Mask pre-alignment device

Abstract

The utility model discloses a mask plate pre-alignment device, and relates to the technical field of mask plate transfer. The device comprises a bottom plate assembly, a rotation compensation mechanism and a pre-alignment mechanism, the bottom plate assembly comprises a mounting bottom plate and a connecting bottom plate which are rotationally connected; the rotation compensation mechanism comprises a rotation adjusting piece arranged on the connecting bottom plate, and one end of the rotation adjusting piece can abut against the side wall of the mounting bottom plate. The pre-alignment mechanism comprises a pre-alignment part, the pre-alignment part comprises two first clamping pieces and two second clamping pieces, and the two first clamping pieces are used for getting close to or getting away from each other in the first direction; the two second clamping pieces are used for getting close to or getting away from each other in the second direction, and the first direction perpendicularly intersects with the second direction; the reference position face is arranged in an area defined by the two first clamping pieces and the two second clamping pieces. The mask plate is transferred into the area defined by the first clamping piece and the second clamping piece, the first clamping piece and the second clamping piece are driven to move and push the mask plate to coincide with the reference position face, and therefore the pre-alignment reliability of the mask plate is improved.

Description

Technical Field

[0001] This utility model relates to the field of mask transfer technology, and more specifically, to a mask pre-alignment device. Background Technology

[0002] In semiconductor lithography, the mask pre-alignment device is a key piece of equipment to ensure exposure accuracy. Its core function is to control the offset of the mask within the adjustable range of the subsequent coarse and fine alignment mechanisms by preliminary positioning and attitude adjustment before the mask enters the lithography machine stage, thereby improving the overall exposure efficiency and yield.

[0003] Existing pre-alignment devices are generally unable to correct rotational offsets caused by assembly errors or transportation. Furthermore, the installation accuracy of existing pre-alignment devices relies on manual adjustment and lacks a standardized positioning structure, resulting in installation errors of the pre-alignment device itself directly affecting the mask positioning results. Utility Model Content

[0004] The purpose of this invention is to provide a mask pre-alignment device that can adjust and compensate for the offset of the mounting base plate, improve the reliability of mask pre-alignment, and meet the requirements of coarse and fine alignment of the mask on the mask stage.

[0005] The embodiments of this utility model are implemented as follows:

[0006] In one aspect, this utility model provides a mask pre-alignment device, including a base plate assembly, a rotation compensation mechanism, and a pre-alignment mechanism; the base plate assembly includes a mounting base plate and a connecting base plate, the mounting base plate being rotatably connected to the upper surface of the connecting base plate; the rotation compensation mechanism includes a rotation adjustment member disposed on the connecting base plate, one end of the rotation adjustment member being able to abut against the side wall of the mounting base plate to drive the mounting base plate to rotate relative to the connecting base plate; the pre-alignment mechanism includes a pre-alignment part, the pre-alignment part including two first clamping members and two second clamping members, the two first clamping members being used to move closer to or further away from each other along a first direction; the two second clamping members being used to move closer to or further away from each other along a second direction, the first direction and the second direction being perpendicularly intersecting; a reference plane is disposed within the area enclosed by the two first clamping members and the two second clamping members; the mask is transferred to the area enclosed by the first clamping members and the second clamping members, the first clamping members and the second clamping members being driven to move and push the mask to coincide with the reference plane.

[0007] Optionally, the rotating adjustment component includes at least two first differential heads, which are spaced apart and disposed on the same side of the mounting base plate. Each first differential head includes an adjustment head and a measuring rod that are connected by a transmission. Driving the adjustment head to rotate can cause the measuring rod to extend or shorten relative to the mounting base plate. The end of the measuring rod abuts against the side wall of the mounting base plate, and the measuring rod can drive the mounting base plate to rotate relative to the connecting base plate.

[0008] Optionally, a connector is provided on the side of the mounting base plate facing the connecting base plate, and a cross ball bearing is sleeved on the outside of the connector. The connecting base plate is provided with a shaft hole corresponding to the cross ball bearing, and the cross ball bearing passes through the shaft hole. The center of the shaft core of the shaft hole, the shaft core of the cross ball bearing, and the reference surface coincide.

[0009] Optionally, the rotation compensation mechanism also includes an oblong hole provided on the mounting base plate, and a bolt hole provided on the connecting base plate. The fastener can pass through the oblong hole and the bolt hole in sequence to fix the mounting base plate and the connecting base plate together. The center of the circumference where the arc extension direction of the oblong hole is located coincides with the core of the cross ball bearing.

[0010] Optionally, a locating pin is vertically provided on the connecting base plate, and the side wall of the mounting base plate can abut against the locating pin.

[0011] Optionally, the rotation compensation mechanism also includes a mounting positioning block disposed on the connecting base plate. The mounting positioning block has an arc-shaped waist hole, and the center of the circumference where the arc-shaped waist hole extends coincides with the axis of the cross ball bearing ring, so that the side wall of the mounting positioning block can fit against the side wall of the mounting base plate.

[0012] Optionally, the pre-alignment part further includes a first sliding assembly and a second sliding assembly; two first clamping members are disposed on the first sliding assembly, and two second clamping members are disposed on the second sliding assembly; the two first clamping members are used to move closer to or further away from each other on the first sliding assembly along a first direction, and the two second clamping members are used to move closer to or further away from each other on the second sliding assembly along a second direction.

