Workpiece loading mechanism and vacuum treatment device

Abstract

The utility model belongs to the technical field of vacuum treatment, and discloses a workpiece loading mechanism and a vacuum treatment device. The workpiece loading mechanism comprises a mounting assembly and a first correction assembly, the mounting assembly comprises a base and a mounting piece used for mounting a workpiece, and the mounting piece is rotationally connected to the base; the first correction assembly corresponds to the installation part and comprises a first correction part and a second correction part, the second correction part is arranged on the peripheral side of the workpiece, the first end of the second correction part is detachably connected to the base, the first correction part is detachably connected with the second end of the second correction part, and the first correction part is provided with a first through hole. According to the utility model, the film layer at each position of the surface of the workpiece can be better controlled, the uniformity of the film thickness at each position of the workpiece can be ensured as far as possible, in addition, the first correction assembly is surrounded outside the workpiece, the film layer on the surface of the workpiece can be better controlled, and the structure of the film layer correction device is simpler.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum processing technical field especially relates to a work piece loading mechanism and vacuum processing device. BACKGROUND

[0002] At present, more and more product surfaces need to be vacuum coated or etched to enrich product performance. With the increasing diversification of product surfaces to be processed, the uniformity of vacuum processing becomes one of the key factors affecting the effect of vacuum processing. Taking magnetron sputtering coating as an example, magnetron sputtering is widely used in optical coating and decorative coating of parts in the fields of semiconductors, smart wear and vehicle-mounted devices due to its high efficiency, stable rate and dense film layer.

[0003] However, magnetron sputtering coating has strong directionality, so when coating 3D products, it often leads to thicker film layer on the front surface of the product facing the sputtering source and thinner film layer on the side surface of the product, thereby causing uneven film thickness on the surface of the product and deteriorating product quality. In the prior art, a film thickness correction plate is usually arranged between the sputtering source and the product to partially shield the particles sputtered by the sputtering source, thereby adjusting the film thickness uniformity at each position on the surface of the product. However, this method usually has good film thickness adjustment effect on the front surface of the product facing the sputtering source. For the side surface of the product away from the sputtering source and not directly opposite to the sputtering source, only by adjusting the size of the aforementioned film thickness correction plate, the expected film thickness uniformity cannot be achieved under the premise of ensuring a certain coating rate. SUMMARY

[0004] The utility model aims at providing a work piece loading mechanism and vacuum processing device, can guarantee the film thickness uniformity of each position on the work piece as much as possible, and the structure is relatively simple.

[0005] To achieve this purpose, the utility model adopts the following technical scheme:

[0006] On the one hand, a work piece loading mechanism is provided, comprising:

[0007] The mounting assembly comprises a base and a mounting piece for mounting the work piece, and the mounting piece is rotatably connected to the base.

[0008] The first correction assembly is arranged corresponding to the mounting piece, and the first correction assembly comprises a first correction piece and a second correction piece.

[0009] In some possible embodiments, the second correction piece is provided with at least two second correction pieces, and the at least two second correction pieces are arranged around the periphery of the work piece.

[0010] In some possible implementation, the mounters are provided in a plurality, the plurality of mounters are divided into a plurality of groups, the plurality of mounters in each group are distributed along the length direction of the base, and are respectively used for mounting the plurality of workpieces. The first correction assemblies are provided in a plurality, the plurality of first correction assemblies are divided into a plurality of groups, and the plurality of first correction assemblies in each group are provided in one-to-one correspondence with the plurality of mounters in each group.

[0011] In some possible implementation, in the plurality of first correction assemblies in each group, at least one second correction member is shared between two adjacent workpieces.

[0012] In some possible implementation, in the plurality of first correction assemblies in each group, the plurality of first correction members are sequentially connected and form an integrated structure.

[0013] In some possible implementation, the plurality of mounters are circumferentially spaced apart on the base, and the base is configured to be rotationally connected in a vacuum processing chamber.

[0014] In some possible implementation, the first correction assembly further comprises a fixing member, the second correction member is detachably connected to the base through the fixing member, a bottom end of the fixing member is detachably arranged on the base, the second correction member is provided with a through hole, the second correction member is detachably sleeved on the fixing member through the through hole, and the first correction member is detachably connected to a top end of the fixing member.

