Auxiliary device for crystal picking detection

By designing an automated wafer sorting and inspection device, which utilizes conveyor belts and various mechanical devices to achieve automatic wafer inspection and sorting, the problem of time-consuming and labor-intensive manual inspection is solved, inspection efficiency and product qualification rate are improved, and production costs are reduced.

CN223847540UActive Publication Date: 2026-01-30SUZHOU YIPINXIN SEMICON CO LTD
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Patent Information

Application Number
CN202520178694.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-02-05
Publication Date
2026-01-30
Estimated Expiration
2035-02-05

AI Technical Summary

Technical Problem

The existing crystal picking and inspection process requires manual picking and observing each crystal one by one, which is extremely labor-intensive and results in an unstable product qualification rate, increasing production costs.

Method used

An auxiliary device including a conveyor belt, a lifting detection device, and a suction device was designed. The wafer is conveyed to the detector by the conveyor belt for automatic detection. Qualified products and defective products are collected into different collection boxes. The movement of the detector and the precise operation of the suction nozzle are realized by a motor, a threaded rod, a hydraulic rod, and a pneumatic telescopic rod.

Benefits of technology

It has achieved automated crystal picking and inspection, reduced manual operation, improved inspection speed and accuracy, and reduced production costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the field of crystal picking detection, in particular to an auxiliary device for crystal picking detection, and adopts the technical scheme that the auxiliary device comprises a base, a storage box and a connecting frame, a conveying belt is mounted on the inner side of the connecting frame, a lifting detection device and a suction device are fixedly mounted on the connecting frame, and the lifting detection device comprises a fixing frame and a motor; a threaded rod is fixedly connected to the output end of the motor, a threaded block is installed on the threaded rod, a fixing frame is fixedly connected to the bottom of the threaded block, the suction device comprises a rotating base and a pneumatic telescopic rod, and a suction nozzle is fixedly installed at the bottom end of the pneumatic telescopic rod; the wafer detection device has the advantages that wafers are conveyed to the position below the detector through the conveying belt, whether the wafers are defective products or not is analyzed, if the wafers are defective products, the defective products are conveyed to the position below the suction nozzle through the conveying belt, the defective products are sucked out through the suction nozzle and placed into the second collecting box, and if the wafers are qualified products, the qualified products are conveyed into the first collecting box through the conveying belt.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the field of picking crystal detection, and particularly relates to an auxiliary device for picking crystal detection. BACKGROUND

[0002] Picking crystal detection is a process for detecting whether there are defects, flaws or defective products on semiconductor wafers, photoelectric elements and the like. In this process, the auxiliary device helps the detection personnel to quickly and accurately identify and select the unqualified wafers. Common picking crystal detection auxiliary devices include microscopes, optical detection equipment, pneumatic selection devices and the like.

[0003] The existing picking crystal detection needs to be observed and detected by manually picking out one by one, and the manual labor consumed by the defective grains to be picked out is huge, and the existing picking crystal detection auxiliary device equipment randomly detects, picks, divides and pours, which cannot stably guarantee the qualified rate of products, further increasing the production cost of enterprises.

[0004] Therefore, it is necessary to invent an auxiliary device for picking crystal detection. UTILITY MODEL CONTENT

[0005] In order to achieve the above purpose, the utility model provides the following technical scheme: an auxiliary device for picking crystal detection, including base, storage box and connecting frame, the connecting frame is fixedly installed on the base, the connecting frame inside is installed with the conveyer belt, the connecting frame is fixedly installed with the lifting detection device and the suction device, the lifting detection device includes the fixed frame and the motor, the motor output end is fixedly connected with the threaded rod, one end of the threaded rod is rotatably connected with the inside of the fixed frame, the threaded rod is installed with the threaded block, the threaded block middle is provided with the internal thread through hole, and the internal thread through hole is connected with the outer wall of the threaded rod, the threaded block bottom is fixedly connected with the fixed frame, the fixed frame is fixedly installed with the hydraulic rod, the fixed frame below is installed with the lifting plate, the hydraulic rod output end is fixedly connected with the top of the lifting plate, one side of the lifting plate is fixedly installed with the fixed block, the fixed block top is fixedly installed with the transmitter, the fixed block bottom is fixedly installed with the detector, the suction device includes the rotary base and the pneumatic telescopic rod, the pneumatic telescopic rod bottom end is fixedly installed with the suction nozzle.

