Coating equipment and hot wire connecting structure thereof

Abstract

The utility model belongs to the field of coating equipment, and particularly relates to coating equipment and a hot wire connecting structure thereof. The hot wire module comprises a first connecting piece, a second connecting piece and a short hot wire; each of the first connecting piece and the second connecting piece comprises an insulating block and a hot wire conductive block, the insulating block is hollow and sleeves the hot wire conductive block, and a plurality of hot wire fixing holes are formed in the hot wire conductive block; wherein one end of the short hot wire is fixed in the hot wire fixing hole of the first connecting piece, the other end of the short hot wire is fixed in the hot wire fixing hole of the second connecting piece, and the first connecting piece and the second connecting piece are connected in series through the hot wire, so that the hot wire module is U-shaped. According to the hot wire connecting structure, the short hot wires are connected in series to prevent the hot wires from drooping, so that the stability of hot wire current in a large-area chamber is ensured, the temperature field of the hot wires is more uniform, and the coating quality is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of coating equipment, specifically relates to a coating equipment and hot wire connecting structure thereof. BACKGROUND

[0002] Hot wire chemical vapor deposition (HWCVD) utilizes catalytic reaction of molecules on heated metal wires and deposition and polymerization on substrate surface to form thin film, and the utilization rate of process gas and growth rate are high, and the horizontal hot wire chemical vapor deposition (HWCVD) equipment has strong advantages in preparation cost and compound semiconductor stability.

[0003] With the increasing demand for equipment capacity, the existing horizontal hot wire chemical vapor deposition (HWCVD) equipment chamber area is larger and larger, the original long hot wire is prone to sagging and breaking after heating, and a large number of fixing holes need to be reserved on the chamber cover, thereby affecting the strength of the chamber cover and being difficult to ensure the uniformity of the hot wire temperature field and the uniformity of the coating of the large chamber.

[0004] Therefore, in order to solve the technical problem that the hot wire module of the large chamber is easy to cause uneven coating, it is urgent to provide a coating equipment and hot wire connecting structure thereof.

[0005] It should be noted that the above information disclosed in the background section of the present application is only used to understand the background technology of the present application, and therefore, the above description is not considered as information of prior art. CONTENT OF THE UTILITY MODEL

[0006] The hot wire connecting structure provided by the embodiments of the present disclosure comprises:

[0007] A hot wire module;

[0008] The hot wire module comprises a first connecting piece, a second connecting piece and a short hot wire;

[0009] The first connecting piece and the second connecting piece comprise an insulating block and a hot wire conductive block, the insulating block is hollow inside and is sleeved on the hot wire conductive block, and a plurality of hot wire fixing holes are arranged in the hot wire conductive block;

[0010] Wherein, one end of the short hot wire is fixed in the hot wire fixing hole of the first connecting piece, and the other end is fixed in the hot wire fixing hole of the second connecting piece, the first connecting piece and the second connecting piece are connected in series through the short hot wire, so that the hot wire module is in U shape.

[0011] In an alternative embodiment, the short hot wires are connected in series between the hot wire modules, and the connecting members between adjacent hot wire modules are in U-shape with the short hot wires connected thereto.

[0012] In an alternative embodiment, the upper part of the insulating blocks in the first and last connecting members of the series connection is provided with a conductive feed-in port.

[0013] In an alternative embodiment, the insulating blocks are arranged on the bottom surface of the spray plate, and the spray plate is provided with a through hole corresponding to the conductive feed-in port, and an external power supply is connected to the conductive feed-in port through the through hole.

[0014] In an alternative embodiment, the outer wall of the hot wire conductive block not wrapped by the insulating block is coated with an insulating coating.

[0015] In another aspect, the embodiments of the present disclosure also provide a coating equipment, comprising:

[0016] a spray plate;

[0017] a uniform gas space is arranged above the spray plate, the uniform gas space is in communication with the gas inlet hole, and the upper part of the uniform gas space is provided with a heating plate and the bottom is provided with a uniform gas hole;

[0018] a connecting member, the connecting member comprises an insulating block and a hot wire conductive block, the insulating block is hollow inside and is sleeved on the hot wire conductive block, and the hot wire conductive block is provided with a plurality of hot wire fixing holes inside;

[0019] a short hot wire, two ends of the short hot wire are fixed in the hot wire fixing holes in the two adjacent connecting members, respectively;

[0020] The insulating block is arranged on the bottom surface of the spray plate, and a plurality of short hot wires are connected in series with a plurality of connecting members through the hot wire fixing holes, so that the plurality of connecting members and the plurality of short hot wires are arranged in a continuous S shape on the bottom surface of the spray plate.