[0013] Optionally, the first sliding assembly includes two first slide rails, and two first clamping members are slidably mounted on the two first slide rails respectively; the second sliding assembly includes two second slide rails, and two second clamping members are slidably mounted on the second slide rails respectively; the two first slide rails and the two second slide rails form a cross-shaped structure.

[0014] Optionally, the first clamping member and / or the second clamping member are provided with a second differential head and a clamping wheel assembly that can abut against the side of the mask. The rotation axis of the clamping wheel assembly intersects with the plane where the mask is located. The second differential head includes an adjusting head and a measuring rod that are connected by transmission. A stop block that is fixedly provided on the mounting base plate and is opposite to the measuring rod is provided. Driving the adjusting head to rotate can drive the measuring rod to move closer to or away from the stop block. The movement of the measuring rod can drive the first clamping member and / or the second clamping member to move, so as to adjust the relative interval between the two first clamping members and / or the two second clamping members.

[0015] Optionally, the pre-alignment part further includes a horizontally arranged support assembly, with two first clamping members and two second clamping members surrounding the periphery of the support assembly; the support assembly includes a connecting column and a support platform, the connecting column is vertically arranged on the mounting base plate, and the support platform is located at the end of the connecting column for placing the mask; a stepped pin and a connector are sequentially spaced at one end of the connecting column facing the support platform, the end face diameter of the stepped pin is smaller than the end face diameter of the connecting column, and larger than the end face diameter of the connector; the periphery of the end of the stepped pin facing the connector is chamfered; the connector is provided with a threaded hole along the axial direction; a through hole is opened at the bottom of the support platform corresponding to the position of the threaded hole, and the connector and the stepped pin can extend into the through hole.

[0016] Optionally, the first slide rail and the second slide rail are respectively provided with driving components. The driving component on the first slide rail can drive the first clamping member to move closer to or away from the reference plane on the first slide rail; the driving component on the second slide rail can drive the second clamping member to move closer to or away from the reference plane on the second slide rail.

[0017] Optionally, the drive assembly includes a positive pressure cylinder and a return spring. The positive pressure cylinder can drive the first clamping member / second clamping member to move closer to or away from the reference surface, and the return spring can be stretched to form a traction force that resets the first clamping member / second clamping member.

[0018] The beneficial effects of this utility model include:

[0019] This application provides a photomask pre-alignment device, including a base plate assembly, a rotation compensation mechanism, and a pre-alignment mechanism. The base plate assembly includes a mounting base plate and a connecting base plate. The mounting base plate is rotatably connected to the upper surface of the connecting base plate. This arrangement allows the mounting base plate to rotate freely around a central axis, thereby correcting rotational misalignment. The rotation compensation mechanism includes a rotation adjustment member disposed on the connecting base plate. One end of the rotation adjustment member can abut against the side wall of the mounting base plate to drive the mounting base plate to rotate relative to the connecting base plate. By adjusting the rotation adjustment member, the rotation angle of the mounting base plate can be precisely controlled to compensate for rotational misalignment. This invention compensates for rotational offsets caused by assembly errors or transport, improving pre-alignment accuracy. The pre-alignment mechanism includes a pre-alignment section, which comprises two first clamping members and two second clamping members. The two first clamping members are used to move closer to or further away from each other along a first direction; the two second clamping members are used to move closer to or further away from each other along a second direction, with the first and second directions intersecting perpendicularly. A reference plane is set within the area enclosed by the two first clamping members and the two second clamping members. When the mask is transported to the area enclosed by the first and second clamping members, the first and second clamping members are driven to move and push the mask to coincide with the reference plane. Compared to the prior art that directly places the mask on the mask stage and performs position calibration through the mask stage, the mask pre-alignment device of this application greatly reduces the offset of the mask through pre-adjustment and performs offset compensation, which is beneficial to improving the high-precision positioning of the mask on the mask stage. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 One of the structural schematic diagrams of the mask pre-alignment device provided in the embodiments of this utility model;

[0022] Figure 2 A second schematic diagram of the mask pre-alignment device provided in this embodiment of the present invention;

[0023] Figure 3 This is a magnified view of the details at point A;

[0024] Figure 4 The third schematic diagram of the mask pre-alignment device provided in this embodiment of the utility model;

[0025] Figure 5 Fourth schematic diagram of the structure of the mask pre-alignment device provided in the embodiments of this utility model;

[0026] Figure 6 Fifth schematic diagram of the structure of the mask pre-alignment device provided in the embodiments of this utility model;

[0027] Figure 7 Sixth schematic diagram of the structure of the mask pre-alignment device provided in the embodiments of this utility model;

[0028] Figure 8 This is one of the schematic diagrams illustrating the mask position calibration in an embodiment of this application;

[0029] Figure 9 This is the second schematic diagram of mask position calibration in an embodiment of this application;

[0030] Figure 10 This is the third schematic diagram of mask position calibration in an embodiment of this application.