[0006] Preferably, the inside of the fixed frame is fixedly installed with the supporting rod, the top of the threaded block is fixedly connected with the sliding block, and the sliding block is slidingly connected with the supporting rod.

[0007] Preferably, a first electric telescopic rod is vertically fixedly installed on the rotary base, a second electric telescopic rod is horizontally fixedly installed on the telescopic end of the first electric telescopic rod, and the telescopic end of the second electric telescopic rod is fixedly connected with one side of the pneumatic telescopic rod placed vertically.

[0008] Preferably, the storage tank is provided with a discharge opening on one side, and support columns are fixedly installed at the four corners of the bottom of the storage tank and are fixedly connected to the upper surface of the base.

[0009] Preferably, the base is provided with a first collecting tank and a second collecting tank above, the first collecting tank is fixedly connected to one end of the conveying belt on one side, and the second collecting tank is fixedly connected to one side of the connecting frame on which the suction device is installed.

[0010] Preferably, an inclined plate is installed between the storage tank and the connecting frame, the upper end of the inclined plate is fixedly connected to the discharge opening, and the lower end of the inclined plate is fixedly connected to the end of the conveying belt away from the first collecting tank.

[0011] Preferably, a limiting rod is slidably connected to the inner wall of the lifting plate.

[0012] Preferably, a fixed plate is fixedly installed on one side of the motor, the fixed plate is fixedly installed on the inner wall of the fixed frame, and a connecting plate is fixedly installed below the motor.

[0013] The beneficial effects of the utility model are:

[0014] 1. The auxiliary device for picking and detecting wafers is characterized in that the cooperation among the first collecting tank, the second collecting tank, the detector, the transmitter, the rotating base and the suction nozzle is used in the use, the wafer is conveyed to the lower side of the detector through the conveying belt, the detection data is transmitted to the computer through the transmitter for analysis, whether the wafer is a defective product is analyzed, if the wafer is a defective product, the defective product is sent to the lower side of the suction nozzle through the conveying belt, the defective product is sucked out and placed into the second collecting tank through the suction nozzle, if the wafer is a qualified product, the wafer is conveyed into the first collecting tank through the conveying belt, the manual detection link is saved, and the production cost is reduced.

[0015] 2. The auxiliary device for picking and detecting wafers is characterized in that the cooperation among the motor, the threaded rod, the threaded block, the hydraulic rod, the fixed frame, the lifting plate and the detector is used, the threaded rod is driven to rotate through the starting of the motor, the threaded block is driven to slide left and right on the threaded rod, the detector below the threaded block is driven to move left and right, the detection range is increased, and the detection speed is further improved; meanwhile, the hydraulic rod is started, the lifting plate is pushed downward, the detector is also pushed downward, the wafer is detected more closely, and the detection accuracy is further improved.

[0016] 3. The auxiliary device for picking and detecting wafers is characterized in that the cooperation among the second collecting tank, the rotating base, the first electric telescopic rod, the second electric telescopic rod, the pneumatic telescopic rod and the suction nozzle is used, the wafer is sucked after the first electric telescopic rod, the second electric telescopic rod and the pneumatic telescopic rod are started according to the distance between the suction nozzle and the wafer, the wafer is placed into the second collecting tank through the starting of the rotating base, the manual picking link is saved, and a large amount of human cost is saved. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 A schematic view of the auxiliary device for crystal picking detection provided by the utility model is shown in the figure.

[0018] Figure 2 A side view of the auxiliary device for crystal picking detection provided by the utility model is shown in the figure.

[0019] Figure 3 A front view of the suction device in the auxiliary device for crystal picking detection provided by the utility model is shown in the figure.

[0020] Figure 4 A front view of the lifting detection device in the auxiliary device for crystal picking detection provided by the utility model is shown in the figure.

