PECVD equipment

Abstract

The utility model discloses PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment, and belongs to the field of photovoltaic technology. The PECVD equipment comprises a base, a first electrode, a second electrode and a third electrode, wherein the base forms an outer cavity; the multiple cooling devices are vertically stacked and installed in the outer cavity, each cooling device comprises a supporting piece and a cooling tower installed on the supporting piece, and every two adjacent cooling towers are connected in a matched mode through the corresponding two sets of supporting pieces in the vertical direction; and the guide piece is installed in the outer cavity and forms a guide groove, the extending direction of the guide groove is parallel to the stacking direction of the multiple cooling devices, and the supporting piece is in sliding fit with the guide groove. Through the arrangement of the guide piece, the butt joint deviation caused by space limitation is obviously reduced, the hoisting precision and stability are improved, the free movement of the cooling device in the hoisting process is limited, and the shaking of the inner cavity in the hoisting process is reduced, so that the collision damage of internal parts of the inner cavity in the hoisting process is reduced.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of photovoltaic technology, and particularly relates to a PECVD device. BACKGROUND

[0002] In the preparation process of a photovoltaic cell, a PECVD device is one of the indispensable key devices for depositing a thin film on a substrate. A conventional PECVD device usually adopts an inner-outer cavity system structure, which comprises, from inside to outside, an inner cavity, a transmission device, a cooling device, and an outer cavity. The cooling device is a key component for maintaining the temperature stability in the process cavity, and the installation and docking precision of the cooling device directly affect the operation efficiency and product quality of the PECVD device.

[0003] However, in actual application, the cooling device and the inner cavity need to be hoisted out during maintenance and repair of the process cavity. Due to the space limitation of the outer cavity, the current cooling device has certain design defects, and cannot stably dock the upper and lower two layers of cooling devices normally, so that the internal components of the inner cavity may be damaged when hoisting the inner cavity. CONTENT OF THE UTILITY MODEL

[0004] The application aims to solve at least one of the technical problems in the prior art. To this end, the application provides a PECVD device, which improves the hoisting precision and stability, reduces the shaking of the inner cavity during hoisting, and reduces the collision damage of the internal components of the inner cavity during hoisting.

[0005] In a first aspect, the application provides a PECVD device, comprising:

[0006] a base, which forms an outer cavity;

[0007] a plurality of cooling devices, which are installed in the outer cavity in a vertical stack, and each cooling device comprises a support and a cooling tower installed on the support, and two adjacent cooling towers are connected through two groups of corresponding supports in the vertical direction;

[0008] a guide piece, which is installed in the outer cavity and forms a guide groove, the extension direction of the guide groove is parallel to the stacking direction of the plurality of cooling devices, and the support and the guide groove are in sliding fit.

[0009] According to the PECVD device of the application, the cooling device can be guided to the correct position at the initial stage of hoisting through the arrangement of the guide piece, the docking deviation caused by space limitation is significantly reduced, the hoisting precision and stability are improved, the free movement of the cooling device during hoisting is limited, the shaking of the inner cavity during hoisting is reduced, the collision damage of the internal components of the inner cavity during hoisting is reduced, the dependence on the experience of the operator during hoisting is reduced, the operation process is simplified, and the work efficiency is improved.

[0010] According to one of the embodiments of the present application, a plurality of the support members are arranged at each corner of the cooling tower, and a plurality of the guide members are arranged at at least some of the corners of the outer cavity. At least some of the support members are in one-to-one correspondence with the guide members and are connected to the guide members in a sliding manner.

[0011] According to one of the embodiments of the present application, the cross section of the guide groove matches the outer contour of the maximum cross section of the support member.

[0012] According to one of the embodiments of the present application, the outer contour of the maximum cross section of the support member is circular, and the guide groove is circular arc-shaped.

[0013] According to one of the embodiments of the present application, the arc α of the guide groove satisfies 90°≤α≤180°.

[0014] According to one of the embodiments of the present application, the guide member comprises a mounting section, a transition section and a guide section connected in sequence. The mounting section is connected to the base and is arranged in a bent manner relative to the transition section. The guide section forms the guide groove.

[0015] According to one of the embodiments of the present application, the mounting section is arranged in a folded manner relative to the transition section and away from the guide section.