[0031] Icons: 100-Mask pre-alignment device; 110-Base plate assembly; 111-Mounting base plate; 112-Connecting base plate; 1121-Positioning pin; 113-Stop; 121-First micrometer head; 122-Oval hole; 123-Mounting positioning block; 1231-Arc-shaped waist hole; 130-Pre-alignment mechanism; 1301-Clamping wheel; 131-First clamping element; 132-Second clamping element; 133-Reference plane; 13 4-First sliding assembly; 1341-First slider; 135-Second sliding assembly; 1351-Second slider; 136-Support assembly; 1361-Connecting column; 1361a-Step pin; 1362b-Connector; 1362-Support platform; 137-Positive pressure cylinder; 138-Reset spring; 139-Second differential head; 140-Cross ball bearing collar; 150-Housing; a-First direction; b-Second direction. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0033] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0034] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0035] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set", "install", "connect", and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0036] Please refer to Figure 1This embodiment provides a mask pre-alignment device 100, including a base plate assembly 110, a rotation compensation mechanism, and a pre-alignment mechanism 130. The base plate assembly 110 includes a mounting base plate 111 and a connecting base plate 112, with the mounting base plate 111 rotatably connected to the upper surface of the connecting base plate 112. The rotation compensation mechanism includes a rotation adjustment member disposed on the connecting base plate 112, one end of which can abut against the side wall of the mounting base plate 111 to drive the mounting base plate 111 to rotate relative to the connecting base plate 112. The pre-alignment mechanism 130 includes a pre-alignment part, which includes... Two first clamping members 131 and two second clamping members 132 are provided. The two first clamping members 131 are used to move closer to or further away from each other along a first direction a; the two second clamping members 132 are used to move closer to or further away from each other along a second direction b. The first direction a and the second direction b intersect perpendicularly. A reference plane 133 is provided in the area enclosed by the two first clamping members 131 and the two second clamping members 132. The mask is transferred to the area enclosed by the first clamping members 131 and the second clamping members 132. The first clamping members 131 and the second clamping members 132 are driven to move and push the mask to coincide with the reference plane 133.

[0037] Specifically, the mask pre-alignment device 100 adopts a modular integrated design, integrating rotation compensation and pre-alignment functions into the device. The rotation compensation mechanism is used to correct the rotational offset of the mask and also to compensate for assembly errors of the device. When the rotational offset of the mask on the mask stage is large and cannot be adjusted by the pre-alignment mechanism 130, the offset can be adjusted by the rotation compensation function. The pre-alignment mechanism 130 realizes translational positioning along the first direction a and the second direction b. This structure simplifies the mask pre-alignment process, reduces the accumulation of installation errors between independent mechanisms, and improves system reliability and maintenance convenience.

[0038] like Figure 1 As shown, the base plate assembly 110 includes a mounting base plate 111 and a connecting base plate 112. In an optional embodiment of this application, the mounting base plate 111 is rotatably connected to the connecting base plate 112 via a cross ball bearing 140. A connector is protruding from the side of the mounting base plate 111 facing the connecting base plate 112, and the cross ball bearing 140 is sleeved on the outside of the connector. The connecting base plate 112 is provided with a shaft hole corresponding to the cross ball bearing 140, and the cross ball bearing 140 passes through the shaft hole. The center of the shaft hole, the shaft of the cross ball bearing 140, and the center of the reference surface 133 coincide.

[0039] Specifically, such as Figure 6As shown, a vertically downward extending shaft or flange is provided at the bottom center of the mounting base plate 111. A cross ball bearing 140 is installed on the shaft or flange. The inner ring of the cross ball bearing 140 and the shaft or flange can be circumferentially limited by interference fit, key assembly or bolt fixation. The inner ring of the cross ball bearing 140 extends downward and protrudes from the lower end face of the mounting base plate 111. The outer ring of the bearing rotates. A shaft hole is provided at the corresponding position of the lower connecting base plate 112 on the lower side of the mounting base plate 111. The cross ball bearing 140 is installed in the shaft hole. The axis of the shaft hole, the axis of the cross ball bearing 140 and the alignment center of the reference surface 133 are all located on the same vertical line.

[0040] The cross ball bearing collar 140 provides rotational freedom for the rotational compensation mechanism. When the rotational offset of the mask on the mask stage is large and cannot be adjusted by the pre-alignment mechanism 130, the offset can be adjusted by the relative rotation of the mounting base 111 and the connecting base 112. Compared with the existing fixed mounting base, this application can correct the rotational offset angle by rotating the mounting base 111 and the connecting base 112.

[0041] To further improve the accuracy of offset angle compensation, the rotation compensation mechanism includes a rotation adjustment component provided on the connecting base plate 112. One end of the rotation adjustment component can abut against the side wall of the mounting base plate 111 to drive the mounting base plate 111 to rotate relative to the connecting base plate 112.

[0042] In one specific embodiment of this application, such as Figure 4 As shown, the rotating adjustment component includes at least two first differential heads 121, which are spaced apart on the same side of the mounting base plate 111. Each first differential head 121 includes an adjustment head and a measuring rod that are connected by a transmission. Driving the adjustment head to rotate can cause the measuring rod to extend or shorten relative to the mounting base plate 111. The end of the measuring rod abuts against the side wall of the mounting base plate 111, and the measuring rod can drive the mounting base plate 111 to rotate relative to the connecting base plate 112.