[0021] In the figure: 100, storage box, 101, fixed frame, 102, connecting frame, 103, conveyor belt, 104, base, 105, first collection box, 106, second collection box, 107, inclined plate, 108, support column, 109, discharge port, 201, support rod, 202, sliding block, 203, motor, 204, fixed plate, 205, connecting plate, 206, threaded rod, 207, threaded block, 208, fixed frame, 209, hydraulic rod, 210, limiting rod, 211, lifting plate, 212, transmitter, 213, fixed block, 214, detector, 301, rotating base, 302, first electric telescopic rod, 303, second electric telescopic rod, 304, pneumatic telescopic rod, 305, suction nozzle. DETAILED DESCRIPTION

[0022] The preferred embodiments of the utility model are described below in combination with the drawings, and it should be understood that the preferred embodiments described herein are only used for illustrating and explaining the utility model, and are not used for limiting the utility model.

[0023] Example 1

[0024] As Figures 1-4As shown, the utility model discloses a kind of auxiliary device for picking crystal detection, including base 104, storage tank 100 and connecting frame 102, connecting frame 102 is fixedly installed on base 104, conveying belt 103 is installed in connecting frame 102 inner side, lifting detection device and suction device are fixedly installed on connecting frame 102, lifting detection device includes fixed frame 101 and motor 203, motor 203 output end is fixedly connected with threaded rod 206, one end of threaded rod 206 is rotatably connected with fixed frame 101 inner side, threaded block 207 is installed on threaded rod 206, inner thread through hole is formed in the middle of threaded block 207, and inner thread through hole is connected with the outer wall of threaded rod 206, fixed frame 208 is fixedly connected to the bottom of threaded block 207, hydraulic rod 209 is fixedly installed in fixed frame 208, lifting plate 211 is installed below fixed frame 208, the top of hydraulic rod 209 output end is fixedly connected with lifting plate 211, fixed block 213 is fixedly installed on one side of lifting plate 211, transmitter 212 is fixedly installed on the top of fixed block 213, detector 214 is fixedly installed on the bottom of fixed block 213, suction device includes rotary base 301 and pneumatic telescopic rod 304, suction nozzle 305 is fixedly installed at the bottom of pneumatic telescopic rod 304.

[0025] In the above embodiment, it needs to be explained that base 104 is used to place the auxiliary device for picking crystal detection, base 104 adopts hard and wear-resistant material, storage tank 100 is used to store good wafer, connecting frame 102 is used to place lifting detection device and suction device, conveying belt 103 is used to convey good wafer, motor 203 is used to drive threaded rod 206 to rotate, lifting plate 211 is used to connect fixed block 213, fixed block 213 is used to connect detector 214, hydraulic rod 209 is used to push lifting plate 211 to move downward, fixed frame 208 is used to place hydraulic rod 209, when using, conveying belt 103 conveys wafer to the below of detector 214, then threaded rod 206 is rotated by starting motor 203, in turn threaded block 207 is slid left and right on threaded rod 206, so that detector 214 below threaded block 207 moves left and right, at the same time, hydraulic rod 209 is started, and lifting plate 211 is pushed downward, in turn, detector is pushed downward, then detection is carried out by detector 214, and detection data is transmitted to computer by transmitter for analysis, whether it is defective product is analyzed; Suction nozzle 305 is used to suck wafer, pneumatic telescopic rod 304 is used to connect suction nozzle 305, at the same time, suction nozzle 305 can be sucked downward, so that suction nozzle 305 can be closer to wafer, conveying belt 103 sends defective product to the below of suction nozzle 305, finally, defective product is sucked out of conveying belt 103 by suction nozzle 305.

[0026] Embodiment 2

[0027] As Figure 4As shown, an auxiliary device for crystal picking detection includes all the contents of Embodiment 1. In addition, a support rod 201 is fixedly installed on the inner side of the fixing frame 101, and a slider 202 is fixedly connected to the top of the threaded block 207. The slider 202 is slidably connected to the support rod 201.