[0016] According to one of the embodiments of the present application, the mounting section is provided with a first threaded structure, and the base is provided with a second threaded structure matched with the first threaded structure.

[0017] According to one of the embodiments of the present application, the support member comprises a first connecting section, a main body section and a second connecting section connected in sequence from top to bottom. The cooling tower is supported by the second connecting section. The second connecting section forms a clamping groove. The first connecting section of the support member is adapted to be inserted into the clamping groove of the second connecting section of another support member located above, so that two adjacent cooling towers are connected in a butt joint manner.

[0018] According to one of the embodiments of the present application, the sizes of the first connecting section and the second connecting section are greater than the size of the main body section, so as to form a limiting groove. The corner of the cooling tower is installed in the limiting groove.

[0019] Additional aspects and advantages of the present application will be in part apparent and in part pointed out hereinafter. BRIEF DESCRIPTION OF DRAWINGS

[0020] The above and / or additional aspects and advantages of the present application will become apparent and be readily appreciated from the following description, including the appended drawings. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a structural schematic view of a PECVD device provided by an embodiment of the present application;

[0022] Figure 2 is a top view of a PECVD device provided by an embodiment of the present application;

[0023] Figure 3 is a sectional view of A-A in Figure 2

[0024] Figure 4 is a structural schematic view of a cooling device and a guide provided by an embodiment of the present application;

[0025] Figure 5 is a structural schematic view of a cooling device provided by an embodiment of the present application;

[0026] Figure 6 is a structural schematic view of a guide provided by an embodiment of the present application;

[0027] Figure 7 is a structural schematic view of a support provided by an embodiment of the present application.

[0028] Reference signs:

[0029] PECVD device 1;

[0030] Base 10, outer cavity 11;

[0031] Cooling device 20, cooling tower 21, support 22, first connecting section 221, main body section 222, second connecting section 223, clamping groove 2231, limiting groove 224;

[0032] Guide 30, assembly section 31, first threaded structure 311, transition section 32, guide section 33, guide groove 331. DETAILED DESCRIPTION

[0033] The embodiments of the present application are described in detail below with reference to the accompanying drawings. The embodiments described below are exemplary only, and are not intended to be limiting of the present application. Throughout the specification, same or similar components are denoted by the same reference numerals, and repeated explanations are omitted.

[0034] The present application discloses a PECVD device 1 (Plasma Enhanced Chemical Vapor Deposition).

[0035] The PECVD device 1 according to an embodiment of the present application is described below with reference to Figures 1-7 The PECVD device 1 according to an embodiment of the present application is described below with reference to​

[0036] In some embodiments, as shown in Figure 1 and Figure 2 PECVD apparatus 1 comprises a base 10, a guide 30 and a plurality of cooling devices 20.

[0037] As shown in Figures 1-4 Base 10 forms an outer cavity 11; the plurality of cooling devices 20 are installed in the outer cavity 11 in vertical stacking, and each cooling device 20 comprises a support 22 and a cooling tower 21 installed on the support 22, and two adjacent cooling towers 21 are connected by corresponding two sets of supports 22 in vertical direction; guide 30 is installed in the outer cavity 11 and forms a guide groove 331, the extension direction of the guide groove 331 is parallel to the stacking direction of the plurality of cooling devices 20, and the support 22 and the guide groove 331 are in sliding fit.

[0038] As shown in Figure 1 Base 10 is the supporting foundation of the entire PECVD apparatus 1, and forms an outer cavity 11 open on one side for accommodating and protecting various components inside the PECVD apparatus 1. The internal components can be hoisted into the outer cavity 11 through the open side of the base 10, and after the internal components are hoisted, the open side of the base 10 can be closed to define a closed outer cavity 11.

[0039] Cooling device 20 is a key component in PECVD apparatus 1 for controlling the temperature of the process chamber during the preparation of photovoltaic cells. Each cooling device 20 comprises a support 22 and a cooling tower 21 installed on the support 22. Through the circulation of cooling fluid in the plurality of cooling towers 21, the heat in the process chamber is taken away, and the process chamber is maintained within a suitable temperature range to maintain the preparation quality of the photovoltaic cells.

[0040] Wherein, a plurality of means two or more than two, for example, in some embodiments, PECVD apparatus 1 comprises six cooling devices 20.

