Target rotating mechanism capable of cooling in large area

Abstract

The utility model provides a target material rotating mechanism capable of cooling in a large area, which comprises a target material, a target material housing, a magnetofluid rotating mechanism and a driving mechanism, the magnetofluid rotating mechanism comprises a magnetofluid housing and a magnetofluid shaft, a water diversion block is arranged at the joint of the magnetofluid shaft and the target material, and at least two water outlet blocks are circumferentially arranged on the outer side of the water diversion block. Each water outlet block corresponds to one target material, a target material water-cooling plate is arranged between each target material and the water outlet block, cooling flow channels are densely distributed around the center of the target material water-cooling plate on the target material water-cooling plate, and a first water inlet and a first water outlet are formed in the middle of each cooling flow channel; a total water inlet and a total water outlet are formed in the magnetic fluid shell, water flows through the cooling flow channel corresponding to the first target material, enters from the first water inlet, annularly flows to the outer ring along the cooling flow channel, then flows to the inner ring, and then flows to the water outlet block, the water diversion block and the cooling flow channel corresponding to the target material from the first water outlet, and so on. Therefore, the target material is cooled in a large area, and the cooling effect is good.

Description

TECHNICAL FIELD

[0001] The utility model relates to ion beam deposition technical field, more specifically, relate to a target material rotating mechanism of large area cooling. BACKGROUND

[0002] Ion beam deposition (IBD) technology is a kind of technology using ion source to bombard the surface of target material of different materials in vacuum to make target material deposition to product surface, the technology is a very important method for preparing high-quality thin film developed in recent years, it has the incomparable advantages of other film preparation technologies, and ion beam deposition technology is small, film forming condition is precisely controllable.Sputtering source is provided for ion beam deposition system, in order to obtain different membrane system, different target materials need to be replaced, and high temperature will be generated in the process of ion beam bombardment target material, and too high temperature will affect the sputtering quality of ion source sputtering system.The angle of target material also affects the plating rate and the quality of thin film.

[0003] The closest prior art to the patent discloses a target device of ion beam deposition system in the prior art announcement No.CN 220057004 U, which can realize multiple target materials selection, has important role for complex membrane system deposition process, and can cool the target material in process, improve the sputtering quality of ion source sputtering system, the target material shielding device can adjust the angle without opening the cavity, and the structure is simple and convenient to operate.

[0004] But in the above-mentioned technology, water flow is introduced and discharged by 015?A and 015?B through water distribution block, target material magnetofluidic shaft, water distribution and cooling water plate form a cooling water circulation system in series, water flow stays in target material for a short time, resulting in small cooling area and poor cooling effect. UTILITY MODEL CONTENTS

[0005] Therefore, in order to solve the above problems, the utility model provides a target material rotating mechanism of large area cooling, adds cooling flow channel 251 on water cooling plate, so that the cooling area is large and the cooling effect is good.