[0043] Preferably, the measuring rod has a scale with an accuracy of 0.01. When a rotational offset is detected, the extension of the measuring rod is adjusted by rotating the adjusting head, so that the measuring rod of the micrometer head can abut against the side wall of the mounting base plate 111, and the mounting base plate 111 is driven to rotate by the measuring rod, thereby achieving precise control of the rotational compensation angle of the mounting base plate 111 around the center of the collar.

[0044] The pre-alignment unit can push the mask to adjust its position. The pre-alignment mechanism 130 is disposed on the mounting base 111, such as... Figure 1 and Figure 2As shown, it includes two first clamping members 131 and two second clamping members 132. The area enclosed by the two first clamping members 131 and the two second clamping members 132 has a reference plane 133 that coincides with the calibrated mask at its center. The two first clamping members 131 are located on both sides of the mask along the second direction b, and the two second clamping members 132 are located on both sides of the mask along the first direction a. Please refer to the following in sequence. Figure 8 , Figure 9 as well as Figure 10 As shown, the first clamping member 131 and the second clamping member 132 are driven to move and push the mask to coincide with the reference surface 133. The position of the reference surface 133 is the reference position set for the pre-alignment of the mask. The mask is clamped towards the center by the clamping members at this position, thereby adjusting the mask to coincide with the reference surface 133. The reference position is adjusted during the assembly process of this device.

[0045] like Figure 7 As shown, the mask pre-alignment device 100 also includes a housing 150. The base plate assembly 110, the rotation compensation mechanism, and the pre-alignment mechanism 130 are all disposed within the housing 150. The housing 150 can protect the base plate assembly 110, the rotation compensation mechanism, and the pre-alignment mechanism 130, while the adjustment head of the first micrometer head 121 can extend outward through the housing 150, facilitating rotational adjustment by the operator. The top of the housing 150 has an opening for placing the mask, allowing the mask to be clamped and adjusted by the clamping components.

[0046] It should be noted that, in one possible implementation of this application, such as Figure 4 As shown, the mounting base plate 111 is provided with an oblong hole 122, and the connecting base plate 112 is provided with a corresponding bolt hole. The fastener can pass through the oblong hole 122 and the bolt hole in sequence to fix the mounting base plate 111 and the connecting base plate 112. The center of the circumference where the arc extension direction of the oblong hole 122 is located coincides with the core of the cross ball bearing 140.

[0047] Specifically, the mounting base plate 111 is provided with an oblong hole 122. Of course, in another specific embodiment of this application, it can also be provided as a strip-shaped hole, as long as it is possible to insert a fixing member. The long axis direction of the oblong hole 122 is consistent with the rotation compensation direction of the mounting base plate 111. Preferably, there are multiple oblong holes 122, and the multiple oblong holes 122 are arranged on the same circumference along the periphery of the mounting base plate 111.

[0048] When it is necessary to rotate the mounting base 111 for fine-tuning of the offset angle, simply loosen the fastener in the oblong hole 122, then rotate the mounting base 111 for fine-tuning. After fine-tuning and calibration, reassemble and tighten the fastener. This design makes the fine-tuning and calibration process of the mounting base 111 more convenient. After fine-tuning and calibration, the mounting base 111 can be fixed in position by the fastener, improving the reliability of the mask pre-alignment device 100.

[0049] The mask pre-alignment device 100 provided in this application includes a base plate assembly 110, a rotation compensation mechanism, and a pre-alignment mechanism 130. The base plate assembly 110 includes a mounting base plate 111 and a connecting base plate 112. The mounting base plate 111 is rotatably connected to the upper surface of the connecting base plate 112. This arrangement allows the mounting base plate 111 to rotate freely around its central axis, thereby correcting rotational offset. The rotation compensation mechanism includes a rotation adjustment member disposed on the connecting base plate 112. One end of the rotation adjustment member can abut against the side wall of the mounting base plate 111 to drive the mounting base plate 111 to rotate relative to the connecting base plate 112. By adjusting the rotation adjustment member, the rotation angle of the mounting base plate 111 can be precisely controlled to compensate for rotational offset. To improve pre-alignment accuracy due to rotational offset caused by assembly errors or transport, the pre-alignment mechanism 130 includes a pre-alignment section, which includes two first clamping members 131 and two second clamping members 132. The two first clamping members 131 are used to move closer to or further away from each other along a first direction a; the two second clamping members 132 are used to move closer to or further away from each other along a second direction b, and the first direction a and the second direction b intersect perpendicularly. A reference surface 133 is disposed in the area enclosed by the two first clamping members 131 and the two second clamping members 132. When the mask is transported to the area enclosed by the first clamping members 131 and the second clamping members 132, the first clamping members 131 and the second clamping members 132 are driven to move and push the mask to coincide with the reference surface 133. Compared to existing technologies that directly place the mask on the mask stage and perform position calibration through the mask stage, the mask pre-alignment device 100 of this application greatly reduces the offset of the mask by pre-adjustment and performs offset compensation, which is conducive to improving the high-precision positioning of the mask on the mask stage.

[0050] In one possible implementation of this application, such as Figure 4 As shown, a positioning pin 1121 is vertically provided on the connecting base plate 112, and the side wall of the mounting base plate 111 can abut against the positioning pin 1121.