[0041] Support 22 can be designed in various forms, such as support frame, column type foot, support platform or triangular type foot, etc., which is not limited here.

[0042] Guide 30 is used to provide accurate guidance for the stacking installation of cooling device 20. Specifically, cooling device 20 is configured to be in sliding fit with guide groove 331 when hoisted.

[0043] In actual implementation, as shown in Figures 1-4As shown, in the hoisting process of the plurality of cooling devices 20, taking the hoisting butt joint of two adjacent cooling devices 20 as an example, the hoisting tool moves to the material taking area, first hoists the cooling device 20 located at the lower layer, then the hoisting tool loaded with the cooling device 20 located at the lower layer moves to the material unloading position, slowly adjusts the cooling device 20 located at the lower layer into the outer cavity 11 along the guide groove 331, and until the cooling device 20 located at the lower layer is placed stably and accurately at the predetermined position; the hoisting tool returns to the material taking area, hoists the cooling device 20 located at the upper layer, then the hoisting tool loaded with the cooling device 20 located at the upper layer moves to the material unloading position, slowly adjusts the cooling device 20 located at the upper layer into the outer cavity 11 along the guide groove 331, and until the cooling device 20 located at the upper layer and the cooling device 20 located at the lower layer are stably butt jointed, and the hoisting is completed.

[0044] It should be noted that the guide piece 30 also does not need to be disassembled after the hoisting is completed, and the existence of the guide piece 30 does not cause negative effects on the normal functions of other components in the working process of the PECVD equipment 1, on the premise that the guide piece 30 can reduce the shaking and displacement of the cooling device 20 in the normal working process.

[0045] The PECVD equipment 1 provided by the embodiment of the present application can guide the cooling device 20 to the correct position in the initial hoisting process through the setting of the guide piece 30, significantly reduces the butt joint deviation caused by the space limitation, improves the hoisting precision and stability, limits the free movement of the cooling device 20 in the hoisting process, reduces the shaking of the inner cavity during hoisting, thereby reducing the collision damage of the internal components of the inner cavity during hoisting, reduces the dependence on the experience of the operator during hoisting, simplifies the operation process, and improves the working efficiency.

[0046] In some embodiments, as shown in Figure 4 and Figure 5 , the support piece 22 and the guide piece 30 are both provided in plurality, the plurality of support pieces 22 are separately arranged at the corners of the cooling tower 21, the plurality of guide pieces 30 are separately arranged at at least part of the corners of the outer cavity 11, and at least part of the plurality of support pieces 22 are in one-to-one sliding connection with the plurality of guide pieces 30.

[0047] Among them, plurality means two or more than two.

[0048] For example, in some embodiments, as shown in Figure 4 , four support pieces 22 are arranged, two guide pieces 30 are arranged, based on the square shape of the cooling tower 21, the four support pieces 22 are separately arranged at the four corners of the cooling tower 21, the two guide pieces 30 are separately arranged at the opposite two corners of the outer cavity 11, and the two support pieces 22 arranged at the opposite corners of the four support pieces 22 are in one-to-one sliding connection with the two guide pieces 30.

[0049] For example, in some embodiments, as shown in FIG. 1, four support members 22 are provided, and two guide members 30 are provided, based on the cooling tower 21 being cuboid-shaped, the four support members 22 are separately arranged at the four corners of the cooling tower 21, and the two guide members 30 are separately arranged at two adjacent corners of the outer cavity 11, of the four support members 22, two adjacent support members 22 are in one-to-one correspondence with the two guide members 30 and are in sliding connection. Figure 4 For example, in some embodiments, as shown in FIG. 1, four support members 22 are provided, and two guide members 30 are provided, based on the cooling tower 21 being cuboid-shaped, the four support members 22 are separately arranged at the four corners of the cooling tower 21, and the two guide members 30 are separately arranged at two adjacent corners of the outer cavity 11, of the four support members 22, two adjacent support members 22 are in one-to-one correspondence with the two guide members 30 and are in sliding connection.