[0021] In an alternative embodiment, the upper part of the insulating block in the first and last connecting members of the series connection is provided with a conductive feed-in port;

[0022] The spray plate is provided with a through hole corresponding to the conductive feed-in port, and an external power supply is connected to the conductive feed-in port through the through hole.

[0023] In an alternative embodiment, the spray plate is provided with a plurality of spray holes, and the spray holes are located directly above the short hot wires.

[0024] In an alternative embodiment, a carrier plate is arranged below the hot wires, and a silicon wafer is loaded on the carrier plate, and the silicon wafer corresponds to the short hot wires.

[0025] The utility model discloses a beneficial effect is: adopt short hot filament series connection, prevent hot filament droop, to guarantee the stability of hot filament current in large area chamber, to make hot filament temperature field more uniform, improve the film quality.

[0026] Other features and advantages of the present utility model will be set forth in the following description of the drawings, and in part will become apparent to those skilled in the art from the description, or can be learned by practice of the present utility model. The objects and other advantages of the present utility model will be realized and achieved by means of the structures particularly pointed out in the description, claims and drawings.

[0027] In order to make the above-mentioned purpose, features and advantages of the utility model more obvious and easy to understand, the text will be preferred embodiment, and cooperate with the attached drawings, make detailed description as follows. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the specific embodiment of the utility model or the technical scheme in prior art, the following will be briefly introduced to the drawings needed to be used in the specific embodiment or prior art description, obviously, the drawings in the following description is some embodiments of the utility model, for those skilled in the art, under the premise of not paying creative labor, can also obtain other drawings according to these drawings.

[0029] Figure 1 The utility model provides a kind of hot filament connection structure's section view schematic diagram for the embodiment of the present disclosure;

[0030] Figure 2 The utility model provides a kind of hot filament connection structure connecting piece's schematic diagram for the embodiment of the present disclosure;

[0031] Figure 3 The utility model provides a kind of chamber section view schematic diagram of coating equipment for the embodiment of the present disclosure;

[0032] Figure 4 The utility model provides a kind of hot filament connection structure's arrangement schematic diagram for the embodiment of the present disclosure;

[0033] Figure 5 The utility model provides a kind of hot filament connection structure's overall three-dimensional schematic diagram for the embodiment of the present disclosure.

[0034] In the drawing:

[0035] 1, hot filament module;110, first connecting piece;120, second connecting piece;121, insulating block;122, hot filament conductive block;123, hot filament fixing hole;124, conductive feed inlet;130, short hot filament;2, spray plate;210, spray hole;220, through hole;3, uniform gas space;310, heating plate;320, uniform gas hole;4, carrier plate;5, silicon wafer;6, air inlet hole;7, external power supply. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme of the utility model will be described clearly and completely below in combination with the drawings. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0037] The terminology used herein is for the purpose of describing particular example configurations only and is not intended to be limiting. As used herein, the singular articles "a," "an," and "the" can be intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," "including," and "having" are inclusive and therefore specify the presence of stated features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or groups thereof.

[0038] As used herein, the phrases "in an embodiment," "according to an embodiment," "in some embodiments," and the like generally mean the particular feature, structure, or characteristic following the phrase is included in at least one embodiment of the present disclosure. Thus, appearances of such phrases in various places throughout this specification are not necessarily all referring to the same embodiment. As used herein, the term "or" as used herein, means any one member of a particular list and also means any two or more members of the list.

[0039] It is found through research that the prior art has the following disadvantages: as the demand for equipment productivity is increasingly high, the existing horizontal hot-wire chemical vapor deposition (HWCVD) equipment chamber area is increasingly large, the original long hot wire is prone to sagging and breaking after heating, and a large number of fixing holes need to be reserved on the chamber upper cover, thereby affecting the strength of the chamber upper cover and making it difficult to ensure the hot wire temperature field uniformity and film deposition uniformity of the large chamber.

[0040] Therefore, in order to solve the technical problems, it is urgent to provide a film deposition equipment and a hot wire connecting structure thereof.

[0041] The above-mentioned defects are the results obtained by the utility model person after practice and careful study, and therefore, the discovery process of the above-mentioned problems and the solutions proposed by the present disclosure for the above-mentioned problems should be the contributions made by the utility model person to the present disclosure in the process of the present disclosure.

[0042] It should be noted that like reference numerals and letters refer to like items throughout the several views, and once an item is defined in one view, it should not be further defined and explained in subsequent views. Additionally, in the drawings, the thickness of components can be exaggerated or reduced for the sake of effective description of the technical content.