[0051] Specifically, to facilitate quick location of the assembly position during assembly, a locating pin 1121 is vertically provided on the connecting base plate 112. When the mounting base plate 111 is assembled onto the connecting base plate 112, one side wall of the mounting base plate 111 can precisely abut against the locating pin 1121. To further improve its positioning accuracy, the number of locating pins 1121 is at least two, and the at least two locating pins 1121 are spaced apart and abut against one side wall of the mounting base plate 111 respectively. When the mounting base plate 111 and the connecting base plate 112 are initially assembled, the side wall of the mounting base plate 111 precisely abuts against the locating pin 1121 to achieve positioning, and at this time, the assembly accuracy of the mounting base plate 111 can meet the preset requirements.

[0052] Optionally, such as Figure 4 As shown, the rotation compensation mechanism also includes a mounting positioning block 123 disposed on the connecting base plate 112. The mounting positioning block 123 has an arc-shaped waist hole 1231. The center of the circumference where the arc-shaped waist hole 1231 extends is coincident with the axis of the cross ball bearing ring 140, so that the side wall of the mounting positioning block 123 can fit against the side wall of the mounting base plate 111.

[0053] Specifically, in order to facilitate the fixing of the mounting base plate 111, such as Figure 4 As shown, a mounting positioning block 123 is also provided on the connecting base plate 112. The mounting positioning block 123 is positioned opposite to the first micro head 121 on one side of the mounting base plate 111. The side of the mounting positioning block 123 closest to the mounting base plate 111 is flat. An arc-shaped waist hole 1231 is provided on the mounting positioning block 123. The depth direction of the arc-shaped waist hole 1231 is in the same direction as the stacking direction of the mounting base plate 111 and the connecting base plate 112.

[0054] The arc-shaped waist hole 1231 is used to set the adjusting bolt. When the mounting base plate 111 is finely adjusted in angle by the first micro head 121, the adjusting bolt can slide along the arc-shaped waist hole 1231 as the mounting base plate 111 rotates. After the angle of the mounting base plate 111 is finely adjusted and calibrated, the mounting positioning block 123 can fit against the side wall of the mounting base plate 111. At this time, tightening the adjusting bolt can further fix the mounting base plate 111.

[0055] For example, such as Figure 2 As shown, the pre-alignment part also includes a first sliding assembly 134 and a second sliding assembly 135; two first clamping members 131 are disposed on the first sliding assembly 134, and two second clamping members 132 are disposed on the second sliding assembly 135; the two first clamping members 131 are used to move closer to or further away from each other on the first sliding assembly 134 along a first direction a, and the two second clamping members 132 are used to move closer to or further away from each other on the second sliding assembly 135 along a second direction b.

[0056] Specifically, such as Figure 2 As shown, the pre-alignment mechanism 130 includes a first sliding component 134 and a second sliding component 135; the first sliding component 134 is provided with two first clamping members 131, and the second sliding component 135 is provided with two second clamping members 132; the two first clamping members 131 can move closer or further away from each other on the first sliding component 134 along a first direction a, and the two second clamping members 132 can move closer or further away from each other on the second sliding component 135 along a second direction b. The first direction a and the second direction b intersect perpendicularly. The intersection of the first direction a and the second direction b here is actually used to indicate that the sliding directions of the first sliding component 134 and the second sliding component 135 are arranged in an intersecting manner.

[0057] Furthermore, the first sliding assembly 134 includes two first slide rails, and two first clamping members 131 are slidably mounted on the two first slide rails respectively; the second sliding assembly 135 includes two second slide rails, and two second clamping members 132 are slidably mounted on the second slide rails respectively; the two first slide rails and the two second slide rails form a cross-shaped structure.

[0058] Specifically, the first sliding assembly 134 includes two first slide rails, and two first clamping members 131 are slidably mounted on the two first slide rails respectively; the second sliding assembly 135 includes two second slide rails, and two second clamping members 132 are slidably mounted on the second slide rails respectively; the two first slide rails and the two second slide rails form a cross-shaped structure. By setting the first slide rails and the second slide rails, the process of adjusting the position of the mask by the first clamping members 131 and the second clamping members 132 is more efficient and stable.

[0059] Optionally, such as Figure 2 As shown, the first clamping member 131 and / or the second clamping member 132 are provided with a second microhead 139 and a set of clamping wheels 1301 that can abut against the side of the mask. The rotation axis of the set of clamping wheels 1301 intersects the plane where the mask is located. The second microhead 139 includes an adjusting head and a measuring rod that are connected by transmission. A stop 113 that is fixedly provided on the mounting base plate 111 and is opposite to the measuring rod is provided. Driving the adjusting head to rotate can drive the measuring rod to move closer to or away from the stop 113. The movement of the measuring rod can drive the first clamping member 131 and / or the second clamping member 132 to move, so as to adjust the relative interval between the two first clamping members 131 and / or the two second clamping members 132.

