Distributed control system of tubular PECVD (plasma enhanced chemical vapor deposition) equipment

Abstract

The utility model discloses a distributed control system of tubular PECVD (plasma enhanced chemical vapor deposition) equipment, which comprises a control subsystem, the control subsystem comprises a signal acquisition module, a control module and a driving module, the signal acquisition module is in communication connection with the control module, and the control module is in communication connection with the driving module; the signal acquisition module is used for acquiring and gathering the current state information of the carrier and sending the current state information to the control module; the control module is used for receiving the current state information, issuing a control instruction according to the current state information and controlling the driving module to work; and the driving module is used for receiving the control instruction and operating the carrier according to the control instruction. And by arranging the signal acquisition module, the effects of reducing the cable laying amount, reducing the workload of installation and debugging and reducing the risk of communication faults of the equipment can be achieved.

Description

Technical Field

[0001] This application relates to the field of tubular PECVD equipment technology, and in particular to a distributed control system for tubular PECVD equipment. Background Technology

[0002] PECVD (Plasma Enhanced Chemical Vapor Deposition) is an advanced materials preparation technology. In PECVD, a gas is ionized through glow discharge in a deposition chamber, forming a highly reactive substance containing gas molecules, high-energy ions, and active free radicals. These reactive substances then undergo a chemical reaction on a substrate, depositing to form a solid thin film. Therefore, tubular PECVD equipment can be used as an important process in photovoltaic production. By depositing an anti-reflective film on silicon wafers using this equipment, the efficiency of the solar cells can be improved.

[0003] Currently, the equipment is highly integrated, comprising multiple control subsystems, each containing multiple data acquisition devices. Specifically, the graphite boat serves as the carrier for the silicon wafers in this process. The silicon wafers are loaded into the graphite boat via an automatic wafer inserter / remover. Based on the information acquired by the data acquisition devices, different control subsystems perform input operations on the graphite boat, such as grasping, placing, and processing reactions. After the process is completed, the reverse output process is executed to remove the silicon wafers, completing the coating operation.

[0004] However, due to the large number of data acquisition components installed in each control subsystem and their extremely dispersed locations, all data acquisition components need to be connected to the control board of the control subsystem. This results in long cable distances and a large number of wire harnesses, which increases the workload of the staff in installation and debugging, as well as the amount of cables used. Furthermore, the electromagnetic interference encountered during production and use will also increase, raising the risk of communication failures in the equipment. Utility Model Content

[0005] Based on this, this application provides a distributed control system for tubular PECVD equipment to solve the problems in related technologies, such as long cable distances and a large number of wire harnesses, which result in a large workload for installation and commissioning and difficulties in later maintenance.

[0006] To address the above issues, a distributed control system for a tubular PECVD equipment is provided, comprising a control subsystem, which includes a signal acquisition module, a control module, and a drive module. The signal acquisition module is communicatively connected to the control module, and the control module is communicatively connected to the drive module.

[0007] The signal acquisition module is used to collect and summarize the current status information of the carrier and send the current status information to the control module;

[0008] The control module is used to receive current status information, issue control commands based on the current status information, and control the operation of the drive module.

[0009] The drive module is used to receive control commands and operate the carrier according to the control commands.

[0010] Preferably, the signal acquisition module includes a signal acquisition unit and an acquisition module, with the signal acquisition unit communicatively connected to the acquisition module;

[0011] The signal acquisition unit is used to acquire the current status information of the carrier and send the current status information to the acquisition module;

[0012] The data acquisition module is used to receive current status information, summarize the current status information, and send it to the control module.

[0013] Preferably, the acquisition module includes an acquisition module master station and an acquisition module slave station, and the acquisition module master station and the acquisition module slave station are communicatively connected; the signal acquisition unit includes a first acquisition unit and a second acquisition unit, the first acquisition unit is communicatively connected to the acquisition module slave station, and the second acquisition unit is communicatively connected to the acquisition module master station;

[0014] The first acquisition unit is used to acquire the first status information of the carrier and send the first status information to the acquisition module slave station;

[0015] The data acquisition module slave station is used to receive the first status information and send the first status information to the data acquisition module master station;

[0016] The second acquisition unit is used to acquire the second status information of the carrier and send the second status information to the acquisition module master station;

[0017] The acquisition module master station is used to receive the first status information and the second status information, and then send the first status information and the second status information to the control module.