[0050] Figure 4 For example, in some embodiments, as shown in FIG. 1, four support members 22 are provided, and two guide members 30 are provided, based on the cooling tower 21 being cuboid-shaped, the four support members 22 are separately arranged at the four corners of the cooling tower 21, and the two guide members 30 are separately arranged at two adjacent corners of the outer cavity 11, of the four support members 22, two adjacent support members 22 are in one-to-one correspondence with the two guide members 30 and are in sliding connection.

[0051] The PECVD equipment 1 provided by the embodiments of the present application further improves the accuracy in the hoisting process by the design that at least part of the plurality of support members 22 are in one-to-one correspondence with the plurality of guide members 30 and are in sliding connection, reduces the damage of internal components caused by improper hoisting as much as possible, enhances the stability of the cooling device 20, can reduce the damage caused by excessive stress on a single point or free swinging, in addition, meets the needs of cooling towers 21 of different sizes and weights, and by adjusting the number, distribution and size of the support members 22 and the guide members 30, different specifications of the cooling device 20 can be adapted, thereby increasing the versatility and flexibility of the PECVD equipment 1.

[0052] In some embodiments, as shown in FIG. 2, the cross section of the guide groove 331 matches the outer profile of the maximum cross section of the support member 22. Figures 1-4

[0053] In other words, the cross-sectional shape of the guide groove 331 needs to be customized according to the outer profile of the maximum cross section of the support member 22.

[0054] For example, in some embodiments, the outer profile of the maximum cross section of the support member 22 is circular, and the cross section of the guide groove 331 is circular arc-shaped.

[0055] For example, in some embodiments, the outer profile of the maximum cross section of the support member 22 is rectangular, and the cross section of the guide groove 331 can be L-shaped or C-shaped, etc.

[0056] The depth and width of the guide groove 331 also need to be designed according to the size of the support member 22, and the guide groove 331 and the support member 22 need to be manufactured according to precise tolerances, so that the support member 22 can smoothly slide in the guide groove 331 without falling off or being stuck. ​​

[0057] In the lifting process, the guide groove 331 and the support 22 need to be correctly aligned, and the support 22 can freely slide in the guide groove 331.

[0058] The PECVD equipment 1 provided by the embodiment of the present application has the design that the cross section of the guide groove 331 matches the outer profile of the maximum cross section of the support 22, which on the one hand makes the sliding of the support 22 in the guide groove 331 smoother, reduces friction and resistance, prolongs the service life of the guide 30 and the support 22, simplifies the maintenance work of the equipment, and on the other hand increases the position stability of the support 22 in the guide groove 331, reduces the docking deviation caused by shaking, and further improves the lifting precision.

[0059] In some embodiments, as shown in Figures 1-4 , the outer profile of the maximum cross section of the support 22 is circular, and the guide groove 331 is circular arc-shaped.

[0060] As can be understood, as shown in Figures 1-4 , since the outer profile of the maximum cross section of the support 22 is circular and the guide groove 331 is circular arc-shaped, on the one hand, the precision in the lifting process is improved, the damage risk caused by improper alignment is reduced, and at the same time, the adjustment and alignment time is reduced, the operator can complete the lifting task faster, and the lifting efficiency is improved; on the other hand, the circular maximum cross section of the support 22 means that the part of the support 22 used for sliding fit with the guide groove 331 has no sharp corners, and the smooth outer profile helps to reduce the scratching of the guide 30 by the support 22, thereby prolonging the service life of the guide 30 and reducing the maintenance cost.

[0061] In some embodiments, the curvature a of the guide groove 331 satisfies: 90°≤a≤180°.

[0062] Specifically, the curvature a of the guide groove 331 can be 90°, 105°, 120°, 146.8°, 180°, or other values between 90° and 180°, which is not limited here.

[0063] The PECVD equipment 1 provided by the embodiment of the present application limits the range of the curvature a of the guide groove 331, so that the support 22 can maintain a relatively stable direction and speed during sliding, reduce shaking and deviation, and as much as possible reduce the alignment difficulty during lifting on the premise that there is enough contact area between the guide groove 331 and the support 22.

[0064] In some embodiments, as shown in Figure 1 , Figure 2 , and Figure 6As shown, the guide 30 includes a mounting section 31, a transition section 32 and a guide section 33 connected in sequence, the mounting section 31 is connected with the base 10, and the mounting section 31 is arranged in a bent manner relative to the transition section 32, and the guide section 33 forms a guide groove 331.

