Floating platform
By designing a floating platform with an air pump and electric push rod system to adjust the wafer orientation, the problem of reduced wafer cutting accuracy in existing technologies has been solved, achieving alignment and precise cutting of the wafer with the wire cutting machine.
Patent Information
- Application Number
- CN202520175012.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-26
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2035-01-26
AI Technical Summary
The existing floating platform cannot adjust the wafer orientation according to the cutting requirements, which leads to a decrease in wafer cutting accuracy due to vibration or external factors after the wire EDM machine has been working for a long time.
A floating platform was designed, which uses an air pump and an electric push rod system to adjust the air pressure, drive the rotating column to rotate, realize the orientation adjustment of the wafer, and ensures that the wafer is aligned with the wire cutting machine through a limiting structure to avoid misalignment.
It improves the precision of wafer dicing, prevents the reduction in dicing accuracy due to misalignment after long-term use, and meets the flexible adjustment of dicing requirements.
Smart Images
Figure CN223849641U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a floating platform, belongs to wafer line cutting equipment field. BACKGROUND
[0002] Wafer cutting is the wafer segmentation of multiple independent dies through multiple process treatments, and the dies usually contain complete circuit functions and are the core components for manufacturing electronic products, with the complexity of chip design and the reduction of size, the precision and efficiency requirements of wafer cutting technology are also higher and higher, and the line cutting machine as an advanced cutting equipment can meet these requirements, and the process is to butt joint the wafer by using the line cutting butt joint machine, the line cutting butt joint machine is internally provided with a carrying mechanism for clamping the wafer, the carrying mechanism changes the orientation through the floating platform, and then the wafer can be conveyed to the cutting machine table for line cutting through cooperation, the floating platform adjusts the outlet air pressure through the air pressure regulator to change the position of the wafer and move the wafer to the line cutting machine for cutting.
[0003] However, the floating platform in the prior art can only drive the wafer to move horizontally through air pressure, and thus the direction of the wafer cannot be rotated according to the cutting requirement during the cutting process, and since the line cutting machine will be displaced due to vibration or other external factors after long-term work, the precision of the finished product after wafer cutting will be reduced, and the precision of the cut wafer is reduced. UTILITY MODEL CONTENTS
[0004] In view of the deficiencies in the prior art, the utility model aims to provide a floating platform to solve the problems in the background art, and the utility model can adjust the orientation of the wafer body according to the working condition, and the cutting precision will not be reduced due to misalignment between the wafer body and the line cutting machine table after long-term use.
[0005] In order to achieve the above-mentioned purpose, the utility model is implemented by the following technical scheme: a floating platform, comprising a butt joint box and a wafer body, the inner top wall of the butt joint box is fixedly connected with a fixed platform, the bottom of the fixed platform is provided with a moving platform, the bottom of the moving platform is fixedly connected with a limiting slide block, the bottom of the moving platform is provided with a steering platform, the bottom of the steering platform is fixedly connected with a carrying table, the bottom of the carrying table is provided with a carrying groove, and the inner wall of the steering platform is fixedly sleeved with a rotating column.
[0006] The top of the fixed platform is fixedly connected with an air pump, the air inlet of the air pump is fixedly connected with an air inlet pipe, the air outlet of the air pump is fixedly connected with an air outlet pipe, the air outlet pipe is fixedly sleeved with the fixed platform, the outer wall of the air outlet pipe is provided with a pressure regulator, the bottom of the air outlet pipe is fixedly connected with a gas storage pipe, and the top of the gas storage pipe is provided with a steering component.
[0007] Furthermore, the directional component includes a directional tube fixedly connected to the top of the air storage tube, a second electric push rod fixedly connected to the top of the air storage tube, and a blocking plate fixedly connected to the top of the second electric push rod.
[0008] Furthermore, a wafer limiting block is fixedly connected to the outer wall of the wafer body. The shape of the wafer limiting block is the same as the shape of the loading groove, and the outer wall of the wafer limiting block is slidably connected to the inner wall of the loading groove.
[0009] Furthermore, the top of the mobile platform is machined with a channel, and the rotating column passes through the channel through the fixed platform. The rotating column is rotatably sleeved with the fixed platform. The air storage tube has a "ring" structure and is fixedly sleeved with the rotating column.
[0010] Furthermore, a support platform is fixedly connected to the bottom of the platform, a first electric push rod is fixedly connected to one end of the support platform, and a locking block is fixedly connected to one end of the first electric push rod.
[0011] Furthermore, the card block has an "F" shaped structure, and a push-pull block is slidably connected to the inner wall of the loading groove. A limit frame is fixedly connected to one side of the push-pull block, and the limit frame is movably engaged with the card block.