[0018] Preferably, the acquisition module uses an IP6X housing for installation.

[0019] Preferably, each interface of the acquisition module is connected via an aviation plug to enhance the protection level.

[0020] Preferably, the control module includes a subsystem control board, on which a PLC host is installed; the PLC host is communicatively connected to both the signal acquisition module and the drive module.

[0021] The PLC host is used to receive current status information, issue control commands based on the current status information, and control the drive module to work.

[0022] Preferably, the drive module includes multiple servo drivers connected in series, which are used to perform different operations on the carrier according to control commands.

[0023] Preferably, the control subsystem also includes a communication gateway, which is connected to the PLC host to provide overall signal support for the control subsystem.

[0024] Preferably, there are multiple control subsystems, including a robotic arm control subsystem and a furnace tube control subsystem;

[0025] The robotic arm control subsystem is used to operate the carrier based on the carrier's current state information;

[0026] The furnace tube control subsystem is used to operate the substrate to be coated on the carrier based on the current status information of the carrier.

[0027] Preferably, when the control subsystem is a furnace tube control subsystem, it also includes other components;

[0028] Other components are connected to the control module to monitor and adjust the status of the furnace tube control subsystem.

[0029] The embodiments of this disclosure have at least the following advantages: by setting up a signal acquisition module, the current status information of the carrier collected by the acquisition components can be summarized and uniformly sent to the control module. It is no longer necessary to connect all the acquisition components to the control board of the control subsystem, thereby reducing the amount of cable laying, reducing the workload of installation and debugging, reducing the impact of electromagnetic interference and the risk of communication failure of the equipment. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in the embodiments of this application or in the conventional technology, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of the overall structure of a distributed control system for a tubular PECVD device in an embodiment of this application;

[0032] Figure 2 This is a schematic diagram of the control subsystem structure of a distributed control system for a tubular PECVD equipment in an embodiment of this application;

[0033] Figure 3 This is a schematic diagram of the housing of the acquisition module in the distributed control system of a tubular PECVD device according to an embodiment of this application.

[0034] Figure 4 This is a schematic diagram of the structure of an aviation plug in the distributed control system of a tubular PECVD equipment according to an embodiment of this application.

[0035] Figure 5 This is a schematic diagram of the robotic arm control subsystem structure of a distributed control system for a tubular PECVD equipment in an embodiment of this application;

[0036] Figure 6 This is a schematic diagram of the furnace tube control subsystem in the distributed control system of a tubular PECVD equipment according to an embodiment of this application. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0038] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this application. Therefore, the drawings only show the components related to this application and are not drawn according to the number, shape and size of the components in actual implementation. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0039] The structures, proportions, sizes, etc., shown in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of this application. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

[0040] The orientations or positional relationships indicated by terms such as "upper," "lower," "left," "right," "middle," "longitudinal," "lateral," "horizontal," "inner," "outer," "radial," and "circumferential" used in this specification are based on the orientations or positional relationships shown in the accompanying drawings and are used only for the purpose of simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0041] In existing technologies, the control systems of tubular PECVD equipment, while including multiple control subsystems, involve a large number of data acquisition components installed in highly dispersed locations. This necessitates connecting all acquisition components to the control board of each subsystem, resulting in long cable distances, numerous wire harnesses, and increased workload for installation and debugging personnel, as well as increased cable usage. Furthermore, it increases electromagnetic interference during production, raising the risk of communication failures. Therefore, this application provides a distributed control system for tubular PECVD equipment. By incorporating a signal acquisition module, the current status information of the carrier acquired by the acquisition components can be aggregated and uniformly sent to the control module. This eliminates the need to connect all acquisition components to the control board of the subsystem, thereby reducing cable laying, installation and debugging workload, electromagnetic interference, and the risk of communication failures.

[0042] The following detailed description, in conjunction with the accompanying drawings, illustrates a distributed control system for a tubular PECVD equipment provided in this embodiment. Please refer to the attached drawings. Figure 1 , Figure 2 As shown, the system includes a control subsystem, which comprises a signal acquisition module, a control module, and a drive module. The signal acquisition module is communicatively connected to the control module, and the control module is communicatively connected to the drive module. The signal acquisition module collects and summarizes the current status information of the carrier and sends this information to the control module. The control module receives the current status information and issues control commands based on it to control the drive module. The drive module receives the control commands and operates the carrier accordingly. The carrier includes, but is not limited to, a graphite boat.

