuum slot (3).

2. The bare chip testing fixture based on a manual probe station according to claim 1, characterized in that, The connecting hole (4) is located at the center of the chip slot (2).

3. The bare chip testing fixture based on a manual probe station according to claim 1, characterized in that, The depth of the chip groove (2) is less than the thickness of the bare chip.

4. The bare chip testing fixture based on a manual probe station according to claim 1, characterized in that, The chip slot (2) is a rectangular slot.

5. The bare chip testing fixture based on a manual probe station according to claim 4, characterized in that, The size of the chip slot (2) is equal to the size of the bare chip.

6. The bare chip testing fixture based on a manual probe station according to claim 1, characterized in that, It also includes an extension groove (5) provided on the side wall of the chip slot (2); after the tweezers pick up the bare chip to be tested, the tweezers tip is placed in the extension groove (5) and the bare chip to be tested is placed in the chip slot (2).

7. The bare chip testing fixture based on a manual probe station according to claim 6, characterized in that, The number of the extension slots (5) is 2, and the 2 extension slots (5) are arranged opposite to each other.

8. The bare chip testing fixture based on a manual probe station according to claim 1, characterized in that, The four corners of the chip slot (2) are chamfered.

9. The bare chip testing fixture based on a manual probe station according to claim 1, characterized in that, It also includes auxiliary positioning holes (6) formed on the base (1).

10. The bare chip testing fixture based on a manual probe station according to claim 1, characterized in that, The base (1) is made of antistatic material.

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