[0060] Specifically, such as Figure 2As shown, in one optional implementation, the first clamping member 131 and / or the second clamping member 132 are provided with a set of clamping wheels 1301. The set of clamping wheels 1301 includes one or at least two clamping wheels 1301, and the at least two clamping wheels 1301 are arranged at intervals along the side of the photomask. In this embodiment, a total of eight clamping wheels 1301 can enclose the reference surface 133 into a rectangle. The size of the reference surface 133 is the same as the size of the photomask, and their edges coincide. By enclosing the reference surface 133 with the eight clamping wheels 1301, the photomask can be made to coincide with the reference surface 133.

[0061] Preferably, the photomask has two clamping wheels 1301 on one side and one clamping wheel 1301 on each of the other three sides. This embodiment uses four clamping wheels 1301 to position the photomask, with one clamping wheel 1301 on each of two corresponding sides, facilitating the fork plate's handling of the photomask from these sides and achieving a design that avoids obstacles. Furthermore, using fewer clamping wheels 1301 in this embodiment effectively reduces equipment costs.

[0062] Taking the first clamping member 131 as an example, after the first clamping member 131 abuts against the side of the photomask, the first clamping member 131 continues to move. The photomask, while suspended, deflects and self-corrects due to the abutment and push on its side. At this time, the side of the photomask will slide against the clamping wheel 1301. In this embodiment, the clamping wheel 1301 converts sliding friction into rolling friction, which not only makes the deflection adjustment of the photomask smoother but also protects the side of the photomask, preventing excessive wear.

[0063] A second micrometer head 139 is also provided on the first clamping member 131 and / or the second clamping member 132. The two first clamping members 131 are disposed on the first sliding assembly 134, and the two second clamping members 132 are disposed on the second sliding assembly 135. The first sliding assembly 134 includes two first slide rails and a first slider 1341 disposed on the first slide rails. The two first clamping members 131 are respectively mounted on the two first slide rails via the first slider 1341. Similarly, the second sliding assembly 135 includes two second slide rails and a second slider 1351 disposed on the second slide rails. The two second clamping members 132 are respectively mounted on the two second slide rails via the second slider 1351.

[0064] A crossbar is provided on the first slider 1341 along its sliding direction. One end of the crossbar is fixed to the first slider 1341, and the other end extends to the outside of the first slider 1341. A second differential head 139 is provided at the end of the crossbar away from the first slider 1341. A stop block 113 corresponding to the position of the second differential head 139 is fixedly provided on the mounting base plate 111. When the first slider 1341 drives the first clamping member 131 to slide along the first direction a, it can simultaneously drive the second differential head 139 to slide, so that the measuring rod of the second differential head 139 approaches or moves away from the stop block 113. By adjusting the adjusting head of the second differential head 139 to adjust its relative distance with the stop block 113, it can simultaneously drive the first clamping member 131 to slide along the first direction a, thereby adjusting the interval distance between the two first clamping members 131 in the same direction and the relative distance with the center point of the reference surface 133, thereby improving the alignment accuracy of the first clamping member 131.

[0065] Similarly, the second slider 1351 has a crossbar arranged along its sliding direction, one end of which is fixed to the second slider 1351 and the other end extends to the outside of the second slider 1351; the second differential head 139 is disposed at the end of the crossbar away from the second slider 1351; a stop block 113 corresponding to the position of the second differential head 139 is fixedly disposed on the mounting base plate 111. When the second slider 1351 drives the second clamping member 132 to slide along the second direction b, it can simultaneously drive the second differential head 139 to slide, so that the measuring rod of the second differential head 139 approaches or moves away from the stop block 113. By adjusting the adjusting head of the second differential head 139 to adjust its relative distance with the stop block 113, the second clamping member 132 can be simultaneously driven to slide along the second direction b, thereby adjusting the interval distance between the two second clamping members 132 in the same direction and the relative distance with the center point of the reference surface 133, thereby improving the alignment accuracy of the second clamping member 132.

[0066] The measuring rod of the second differential head 139 has a scale, preferably with a scale accuracy of 0.01, which can ensure the installation consistency of the first clamping member 131 and the second clamping member 132 during installation, thereby ensuring the consistency of the distance between the two first clamping members 131 and the two second clamping members 132 and the edge of the mask, thus further improving the alignment accuracy of the mask pre-alignment device 100.

[0067] In one possible implementation of this application, such as Figure 2 , Figure 3 and Figure 5As shown, the pre-alignment part also includes a horizontally arranged support assembly 136, with two first clamping members 131 and two second clamping members 132 surrounding the periphery of the support assembly 136; the support assembly 136 includes a connecting column 1361 and a support platform 1362, the connecting column 1361 is vertically arranged on the mounting base plate 111, and the support platform 1362 is disposed at the end of the connecting column 1361 for placing the mask plate; the end of the connecting column 1361 facing the support platform 1362 is provided with sequentially spaced... The support platform 1362 is provided with a stepped pin 1361a and a connector 1362b. The end face diameter of the stepped pin 1361a is smaller than the end face diameter of the connecting column 1361 and larger than the end face diameter of the connector 1362b. The periphery of the end of the stepped pin 1361a facing the connector 1362b is chamfered. The connector 1362b is provided with a threaded hole along the axial direction. A through hole is provided at the bottom of the support platform 1362 corresponding to the position of the threaded hole, and the connector 1362b and the stepped pin 1361a can extend into the through hole.