[0043] Some embodiments of the present application will be described in detail below with reference to the drawings. In the case of no conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0044] Please refer to Figure 1 and Figure 2 The hot wire connecting structure provided by the embodiments of the present disclosure comprises a hot wire module 1, the hot wire module 1 comprises a first connecting piece 110, a second connecting piece 120 and a short hot wire 130, the first connecting piece 110 and the second connecting piece 120 comprise an insulating block 121 and a hot wire conductive block 122, the insulating block 121 is hollow inside and is sleeved on the hot wire conductive block 122, and a plurality of hot wire fixing holes 123 are arranged in the hot wire conductive block 122, wherein one end of the short hot wire 130 is fixed in the hot wire fixing hole 123 of the first connecting piece 110, and the other end is fixed in the hot wire fixing hole 123 of the second connecting piece 120, the first connecting piece 110 and the second connecting piece 120 are connected in series through the short hot wire 130, so that the hot wire module 1 is in a U shape. The hot wire module 1 is connected in series through the short hot wire 130, which can effectively prevent the hot wire from drooping, thereby ensuring the stability of the hot wire current in the large-area chamber, so that the hot wire temperature field is more uniform, and the coating quality is improved.

[0045] Please refer to Figure 3 and Figure 5 In some embodiments, the hot wire modules 1 are connected in series through the short hot wires 130, and the connecting pieces between adjacent hot wire modules 1 and the short hot wires 130 connected thereto are in a U shape. The upper part of the insulating block 121 in the first connecting piece and the last connecting piece of the hot wire module 1 connected in series is provided with a conductive feeding port 124. The insulating block 121 is arranged on the bottom surface of the spray plate 2, the spray plate 2 is provided with a through hole 220 corresponding to the conductive feeding port 124, and the external power supply 7 is connected with the conductive feeding port 124 through the through hole 220, so that the short hot wire 130 in the series connection circuit is electrified to generate heat. Through the above arrangement, more fixing holes do not need to be reserved on the chamber cover, thereby preventing the structure strength of the chamber cover from being reduced to affect the coating uniformity. Preferably, the outer wall of the hot wire conductive block 122 which is not wrapped by the insulating block 121 is coated with an insulating coating, and the insulating block 121 and the insulating coating can prevent the hot wire conductive block 122 from arcing and discharging to the chamber, thereby further improving the stability of the coating chamber.

[0046] Please refer to Figure 3 and Figure 4Some embodiments also provide a coating equipment, comprising: a spray plate 2; a uniform gas space 3 arranged above the spray plate 2, the uniform gas space 3 being communicated with a gas inlet hole 6, and a heating plate 310 being arranged at the upper part of the uniform gas space 3 and a uniform gas hole 320 being arranged at the bottom of the uniform gas space 3; a connecting piece, the connecting piece comprising an insulating block 121 and a hot wire conductive block 122, the insulating block 121 being hollow inside and sleeved on the hot wire conductive block 122, and a plurality of hot wire fixing holes 123 being arranged in the hot wire conductive block 122; a short hot wire 130, two ends of the short hot wire 130 being fixed in the hot wire fixing holes 123 in two adjacent connecting pieces respectively; wherein the insulating block 121 is arranged on the bottom surface of the spray plate 2, and a plurality of short hot wires 130 are connected in series with a plurality of connecting pieces through the hot wire fixing holes 123, so that the plurality of connecting pieces and the plurality of short hot wires 130 are arranged in a continuous S shape on the bottom surface of the spray plate 2. A plurality of spray holes 210 are arranged on the spray plate 2, and the spray holes 210 are located directly above the short hot wires 130. A carrier plate 4 is arranged below the hot wires, and a silicon wafer 5 is loaded on the carrier plate 4, and the silicon wafer 5 corresponds to the short hot wire 130. When the coating equipment is used for coating, an external power supply is connected to the hot wire conductive feeding port 124 through the through hole 220, and heat is generated after the hot wire is electrified. Process gas enters the uniform gas space 3 through the gas inlet hole 6, and the heating plate 310 of the uniform gas space 3 is suitable for preheating the process gas to ensure the activity of the chemical reaction. Further, the preheated process gas is in uniform contact with the heated short hot wire 130 through the uniform gas hole 320 and the spray hole 210, and the short hot wire 130 decomposes the process gas at high temperature, so that the process gas is deposited on the silicon wafer 5, and the coating is completed.

[0047] In summary, the embodiment provides a coating equipment and a hot wire connecting structure thereof, the hot wire connecting structure adopts a connecting mode of short hot wires 130 in series, prevents the hot wires from drooping, thereby ensuring the stability of the hot wire current in a large-area chamber and improving the coating quality. The through hole 220 connected with the external power supply is arranged on the spray plate 2 at the head and tail of the short hot wires 130 in series, so that more fixing holes are not reserved on the chamber upper cover, and the structural strength of the chamber upper cover is prevented from being reduced to affect the coating uniformity. The coating equipment further comprises a uniform gas space 3, which is suitable for preheating the process gas entering the uniform gas space 3 to ensure the activity of the chemical reaction, thereby further improving the coating uniformity.