[0065] The mounting section 31 is the part of the guide 30 connected with the base 10, and the mounting section 31 can be fixedly connected with the base 10 by welding, bolt connection, buckle connection or other mechanical connection methods, which is not limited here.

[0066] The transition section 32 is located between the mounting section 31 and the guide section 33, and the transition section 32 is used to smoothly connect the mounting section 31 and the guide section 33, so as to reduce the stress concentration caused by structural mutation.

[0067] The guide section 33 is the part forming the guide groove 331, and the guide section 33 has a specific shape and size to accommodate and guide the support 22 to slide along a predetermined trajectory.

[0068] The guide section 33 can be formed into the required shape and size by precision machining processes such as numerical control machine tool processing or laser cutting, and the surface of the guide section 33 can be polished, sandblasted, coated or treated in other ways to improve wear resistance and reduce friction coefficient.

[0069] The mounting section 31 and the transition section 32 can be connected in a bent manner by bending, stamping or forging, etc.

[0070] Exemplarily, as shown in Figure 6 , the mounting section 31 and the transition section 32 can be connected in a 90° bent manner, and the guide section 33 can be connected to the middle part of the transition section 32.

[0071] The PECVD device 1 provided by the embodiment of the present application realizes the fixed connection between the guide 30 and the base 10 and the sliding connection between the guide 30 and the support 22 by dividing the guide 30 into the mounting section 31, the transition section 32 and the guide section 33, and using this structure helps to disperse stress, which can improve the structural stability of the entire guide 30 and reduce damage caused by load during hoisting.

[0072] In some embodiments, as shown in Figure 6 , the mounting section 31 is arranged in a folded manner relative to the transition section 32 towards the direction away from the guide section 33.

[0073] It can be understood that, as Figure 1 , Figure 2 and Figure 6As shown, based on the folding arrangement of the assembly section 31 relative to the transition section 32 in the direction away from the guide section 33, in other words, the assembly section 31 and the guide section 33 are located on different sides of the transition section 32, respectively, using this structure, on the one hand, the problem of too close distance between the assembly section 31 and the guide section 33 caused by the same side arrangement is avoided, the interference between the assembly section 31 and the guide section 33 is reduced, thereby reducing the difficulty of the guide 30 on the base 10. The assembly and disassembly, on the other hand, helps to disperse and reduce the stress and load received by the guide 30 during work, so that the guide 30 is more stable when subjected to external force and is not easy to deform or loosen, thereby prolonging the service life of the guide 30.

[0074] In some embodiments, as shown in Figure 6 The assembly section 31 is provided with a first threaded structure 311, and the base 10 is provided with a second threaded structure for cooperating with the first threaded structure 311.

[0075] In this embodiment, as shown in Figure 6 The first threaded structure 311 and the second threaded structure can be threaded holes, when the assembly section 31 is connected with the base 10, the threaded holes on the assembly section 31 and the threaded holes of the base 10 are aligned, and a threaded connecting piece is driven into the threaded holes on the assembly section 31 and the threaded holes of the base 10 by using a tool, the threaded connecting piece is screwed with the threaded holes on the assembly section 31 and the threaded holes of the base 10, and a tight threaded connection is formed.

[0076] It should be noted that on the basis of threaded connection, a locking device such as a locking nut or a locking washer can be additionally added to improve the firmness of the assembly of the guide 30.

[0077] Among them, the first threaded structure 311 and the second threaded structure can be provided with multiple, multiple means two or more than two.

[0078] For example, in some embodiments, as shown in Figure 6 The assembly section 31 is provided with six first threaded structures 311, and correspondingly, the base 10 is provided with six second threaded structures, the six first threaded structures 311 are uniformly distributed on the assembly section 31, specifically, the six first threaded structures 311 can be arrayed along the length direction and the width direction of the assembly section 31, so as to reduce the stress concentration of the assembly section 31.

[0079] The PECVD equipment 1 provided by the embodiment of the application improves the stability and reliability of the guide 30 during use through the cooperation design of the first threaded structure 311 and the second threaded structure, reduces the risk of accidental falling or damage caused by unstable connection, and at the same time, the threaded connection method is convenient for installation and disassembly, so that the maintenance and component replacement of the PECVD equipment 1 are more convenient and fast, thereby improving the maintenance efficiency.