[0043] Here, as Figure 1 As shown, the distributed control system is first briefly introduced, which includes a Manufacturing Execution System (MES), a human-machine interface (HMI) industrial computer, a gateway, a chip inserter, and multiple control subsystems. The MES, HMI, chip inserters, and each control subsystem communicate with each other through a gateway, and different protocols are used for communication between different components and the gateway. Specifically, the MES and the gateway exchange information using a dedicated MES protocol; the HMI and the gateway exchange information using the OPCUA (OPC Unified Architecture) protocol; the chip inserters and the gateway exchange information using the TCP / IP (Transmission Control Protocol / Internet Protocol) protocol; and each control subsystem and the gateway exchange information using the SOCKET protocol.

[0044] Here, the MES system is a production information management system for the shop floor execution layer of manufacturing enterprises. It is a computerized system used to monitor and guide shop floor production operations and processes. The human-machine interface (HMI) industrial control computer plays an important role in industrial automation and control systems, enabling information interaction between humans and machines. The gateway is an important network device that plays a crucial role in communication and data exchange between different networks. The chip inserter is mainly used to quickly and accurately assemble small electronic components onto circuit boards and is one of the important pieces of equipment in the automated assembly process of electronic components. The control subsystem is the "brain" of the system. It receives information from other parts, analyzes and processes it, and issues control commands to maintain the stable operation of the system or achieve specific goals. In the distributed control system of this application, the MES system can issue process control commands to each control subsystem; the gateway can provide overall network support for the distributed control system to facilitate information exchange between components; the human-machine interface (HMI) industrial control computer allows operators to monitor and operate the distributed control system, and can also display production alarm information and record historical data; the wafer insertion machine can prepare the substrate to be coated and place it into the carrier after preparation; the control subsystem can adjust its own status according to process control commands and operate the carrier according to its own control commands. The aforementioned distributed control system ensures that a problem in one subsystem will not affect the entire system, and other subsystems can continue production operations normally, thus improving equipment reliability and reducing the risk of failure. The substrate to be coated includes, but is not limited to, battery silicon wafers.

[0045] Specifically, the control subsystem includes a signal acquisition module, a control module, and a drive module. The signal acquisition module communicates with the control module via a network cable using either the ETHERCAT or PROFINET communication protocol. Similarly, the control module communicates with the drive module via a network cable using either the ETHERCAT or PROFINET communication protocol. It should be noted that the ETHERCAT or PROFINET communication protocols are chosen because they offer advantages such as high reliability, efficient data transmission, strong compatibility, and ease of system expansion and upgrades.

[0046] In one feasible approach, the signal acquisition module can collect and summarize the current status information of the carrier and send the current status information to the control module; the control module can receive the current status information sent by the signal acquisition module, issue control commands based on the current status information, and control the drive module to work; the drive module can receive the control commands sent by the control module and operate the carrier according to the control commands.

[0047] The above setup, by setting up a signal acquisition module, can aggregate the current status information of the carrier collected by the acquisition components and send it to the control module in a unified manner. It is no longer necessary to connect all the acquisition components to the control board of the control subsystem, thereby reducing the amount of cable laying, reducing the workload of installation and debugging, reducing the impact of electromagnetic interference, and reducing the risk of communication failure of the equipment.

[0048] Preferred, refer to Figure 2 The signal acquisition module includes a signal acquisition unit and an acquisition module. The signal acquisition unit is communicatively connected to the acquisition module. The signal acquisition unit is used to acquire the current status information of the carrier and send the current status information to the acquisition module. The acquisition module is used to receive the current status information, summarize the current status information and send it to the control module.

[0049] Specifically, such as Figure 2 As shown, the signal acquisition module includes a signal acquisition unit and an acquisition module connected via a power signal cable. The signal acquisition unit and the acquisition module also exchange information via communication protocols such as ETHERCAT or PROFINET. The signal acquisition unit includes multiple signal acquisition sensors, each capable of acquiring the current status information of the carrier and sending it to the acquisition module. The current status information of the carrier includes, but is not limited to, the status of the furnace door, lifting information, and position information. The acquisition module can be positioned near the multiple signal acquisition sensors to connect them to the module. It can then receive the current status information of the carrier collected by each sensor, aggregate the information, and send it to the control module.