[0012] The beneficial effects of this utility model are:
[0013] 1. The wafer positioning block is installed into the loading slot via an external docking platform. One side of the docking box moves to one side of the wire cutting machine. When the moving platform moves, it can drive the steering platform to move via the limit slider, thus pushing the wafer body to one side of the wire cutting machine. When the wafer body is pushed to one side of the wire cutting machine, observe whether the wafer body and the cutting part of the wire cutting machine are aligned. If misalignment occurs, start the air pump. The air pump will take in air through the air inlet pipe and vent air through the air outlet pipe, and then the gas will enter the air storage pipe. The pressure regulator can adjust the air pressure. The second electric push rod is activated, causing the blocking plate to no longer cover the reversing pipe, and the reversing pipe can then release air. The air pressure can drive the rotating column to rotate, and then drive the wafer body to turn via the steering platform. Thus, the device can adjust the position of the wafer body according to the working conditions, and will not cause misalignment with the wire cutting machine and reduce the cutting accuracy even after long-term use.
[0014] 2. The card block has an "F" shaped structure, and the limiting frame is movably engaged with the card block. Activating the first electric push rod can drive the card block to move, and the operation of the first electric push rod can drive the push-pull block to move, thereby pushing the wafer limiting block out of the loading slot, thus realizing the unloading of the processed wafer body, and further meeting the working requirements of the device. Attached Figure Description
[0015] Other features, objects, and advantages of the present application will become more apparent from the following detailed description of non-limiting embodiments thereof, when read in conjunction with the accompanying drawings:
[0016] Figure 1 It is a structural schematic view of the floating platform of the present application;
[0017] Figure 2 It is a structural schematic view of the floating platform of the present application;
[0018] Figure 3 It is Figure 2 It is an enlarged view of structure at A in the middle;
[0019] Figure 4 It is a structural schematic view of the fixed platform in the floating platform of the present application;
[0020] Figure 5 It is a structural schematic view of the rotating column in the floating platform of the present application;
[0021] Figure 6 It is a schematic view of the wafer body in the floating platform of the present application.
[0022] In the figure: 1, docking box; 2, baffle; 3, support table; 4, first electric push rod; 5, clamping block; 6, second electric push rod; 7, object table; 8, object slot; 9, moving platform; 10, limit sliding block; 11, push-pull block; 12, limit frame; 13, wafer limit block; 14, wafer body; 15, rotating column; 16, fixed platform; 17, steering platform; 18, air pump; 19, air outlet pipe; 20, air inlet pipe; 21, pressure regulator; 22, gas storage pipe; 23, steering pipe. DETAILED DESCRIPTION
[0023] In order to make the technical means, creative features, purposes and effects achieved by the present application easy to understand, the present application will be further described below in conjunction with specific embodiments.
[0024] Please refer to Figures 1-6 The present application provides a technical solution: a floating platform, comprising a docking box 1 and a wafer body 14, the inner top wall of the docking box 1 is fixedly connected with a fixed platform 16, the bottom of the fixed platform 16 is provided with a moving platform 9, the bottom of the moving platform 9 is fixedly connected with a limit sliding block 10, the bottom of the moving platform 9 is provided with a steering platform 17, the moving platform 9 can drive the steering platform 17 to move through the limit sliding block 10 when moving, and then the steering platform 17 can also move, the bottom of the steering platform 17 is fixedly connected with an object table 7, the bottom of the object table 7 is provided with an object slot 8, and the inner wall of the steering platform 17 is fixedly sleeved with a rotating column 15.
[0025] The top of the fixed platform 16 is fixedly connected with an air pump 18, the air inlet of the air pump 18 is fixedly connected with an air inlet pipe 20, the air outlet of the air pump 18 is fixedly connected with an air outlet pipe 19, the air outlet pipe 19 is fixedly sleeved with the fixed platform 16, the outer wall of the air outlet pipe 19 is provided with a pressure regulator 21, the bottom of the air outlet pipe 19 is fixedly connected with a gas storage pipe 22, the top of the gas storage pipe 22 is provided with a direction adjusting part, and the number of the direction adjusting part is multiple.
[0026] The direction adjusting part comprises a direction adjusting pipe 23 fixedly connected to the top of the gas storage pipe 22, the top of the gas storage pipe 22 is fixedly connected with a second electric push rod 6, the top of the second electric push rod 6 is fixedly connected with a blocking plate 2, the blocking plate 2 covers the top of the direction adjusting pipe 23, the direction adjusting pipe 23 cannot automatically exhaust, according to the misalignment of the wafer body 14, the specific position of the second electric push rod 6 can be controlled to start by the system of the second electric push rod 6, the second electric push rod 6 drives the blocking plate 2 to no longer cover the direction adjusting pipe 23, and the direction adjusting pipe 23 can exhaust, the rotating column 15 can be driven to rotate by the action of the air pressure, and then the wafer body 14 can be driven to turn by the turning platform 17.
[0027] The outer wall of the wafer body 14 is fixedly connected with a wafer limiting block 13, the shape of the wafer limiting block 13 is same as that of the object groove 8, the outer wall of the wafer limiting block 13 is slidably connected with the inner wall of the object groove 8, and then an external docking platform can be used to install the wafer limiting block 13 into the object groove 8.