[0028] In the above embodiments, it should be noted that the fixing frame 101 is used to protect the lower device. The fixing frame 101 is made of a hard and wear-resistant material. The slider 202 is used to slide on the support rod 201 to ensure that the lower device can move normally left and right. The threaded block 207 slides left and right on the threaded rod 206 to drive the slider 202 to slide left and right on the support rod 201.

[0029] Example 3

[0030] like Figure 3 As shown, an auxiliary device for crystal picking detection includes all the contents of Embodiment 1. In addition, a first electric telescopic rod 302 is vertically fixedly installed on the rotating base 301, and a second electric telescopic rod 303 is horizontally fixedly installed at the telescopic end of the first electric telescopic rod 302. The telescopic end of the second electric telescopic rod 303 is fixedly connected to one side of the vertically placed pneumatic telescopic rod 304.

[0031] In the above embodiments, it should be noted that the rotating base 301 is used to rotate the combination device of the first electric telescopic rod 302, the second electric telescopic rod 303, the pneumatic telescopic rod 304 and the suction nozzle 305. The first electric telescopic rod 302 is used to adjust the distance between the suction nozzle 305 and the wafer, and the second electric telescopic rod 303 is used to adjust the distance between the suction nozzle 305 and the connecting frame 102. By opening the first electric telescopic rod 302 and the second electric telescopic rod 303, the suction nozzle 305 can properly pick up the defective wafer.

[0032] Example 4

[0033] like Figure 1 As shown, an auxiliary device for crystal picking detection includes all the contents of Embodiment 1. In addition, a discharge port 109 is provided on one side of the storage box 100, and support columns 108 are fixedly installed at the four corners of the bottom of the storage box 100. The support columns 108 are fixedly connected to the upper surface of the base 104.

[0034] In the above embodiments, it should be noted that the support column 108 is used to support the storage box 100 on the base 104, and the size of the discharge port 109 is much larger than the size of the wafer, so the wafer can be easily taken out.

[0035] Example 5

[0036] like Figure 1As shown, an auxiliary device for crystal picking detection includes all the contents of Embodiment 1. In addition, a first collection box 105 and a second collection box 106 are provided above the base 104. One side of the first collection box 105 is fixedly connected to one end of the conveyor belt 103, and the second collection box 106 is fixedly connected to the side of the connecting frame 102 where the suction device is installed.

[0037] In the above embodiments, it should be noted that the first collection box 105 is used to collect qualified products on the conveyor belt, and the second collection box 106 is used to collect defective products removed from the suction nozzle 305. The inner surfaces of both the first collection box 105 and the second collection box 106 are provided with rubber pads to prevent damage when the wafers fall. By setting the first collection box 105 and the second collection box 106, it is more convenient to collect and classify the wafers, which greatly enhances the practicality of the device.

[0038] Example 6

[0039] like Figure 1 As shown, an auxiliary device for crystal picking detection includes all the contents of Embodiment 1. In addition, an inclined plate 107 is installed between the storage box 100 and the connecting frame 102. The upper end of the inclined plate 107 is fixedly connected to the discharge port 109, and the lower end of the inclined plate 107 is fixedly connected to the end of the conveyor belt 103 away from the first collection box 105.

[0040] In the above embodiments, it should be noted that the ramp 107 is made of a wear-resistant and smooth material, which facilitates the wafer to slide down faster. The ramp 107 is used to send the wafer from the outlet 109 to the conveyor belt 103, making the subsequent inspection and handling process more convenient.

[0041] Example 7

[0042] like Figure 4 As shown, an auxiliary device for crystal picking detection includes all the contents of Embodiment 1. In addition, a limit rod 210 is slidably connected to the inner wall of the lifting plate 211.

[0043] In the above embodiments, it should be noted that the limiting rod 210 limits the lifting plate 211, and the hydraulic rod 209 pushes the lifting plate 211 downward so that the lifting plate 211 slides downward outside the limiting rod 210.

[0044] Example 8

[0045] like Figures 1-4 As shown, an auxiliary device for crystal picking detection includes all the contents of Embodiment 1. In addition, a fixing plate 204 is fixedly installed on one side of the motor 203, the fixing plate 204 is fixedly installed on the inner wall of the fixing frame 101, and a connecting plate 205 is fixedly installed below the motor 203.