[0050] Since the signal acquisition sensors are generally far from the control module, the above operation can be achieved by setting up an acquisition module to collect and summarize the information collected by nearby signal acquisition sensors and send it to the control module in a unified manner, thereby reducing the use of communication cables and reducing the risk of electromagnetic interference.

[0051] For the preferred option, continue to refer to... Figure 2The acquisition module includes a master station and a slave station, which are communicatively connected. The signal acquisition unit includes a first acquisition unit and a second acquisition unit, which are communicatively connected to the slave station and the master station. The first acquisition unit is used to acquire the first status information of the carrier and send the first status information to the slave station. The slave station is used to receive the first status information and send it to the master station. The second acquisition unit is used to acquire the second status information of the carrier and send it to the master station. The master station receives the first and second status information, summarizes the information, and sends it to the control module.

[0052] Specifically, the data acquisition module includes a master station and slave stations. The master and slave stations communicate via a communication cable using the IO-LINK (Input / Output Link, an open standard for serial communication) protocol. The IO-LINK protocol is chosen because it offers advantages such as high data accuracy, strong anti-interference capabilities, high data transmission rates, rich data types, strong scalability, real-time monitoring and response, remote parameter configuration, and powerful diagnostic capabilities.

[0053] The signal acquisition unit includes a first acquisition unit and a second acquisition unit. The first acquisition unit and the slave station of the acquisition module, as well as the second acquisition unit and the master station of the acquisition module, are all connected via a four-core power signal cable to achieve power supply and signal transmission functions. Both the first and second acquisition units include multiple signal acquisition sensors, and the specific number of signal acquisition sensors can be determined according to actual needs.

[0054] The first acquisition unit can acquire the first status information of the carrier and send it to the acquisition module slave station. The acquisition module slave station can receive the first status information sent by the first acquisition unit and send it to the acquisition module master station. The first status information may include, but is not limited to, the furnace door status and lifting information of the carrier. The second acquisition unit can acquire the second status information of the carrier and send it to the acquisition module master station. The acquisition module master station can simultaneously receive the first status information sent by the acquisition module slave station and the second status information sent by the second acquisition unit, and then send the aggregated first and second status information to the control module. It should be noted that the acquisition module slave station, as an extension unit, is not limited to one; the specific number can be flexibly set according to the specific number of signal acquisition sensors, and no restriction is placed here.

[0055] The above operations, by setting up slave stations for the acquisition module, expand the acquisition module so that more signal acquisition sensors can be connected to it, thereby reducing the amount of cables used and simplifying the installation and debugging work for staff.

[0056] Preferred, refer to Figure 3 The acquisition module uses an IP6X housing for installation.

[0057] Specifically, the acquisition module uses an IP6X enclosure. IP6X is an important standard in enclosure protection ratings, representing the enclosure's complete protection against dust. The IP6X enclosure includes two EtherCAT (Ethernet Control Automation Technology, bus) interfaces, two power interfaces, and eight signal input / output interfaces. The EtherCAT interfaces are used for bus connection, the power interfaces for power cable connection, and the signal input / output interfaces for connection to the signal acquisition sensors. Multiple signal channel indicator lights are also provided to monitor the signals from the signal acquisition sensors.

[0058] The above operation, by using an IP6X enclosure, is compact in size and does not require a specific electrical control box or additional electrical board, thus achieving flexible installation.

[0059] Preferred, refer to Figure 4 Each interface of the acquisition module is connected via aviation plugs to enhance the protection level.

[0060] Specifically, since the acquisition module uses an IP6X housing, which includes an EtherCAT interface, a power interface, and signal input / output interfaces, aviation connectors can be installed at each interface for docking. Different interfaces use different aviation connectors. The bus interface uses a bus input aviation connector and a bus output aviation connector (IN Bus OUT), the power interface uses a power input aviation connector and a power output aviation connector (IN PowerOUT), and the signal input / output interface uses a signal input aviation connector and a signal output aviation connector (IO-Link). The number, location, and function of each aviation connector pin are as follows: Figure 4 As shown.

[0061] The above operation, by setting different aviation plugs and using aviation plugs instead of terminal connections, achieves the effect of convenient installation and replacement and a high level of protection.

[0062] Preferred options are still referred to Figure 2The control module includes a subsystem control board, on which a PLC host is installed. The PLC host is communicatively connected to both the signal acquisition module and the drive module. The PLC host is used to receive current status information and issue control commands based on the current status information to control the drive module to work.