[0015] In some possible implementation, the base comprises a base body and a connecting member, the connecting member is detachably connected to the base body, and the connecting member is used for connecting with the first correction assembly.

[0016] In some possible implementation, the connecting member is provided with a avoiding hole for avoiding the workpiece.

[0017] In one aspect, a vacuum processing device is provided, comprising a vacuum processing chamber, a vacuum processing source, and a workpiece loading mechanism according to any one of the preceding aspects. The vacuum processing source, the mounting assembly, and the first correction assembly are arranged in the vacuum processing chamber, and the vacuum processing source is used for vacuum processing of the workpiece.

[0018] In some possible implementation manners, the vacuum processing device further comprises a second correction assembly arranged between the vacuum processing source and the base, the second correction assembly comprises two third correction members arranged along the length direction of the base, the two third correction members are arranged in a spaced manner and a gap forms a second through hole; each third correction member is provided with a plurality of adjusting members distributed along the length direction of the third correction member, and each adjusting member is arranged on the third correction member in a position-adjustable manner along the width direction of the third correction member to cover the second through hole.

[0019] In some possible implementation manners, the vacuum processing source is a planar target or a rotating target; and / or, the vacuum processing source is a twin double target or a single target.

[0020] The utility model discloses beneficial effects:

[0021] The workpiece loading mechanism provided by the utility model, taking sputtering film coating as an example, the particles sputtered from the vacuum processing source, a part enters the first through hole of the first correction member to contact the top surface of the workpiece, and a part bypasses the first correction member to contact the side surface of the workpiece, when the vacuum processing source directly faces the top surface of the workpiece, the particles incident to the top surface of the workpiece are shielded by the first correction member, the film layer on the top surface of the workpiece is thinned, and then the film layer thickness on the top surface of the workpiece is substantially the same as the film layer thickness on the side surface, so that the film thickness uniformity of the workpiece at all positions can be ensured as much as possible. The second correction member is detachably connected to the base, the second correction member with only different widths can be replaced, the second correction member with different external contour shapes can be replaced, and the second correction member with only different heights can be replaced to change the distance between the first correction member and the workpiece, so that the film thickness of the workpiece is adjusted, and the film thickness is more uniform. The first correction member and the second correction member are detachably connected, the first correction member with different first through hole sizes can be replaced, the first correction member with different first through hole cross section shapes can be replaced, the film thickness of the workpiece is adjusted, and the film thickness is more uniform. In addition, the first correction assembly is surrounded outside the workpiece, better control of the film layer on the surface of the workpiece can be realized, and the structure is relatively simple.

[0022] The vacuum processing device provided by the utility model comprises a vacuum processing chamber, a vacuum processing source and a workpiece loading mechanism, and the film thickness uniformity of the workpiece at all positions can be ensured as much as possible. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is the front view of the vacuum processing device (connection piece is not shown) provided by the utility model;

[0024] Figure 2 is the structural schematic view of the first correction assembly and the connection piece involved by the utility model;

[0025] Figure 3 is a structure schematic view of the second correction member involved in the utility model;

[0026] Figure 4 is a side view of the vacuum processing device (display part first correction assembly and part workpiece) provided by the utility model;

[0027] Figure 5 is a side view of the vacuum processing device (display part first correction assembly and part workpiece) provided by the utility model;

[0028] Figure 6 is a structure schematic view of the assembly of multiple first correction assemblies and multiple connecting pieces involved in the utility model.

[0029] In the figure:

[0030] 1, base; 11, connecting piece; 111, avoiding hole; 2, vacuum processing source; 3, first correction assembly; 31, first correction member; 311, first through hole; 32, second correction member; 321, through hole; 4, second correction assembly; 41, third correction member; 42, second through hole; 43, adjusting member;

[0031] 100, workpiece. DETAILED DESCRIPTION

[0032] The utility model will be explained in further detail below in combination with the drawings and examples. It can be understood that the specific examples described here are only for explaining the utility model, not for limiting the utility model. In addition, it needs to be explained that, for the convenience of description, only the parts related to the utility model are shown in the drawings, not all the structures.

