Wafer boat lifting mechanism monitoring device, furnace tube lifting system and semiconductor equipment

Abstract

The utility model provides a monitoring device for a wafer boat lifting mechanism, a furnace tube lifting system and semiconductor equipment. The monitoring device comprises a first pressure sensor, a second pressure sensor, a first baffle plate and a second baffle plate, the first pressure sensor and the second pressure sensor are both fixedly connected with a nut installed on a lead screw of the wafer boat lifting mechanism, and the first pressure sensor is located above the second pressure sensor. The first baffle and the second baffle are arranged at the two axial ends of the lead screw respectively, when the wafer boat lifting mechanism ascends to the upper limit point position, the first pressure sensor can extrude the first baffle, and when the wafer boat lifting mechanism descends to the lower limit point position, the second pressure sensor can extrude the second baffle. The upper limit point position is a theoretical point position when the furnace tube is completely sealed, and the lower limit point position is a theoretical point position when the wafer boat reaches a wafer transmission position. According to the utility model, not only can the position of the wafer boat lifting mechanism be monitored, but also the leakproofness of the furnace tube can be monitored.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing and manufacturing technology, and in particular to a monitoring device for a crystal boat lifting mechanism, a furnace tube lifting system, and semiconductor equipment. Background Technology

[0002] In semiconductor manufacturing processes, furnace tube technology plays an important role due to its advantages such as low cost and simple process.

[0003] Furnace tube processing refers to the batch processing of wafers using furnace tube equipment. Specifically, it includes: placing wafers onto a wafer boat according to a specific logic using a robotic arm; the wafer boat being lifted into the furnace tube by a lifting mechanism; the furnace tube being sealed before entering the furnace tube process; after the reaction is complete, the furnace tube being opened; and the wafer boat being lowered to the wafer transfer position by the lifting mechanism. The robotic arm then transfers the wafers to the wafer transfer box. During this process, the lifting mechanism must precisely transfer the wafer boat to the designated position.

[0004] The lifting distance can be controlled by adjusting the rotation speed and time of the lead screw driven by a motor, and positioning is achieved through photoelectric sensors to raise or lower the wafer boat to a designated position. When the wafer boat is at its origin, if the lead screw of the lifting mechanism slips or skips teeth, the wafer boat's position will be lower than ideal. This can lead to scratches and collisions when the robotic arm grasps the wafer, resulting in wafer scratches or even breakage. Furthermore, to ensure the coating process, the furnace tube needs to be completely sealed. Therefore, a sealing ring is required between the furnace tube and the furnace door, and sealing is achieved by compressing the sealing ring. Specifically, when the wafer boat rises to the top, the sealing ring is compressed to achieve a seal. Different compression pressures on the sealing ring will cause variations in the degree of sealing of the furnace tube, thus affecting the film deposition process.

[0005] However, in the existing technology, controlling the lifting and lowering of the crystal boat through photoelectric sensors can only realize the on / off function. It cannot realize the quantitative monitoring of the position of the crystal boat, nor can it monitor the subtle differences in the position of the lifting mechanism, nor can it monitor the state change process of the lifting mechanism. The lifting mechanism can only be replaced or repaired after a problem occurs, thus affecting the process.

[0006] It should be noted that the information disclosed in the background section of this utility model is intended only to enhance the understanding of the general background of this utility model, and should not be regarded as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0007] The purpose of this invention is to provide a monitoring device for a crystal boat lifting mechanism, a furnace tube lifting system, and semiconductor equipment. This device can not only monitor the position of the crystal boat lifting mechanism, but also monitor the airtightness of the furnace tube, thereby preventing the product from suffering from thermal runaway and particulate contamination, and effectively improving the product yield.

[0008] To achieve the above objectives, this utility model provides a monitoring device for a crystal boat lifting mechanism. The monitoring device includes a first pressure sensor, a second pressure sensor, a first baffle, and a second baffle. Both the first and second pressure sensors are fixedly connected to nuts mounted on the lead screw of the crystal boat lifting mechanism, with the first pressure sensor located above the second pressure sensor. The first and second baffles are respectively disposed at the axial ends of the lead screw. When the crystal boat lifting mechanism rises to the upper limit position, the first pressure sensor can compress the first baffle. When the crystal boat lifting mechanism descends to the lower limit position, the second pressure sensor can compress the second baffle. The upper limit position is the theoretical position at which the furnace tube is completely sealed, and the lower limit position is the theoretical position at which the crystal boat reaches the wafer transfer position.