[0048] In the description of the embodiment of the utility model, unless there is definite stipulation and limitation, the terms "mount", "connect", "joint" should be understood in broad sense, for example, can be fixed connection, also can be detachable connection, or integrally connected, can be mechanical connection, also can be electrical connection, can be directly connected, also can be indirectly connected through intermediate medium, can be the intercommunication of two elements inside. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to specific circumstances.

[0049] In the description of the utility model, it is necessary to explain, the term "center", "upper", "lower", "left", "right", "vertical", "horizontal", "internal", "external" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and not indicating or implying that the indicated device or element must have a particular orientation, constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the utility model.

[0050] Spatially relative terms, such as "inner", "outer", "below", "below", "lower", "above", "upper" and the like, can be used herein to facilitate description of the relationship of one element or feature to another element or feature as illustrated in the drawings. In addition to the orientation depicted in the drawings, the spatially relative terms can be intended to cover different orientations of the device in use or operation. For example, if the device in the drawing is turned over, the element described as "below" or "under" the other element or feature will be oriented "above" the other element or feature. Therefore, the example term "below" can cover the upward and downward orientations. The device can be oriented in other ways (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0051] With the above ideal embodiments according to the utility model as the inspiration, through the above description, the relevant staff can make various changes and modifications without deviating from the technical idea of the utility model. The technical scope of the utility model is not limited to the content in the specification, and the technical scope must be determined according to the scope of claims.

Claims

1. A hot wire connection structure, characterized by, The hot wire module (1) comprises a first connecting piece (110), a second connecting piece (120) and a short hot wire (130). The first connecting piece (110) and the second connecting piece (120) comprise an insulating block (121) and a hot wire conductive block (122), the insulating block (121) is hollow inside and is sleeved on the hot wire conductive block (122), and a plurality of hot wire fixing holes (123) are arranged in the hot wire conductive block (122). The one end of the short hot wire (130) is fixed in the hot wire fixing hole (123) of the first connecting piece (110), the other end is fixed in the hot wire fixing hole (123) of the second connecting piece (120), and the first connecting piece (110) and the second connecting piece (120) are connected in series through the short hot wire (130), so that the hot wire module (1) is in U shape.

2. The hot wire connecting structure according to claim 1, wherein the hot wire modules (1) are connected in series through the short hot wires (130), and the connecting pieces between adjacent hot wire modules (1) and the short hot wires (130) connected thereto are in U shape.

3. The hot wire connecting structure according to claim 2, wherein the upper part of the insulating block (121) in the first connecting piece and the last connecting piece connected in series is provided with a conductive feed inlet (124).

4. The hot wire connecting structure according to claim 1, wherein the insulating block (121) is arranged on the bottom surface of the spray plate (2), the spray plate (2) is provided with a through hole (220) corresponding to the conductive feed inlet (124), and an external power supply is connected to the conductive feed inlet (124) through the through hole.

5. The hot wire connecting structure according to claim 1, wherein the outer wall of the hot wire conductive block (122) which is not wrapped by the insulating block (121) is coated with an insulating coating. The spray plate (2) comprises a first connecting piece (110), a second connecting piece (120) and a short hot wire (130). The first connecting piece (110) and the second connecting piece (120) comprise an insulating block (121) and a hot wire conductive block (122), the insulating block (121) is hollow inside and is sleeved on the hot wire conductive block (122), and a plurality of hot wire fixing holes (123) are arranged in the hot wire conductive block (122). The two ends of the short hot wire (130) are respectively fixed in the hot wire fixing holes (123) in the adjacent two connecting pieces. The insulating block (121) is arranged on the bottom surface of the spray plate (2), and a plurality of short hot wires (130) and a plurality of connecting pieces are connected in series through the hot wire fixing holes (123), so that the plurality of connecting pieces and the plurality of short hot wires (130) are arranged in a continuous S shape on the bottom surface of the spray plate (2).

7. The coating equipment according to claim 6, wherein the upper part of the insulating block (121) in the first connecting piece and the last connecting piece connected in series is provided with a conductive feed inlet (124). ​ 6. A coating apparatus, characterized by, ​ ​ ​ ​ ​ ​ ​ ​ The spray plate (2) is provided with a through hole (220) corresponding to the conductive feed inlet (124), and an external power supply (7) is connected with the conductive feed inlet (124) through the through hole (220).

8. The coating equipment of claim 7, wherein, The spray plate (2) is provided with a plurality of spray holes (210), and the spray holes (210) are located directly above the short hot wire (130).

9. The coating equipment of claim 8, wherein, A carrier plate (4) is arranged below the short hot wire (130), the carrier plate (4) is loaded with a silicon wafer (5), and the silicon wafer (5) corresponds to the short hot wire (130).

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