[0033] In the description of the utility model, unless explicitly defined and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixed connection, can also be detachable connection, or be integrated; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through intermediate medium, can be the communication inside two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0034] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0036] like Figures 1 to 6 As shown, this utility model provides a workpiece loading mechanism, including an installation component and a first correction component 3. The installation component includes a base 1 and an installation member for installing a workpiece 100. In this embodiment, the installation member clamps the workpiece 100 and is rotatably connected to the base 1. The first correction component 3 is correspondingly arranged with the installation member. The first correction component 3 includes a first correction member 31 and a second correction member 32. The second correction member 32 is disposed on the periphery of the workpiece 100. The first end of the second correction member 32 is detachably connected to the base 1, and the second ends of the first correction member 31 and the second correction member 32 are detachably connected. The first correction member 31 is provided with a first through hole 311. In this embodiment, the first through hole 311 penetrates the top surface and the bottom surface of the first correction member 31.

[0037] The workpiece 100 is sputter coated, wherein the workpiece 100 is a product with a 3D shape, which can be a large curved lens, or a cuboid, a cylinder or a mask type product. Particles sputtered from the vacuum processing source 2 enter the first through hole 311 of the first modifier 31 to contact the top surface of the workpiece 100, and part of the particles bypass the first modifier 31 to contact the side surface of the workpiece 100. When the vacuum processing source 2 is directly opposite the top surface of the workpiece 100, the number of particles reaching the top surface of the workpiece 100 is more than the number of particles reaching the side surface of the workpiece 100 without the first modifier 31 and the second modifier 32. In the case of applying the first modifier 31 provided by the utility model, part of the particles incident on the top surface of the workpiece 100 are blocked by the first modifier 31, so that the film layer covering the top surface of the workpiece 100 is thinned, which is further conducive to realizing that the film layer thickness covering the top surface of the workpiece 100 and the film layer thickness covering the side surface of the workpiece 100 tend to be consistent, and the film thickness uniformity of each position on the workpiece 100 can be ensured as much as possible. The workpiece 100 is fixed on the mounting piece, and the mounting piece is rotationally connected to the base 1, so that the vacuum processing source 2 can cover the entire side surface of the workpiece 100, and the film thickness uniformity of the side surface of the workpiece 100 is further ensured.

[0038] The second modifier 32 is detachably connected to the base 1. The second modifier 32 with only different width can be replaced, the second modifier 32 with different outer contour shape can be replaced, and the second modifier 32 with only different height can be replaced to change the distance between the first modifier 31 and the workpiece 100, so as to adjust the film thickness of the workpiece 100 and make the film thickness more uniform. Specifically, under the condition that other factors of the second modifier 32 are unchanged, only the width of the second modifier 32 is changed, that is, the shielding area of the second modifier 32 to the side surface of the workpiece 100 is changed, so as to adjust the film thickness of the side surface of the workpiece 100, make the size of the side surface film thickness more accurate, adjust the film thickness ratio of the side surface and the top surface, and make the overall film thickness more uniform. The wider the width of the second modifier 32 is, the larger the shielding area of the second modifier 32 to the side surface of the workpiece 100 is, and the thinner the film thickness of the side surface of the workpiece 100 is. The narrower the width of the second modifier 32 is, the smaller the shielding area of the second modifier 32 to the side surface of the workpiece 100 is, and the thicker the film thickness of the side surface of the workpiece 100 is. Under the condition that other factors of the second modifier 32 are unchanged, the second modifier 32 with different outer contour shape is replaced to meet the film plating demand of the workpiece 100 with different shape and ensure the uniformity of the film layer of the side surface of the workpiece 100. Understandably, the outer contour of the second modifier 32 can be rectangular, triangular, shuttle-shaped, trapezoidal, parallelogram, etc., which can be set according to the specific shape of the workpiece 100. Under the condition that other factors of the second modifier 32 are unchanged, only the height of the second modifier 32 is changed to change the distance between the first modifier 31 and the workpiece 100, so as to adjust the film thickness of the top surface of the workpiece 100, make the size of the top surface film thickness more accurate, adjust the film thickness ratio of the side surface and the top surface, and make the overall film thickness more uniform. The farther the distance between the first modifier 31 and the workpiece 100 is, that is, the closer the distance between the first modifier 31 and the vacuum processing source 2 is, the thicker the film thickness of the top surface of the workpiece 100 is. The closer the distance between the first modifier 31 and the workpiece 100 is, that is, the farther the distance between the first modifier 31 and the vacuum processing source 2 is, the thinner the film thickness of the top surface of the workpiece 100 is.