[0009] Optionally, the monitoring device for the crystal boat lifting mechanism provided by this utility model further includes a support plate, the support plate being fixedly connected to the nut, the first pressure sensor being fixed to the upper surface of the support plate, and the second pressure sensor being fixed to the lower surface of the support plate.

[0010] Optionally, the first baffle is located above the upper limit point, and the distance between the first baffle and the upper limit point is less than the height of the first pressure sensor.

[0011] Optionally, the second baffle is located below the lower limit point, and the distance between the second baffle and the lower limit point is less than the height of the second pressure sensor.

[0012] Optionally, the monitoring device for the crystal boat lifting mechanism provided by this utility model further includes a first limit sensor. The first limit sensor is fixedly installed on the support seat of the crystal boat lifting mechanism. The first limit sensor is located on the side of the support seat away from the lead screw, and the position of the first limit sensor corresponds to the upper limit point.

[0013] Optionally, the monitoring device for the crystal boat lifting mechanism provided by this utility model further includes a second limit sensor. The second limit sensor is fixedly installed on the support seat of the crystal boat lifting mechanism. The second limit sensor is located on the side of the support seat away from the lead screw, and the position of the second limit sensor corresponds to the lower limit point.

[0014] Optionally, the monitoring device for the crystal boat lifting mechanism provided by this utility model further includes a third limit sensor. The third limit sensor is fixedly installed on the support base of the crystal boat lifting mechanism. The third limit sensor is located on the side of the support base away from the lead screw, and the position of the third limit sensor is lower than the position of the second baffle.

[0015] Optionally, the monitoring device for the crystal boat lifting mechanism provided by this utility model further includes a controller. The first pressure sensor and the second pressure sensor are both communicatively connected to the controller. The controller is configured to control the crystal boat lifting mechanism to stop rising when the pressure value detected by the first pressure sensor reaches a first preset pressure threshold, and to control the crystal boat lifting mechanism to stop falling when the pressure value detected by the second pressure sensor reaches a second preset pressure threshold.

[0016] To achieve the above objectives, this utility model also provides a furnace tube lifting system, which includes a crystal boat, a furnace door, a crystal boat lifting mechanism, and a monitoring device for the crystal boat lifting mechanism as described in any one of the above. The crystal boat is installed on the upper surface of the furnace door, and the upper surface of the furnace door is also provided with a sealing ring surrounding the crystal boat. The furnace door is fixedly connected to the nut.

[0017] To achieve the above objectives, this utility model also provides a semiconductor device, which includes a furnace tube and the furnace tube lifting system described above.

[0018] Compared with the prior art, the crystal boat lifting mechanism monitoring device, furnace tube lifting system and semiconductor equipment provided by this utility model have the following beneficial effects:

[0019] When the crystal boat lifting mechanism rises to the upper limit position, which allows the furnace tube to be completely sealed (i.e., the furnace door and furnace tube squeeze the sealing ring), the first pressure sensor can squeeze the first baffle. Thus, when the crystal boat lifting mechanism rises to the upper limit position, the furnace door and furnace tube will squeeze the sealing ring, and the first pressure sensor will also squeeze the first baffle, resulting in an increase in the pressure value monitored by the first pressure sensor (e.g., reaching the first preset pressure threshold). It can be seen that the pressure value monitoring result of the first pressure sensor can not only monitor the position of the crystal boat lifting mechanism, but also monitor the airtightness of the furnace tube. When the airtightness of the furnace tube is not properly maintained, measures can be taken in advance to avoid the product from suffering from thermal runaway and particulate contamination, thereby effectively improving the product yield. Furthermore, when the boat lifting mechanism descends to the lower limit position, allowing the boat to reach the wafer transfer position, the second pressure sensor can compress the second baffle. Therefore, if the lead screw does not experience slippage or skipping, the boat will descend to the wafer transfer position when the lifting mechanism reaches the lower limit position, and the second pressure sensor will compress the second baffle, resulting in a larger pressure value detected by the second pressure sensor (e.g., reaching a second preset pressure threshold). If the lead screw experiences slippage or skipping, the actual position of the boat will be lower than the wafer transfer position when the lifting mechanism descends to the lower limit position. This will also cause the reading of the second pressure sensor to be larger than when the lead screw does not experience slippage or skipping (i.e., the pressure value detected by the second pressure sensor is greater than the second preset pressure threshold). Therefore, the pressure value monitoring result of the second pressure sensor can not only monitor the position of the boat lifting mechanism but also monitor whether any abnormalities occur, thus enabling early warning of aging in the boat lifting mechanism and facilitating timely preventative measures.