[0068] Specifically, such as Figure 2 and Figure 5 As shown, the support assembly 136 includes connecting columns 1361 and a support platform 1362. In one optional embodiment, the support platform 1362 has multiple spaced-apart support structural members for supporting the mask. The connecting columns 1361 are vertically mounted on the mounting base plate 111 and provide support for the support platform 1362. To improve the stability of the support platform 1362, preferably, four connecting columns 1361 are located around the support platform 1362.

[0069] like Figure 3 As shown, the end face of the connecting column 1361 is provided with a cylindrical connector 1362b, the diameter of which is smaller than the diameter of the connecting column 1361. A threaded hole is machined at the axial center position of the connector 1362b. Correspondingly, a through hole is provided at the bottom of the support platform 1362 at the position corresponding to the threaded hole on the connector 1362b. The connector 1362b can extend into the through hole so that the connecting column 1361 and the support platform 1362 are connected by a fastener thread.

[0070] In order to further improve the connection stability of the connecting column 1361, such as Figure 3As shown, a stepped pin 1361a is provided at the end of the connecting column 1361 facing the support platform 1362. The periphery of the stepped pin 1361a facing the connector 1362b is chamfered to facilitate the assembly of the connecting column 1361. During assembly, the diameter of the connector 1362b is smaller than the diameter of the through hole, and the stepped pin 1361a, guided by the chamfer, can enter the through hole together with the connector 1362b. The outer diameter of the stepped pin 1361a matches the inner diameter of the through hole, thus restricting the radial movement of the connecting column 1361 and making the connection between the connecting column 1361 and the support platform 1362 more stable.

[0071] In one possible embodiment of this application, a driving component is provided on the first slide rail and the second slide rail respectively. The driving component on the first slide rail can drive the first clamping member 131 to move closer to or away from the reference surface 133 on the first slide rail; the driving component on the second slide rail can drive the second clamping member 132 to move closer to or away from the reference surface 133 on the second slide rail.

[0072] Optionally, such as Figure 5 As shown, the drive assembly includes a positive pressure cylinder 137 and a return spring 138. The positive pressure cylinder 137 can drive the first clamping member 131 / second clamping member 132 to move closer to or away from the reference surface 133. The return spring 138 can be stretched to form a traction force that resets the first clamping member 131 / second clamping member 132.

[0073] Specifically, the positive pressure cylinder 137 can drive the first clamping member 131 closer to the reference surface 133, and the return spring 138 can be stretched to form a traction force that causes the first clamping member 131 to move away from the reference surface 133. The positive pressure cylinder 137 can drive the second clamping member 132 closer to the reference surface 133, and the return spring 138 can be stretched to form a traction force that causes the second clamping member 132 to move away from the reference surface 133.

[0074] Similarly, the positive pressure cylinder 137 can drive the first clamping member 131 away from the reference surface 133, and the return spring 138 can be stretched to form a traction force that brings the first clamping member 131 closer to the reference surface 133. The positive pressure cylinder 137 can drive the second clamping member 132 away from the reference surface 133, and the return spring 138 can be stretched to form a traction force that brings the second clamping member 132 closer to the reference surface 133.

[0075] Compared to a negative pressure cylinder, the mask pre-alignment device 100 of this application uses a positive pressure cylinder 137 as the driving component. Since the power source of a negative pressure cylinder is negative pressure, the pressure of the negative pressure is small, which will result in low efficiency. In contrast, the output force of the positive pressure cylinder 137 is greater than that of the negative pressure cylinder, so the response speed is also faster, thus improving the pre-alignment efficiency.

[0076] The above description is merely an optional embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

[0077] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable way without contradiction. In order to avoid unnecessary repetition, this utility model will not describe the various possible combinations separately.

Claims

1. A mask pre-alignment device, characterized in that, The system includes a base plate assembly (110), a rotation compensation mechanism, and a pre-alignment mechanism (130). The base plate assembly (110) includes a mounting base plate (111) and a connecting base plate (112), wherein the mounting base plate (111) is rotatably connected to the upper surface of the connecting base plate (112). The rotation compensation mechanism includes a rotation adjustment member disposed on the connecting base plate (112), one end of which can abut against the side wall of the mounting base plate (111) to drive the mounting base plate (111) to rotate relative to the connecting base plate (112). The pre-alignment mechanism (130) includes a pre-alignment part, which includes two first clamping members (131) and two... The second clamping member (132) is used for the two first clamping members (131) to move closer or further away from each other along a first direction (a); the two second clamping members (132) are used for moving closer or further away from each other along a second direction (b), the first direction (a) and the second direction (b) intersect perpendicularly; the reference plane (133) is disposed in the area enclosed by the two first clamping members (131) and the two second clamping members (132); the mask is transferred to the area enclosed by the first clamping members (131) and the second clamping members (132), the first clamping members (131) and the second clamping members (132) are driven to move and push the mask to coincide with the reference plane (133).

2. The mask pre-alignment device according to claim 1, characterized in that, The rotation adjustment component includes at least two first differential heads (121), which are spaced apart on the same side of the mounting base plate (111). Each first differential head (121) includes an adjustment head and a measuring rod that are connected by a transmission. Driving the adjustment head to rotate can cause the measuring rod to extend or shorten relative to the mounting base plate (111). The end of the measuring rod abuts against the side wall of the mounting base plate (111), and the measuring rod can drive the mounting base plate (111) to rotate relative to the connecting base plate (112).