[0039] The first correction member 31 is detachably connected with the second correction member 32, and in the case that other factors of the first correction member 31 are unchanged, the first correction member 31 with different first through holes 311 can be replaced to adjust the film thickness of the top surface of the workpiece 100, so that the film thickness of the top surface is more accurate, the film thickness ratio of the side surface and the top surface is adjusted, and the overall film thickness is more uniform. Specifically, the larger the aperture of the first through hole 311, the thicker the film thickness of the top surface of the workpiece 100; the smaller the aperture of the first through hole 311, the thinner the film thickness of the top surface of the workpiece 100. In the case that other factors of the first correction member 31 are unchanged, the first correction member 31 with different cross-sectional shapes of the first through hole 311 can be replaced to meet the film plating requirements of the workpiece 100 with different top surface shapes and ensure the uniformity of the film layer on the top surface of the workpiece 100. Understandably, the cross-sectional shape of the first through hole 311 can be a symmetrical shape such as a circular shape and a polygonal shape or an asymmetrical shape, which can be set according to the specific shape of the workpiece 100. If the top surface of the workpiece 100 is a convex surface or a plane, the cross-sectional shape of the first through hole 311 is preferably a circular shape.

[0040] By detachably connecting the second correction member 32 to the base 1 and detachably connecting the first correction member 31 with the second correction member 32, the film thickness of each position of the workpiece 100 is more uniform. Moreover, in the sputtering process, the first correction assembly 3 is surrounded outside the workpiece 100, so that the film layer of each position on the surface of the workpiece 100 can be better controlled, and in addition, the structure of the utility model is relatively simple.

[0041] Optionally, in the embodiment, the base 1 comprises a base body and a connecting piece 11, the connecting piece 11 is detachably connected to the base body, and the connecting piece 11 is used for connecting with the first correction assembly 3. In this way, when the first correction assembly 3 is replaced, the connecting piece 11 is conveniently taken down together with the first correction assembly 3 for replacement. Optionally, in the embodiment, the connecting piece 11 is provided with a avoiding hole 111 for avoiding the workpiece 100. In this way, the contact area of the connecting piece 11 with the base body is increased, the connection stability is improved, and the structure is relatively compact.

[0042] Optionally, in the embodiment, the second modifier 32 is provided with at least two, and the at least two second modifiers 32 are arranged at intervals on the side of the workpiece 100. In this way, without affecting the entry and contact of the sputtering particles with the side of the workpiece 100, the film thickness uniformity of the entire side of the workpiece 100 can be further ensured. For example, the workpiece 100 has a cuboid structure, and the side is formed by four planes connected in sequence, and then four second modifiers 32 can be arranged correspondingly, and the four planes are modified respectively, so as to ensure the film thickness uniformity of the entire side of the workpiece 100. In the embodiment, the second modifier 32 is provided with two, and the two second modifiers 32 are arranged oppositely, and the two second modifiers 32 form two openings with the first modifier 31, and the sputtering particles pass through the two openings along the sputtering direction to contact the side of the workpiece 100. In this way, the film coating effect is better. Further, the second modifier 32 is arranged along the first direction X, and the first modifier 31 is arranged along the second direction Y, and the first direction X and the second direction Y are arranged at an angle, and the angle is preferably a right angle. In this way, the installation and processing are facilitated.

[0043] Optionally, in the embodiment, the mounting member is provided with a plurality of mounting members, and the plurality of mounting members are divided into a plurality of groups, and the plurality of mounting members in each group are distributed along the length direction of the base 1 and are respectively used for mounting a plurality of workpieces 100. The first modifier assembly 3 is provided with a plurality of first modifier assemblies 3, and the plurality of first modifier assemblies 3 are divided into a plurality of groups, and the plurality of first modifier assemblies 3 in each group are arranged one by one with the plurality of mounting members in each group. In this way, the vacuum processing source 2 can simultaneously perform sputtering on a plurality of workpieces 100, thereby improving the film coating efficiency. Optionally, the number of groups of mounting members and the number of mounting members in each group can be adjusted according to the size of the workpiece 100, and the number of groups of mounting members is preferably 3-8 groups.