[0020] In summary, the crystal boat lifting mechanism monitoring device provided by this utility model can not only provide early warning of whether the furnace tube chamber is properly sealed based on the pressure value monitoring results of the first pressure sensor, but also monitor the subtle changes in the position of the crystal boat lifting mechanism (crystal boat position) in real time based on the pressure value monitoring results of the first pressure sensor and the second pressure sensor. At the same time, by continuously tracking pressure changes, the system status of the crystal boat lifting mechanism can be monitored.

[0021] Since both the furnace tube lifting system and the semiconductor equipment provided by this utility model include the crystal boat lifting mechanism monitoring device provided by this utility model, the furnace tube lifting system and the semiconductor equipment provided by this utility model have at least all the beneficial effects of the crystal boat lifting mechanism monitoring device provided by this utility model. For details, please refer to the relevant descriptions of the beneficial effects of the crystal boat lifting mechanism monitoring device provided by this utility model above. Therefore, the beneficial effects of the furnace tube lifting system and the semiconductor equipment provided by this utility model will not be elaborated here. Attached Figure Description

[0022] Figure 1 A schematic diagram of the installation status of the monitoring device for the crystal boat lifting mechanism provided in one embodiment of this utility model;

[0023] Figure 2 A partial structural block diagram of the monitoring device for the crystal boat lifting mechanism provided in one embodiment of this utility model;

[0024] Figure 3 This is a flowchart of the furnace tube airtightness monitoring process in the existing technology;

[0025] Figure 4 The flowchart illustrates the process of using the crystal boat lifting mechanism monitoring device provided by this utility model to monitor the airtightness of the furnace tube.

[0026] The reference numerals in the attached figures are explained as follows:

[0027] First pressure sensor - 111; Second pressure sensor - 112; First baffle - 121; Second baffle - 122; Support plate - 130; First limit sensor - 141; Second limit sensor - 142; Third limit sensor - 143; Controller - 150; Alarm module - 160;

[0028] Lead screw - 210; nut - 220; slide rail - 230; support base - 240; slider - 250. Detailed Implementation

[0029] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, further illustrates the crystal boat lifting mechanism monitoring device, furnace tube lifting system, and semiconductor equipment proposed in this utility model. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, intended only to facilitate and clearly illustrate the embodiments of this utility model. Please refer to the drawings to make the objectives, features, and advantages of this utility model more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for illustrative purposes and to enable those skilled in the art to understand and read them, and are not intended to limit the implementation conditions of this utility model. Any modifications to the structure, changes in proportions, or adjustments to the size, provided they produce the same or similar effects and achieve the same objectives as this utility model, should still fall within the scope of the technical content disclosed in this utility model. Specific design features of this utility model disclosed herein, including, for example, specific dimensions, orientations, positions, and shapes, will be determined in part by the specific application and usage environment. Furthermore, in the embodiments described below, the same reference numerals are sometimes used across different figures to denote the same parts or parts having the same function, and their repeated descriptions are omitted. In this specification, similar reference numerals and letters are used to denote similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0030] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor should they be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element. The singular forms “a,” “one,” and “the” include plural objects. The term “or” is generally used to mean “and / or.” The term “several” is generally used to mean “at least one.” The term “at least two” is generally used to mean “two or more.” The term “multiple” is generally used to mean “at least two.”

[0031] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, in this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Moreover, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0032] The core idea of ​​this utility model is to provide a monitoring device for a crystal boat lifting mechanism, a furnace tube lifting system, and semiconductor equipment. It can not only monitor the position of the crystal boat lifting mechanism, but also monitor the airtightness of the furnace tube, thereby avoiding the product from thermal runaway and particulate contamination, and effectively improving the product yield.

[0033] To achieve the above-mentioned goals, this utility model provides a monitoring device for a crystal boat lifting mechanism. Please refer to the following: Figure 1 This is a schematic diagram showing the installation status of the monitoring device for the crystal boat lifting mechanism provided in one embodiment of this utility model. Figure 1As shown, the monitoring device for the crystal boat lifting mechanism provided by this utility model includes a first pressure sensor 111, a second pressure sensor 112, a first baffle 121, and a second baffle 122. The first pressure sensor 111 and the second pressure sensor 112 are both fixedly connected to a nut 220 installed on the lead screw 210 of the crystal boat lifting mechanism, and the first pressure sensor 111 is located above the second pressure sensor 112. The first baffle 121 and the second baffle 122 are respectively disposed at the two ends of the axial direction of the lead screw 210. When the crystal boat lifting mechanism rises to the upper limit position, the first pressure sensor 111 can squeeze the first baffle 121. When the crystal boat lifting mechanism descends to the lower limit position, the second pressure sensor 112 can squeeze the second baffle 122. The upper limit position is the theoretical position when the furnace tube is completely sealed, and the lower limit position is the theoretical position when the crystal boat reaches the wafer transfer position.