[0028] The top of the moving platform 9 is processed with a channel, the rotating column 15 penetrates through the fixed platform 16 through the channel, the rotating column 15 is rotatably sleeved with the fixed platform 16, the gas storage pipe 22 is a "ring" structure, the gas storage pipe 22 is fixedly sleeved with the rotating column 15, and then the rotating column 15 can be driven to rotate by the action of the air pressure, and then the rotating column 15 can drive the turning platform 17 to rotate.
[0029] The bottom of the object table 7 is fixedly connected with a supporting table 3, one end of the supporting table 3 is fixedly connected with a first electric push rod 4, one end of the first electric push rod 4 is fixedly connected with a clamping block 5, and the first electric push rod 4 can drive the clamping block 5 to move.
[0030] The clamping block 5 is an "F" shaped structure, the inner wall of the object groove 8 is slidably connected with a push-pull block 11, one side of the push-pull block 11 is fixedly connected with a limiting frame 12, the limiting frame 12 is movably connected with the clamping block 5, the working of the first electric push rod 4 can drive the push-pull block 11 to move, the wafer limiting block 13 can be pushed out of the object groove 8, and then the machined wafer body 14 can be discharged.
[0031] Working principle: first, the outside docking platform will wafer limiting block 13 to the inside of the loading slot 8, the side of the docking box 1 moves to the side of the wire cutting machine, the moving platform 9 can be moved by the limiting block 10 when moving, and the steering platform 17 can also be moved, and then the wafer body 14 is pushed to the side of the wire cutting machine;
[0032] Secondly, when the wafer body 14 is pushed to the side of the wire cutting machine, whether the wafer body 14 and the cutting part of the wire cutting machine are aligned is observed, when misalignment occurs, the air pump 18 is started, the air pump 18 will enter the gas through the inlet pipe 20, and the gas will enter the storage pipe 22 through the outlet pipe 19, and the pressure regulator 21 can adjust the gas pressure;
[0033] Finally, the number of steering components is multiple, according to the misalignment of the wafer body 14, the second electric push rod 6 system can be used to control the specific position of the second electric push rod 6 to start, the second electric push rod 6 drives the blocking plate 2 to stop covering the steering pipe 23, the steering pipe 23 can be discharged, and the rotating column 15 can be driven to rotate by the action of the gas pressure, and then the wafer body 14 is turned by the steering platform 17.
[0034] Although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be combined appropriately to form other embodiments that those skilled in the art can understand.
Claims
1. A floating platform comprising a docking box (1) and a wafer body (14), characterized in that: The inner top wall of the docking box (1) is fixedly connected with a fixed platform (16), the bottom of the fixed platform (16) is provided with a moving platform (9), the bottom of the moving platform (9) is fixedly connected with a limiting sliding block (10), the bottom of the moving platform (9) is provided with a steering platform (17), the bottom of the steering platform (17) is fixedly connected with a load table (7), the bottom of the load table (7) is provided with a load groove (8), and the inner wall of the steering platform (17) is fixedly sleeved with a rotating column (15). The top of the fixed platform (16) is fixedly connected with an air pump (18), the air inlet of the air pump (18) is fixedly connected with an air inlet pipe (20), the air outlet of the air pump (18) is fixedly connected with an air outlet pipe (19), the air outlet pipe (19) is fixedly sleeved with the fixed platform (16), the outer wall of the air outlet pipe (19) is provided with a pressure regulator (21), the bottom of the air outlet pipe (19) is fixedly connected with a gas storage pipe (22), and the top of the gas storage pipe (22) is provided with a steering component.
2. A floating platform according to claim 1, characterised in that: The steering component comprises a steering pipe (23) fixedly connected to the top of the gas storage pipe (22), the top of the gas storage pipe (22) is fixedly connected with a second electric push rod (6), and the top of the second electric push rod (6) is fixedly connected with a baffle (2).
3. A floating platform according to claim 1, wherein: The outer wall of the wafer body (14) is fixedly connected with a wafer limiting block (13), the shape of the wafer limiting block (13) is the same as that of the load groove (8), and the outer wall of the wafer limiting block (13) is in sliding connection with the inner wall of the load groove (8).
4. A floating platform according to claim 1, wherein: The top of the moving platform (9) is processed with a channel, and the rotating column (15) penetrates through the fixed platform (16) through the channel, the rotating column (15) is in rotating sleeve connection with the fixed platform (16), the gas storage pipe (22) is of a "ring" structure, and the gas storage pipe (22) is fixedly sleeved with the rotating column (15).
5. A floating platform according to claim 1, characterized in that: The bottom of the load table (7) is fixedly connected with a support table (3), one end of the support table (3) is fixedly connected with a first electric push rod (4), and one end of the first electric push rod (4) is fixedly connected with a clamping block (5).
6. A floating platform according to claim 5, wherein: The clamping block (5) is of an "F" shape structure, the inner wall of the load groove (8) is in sliding connection with a push-pull block (11), one side of the push-pull block (11) is fixedly connected with a limiting frame (12), and the limiting frame (12) is in movable clamping connection with the clamping block (5).