[0044] Optionally, in the embodiment, as shown in Figure 6 In the plurality of first modifier assemblies 3 in each group, at least one second modifier 32 is shared between adjacent two workpieces 100, which can save materials and space. Optionally, in the plurality of first modifier assemblies 3 in each group, the plurality of first modifiers 31 are connected in sequence and form an integrated structure. In this way, materials are saved, installation time is saved, and the structure is compact.

[0045] Optionally, in the embodiment, the plurality of connecting members 11 corresponding to the plurality of first modifier assemblies 3 in each group are connected in sequence and form an integrated structure, and the integrated structure is arranged along the length direction of the base 1 and is detachably connected with the base 1. In this way, materials and installation time are further saved, and the structure is also compact.

[0046] Optionally, a plurality of sets of mounting members are circumferentially spaced apart on the base 1, and the base 1 is configured to be rotationally connected in the vacuum processing chamber. During the coating process, the base 1 is in a rotating state, and the workpiece 100 on the mounting member is also in a rotating state. In this way, the number of workpieces 100 coated at one time is increased, and the coating efficiency is further improved. In addition, when the base 1 is rotated to make the vacuum processing source 2 face the side surface of the workpiece 100, more particles reach the side surface of the workpiece 100 than reach the top surface of the workpiece 100 without the first correction member 31 and the second correction member 32. In the case of applying the second correction member 32 provided by the utility model, part of the particles incident on the side surface of the workpiece 100 are blocked by the second correction member 32, so that the film layer covering the side surface of the workpiece 100 is thinned, and further, it is beneficial to realize that the thickness of the film layer covering the side surface of the workpiece 100 and the thickness of the film layer covering the top surface of the workpiece 100 tend to be consistent.

[0047] Optionally, in the embodiment, the first correction assembly 3 further comprises a fixing member, the second correction member 32 is detachably connected to the base 1 through the fixing member, and a bottom end of the fixing member is detachably arranged on the base 1, as shown in Figure 3 The second correction member 32 is provided with a through hole 321, the second correction member 32 is detachably sleeved on the fixing member through the through hole 321, and the first correction member 31 is detachably connected to a top end of the fixing member. By arranging the fixing member, the second correction member 32 is convenient to replace. Specifically, the fixing member is a fixing rod, a connecting member 11 of the base 1 is threadedly connected to a bottom end of the fixing rod, the second correction member 32 is detachably sleeved on the fixing rod through the through hole 321, and a bottom portion of the first correction member 31 is recessed with a plug-in slot, the plug-in slot is detachably plugged into a top end of the fixing rod.

[0048] The utility model also provides a kind of vacuum processing device, including vacuum processing chamber, vacuum processing source 2 and workpiece loading mechanism, vacuum processing source 2, mounting assembly and first correction assembly 3 are all arranged in vacuum processing chamber, and vacuum processing source 2 is used to carry out vacuum processing to workpiece 100. The vacuum processing device can guarantee that the film thickness uniformity of each position of workpiece 100 is consistent as far as possible.

[0049] Optionally, in the embodiment, the vacuum processing device further comprises a second correction assembly 4, the second correction assembly 4 is arranged between the vacuum processing source 2 and the base 1, and the second correction assembly 4 comprises two third correction members 41, the third correction member 41 is arranged along the length direction of the base 1, as shown in Figure 5As shown, two third correction elements 41 are spaced apart, with the gap forming a second through hole 42. Each third correction element 41 is provided with multiple adjustment elements 43, which are distributed along the length of the third correction element 41 and are adjustable along the width of the third correction element 41 to cover the second through hole 42. Due to the influence of vacuum processing source 2 and other factors, the coating thickness of multiple workpieces 100 distributed along the length of the base 1 may be different. To ensure that the coating thickness of multiple workpieces 100 is the same, and to make the final spectral and color distribution differences of workpieces 100 meet the mass production specifications and achieve mass production, it is necessary to thicken some workpieces 100 with thinner coating thickness. For one workpiece 100 with thinner coating thickness, the distance between the two adjustment elements 43 on the two third correction elements 41 that are opposite to the workpiece 100 is adjusted to increase the distance between the two adjustment elements 43. The larger the distance, the smaller the area covered by the second through hole 42, and the thicker the coating thickness of the workpiece 100. Then, adjustments were made to each of the other workpieces 100 with thinner coatings.