[0034] When the crystal boat lifting mechanism rises to the upper limit position, which allows the furnace tube to be completely sealed (i.e., the furnace door and furnace tube squeeze the sealing ring), the first pressure sensor 111 can squeeze the first baffle 121. Thus, when the crystal boat lifting mechanism rises to the upper limit position, the furnace door and furnace tube will squeeze the sealing ring, and the first pressure sensor 111 will also squeeze the first baffle 121, resulting in an increase in the pressure value monitored by the first pressure sensor 111 (e.g., reaching the first preset pressure threshold). It can be seen that the pressure value monitoring result of the first pressure sensor 111 can not only monitor the position of the crystal boat lifting mechanism, but also monitor the airtightness of the furnace tube, so that measures can be taken in advance when the airtightness of the furnace tube is problematic, thereby avoiding the product from being subjected to thermal stress and particulate contamination, and effectively improving the product yield. Furthermore, since the second pressure sensor 112 can press the second baffle 122 when the boat lifting mechanism descends to the lower limit position that allows the boat to reach the wafer transfer position, if the lead screw 210 does not experience slippage / skipping, the boat can descend to the wafer transfer position when the boat lifting mechanism descends to the lower limit position, and the second pressure sensor 112 can press the second baffle 122, thereby causing the pressure value monitored by the second pressure sensor 112 to increase (e.g., reach the second preset pressure threshold); if the lead screw 210 experiences slippage / skipping, then when the boat lifting mechanism descends to the lower limit position, the boat can descend to the wafer transfer position, and the second pressure sensor 112 can press the second baffle 122, resulting in an increase in the pressure value monitored by the second pressure sensor 112 (e.g., reaching the second preset pressure threshold); if the lead screw 210 experiences slippage / skipping, then when the boat lifting mechanism descends to the lower limit position, the boat can descend to the wafer transfer position, and the second pressure sensor 112 can press the second baffle 122, thereby causing the pressure value monitored by the second pressure sensor 112 to increase (e.g., reach the second preset pressure threshold). When the crystal boat lifting mechanism descends to the lower limit position, the actual position of the crystal boat will be lower than the wafer transfer position. At the same time, the reading of the second pressure sensor 112 will be larger than the reading when the lead screw 210 does not have problems such as slippage / skipping (that is, the pressure value monitored by the second pressure sensor 112 is greater than the second preset pressure threshold). It can be seen that the pressure value monitoring result of the second pressure sensor 112 can not only monitor the position of the crystal boat lifting mechanism, but also monitor whether the crystal boat lifting mechanism is abnormal. In this way, it can realize the aging warning of the crystal boat lifting mechanism and facilitate the corresponding preventive measures to be taken in advance.

[0035] In summary, the crystal boat lifting mechanism monitoring device provided by this utility model can not only provide early warning of whether the furnace tube chamber is properly sealed based on the pressure value monitoring results of the first pressure sensor 111, but also monitor the subtle changes in the position (crystal boat position) of the crystal boat lifting mechanism in real time based on the pressure value monitoring results of the first pressure sensor 111 and the second pressure sensor 112. At the same time, by continuously tracking pressure changes, the system status of the crystal boat lifting mechanism can be monitored.

[0036] Specifically, the crystal boat is installed on the upper surface of the furnace door, and the upper surface of the furnace door is also provided with a sealing ring surrounding the crystal boat. The crystal boat lifting mechanism includes a servo motor (not shown in the figure), a lead screw 210, a slide rail 230, and a support base 240. The support base 240 serves as the main support, and the servo motor, lead screw 210, and slide rail 230 are all mounted on the support base 240. The servo motor provides rotational driving force, and the ball screw pair consisting of the lead screw 210 connected to the shaft of the servo motor and the nut 220 threadedly connected to the lead screw 210 converts the rotational motion into linear motion. The slide rail 230 can limit the direction of movement. Specifically, the slide rail 230 is provided with a slider 250, and the furnace door is fixedly connected to the slider 250 and the nut 220, thereby ensuring that the furnace door, sealing ring, crystal boat, first pressure sensor 111, and second pressure sensor 112 can move along the direction of the slide rail 230.