[0006] A target material rotating mechanism capable of large-area cooling, comprising a target material 21, a target material cover 1, a magnetic fluid rotating mechanism 5, and a driving mechanism 6, wherein the body of the driving mechanism 6 is fixedly connected with the bottom plate of a vacuum chamber, the magnetic fluid rotating mechanism 5 is connected with the side wall of the vacuum chamber through a flange 12, one end of the flange 12 is arranged outside the chamber, and the other end is arranged inside the chamber through the chamber and is used for supporting the magnetic fluid rotating mechanism 5, the magnetic fluid rotating mechanism 5 comprises a magnetic fluid shell 51 and a magnetic fluid shaft 52, the magnetic fluid shell 51 is sleeved on the inner wall of the flange 12, one end of the magnetic fluid shell 51 is fixedly connected with the target material cover 1, the magnetic fluid shaft 52 is sleeved in the magnetic fluid shell 51, one end of the magnetic fluid shaft 52 penetrates through the side wall of the vacuum chamber and is connected with the target material 21 in the vacuum chamber, the target material 21 rotates with the magnetic fluid shaft 52, and the other end of the magnetic fluid shaft 52 is connected with the driving shaft of the driving mechanism 6; the target material cover 1 is sleeved outside the target material 21 and leaves a gap between the target material cover 1 and the target material 21, characterized in that: a water distribution block 4 is arranged at the connection position of the magnetic fluid shaft 52 and the target material 21, at least two water outlet blocks 3 are arranged on the outer side of the water distribution block 4 in a circumferential direction, each water outlet block 3 corresponds to one target material 21, a target material water cooling plate 25 is arranged between each target material 21 and the water outlet block 3, a plurality of cooling flow channels 251 are densely arranged around the center of the target material water cooling plate 25 on the target material water cooling plate 25, a first water inlet 252 and a first water outlet 253 are arranged in the middle of each cooling flow channel 251, a total water inlet 511 and a total water outlet 512 are arranged on the magnetic fluid shell 51, water flows into the magnetic fluid shell 51 through the total water inlet 511, enters the magnetic fluid shaft 52, is introduced into the water distribution block 4 arranged on the end face of the magnetic fluid shaft 52, and flows through the cooling flow channel 251 corresponding to the first target material 21 through the water distribution block 4 and the water outlet block 3, the water flows into the first water inlet 252, flows to the outer ring along the cooling flow channel 251 in a ring shape, is bent to flow to the inner ring along the cooling flow channel 251, then flows to the water outlet block 3 corresponding to the target material 21 through the first water outlet 253, then flows into the water distribution block 4, and then flows to the cooling flow channel 251 corresponding to the next target material 21 through the water distribution block 4, and the process is repeated until the water finally flows out of the total water outlet 512 on the magnetic fluid shell 51, so that the target material 21 is cooled and cooled in a large area, and the cooling effect is good.

[0007] Further, when the water distribution block 4 is a square, the corresponding water outlet blocks 3 are four, and the corresponding target materials 21 are four.

[0008] Further, one water distribution inlet 41 and one water distribution outlet 42 are arranged on the face of the water distribution block 4 connected with the end face of the magnetic fluid shaft 52 and the faces connected with the plurality of water outlet blocks 3.

[0009] Further, the water distribution block 4 comprises a plurality of water distribution channels 43, each of which is connected to the target water-cooled plate 25 corresponding to one of the water outlet blocks 3, the first water inlet 252 is connected to the water distribution inlet 41 of the water distribution block 4 through the water outlet block 3, and the first water outlet 253 is connected to the water distribution outlet 42 of the water distribution block 4 through the water outlet block 3.

[0010] Further, one side of the cooling flow channel 251 of the target water-cooled plate 25 is provided with a water-cooled sealing plate 24 for sealing the cooling flow channel 251.

[0011] Further, the water-cooled sealing plate 24 and the target 21 are provided with a target back plate 22, the middle part of the target back plate 22 is provided with a groove 221 for mounting the target 21, and the outer circle of the groove 221 of the target back plate 22 is provided with an annular boss 222 for connecting the target light shielding plate 23.

[0012] Further, the target housing 1 is cylindrical, the target housing 1 and the magnetic fluid shaft 52 are coaxially arranged, a working plane is arranged on the side wall of the target housing 1, an opening 11 is formed at the center of the working plane, when coating is needed, the selected target 21 is rotated to the opening 11, and the size of the opening 11 matches the size of the target 21.

[0013] Further, the driving mechanism 6 comprises a motor bracket 61, a motor 62, a synchronous belt 63 and a synchronous wheel 64, the motor 62 is mounted outside the vacuum chamber bottom plate through the motor bracket 61, the synchronous wheel 64 is coaxially mounted on the magnetic fluid shaft 52 and located at one end close to the magnetic fluid shell 51, and the synchronous wheel 64 is connected with the rotating shaft of the motor 62 through the synchronous belt 63.

[0014] Further, the motor bracket 61 is provided with an adjusting device 65 below, the adjusting device 65 comprises a movable plate 651 and a rotating handle 652, one side of the movable plate 651 is connected with the motor 62, one end of the rotating handle 652 penetrates through the bottom of the motor bracket 61 and is threadedly connected with the bottom of the movable plate 651, the rotating handle 652 drives the movable plate 651 to move up and down, so as to realize the tensioning of the synchronous belt 63, and the operation is simple.