[0050] In this embodiment, multiple adjusting elements 43 are configured one-to-one with multiple mounting elements in each group. That is, the film thickness of one workpiece 100 can be adjusted by one adjusting element 43, which is more targeted and results in higher product quality in mass production. Of course, the film thickness of multiple workpieces 100 can also be adjusted by one adjusting element 43.

[0051] Optionally, the vacuum treatment source 2 can be a planar target or a rotating target. Planar targets have a simple structure and strong versatility, while rotating targets have a compact structure and high target utilization. Optionally, the vacuum treatment source 2 can be a twinned dual target or a single target. Using a twinned dual target can improve the uniformity of the coated film.

[0052] Based on the above-mentioned workpiece loading mechanism, the uniformity of the film layer at various locations on the surface of workpiece 100 can be corrected. The vacuum processing uniformity correction method includes:

[0053] S1. The first end of the second correction member 32 is installed on the base 1 and the second correction member 32 is located on the periphery of the workpiece 100. The first correction member 31 with the first through hole 311 is installed on the second end of the second correction member 32 so that the thickness of the film layer covering the top surface of the workpiece 100 is basically the same as the thickness of the film layer covering the side surface, which can ensure the uniformity of the film thickness at various positions on the workpiece 100 as much as possible.

[0054] S2, disassemble and replace the second correction member 32 and / or the first correction member 31 to change the size of the film thickness of the side surface and the top surface of the workpiece 100, so that the film thickness of each position of the workpiece 100 is more uniform. Specifically, according to the actual film coating condition of each position of the workpiece 100, only the second correction member 32 can be replaced, only the first correction member 31 can be replaced, or both the second correction member 32 and the first correction member 31 can be replaced. In the case of ensuring that other factors of the second correction member 32 remain unchanged, by disassembling and replacing the second correction member 32 with only different widths, the size of the film thickness of the side surface of the workpiece 100 is changed to make the size of the side surface film thickness more accurate. In the case of ensuring that other factors of the second correction member 32 remain unchanged, by disassembling and replacing the second correction member 32 with different outer contour shapes, the film coating requirements for workpieces 100 of different shapes are met to ensure the uniformity of the side surface film layer of the workpiece 100. In the case of ensuring that other factors of the second correction member 32 remain unchanged, by disassembling and replacing the second correction member 32 with only different heights, the size of the film thickness of the top surface of the workpiece 100 is changed to make the size of the top surface film thickness more accurate. In the case of ensuring that other factors of the first correction member 31 remain unchanged, the first correction member 31 with different aperture sizes of the first through hole 311 is replaced to adjust the film thickness of the top surface of the workpiece 100, so that the size of the top surface film thickness is more accurate. In the case of ensuring that other factors of the first correction member 31 remain unchanged, the first correction member 31 with different cross-sectional shapes of the first through hole 311 is replaced to meet the film coating requirements for workpieces 100 of different top surface shapes, and to ensure the uniformity of the top surface film layer of the workpiece 100.

[0055] S3, adjust the distance between the two adjusting members 43 on the two third correction members 41 opposite to the workpiece 100 to make the film coating thickness of the plurality of workpieces 100 the same, so that the film coating uniformity of the plurality of workpieces 100 is consistent based on the uniformity of the film coating of a single workpiece 100, so that the final spectrum and color distribution difference of the plurality of workpieces 100 meets the production specification requirements, and mass production can be realized. Specifically, for one of the workpieces 100 with a relatively thin film coating thickness, the distance between the two adjusting members 43 on the two third correction members 41 opposite to the workpiece 100 is adjusted to make the distance between the two adjusting members 43 larger.