[0037] It should be noted that, as those skilled in the art will understand, the greater the compressive force on the sealing ring, the greater the pressure value monitored by the first pressure sensor 111. Therefore, the monitoring results of the first pressure sensor 111 can not only intuitively reflect the degree of compression of the sealing ring (the sealing degree of the furnace tube), but also quantify the position information of the wafer boat during the manufacturing process. Preferably, the position of the first baffle 121 should be such that when the wafer boat lifting mechanism rises to the point where the sealing ring contacts the furnace tube, the first pressure sensor 111 is just in contact with the first baffle 121. It should also be noted that, as those skilled in the art will understand, the position of the second baffle 122 should be such that when the wafer boat lifting mechanism descends to the point where the wafer boat approaches the wafer transfer position (e.g., a preset distance from the wafer transfer position), the second pressure sensor 112 can contact the second baffle 122. Therefore, the monitoring results of the second pressure sensor 112 can quantify the position information of the wafer boat during the wafer gripping process.

[0038] Please continue to refer to this. Figure 1 ,like Figure 1As shown, in some exemplary embodiments, the monitoring device for the crystal boat lifting mechanism provided by this utility model further includes a support plate 130, which is fixedly connected to the nut 220. The first pressure sensor 111 is fixed to the upper surface of the support plate 130, and the second pressure sensor 112 is fixed to the lower surface of the support plate 130. Therefore, by setting a support plate 130 fixedly connected to the nut 220, and installing the first pressure sensor 111 on the upper surface of the support plate 130 and the second pressure sensor 112 on the lower surface of the support plate 130, it is not only easier to install and fix the first pressure sensor 111 and the second pressure sensor 112, but the support plate 130 also provides a certain support for the first pressure sensor 111 and the second pressure sensor 112, effectively ensuring the measurement accuracy of the first pressure sensor 111 and the second pressure sensor 112.

[0039] Please continue to refer to this. Figure 1 ,like Figure 1 As shown, in some exemplary embodiments, the support plate 130 is fixedly connected to the side of the nut 220 away from the slide rail 230 of the crystal boat lifting mechanism, and both the first baffle 121 and the second baffle 122 are oriented away from the slide rail 230. Therefore, by configuring the support plate 130 to be fixedly connected to the side of the nut 220 away from the slide rail 230, and configuring both the first baffle 121 and the second baffle 122 to be oriented away from the slide rail 230, interference with the vertical movement of the furnace door can be effectively prevented.

[0040] In some exemplary embodiments, the first baffle 121 is positioned above the upper limit point, and the distance between the first baffle 121 and the upper limit point is less than the height of the first pressure sensor 111. Since the first pressure sensor 111 has a certain height, by placing the first baffle 121 above the upper limit point, premature contact between the first pressure sensor 111 and the first baffle 121 can be avoided. This prevents damage to the first baffle 121 due to excessive pressure from the first pressure sensor 111 when the crystal boat lifting mechanism rises to the upper limit point. Furthermore, by setting the distance between the first baffle 121 and the upper limit point to be less than the height of the first pressure sensor 111, it can be ensured that the first pressure sensor 111 can smoothly press against the first baffle 121 when the crystal boat lifting mechanism rises to the upper limit point. This ensures effective monitoring of the position of the crystal boat lifting mechanism (the position of the crystal boat during the process) and the airtightness of the furnace tube based on the pressure value monitoring results of the first pressure sensor 111.

[0041] It should be noted that, as those skilled in the art will understand, the distance between the first baffle 121 and the upper limit point is equal to the absolute value of the difference between the height of the first baffle 121 and the height of the upper limit point.

[0042] In some exemplary embodiments, the second baffle 122 is positioned below the lower limit point, and the distance between the second baffle 122 and the lower limit point is less than the height of the second pressure sensor 112. Since the second pressure sensor 112 has a certain height, by positioning the second baffle 122 below the lower limit point, premature contact between the second pressure sensor and the second baffle 122 can be avoided. This prevents damage to the second baffle 122 due to excessive pressure from the second pressure sensor 112 when the crystal boat lifting mechanism descends to the lower limit point. Furthermore, by setting the distance between the second baffle 122 and the lower limit point to be less than the height of the second pressure sensor 112, it can be ensured that the second pressure sensor 112 can smoothly press against the second baffle 122 when the crystal boat lifting mechanism descends to the lower limit point. This ensures effective monitoring of the position of the crystal boat lifting mechanism (the position of the crystal boat during the wafer gripping process) and whether any abnormalities occur in the crystal boat lifting mechanism based on the pressure value monitoring results of the second pressure sensor 112.