[0063] Specifically, the control module includes a subsystem control board, which is a circuit board integrating control logic, signal processing, and communication interfaces. It is specifically designed to control and manage a particular subsystem. The subsystem control board houses a PLC (Programmable Logic Controller), an indispensable key component in industrial automation control systems. Since the PLC cannot exist independently, it is installed on the subsystem control board to perform its functions. Here, the PLC uses communication protocols such as ETHERCAT or PROFINET to interact with the signal acquisition module and the drive module, respectively, to receive current status information from the signal acquisition module and issue control commands based on the received current status information to control the drive module.

[0064] Still refer to Figure 2 In one possible implementation, the drive module includes multiple servo drivers connected in series to perform different operations on the carrier according to control commands.

[0065] Specifically, the drive module includes multiple servo drivers connected in series. These servo drivers, also known as servo controllers or servo amplifiers, are a crucial component of modern motion control and are widely used in automated equipment such as industrial robots and CNC machining centers. A servo driver is a controller used to control a servo motor, similar to a frequency converter for a regular AC motor, and is part of a servo system. It primarily controls the servo motor through position, speed, and torque to achieve high-precision transmission system positioning. In this application, multiple servo drivers can perform different operations on the carrier according to control commands.

[0066] Still refer to Figure 2 In one possible implementation, the control subsystem also includes a communication gateway, which communicates with the PLC host to provide overall signal support for the control subsystem.

[0067] Specifically, the control subsystem also includes a communication gateway, which communicates with the PLC host via the TCP / IP protocol. The communication gateway enables communication between different architectures and environments. Data, after being re-converted by the gateway, can travel from one network environment to another; that is, the gateway's function is to repackage information to adapt to the requirements of the target network environment. Therefore, in this application, the communication gateway provides signal support for the overall control subsystem.

[0068] The above operations, through the configuration of the PLC host, multiple servo drives, and communication gateway, facilitate different operations on the carrier.

[0069] Preferred, refer to Figure 1 The control subsystem has several components, including a robotic arm control subsystem and a furnace tube control subsystem. The robotic arm control subsystem is used to operate the carrier based on its current status information. The furnace tube control subsystem is used to operate the substrate to be coated on the carrier based on its current status information.

[0070] Specifically, such as Figure 1 , Figure 3 As shown, there are multiple control subsystems, including six furnace tube control subsystems and one robotic arm control subsystem. The robotic arm control subsystem collects and summarizes the current status information of the carrier and sends this information to the control module. The control module then issues control commands based on the current status information to control the drive module. The drive module performs feeding and discharging operations on the carrier according to the control commands, either placing it into or removing it from the furnace tube control subsystem, or buffering and cooling the carrier. It should be noted that when the control subsystem is a mechanical control subsystem, four servo drives are typically used.

[0071] like Figure 1 , Figure 4 As shown, the furnace tube control subsystem can collect and summarize the current status information of the carrier and send it to the control module. The control module issues control commands based on the current status information to control the drive module. The drive module performs the coating operation on the substrate to be coated on the carrier according to the control commands. It should be noted that when the control subsystem is a furnace tube control subsystem, two servo drivers are generally configured.

[0072] The above operations, through the setting of a robotic arm control subsystem and a furnace tube control subsystem, enable the manipulation of the carrier itself and the substrate to be coated within the carrier, thereby completing the coating process.

[0073] In one feasible approach, refer to Figure 1 , Figure 4When the control subsystem is a furnace tube control subsystem, it also includes other components; these other components are connected to the control module and are used to adjust the state of the furnace tube control subsystem itself.

[0074] Specifically, when the control subsystem is the furnace tube control subsystem, it also includes other components, such as a power regulator, temperature controller, vacuum pump, butterfly valve, flow meter, and RF power supply. These components communicate with the PLC host via the RS485 protocol to exchange information. The RS485 protocol is used because it is a widely used serial communication standard in industrial control and other fields, employing balanced transmission and differential reception. The transmitting end converts the signal into two differential signals, A and B, and the receiving end then restores the original signal from the differential signals. Furthermore, because external common-mode interference signals are canceled out during differential transmission, common-mode interference can be effectively suppressed.

[0075] Here, other components can adjust the state of the furnace tube control subsystem itself, mainly based on process control commands sent by the MES system. Specifically, the power regulator can adjust the power of the furnace tube control subsystem; the temperature controller can adjust the temperature of the furnace tube control subsystem; the vacuum pump can adjust the vacuum state of the furnace tube control subsystem; the butterfly valve can control the opening and closing of the vacuum pump; the flow meter can control the process gas within the furnace tube control subsystem; and the radio frequency power supply can discharge the process gas to generate plasma, transforming the process gas into a plasma state.