[0056] By the method of steps S1-S3, the front surface film thickness difference, the side surface film thickness difference and the film thickness difference between different workpieces 100 of all workpieces 100 on the correction base 1 are corrected, so that the final spectrum and color distribution difference of the plurality of workpieces 100 meets the production specification requirements, and mass production can be realized.

[0057] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, various obvious changes, re-adjustments and replacements can be made without departing from the protection scope of the present application. Here, it is not necessary and also impossible to enumerate all the implementation modes. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application claim.

Claims

1. A workpiece loading mechanism, characterized by, The installation assembly comprises a base (1) and an installation piece for installing a workpiece (100), the installation piece is rotationally connected to the base (1); a first correction assembly (3) is arranged corresponding to the installation piece, the first correction assembly (3) comprises a first correction piece (31) and a second correction piece (32), the second correction piece (32) is arranged on the circumferential side of the workpiece (100), a first end of the second correction piece (32) is detachably connected to the base (1), the first correction piece (31) is detachably connected to a second end of the second correction piece (32), and the first correction piece (31) is provided with a first through hole (311). The second correction piece (32) is provided with at least two second correction pieces (32) which are arranged on the circumferential side of the workpiece (100) in a spaced manner. The installation piece is provided with a plurality of installation pieces, the plurality of installation pieces are divided into a plurality of groups, the plurality of installation pieces in each group are distributed along the length direction of the base (1) and are respectively used for installing a plurality of workpieces (100), and the first correction assembly (3) is provided with a plurality of first correction assemblies (3), the plurality of first correction assemblies (3) in each group are arranged one by one corresponding to the plurality of installation pieces in each group.

2. The workpiece loading mechanism of claim 1, wherein, In the plurality of first correction assemblies (3) in each group, at least one second correction piece (32) is shared between two adjacent workpieces (100).

3. The workpiece loading mechanism of claim 2, wherein, In the plurality of first correction assemblies (3) in each group, the plurality of first correction pieces (31) are connected in sequence and form an integrated structure.

4. The workpiece loading mechanism of claim 3, wherein, A plurality of installation pieces are arranged in a circumferential direction on the base (1), and the base (1) is configured to be rotationally connected in a vacuum processing chamber.

5. The workpiece loading mechanism of claim 3, wherein, The first correction assembly (3) further comprises a fixing piece, the second correction piece (32) is detachably connected to the base (1) through the fixing piece, a bottom end of the fixing piece is detachably arranged on the base (1), the second correction piece (32) is provided with a through hole (321), the second correction piece (32) is detachably sleeved on the fixing piece through the through hole (321), and the first correction piece (31) is detachably connected to a top end of the fixing piece.

6. The workpiece loading mechanism of claim 3, wherein, The base (1) comprises a base body and a connecting piece (11), the connecting piece (11) is detachably connected to the base body, and the connecting piece (11) is used for connecting with the first correction assembly (3).

7. The workpiece loading mechanism of claim 1, wherein, The connecting piece (11) is provided with a avoiding hole (111) for avoiding the workpiece (100).

8. The workpiece loading mechanism of claim 1, wherein, The vacuum processing chamber, the vacuum processing source (2) and the workpiece loading mechanism according to any one of claims 1-9 are provided, the vacuum processing source (2), the installation assembly and the first correction assembly (3) are arranged in the vacuum processing chamber, and the vacuum processing source (2) is used for vacuum processing of the workpiece (100).

9. The workpiece loading mechanism of claim 8, wherein, ​ 10. A vacuum processing apparatus, characterized by, ​ 11. The vacuum processing apparatus according to claim 10, wherein The vacuum processing device further comprises a second correction assembly (4) arranged between the vacuum processing source (2) and the base (1), the second correction assembly (4) comprising two third correction members (41) arranged along the length direction of the base (1), the two third correction members (41) being spaced apart and forming a second through hole (42) therebetween; each third correction member (41) is provided with a plurality of adjusting members (43) distributed along the length direction of the third correction member (41), and each adjusting member (43) is adjustably arranged on the third correction member (41) along the width direction of the third correction member (41) to cover the second through hole (42).

12. The vacuum processing apparatus according to claim 10, wherein The vacuum processing source (2) is a planar target or a rotating target; and / or the vacuum processing source (2) is a twin double target or a single target.

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