[0043] It should be noted that, as those skilled in the art will understand, the distance between the second baffle 122 and the lower limit point is equal to the absolute value of the difference between the height of the location of the second baffle 122 and the height of the location of the lower limit point.

[0044] Please continue to refer to this. Figure 1 ,like Figure 1 As shown, in some exemplary embodiments, the monitoring device for the crystal boat lifting mechanism provided by this utility model further includes a first limit sensor 141. The first limit sensor 141 is fixedly mounted on the support base 240 of the crystal boat lifting mechanism. The first limit sensor 141 is located on the side of the support base 240 away from the lead screw 210 (i.e., the side closer to the slide rail 230), and the position of the first limit sensor 141 corresponds to the upper limit point. Thus, by setting the first limit sensor 141 at the position on the support base 240 corresponding to the upper limit point, it is possible to determine whether the crystal boat lifting mechanism has risen to the upper limit point based on the monitoring result of the first limit sensor 141.

[0045] Furthermore, since the first limit sensor 141 is located close to the furnace tube and the temperature is relatively high, a conventional miniature photoelectric sensor cannot be used as the first limit sensor 141. Instead, a high-temperature resistant fiber optic sensor is required as the first limit sensor 141.

[0046] Please continue to refer to this. Figure 1 ,like Figure 1 As shown, in some exemplary embodiments, the monitoring device for the crystal boat lifting mechanism provided by this utility model further includes a second limit sensor 142. The second limit sensor 142 is fixedly mounted on the support base 240 of the crystal boat lifting mechanism. The second limit sensor 142 is located on the side of the support base 240 away from the lead screw 210 (i.e., the side closer to the slide rail 230), and the position of the second limit sensor 142 corresponds to the lower limit point. Thus, by setting the second limit sensor 142 at the position corresponding to the lower limit point on the support base 240, it is possible to determine whether the crystal boat lifting mechanism has descended to the lower limit point based on the monitoring result of the second limit sensor 142.

[0047] Furthermore, since the second limit sensor 142 is located far from the furnace tube and has a relatively low temperature, a conventional miniature photoelectric sensor can be used as the second limit sensor 142.

[0048] Please continue to refer to this. Figure 1 ,like Figure 1As shown, in some exemplary embodiments, the monitoring device for the crystal boat lifting mechanism provided by this utility model further includes a third limit sensor 143. The third limit sensor 143 is fixedly mounted on the support base 240 of the crystal boat lifting mechanism. The third limit sensor 143 is located on the side of the support base 240 away from the lead screw 210 (i.e., the side closer to the slide rail 230), and the position of the third limit sensor 143 is lower than the position of the second baffle 122. Therefore, by setting the third limit sensor 143 at a position on the support base 240 lower than the second baffle 122, the monitoring result of the third limit sensor 143 can be used to determine whether the crystal boat lifting mechanism has descended to the bottom limit point, thereby preventing overtravel of the crystal boat lifting mechanism and further ensuring the stability of the crystal boat lifting mechanism during use.

[0049] Furthermore, since the third limit sensor 143 is located far from the furnace tube and has a relatively low temperature, a conventional miniature photoelectric sensor can be used as the third limit sensor 143.

[0050] Please continue to refer to this. Figure 2 This is a partial structural block diagram of the monitoring device for the crystal boat lifting mechanism provided in one embodiment of this utility model. Figure 2 As shown, the monitoring device for the crystal boat lifting mechanism provided by this utility model also includes a controller 150. The first pressure sensor 111 and the second pressure sensor 112 are both communicatively connected to the controller 150. The controller 150 is configured to control the crystal boat lifting mechanism to stop rising when the pressure value detected by the first pressure sensor 111 reaches a first preset pressure threshold, and to control the crystal boat lifting mechanism to stop descending when the pressure value detected by the second pressure sensor 112 reaches a second preset pressure threshold. Therefore, by controlling the crystal boat lifting mechanism to stop rising (i.e., controlling the crystal boat to stop rising) when the pressure value detected by the first pressure sensor 111 reaches the first preset pressure threshold, the airtightness of the furnace tube chamber can be fully guaranteed. By controlling the crystal boat lifting mechanism to stop descending (i.e., controlling the crystal boat to stop descending) when the pressure value detected by the second pressure sensor 112 reaches the second preset pressure threshold, the crystal boat can be ensured to smoothly reach the wafer transfer position.