[0015] Further, the target rotating mechanism is also provided with a positioning sensing module, the positioning sensing module is arranged at the outer end of the magnetic fluid shell 51 through a mounting plate 71, the positioning sensing module comprises a plurality of photoelectric sensors 7, one photoelectric sensor 7 corresponds to one target 21, and is used for positioning the rotating angle of the magnetic fluid shaft 52.

[0016] Further, the target housing 1 is provided with a protection plate 8 at both ends to prevent the ion beam from directly splashing out to harm the operator.

[0017] The utility model discloses a target material rotating mechanism of big area cooling, including target material 21, target material cover 1, magnetic fluid rotating mechanism 5, drive mechanism 6, the magnetic fluid rotating mechanism 5 includes magnetic fluid shell 51 and magnetic fluid axle 52, one end surface of magnetic fluid axle 52 is connected with the water distribution block 4 in vacuum chamber, the water distribution block 4 outside is provided with at least two water outlet blocks 3 in circumference, and each water outlet block 3 corresponds to a piece of target material 21, and is equipped with target material water cooling plate 25 between each target material 21 and water outlet block 3, is densely provided with cooling flow channel 251 around target material water cooling plate 25 center on target material water cooling plate 25, and is equipped with first water inlet 252 and first water outlet 253 in the middle part of each cooling flow channel 251, be equipped with total water inlet 511 and total water outlet 512 on magnetic fluid shell 51, after water flow enters from total water inlet 511 on magnetic fluid shell 51, passes through magnetic fluid internal magnetic liquid sealing and is introduced into magnetic fluid axle 52, from the end surface of magnetic fluid axle 52 to the water distribution block 4 installed in the end surface, make water flow through the cooling flow channel 251 of first target material 21 corresponding by water distribution block 4 and water outlet block 3, and water flow enters along cooling flow channel 251 annular flow to outer ring after from first water inlet 252, again bends along cooling flow channel 251 annular flow to inner ring, then from first water outlet 253 flow to the water outlet block 3 corresponding to this target material 21, then flow into water distribution block 4, and then flow to the cooling flow channel 251 corresponding to next target material 21 from water distribution block 4, and so on, finally flow out from total water outlet 512 on magnetic fluid shell 51, thereby target material 21 is cooled and is cooled down in large area, and the cooling effect is good. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is whole structural drawing of target material rotating mechanism of big area cooling of the utility model.

[0019] Figure 2 It is target material cover structure diagram of target material rotating mechanism of big area cooling of the utility model.

[0020] Figure 3 It is partial structural drawing of target material rotating mechanism of big area cooling of the utility model.

[0021] Figure 4 It is target material connecting part explosion drawing of target material rotating mechanism of big area cooling of the utility model.

[0022] Figure 5 It is target material water cooling plate structure diagram of target material rotating mechanism of big area cooling of the utility model.

[0023] Figure 6 It is water distribution block structure diagram of target material rotating mechanism of big area cooling of the utility model.

[0024] Figure 7 is an enlarged view of A part of FIG. 1. Figure 2 is an enlarged view of A part of FIG. 1.

[0025] Figure 8 is an enlarged view of A part of FIG. 1.

[0026] Main component symbol explanation

[0027] Target material cover 1, opening 11, flange 12, target material 21, target material back plate 22, groove 221, annular boss 222, target material light shield 23, water-cooled sealing plate 24, target material water-cooled plate 25, cooling flow channel 251, first water inlet 252, first water outlet 253, water outlet block 3, water distribution block 4, water distribution inlet 41, water distribution outlet 42, water distribution channel 43, magnetic fluid rotating mechanism 5, magnetic fluid shell 51, total water inlet 511, total water outlet 512, magnetic fluid shaft 52, driving mechanism 6, motor support 61, motor 62, synchronous belt 63, synchronous wheel 64, adjusting device 65, movable plate 651, rotating handle 652, photoelectric sensor 7, mounting plate 71, anti-sticking plate 8.