[0046] In the above embodiment, it should be noted that the fixed plate 204 is used to fix the motor 203 inside the fixed frame 101, by installing the fixed plate 204 and the connecting plate 205 inside the fixed frame 101, the motor 203 is placed to achieve the effect of fixing the motor 203 inside the fixed frame 101.

[0047] The use process of the utility model is as follows: the person skilled in the art connects the transmitter 212 to the external computer, the motor, the rotating base, the first electric telescopic rod, the second electric telescopic rod and the pneumatic telescopic rod all need external power supply and controller, first, the detection wafer is placed on the conveyor belt through the discharge port, the wafer is conveyed to the lower side of the detector 214 through the conveyor belt 103, then the threaded rod 206 is driven to rotate through the starting motor 203, and the threaded block 207 is driven to slide left and right on the threaded rod 206, so that the detector 214 below the threaded block 207 moves left and right, at the same time, the hydraulic rod 209 is started, the lifting plate 211 is pushed downward, and the detector is also pushed downward, then the detector 214 detects and transmits the detection data to the computer through the transmitter for analysis, whether it is a defective product is analyzed, if it is a defective product, the defective product is conveyed to the lower side of the suction nozzle 305, the first electric telescopic rod 302, the second electric telescopic rod 303 and the pneumatic telescopic rod 304 are started in turn according to the distance between the suction nozzle 305 and the defective product to suck the defective product, the suction nozzle 305 is placed in the second collecting box 106 through the rotating base 301, if it is a qualified product, it is conveyed to the first collecting box 105 through the conveyor belt, and the detection of the wafer is completed.

[0048] The above is only the preferred embodiment of the utility model, and any person skilled in the art can modify the utility model by using the technical solutions described above or modify it into an equivalent technical solution. Therefore, any simple modification or equivalent replacement according to the technical solutions of the utility model is within the scope of protection required by the utility model.

Claims

1. An auxiliary device for crystal picking detection, comprising a base (104), a storage box (100) and a connecting frame (102), the connecting frame (102) is fixedly installed on the base (104), characterized in that: The connecting frame (102) is internally provided with a conveying belt (103), and the connecting frame (102) is fixedly provided with lifting detection devices and suction devices.

2. The auxiliary device for wafer picking detection according to claim 1, characterized in that: The fixed frame (101) is internally fixedly provided with a supporting rod (201), and the threaded block (207) is fixedly connected with a sliding block (202) at the top.

3. The auxiliary device for wafer picking detection according to claim 1, characterized in that: The rotating base (301) is vertically fixedly provided with a first electric telescopic rod (302), and the first electric telescopic rod (302) is horizontally fixedly provided with a second electric telescopic rod (303) at the telescopic end.

4. The auxiliary device for wafer picking detection according to claim 1, characterized in that: The storage box (100) is provided with a discharge port (109) on one side, and supporting columns (108) are fixedly installed at the bottom of the storage box (100) at four corners.

5. The auxiliary device for wafer picking detection according to claim 1, characterized in that: The base (104) is provided with a first collecting box (105) and a second collecting box (106) above, the first collecting box (105) is fixedly connected with one end of the conveying belt (103) on one side, and the second collecting box (106) is fixedly connected on one side of the connecting frame (102) provided with the suction device.

6. The auxiliary device for wafer picking detection according to claim 1, characterized in that: The storage box (100) and the connecting frame (102) are provided with an inclined plate (107), the inclined plate (107) is fixedly connected at the upper end of the discharge port (109), and the lower end of the inclined plate (107) is fixedly connected with one end of the conveying belt (103) away from the first collecting box (105).

7. The auxiliary device for wafer picking detection according to claim 1, characterized in that: The inner wall of the lifting plate (211) is slidably connected with a limiting rod (210).

8. The auxiliary device for wafer picking detection according to claim 1, characterized in that: The motor (203) is fixedly provided with a fixed plate (204) on one side, and the fixed plate (204) is fixedly installed on the inner wall of the fixed frame (101). The motor (203) is fixedly provided with a connecting plate (205) below.