[0051] Please continue to refer to this. Figure 3 and Figure 4 ,in, Figure 3 This is a flowchart of the furnace tube airtightness monitoring process in the existing technology; Figure 4 This is a flowchart illustrating the monitoring of furnace tube sealing using the crystal boat lifting mechanism monitoring device provided by this utility model. (Comparison is also included.) Figure 3 and Figure 4It is understood that by employing the crystal boat lifting mechanism monitoring device provided by this utility model, the furnace tube sealing can be detected before the furnace tube leakage rate is measured during the process bottom pressure test. This allows for proactive measures to be taken to avoid risks such as thermal runaway and particulate contamination, effectively improving product yield. It should be noted that... Figure 4 The pressure value refers to the pressure value monitored by the first pressure sensor 111 when the crystal boat lifting mechanism rises to the upper limit position.

[0052] Please continue to refer to this. Figure 2 ,like Figure 2 As shown, in some exemplary embodiments, the monitoring device for the crystal boat lifting mechanism provided by this utility model further includes an alarm module 160 communicatively connected to the controller 150. The controller 150 is further configured to control the alarm module 160 to issue an alarm when the crystal boat lifting mechanism descends to the lower limit position if the pressure value detected by the second pressure sensor 112 is greater than the second preset pressure threshold. Since if the lead screw 210 experiences slippage / skipping, when the crystal boat lifting mechanism descends to the lower limit position, the actual position of the crystal boat will be lower than the wafer transfer position. Simultaneously, the reading of the second pressure sensor 112 will be larger than the reading when the lead screw 210 does not experience slippage / skipping (i.e., the pressure value detected by the second pressure sensor 112 is greater than the second preset pressure threshold). Therefore, if the pressure value detected by the second pressure sensor 112 is greater than the second preset pressure threshold when the crystal boat lifting mechanism descends to the lower limit position, it indicates that the lead screw 210 has experienced slippage or skipping. By controlling the alarm module 160 to issue an alarm, relevant engineers can be notified to handle the issue promptly.

[0053] It should be noted that, as those skilled in the art will understand, the controller 150 and the alarm module 160 can be integrated with the fault data collection system (FDC) or set up separately, and this utility model does not limit them in this regard.

[0054] Please continue to refer to this. Figure 2 ,like Figure 2 As shown, the first limit sensor 141, the second limit sensor 142, and the third limit sensor 143 are all communicatively connected to the controller 150. The first controller 150 is further configured to control the crystal boat lifting mechanism to stop rising when the first limit sensor 141 detects that the crystal boat lifting mechanism has risen to the upper limit position, and to control the crystal boat lifting mechanism to stop falling when the second limit sensor 142 detects that the crystal boat lifting mechanism has fallen to the lower limit position or the third limit sensor 143 detects that the crystal boat lifting mechanism has fallen to the bottom limit position.

[0055] To achieve the above-mentioned goals, this utility model also provides a furnace tube lifting system, which includes a crystal boat, a furnace door, a crystal boat lifting mechanism, and the crystal boat lifting mechanism monitoring device described above. The crystal boat is installed on the upper surface of the furnace door, and the upper surface of the furnace door is also provided with a sealing ring surrounding the crystal boat. The furnace door is fixedly connected to the nut 220. Since the furnace tube lifting system provided by this utility model includes the crystal boat lifting mechanism monitoring device provided by this utility model, the furnace tube lifting system provided by this utility model has at least all the beneficial effects of the crystal boat lifting mechanism monitoring device provided by this utility model. For details, please refer to the relevant descriptions of the beneficial effects of the crystal boat lifting mechanism monitoring device provided by this utility model above. Therefore, the beneficial effects of the furnace tube lifting system provided by this utility model will not be elaborated here.

[0056] To achieve the above-mentioned ideas, this utility model also provides a semiconductor device, which includes a furnace tube and the furnace tube lifting system described above. Since the semiconductor device provided by this utility model includes the crystal boat lifting mechanism monitoring device provided by this utility model, the semiconductor device provided by this utility model at least has all the beneficial effects of the crystal boat lifting mechanism monitoring device provided by this utility model. For details, please refer to the relevant descriptions of the beneficial effects of the crystal boat lifting mechanism monitoring device provided by this utility model above; therefore, the beneficial effects of the semiconductor device provided by this utility model will not be elaborated upon here.