[0028] The following specific embodiments will further illustrate the present application in conjunction with the above-mentioned drawings. Specific embodiments Embodiments

[0029] As Figure 1 , 2, 3, 5, a target material rotating mechanism capable of large-area cooling, comprising a target material 21, a target material cover 1, a magnetic fluid rotating mechanism 5, a driving mechanism 6, the body of the driving mechanism 6 is fixedly connected with the bottom plate of a vacuum cavity, the magnetic fluid rotating mechanism 5 is connected with the side wall of the vacuum cavity through a flange 12, one end of the flange 12 is arranged outside the cavity, and the other end is arranged inside the cavity through the cavity and is used for supporting the magnetic fluid rotating mechanism 5, the magnetic fluid rotating mechanism 5 comprises a magnetic fluid shell 51 and a magnetic fluid shaft 52, the magnetic fluid shell 51 is sleeved on the inner wall of the flange 12, one end of the magnetic fluid shell 51 is fixedly connected with the target material cover 1, the magnetic fluid shaft 52 is sleeved in the magnetic fluid shell 51, one end of the magnetic fluid shaft 52 penetrates through the side wall of the vacuum cavity and is connected with the target material 21 in the vacuum cavity, the target material 21 rotates with the magnetic fluid shaft 52, and the other end of the magnetic fluid shaft 52 is connected with the driving shaft of the driving mechanism 6; the target material cover 1 is sleeved outside the target material 21 and leaves a gap between the target material cover 1 and the target material 21, a water distribution block 4 is arranged at the connection position of the magnetic fluid shaft 52 and the target material 21, at least two water outlet blocks 3 are arranged on the outer side of the water distribution block 4 in a circumferential direction, each water outlet block 3 corresponds to a target material 21, and a target material water cooling plate 25 is arranged between each target material 21 and the water outlet block 3, a plurality of cooling flow channels 251 are densely arranged around the center of the target material water cooling plate 25 on the target material water cooling plate 25, and a first water inlet 252 and a first water outlet 253 are arranged in the middle of each cooling flow channel 251; a total water inlet 511 and a total water outlet 512 are arranged on the magnetic fluid shell 51, water flows into the magnetic fluid shell 51 from the total water inlet 511, enters the magnetic fluid shaft 52, is introduced into the water distribution block 4 arranged on the end face of the magnetic fluid shaft 52, and flows through the cooling flow channel 251 corresponding to the first target material 21 through the water distribution block 4 and the water outlet block 3, the water flows into the first water inlet 252, flows to the outer ring along the cooling flow channel 251 in a ring shape, is bent to flow to the inner ring along the cooling flow channel 251, then flows to the water outlet block 3 corresponding to the target material 21 from the first water outlet 253, then flows into the water distribution block 4, and then flows to the cooling flow channel 251 corresponding to the next target material 21 through the water distribution block 4, and the process is repeated until the water finally flows out from the total water outlet 512 on the magnetic fluid shell 51, so that the target material 21 is cooled and cooled in a large area, and the cooling effect is good.

[0030] As shown in Figure 6 the water distribution block 4 is a square, the corresponding water outlet blocks 3 are four, and the corresponding target materials 21 are four.

[0031] One side of the water distribution block 4 connected with the end face of the magnetic fluid shaft 52 and the side connected with the plurality of water outlet blocks 3 are respectively provided with a water distribution inlet 41 and a water distribution outlet 42.

[0032] The water distribution block 4 includes multiple water distribution channels 43. Each water distribution channel 43 is connected to the target material water-cooled plate 25 corresponding to one of the water outlet blocks 3. The first water inlet 252 is connected to the water distribution inlet 41 of the water distribution block 4 through the water outlet block 3. The first water outlet 253 is connected to the water distribution outlet 42 of the water distribution block 4 through the water outlet block 3.

[0033] The water distribution channel 43 is arc-shaped, which reduces the resistance to water flow, resulting in a fast water flow rate and good cooling effect.

[0034] like Figure 4 As shown, a water-cooled sealing plate 24 is provided on one side of the cooling channel 251 of the target material water-cooled plate 25 to seal the cooling channel 251.

[0035] A target back plate 22 is provided between the water-cooled sealing plate 24 and the target 21. A groove 221 is provided in the middle of the target back plate 22 for installing the target 21. An annular boss 222 is provided on the outer ring of the groove 221 of the target back plate 22 for connecting the target light shielding plate 23.

[0036] like Figure 1 As shown, the target housing 1 is columnar, and the target housing 1 and the magnetohydrodynamic shaft 52 are coaxially arranged. A working plane is provided on the side wall of the target housing 1, and an opening 11 is provided at the center of the working plane. When coating is required, the selected target 21 is rotated to the opening 11, and the size of the opening 11 matches the size of the target 21.