[0076] The above operations, by setting other components, can enable the monitoring and adjustment of the furnace tube control subsystem's own status, so as to facilitate the furnace tube control subsystem's process production.

[0077] The overall implementation principle of this embodiment is as follows: During use, the inserter prepares the substrate to be coated and places it into the carrier; the robotic arm control subsystem, based on the current status information of the carrier collected by the signal acquisition module, places the carrier into the furnace tube control subsystem; the furnace tube control subsystem adjusts its own state based on the process control instructions issued by the MES system, and simultaneously performs coating operations on the substrate to be coated within the carrier based on its own collected current status information. This application can effectively solve the problems of long cable distances and numerous wire harnesses, which cause a large workload for installation and debugging and make subsequent maintenance difficult. It achieves the effects of reducing cable laying, reducing installation and debugging workload, reducing electromagnetic interference, and reducing the risk of equipment communication failures.

[0078] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0079] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A distributed control system for a tubular PECVD equipment, comprising a control subsystem, characterized in that, The control subsystem includes a signal acquisition module, a control module, and a drive module. The signal acquisition module is communicatively connected to the control module, and the control module is communicatively connected to the drive module. The signal acquisition module is used to collect and summarize the current status information of the carrier and send the current status information to the control module; The control module is used to receive the current status information, issue control commands based on the current status information, and control the drive module to work. The drive module is used to receive the control command and operate the carrier according to the control command.

2. The distributed control system according to claim 1, characterized in that, The signal acquisition module includes a signal acquisition unit and an acquisition module, wherein the signal acquisition unit is communicatively connected to the acquisition module; The signal acquisition unit is used to acquire the current status information of the carrier and send the current status information to the acquisition module; The acquisition module is used to receive the current status information, summarize the current status information, and send it to the control module.

3. The distributed control system according to claim 2, characterized in that, The acquisition module includes an acquisition module master station and an acquisition module slave station, which are communicatively connected; the signal acquisition unit includes a first acquisition unit and a second acquisition unit, which are communicatively connected to the acquisition module slave station and to the acquisition module master station. The first acquisition unit is used to acquire the first status information of the carrier and send the first status information to the acquisition module slave station; The slave station of the acquisition module is used to receive the first status information and send the first status information to the master station of the acquisition module; The second acquisition unit is used to acquire the second status information of the carrier and send the second status information to the acquisition module master station; The acquisition module master station is used to receive the first status information and the second status information, and send the first status information and the second status information to the control module after summarizing them.

4. The distributed control system according to claim 3, characterized in that, The acquisition module uses an IP6X housing for installation.

5. The distributed control system according to claim 4, characterized in that, Each interface of the acquisition module is connected via an aviation plug to enhance the protection level.

6. The distributed control system according to any one of claims 1-5, characterized in that, The control module includes a subsystem control board, on which a PLC host is installed; the PLC host is communicatively connected to the signal acquisition module and the drive module respectively. The PLC host is used to receive the current status information, issue control commands based on the current status information, and control the drive module to work.

7. The distributed control system according to any one of claims 1-5, characterized in that, The drive module includes multiple servo drivers connected in series, which are used to perform different operations on the carrier according to the control commands.

8. The distributed control system according to claim 6, characterized in that, The control subsystem also includes a communication gateway, which is communicatively connected to the PLC host and is used to provide overall signal support for the control subsystem.

9. The distributed control system according to any one of claims 1-5, characterized in that, The control subsystems are multiple, including a robotic arm control subsystem and a furnace tube control subsystem; The robotic arm control subsystem is used to operate the carrier based on the carrier's current state information; The furnace tube control subsystem is used to operate the substrate to be coated on the carrier based on the current status information of the carrier.

10. The distributed control system according to claim 9, characterized in that, When the control subsystem is a furnace tube control subsystem, it also includes any one or more components such as a power regulator, a temperature controller, a vacuum pump, a butterfly valve, a flow meter, and a radio frequency power supply. Any one or more of the components, including the power regulator, temperature controller, vacuum pump, butterfly valve, flow meter, and RF power supply, are communicatively connected to the control module for monitoring and adjusting the status of the furnace tube control subsystem.

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