[0057] In summary, compared with the prior art, the crystal boat lifting mechanism monitoring device, furnace tube lifting system, and semiconductor equipment provided by this utility model have the following beneficial effects:

[0058] This invention can not only provide early warning of whether the furnace tube chamber is properly sealed based on the pressure value monitoring results of the first pressure sensor 111, but also monitor subtle changes in the position (crystal boat position) of the crystal boat lifting mechanism in real time based on the pressure value monitoring results of the first pressure sensor 111 and the second pressure sensor 112. At the same time, by continuously tracking pressure changes, the system status of the crystal boat lifting mechanism can be monitored.

[0059] It should be noted that in the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0060] It should also be noted that the above description is only a description of the preferred embodiment of this utility model and is not intended to limit the scope of this utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure are within the protection scope of this utility model. Obviously, those skilled in the art can make various modifications and variations to the utility model without departing from the spirit and scope of this utility model. Therefore, if these modifications and variations fall within the scope of this utility model and its equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A monitoring device for a crystal boat lifting mechanism, characterized in that, It includes a first pressure sensor, a second pressure sensor, a first baffle, and a second baffle; Both the first pressure sensor and the second pressure sensor are fixedly connected to a nut on the lead screw of the crystal boat lifting mechanism, and the first pressure sensor is located above the second pressure sensor. The first baffle and the second baffle are respectively disposed at the two ends of the lead screw. When the crystal boat lifting mechanism rises to the upper limit position, the first pressure sensor can squeeze the first baffle. When the crystal boat lifting mechanism falls to the lower limit position, the second pressure sensor can squeeze the second baffle. The upper limit position is the theoretical position when the furnace tube is completely sealed, and the lower limit position is the theoretical position when the crystal boat reaches the wafer transfer position.

2. The monitoring device for the crystal boat lifting mechanism according to claim 1, characterized in that, It also includes a support plate, which is fixedly connected to the nut. The first pressure sensor is fixed to the upper surface of the support plate, and the second pressure sensor is fixed to the lower surface of the support plate.

3. The monitoring device for the crystal boat lifting mechanism according to claim 1, characterized in that, The first baffle is located above the upper limit point, and the distance between the first baffle and the upper limit point is less than the height of the first pressure sensor.

4. The monitoring device for the crystal boat lifting mechanism according to claim 1, characterized in that, The second baffle is located below the lower limit point, and the distance between the second baffle and the lower limit point is less than the height of the second pressure sensor.

5. The monitoring device for the crystal boat lifting mechanism according to claim 1, characterized in that, It also includes a first limit sensor, which is fixedly mounted on the support of the crystal boat lifting mechanism. The first limit sensor is located on the side of the support away from the lead screw, and the position of the first limit sensor corresponds to the upper limit point.

6. The monitoring device for the crystal boat lifting mechanism according to claim 1, characterized in that, It also includes a second limit sensor, which is fixedly mounted on the support base of the crystal boat lifting mechanism. The second limit sensor is located on the side of the support base away from the lead screw, and the position of the second limit sensor corresponds to the lower limit point.

7. The monitoring device for the crystal boat lifting mechanism according to claim 1, characterized in that, It also includes a third limit sensor, which is fixedly mounted on the support of the crystal boat lifting mechanism. The third limit sensor is located on the side of the support away from the lead screw, and the position of the third limit sensor is lower than the position of the second baffle.

8. The monitoring device for the crystal boat lifting mechanism according to claim 1, characterized in that, It also includes a controller, with both the first pressure sensor and the second pressure sensor communicatively connected to the controller. The controller is configured to control the crystal boat lifting mechanism to stop rising when the pressure value detected by the first pressure sensor reaches a first preset pressure threshold, and to control the crystal boat lifting mechanism to stop descending when the pressure value detected by the second pressure sensor reaches a second preset pressure threshold.

9. A furnace tube lifting system, characterized in that, The device includes a crystal boat, a furnace door, a crystal boat lifting mechanism, and a monitoring device for the crystal boat lifting mechanism as described in any one of claims 1 to 8. The crystal boat is installed on the upper surface of the furnace door, and the upper surface of the furnace door is also provided with a sealing ring surrounding the crystal boat. The furnace door is fixedly connected to the nut.

10. A semiconductor device, characterized in that, Includes furnace tubes and the furnace tube lifting system as described in claim 9.

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