[0037] like Figure 2 As shown, the drive mechanism 6 includes a motor bracket 61, a motor 62, a synchronous belt 63, and a synchronous pulley 64. The motor 62 is mounted on the outside of the vacuum chamber floor plate via the motor bracket 61. The synchronous pulley 64 is coaxially mounted on the magnetofluid shaft 52 and located at one end near the magnetofluid housing 51. The synchronous pulley 64 is connected to the shaft of the motor 62 via the synchronous belt 63.

[0038] like Figure 8 As shown, an adjustment device 65 is provided below the motor bracket 61. The adjustment device 65 includes a movable plate 651 and a rotating handle 652. One side of the movable plate 651 is connected to the motor 62. One end of the rotating handle 652 passes through the bottom of the motor bracket 61 and is threadedly connected to the bottom of the movable plate 651. By adjusting the rotating handle 652, the movable plate 651 is moved up and down to achieve tensioning of the synchronous belt 63. The operation is simple.

[0039] like Figure 7As shown, the target material rotating mechanism is further provided with a positioning sensing module, which is arranged at the outer end of the magnetic fluid shell 51 through the mounting plate 71, and comprises a plurality of photoelectric sensors 7, one photoelectric sensor 7 corresponding to one target material 21, for positioning the rotation angle of the magnetic fluid shaft 52.

[0040] As shown in the drawings, Figure 1 As shown, the target material cover 1 is provided with a protection plate 8 at both ends to prevent the ion beam from directly splashing out to cause harm to the operator.

[0041] The target material rotating mechanism can be used for large-area cooling, and the cooling effect is good.

[0042] The above-mentioned embodiments only express several implementation manners of the utility model, and the description is relatively specific and detailed, but it cannot be understood as the limitation of the utility model patent range. It should be pointed out that for ordinary skilled persons in the art, without departing from the concept of the utility model, a number of modifications and improvements can be made, which belong to the protection range of the utility model. Therefore, the protection range of the utility model patent should be subject to the appended claims.

Claims

1. A large-area coolable target rotation mechanism, comprising a target (21), a target housing (1), a magnetorheological fluid rotation mechanism (5), and a driving mechanism (6), wherein the body of the driving mechanism (6) is fixedly connected to the bottom plate of a vacuum chamber, the magnetorheological fluid rotation mechanism (5) is connected to the side wall of the vacuum chamber through a flange (12), one end of the flange (12) is arranged outside the chamber, and the other end is arranged inside the chamber through the chamber and is used for supporting the magnetorheological fluid rotation mechanism (5), the magnetorheological fluid rotation mechanism (5) comprises a magnetorheological fluid shell (51) and a magnetorheological fluid shaft (52), the magnetorheological fluid shell (51) is sleeved on the inner wall of the flange (12), one end of the magnetorheological fluid shell (51) is fixedly connected to the target housing (1), the magnetorheological fluid shaft (52) is sleeved in the magnetorheological fluid shell (51), one end of the magnetorheological fluid shaft (52) penetrates through the side wall of the vacuum chamber and is connected to the target (21) in the vacuum chamber, the target (21) rotates with the magnetorheological fluid shaft (52), and the other end of the magnetorheological fluid shaft (52) is connected to the driving shaft of the driving mechanism (6); the target housing (1) is sleeved outside the target (21) and leaves a gap between the target housing (1) and the target (21), and the large-area coolable target rotation mechanism is characterized in that: The magnetic fluid shaft (52) is provided with a water distribution block (4) at the connection with the target material (21), and the outer side of the water distribution block (4) is provided with at least two water outlet blocks (3) in the circumferential direction, each water outlet block (3) corresponds to a target material (21), and each target material (21) is provided with a target material water cooling plate (25) between the target material (21) and the water outlet block (3), and the target material water cooling plate (25) is densely provided with cooling flow channels (251) around the center of the target material water cooling plate (25), and the middle part of each cooling flow channel (251) is provided with a first water inlet (252) and a first water outlet (253), and the magnetic fluid shell (51) is provided with a total water inlet (511) and a total water outlet (512), and the water flow enters the magnetic fluid shaft (52) from the total water inlet (511) on the magnetic fluid shell (51), and is introduced into the water distribution block (4) installed on the end face of the magnetic fluid shaft (52), and the water flow flows through the cooling flow channel (251) corresponding to the first target material (21) through the water distribution block (4) and the water outlet block (3), and the water flow enters from the first water inlet (252) and flows along the cooling flow channel (251) to the outer ring, and then bends and flows along the cooling flow channel (251) to the inner ring, and then flows from the first water outlet (253) to the water outlet block (3) corresponding to the target material (21), and then flows into the water distribution block (4), and then flows from the water distribution block (4) to the cooling flow channel (251) corresponding to the next target material (21), and so on, and finally flows out from the total water outlet (512) on the magnetic fluid shell (51), so that the target material (21) is cooled and cooled in a large area. ​ 2. The large area coolable target rotation mechanism of claim 1, wherein: When the water distribution block (4) is a cube, the corresponding water outlet block (3) is four, and the corresponding target material (21) is four.