3. The mask pre-alignment device according to claim 1, characterized in that, The mounting base plate (111) has a connector protruding on the side facing the connecting base plate (112). A cross ball bearing ring (140) is sleeved on the outside of the connector. The connecting base plate (112) has a shaft hole corresponding to the cross ball bearing ring (140). The cross ball bearing ring (140) passes through the shaft hole. The center of the shaft hole, the shaft of the cross ball bearing ring (140), and the center of the reference surface (133) coincide.

4. The mask pre-alignment device according to claim 3, characterized in that, The rotation compensation mechanism also includes an oblong hole (122) provided on the mounting base plate (111), and the connecting base plate (112) is provided with corresponding bolt holes. The fastener can pass through the oblong hole (122) and the bolt holes in sequence to fix the mounting base plate (111) and the connecting base plate (112) together. The center of the circumference of the arc-shaped extension direction of the oblong hole (122) coincides with the core of the cross ball bearing (140).

5. The mask pre-alignment device according to claim 1, characterized in that, The connecting base plate (112) is vertically provided with a positioning pin (1121), and the side wall of the mounting base plate (111) can abut against the positioning pin (1121).

6. The mask pre-alignment device according to claim 3, characterized in that, The rotation compensation mechanism also includes a mounting positioning block (123) disposed on the connecting base plate (112). The mounting positioning block (123) has an arc-shaped waist hole (1231). The center of the circumference of the arc-shaped waist hole (1231) is coincident with the axis of the cross ball bearing ring (140), so that the side wall of the mounting positioning block (123) can fit against the side wall of the mounting base plate (111).

7. The mask pre-alignment device according to claim 1, characterized in that, The pre-alignment part further includes a first sliding assembly (134) and a second sliding assembly (135); two first clamping members (131) are disposed on the first sliding assembly (134), and two second clamping members (132) are disposed on the second sliding assembly (135); the two first clamping members (131) are used to move closer to or further away from each other on the first sliding assembly (134) along a first direction (a), and the two second clamping members (132) are used to move closer to or further away from each other on the second sliding assembly (135) along a second direction (b).

8. The mask pre-alignment device according to claim 7, characterized in that, The first sliding assembly (134) includes two first slide rails, and two first clamping members (131) are slidably mounted on the two first slide rails respectively; the second sliding assembly (135) includes two second slide rails, and two second clamping members (132) are slidably mounted on the second slide rails respectively; the two first slide rails and the two second slide rails form a cross-shaped structure.

9. The mask pre-alignment device according to claim 8, characterized in that, The first clamping member (131) and / or the second clamping member (132) are provided with a second microhead (139) and a set of clamping wheels (1301) that can abut against the side of the mask. The rotation axis of the set of clamping wheels (1301) intersects the plane where the mask is located. The second microhead (139) includes an adjusting head and a measuring rod that are connected by transmission. A stop (113) that is fixedly provided on the mounting base plate (111) and is opposite to the measuring rod. Driving the adjusting head to rotate can drive the measuring rod to move closer to or away from the stop (113). The movement of the measuring rod can drive the first clamping member (131) and / or the second clamping member (132) to move, so as to adjust the relative interval between the two first clamping members (131) and / or the two second clamping members (132).

10. The mask pre-alignment device according to claim 7, characterized in that, The pre-alignment part further includes a horizontally arranged support assembly (136), with two first clamping members (131) and two second clamping members (132) surrounding the periphery of the support assembly (136); the support assembly (136) includes a connecting column (1361) and a support platform (1362), the connecting column (1361) is vertically arranged on the mounting base plate (111), and the support platform (1362) is arranged at the end of the connecting column (1361) for placing the mask plate; the end of the connecting column (1361) facing the support platform (1362) is spaced apart sequentially. The support platform (1362) is provided with a stepped pin (1361a) and a connector (1362b). The end face diameter of the stepped pin (1361a) is smaller than the end face diameter of the connecting column (1361) and larger than the end face diameter of the connector (1362b). The periphery of the end of the stepped pin (1361a) facing the connector (1362b) is chamfered. The connector (1362b) is provided with a threaded hole along the axial direction. The bottom of the support platform (1362) is provided with a through hole corresponding to the position of the threaded hole, and the connector (1362b) and the stepped pin (1361a) can extend into the through hole.

11. The mask pre-alignment device according to claim 8, characterized in that, The first slide rail and the second slide rail are respectively provided with driving components. The driving component on the first slide rail can drive the first clamping member (131) to move closer to or away from the reference plane (133) on the first slide rail; the driving component on the second slide rail can drive the second clamping member (132) to move closer to or away from the reference plane (133) on the second slide rail.

12. The mask pre-alignment device according to claim 11, characterized in that, The drive assembly includes a positive pressure cylinder (137) and a return spring (138). The positive pressure cylinder (137) can drive the first clamping member (131) / second clamping member (132) to move closer to or away from the reference surface (133). The return spring (138) can be stretched to form a traction force that resets the first clamping member (131) / second clamping member (132).

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