3. The large area coolable target rotation mechanism of claim 1, wherein: One side of the water distribution block (4) connected with the end face of the magnetic fluid shaft (52) and the side connected with the plurality of water outlet blocks (3) are each provided with a water distribution inlet (41) and a water distribution outlet (42).

4. The large area coolable target rotation mechanism of claim 1, wherein: The water distribution block (4) includes a plurality of water distribution channels (43), each water distribution channel (43) is connected with the target material water cooling plate (25) corresponding to the water outlet block (3) through one of the water outlet blocks (3), the first water inlet (252) is connected with the water distribution inlet (41) of the water distribution block (4) through the water outlet block (3), and the first water outlet (253) is connected with the water distribution outlet (42) of the water distribution block (4) through the water outlet block (3).

5. The large area coolable target rotation mechanism of claim 1, wherein: The side of the cooling flow channel (251) of the target material water cooling plate (25) is provided with a water cooling sealing plate (24) for sealing the cooling flow channel (251).

6. The large area coolable target rotation mechanism of claim 5, wherein: The target material back plate (22) is provided between the water cooling sealing plate (24) and the target material (21), the middle part of the target material back plate (22) is provided with a groove (221) for mounting the target material (21), and the outer ring of the groove (221) of the target material back plate (22) is provided with an annular boss (222) for connecting the target material light shielding plate (23).

7. The large area coolable target rotation mechanism of claim 1, wherein: The target shell (1) is in a column shape, the target shell (1) and the magnetohydrodynamic shaft (52) are coaxially arranged, a working plane is arranged on the sidewall of the target shell (1), an opening (11) is arranged at the center of the working plane, when film coating is needed, the selected target material (21) is rotated to the opening (11), the size of the opening (11) is matched with the size of the target material (21).

8. The large area coolable target rotation mechanism of claim 1, wherein: The driving mechanism (6) comprises a motor support (61), a motor (62), a synchronous belt (63) and a synchronous wheel (64), the motor (62) is installed outside the vacuum chamber bottom plate through the motor support (61), the synchronous wheel (64) is coaxially installed on the magnetohydrodynamic shaft (52) and located at one end close to the magnetohydrodynamic shell (51), the synchronous wheel (64) is connected with the rotating shaft of the motor (62) through the synchronous belt (63).

9. The large area coolable target rotation mechanism of claim 1, wherein: The target rotating mechanism is further provided with a positioning sensing module, the positioning sensing module is arranged at the outer end of the magnetohydrodynamic shell (51) through a mounting plate (71), the positioning sensing module comprises a plurality of photoelectric sensors (7), one photoelectric sensor (7) corresponds to one target material (21), and is used for positioning the rotating angle of the magnetohydrodynamic shaft (52).

10. The large area coolable target rotation mechanism of claim 8, wherein: An adjusting device (65) is arranged below the motor support (61), the adjusting device (65) comprises a movable plate (651) and a rotating handle (652), one side of the movable plate (651) is connected with the motor (62), one end of the rotating handle (652) penetrates through the bottom of the motor support (61) and is threadedly connected with the bottom of the movable plate (651), the movable plate (651) is moved up and down by adjusting the rotating handle (652), and the synchronous belt (63) is tensioned.

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