[0080] In some embodiments, as shown in Figure 4 , Figure 5 and Figure 7 , the support 22 comprises a first connecting section 221, a main section 222 and a second connecting section 223 connected in sequence from top to bottom, the cooling tower 21 is supported on the second connecting section 223, the second connecting section 223 forms a clamping groove 2231, and the first connecting section 221 of the support 22 is adapted to be inserted into the clamping groove 2231 of the second connecting section 223 of another support 22 located above, so that two adjacent cooling towers 21 are connected in abutment.

[0081] The first connecting section 221 is located at the top of the support 22, and the shape and size of the first connecting section 221 are designed to be capable of being inserted into the clamping groove 2231 of the second connecting section 223 of the adjacent support 22 located above, which allows the supports 22 to be stacked in the vertical direction and connected through the cooperation between the first connecting section 221 and the clamping groove 2231 to form a stable structure.

[0082] The main section 222 is the main part of the support 22, and the main section 222 is responsible for providing sufficient strength and stability to support the cooling device 20 above. Specifically, the shape and size of the main section 222 can be designed according to the weight and size of the cooling tower 21 to maintain sufficient supporting force.

[0083] The second connecting section 223 is located at the bottom of the support 22, and forms a clamping groove 2231 to accommodate the first connecting section 221 of the adjacent support 22 located below, and the shape and size of the clamping groove 2231 are matched with the first connecting section 221 to enable the two supports 22 to be tightly connected in abutment. At the same time, the second connecting section 223 is also responsible for supporting the cooling tower 21, in other words, the weight and load of the cooling tower 21 are directly transmitted to the second connecting section 223 of the support 22, thereby achieving stable installation of the cooling tower 21.

[0084] For example, in some embodiments, as shown in Figure 7 , the shapes of the first connecting section 221, the main section 222 and the second connecting section 223 are all cylindrical, and the size of the first connecting section 221 is smaller than that of the second connecting section 223, so that the second connecting section 223 is sufficient to accommodate the first connecting section 221, and correspondingly, the clamping groove 2231 on the second connecting section 223 is also circular.

[0085] For example, in other embodiments, the shapes of the first connecting section 221, the main section 222 and the second connecting section 223 are all prismatic, and correspondingly, the clamping groove 2231 on the second connecting section 223 is polygonal.

[0086] For example, in some embodiments, the first connecting section 221 and the second connecting section 223 are in the shape of a cylinder, and the main body section 222 is in the shape of a prism, and correspondingly, the clamping slot 2231 on the second connecting section 223 is also in the shape of a circle.

[0087] The PECVD device 1 provided by the embodiments of the present application reduces the structural deformation caused by vibration or wind force during hoisting and operation through the segmented design of the support 22 and the clamping slot 2231 connection mode, improves the stability of the entire PECVD device 1, and at the same time, the connection mode between the support 22 and the cooling tower 21 is simple and reliable, simplifies the hoisting and stacking process of the plurality of cooling devices 20, and makes the installation faster and more convenient.

[0088] In some embodiments, as shown in Figure 3 , Figure 5 and Figure 7 , the size of the first connecting section 221 and the second connecting section 223 is greater than the size of the main body section 222, so as to form a limiting slot 224, and the corners of the cooling tower 21 are installed in the limiting slot 224.

[0089] As can be understood, as shown in Figure 3 , Figure 5 and Figure 7 , since the size of the first connecting section 221 and the second connecting section 223 is greater than the size of the main body section 222, the first connecting section 221 has an edge protruding relative to the outer periphery of the main body section 222, the second connecting section 223 has an edge protruding relative to the outer periphery of the main body section 222, and the top protruding edge, the bottom protruding edge and the main body section 222 constitute the limiting slot 224. When installing the cooling tower 21, only the corners of the cooling tower 21 are aligned with the position of the limiting slot 224, and then gently pushed in. Due to the design of the limiting slot 224, the cooling tower 21 will be limited between the plurality of supports 22, reducing the probability of the cooling tower 21 falling off, thereby maintaining the stability and reliability of the PECVD device 1 during long-time operation.

[0090] The terms "first", "second", and the like in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than that illustrated or described herein, and the objects distinguished by "first", "second", etc. are generally a class, not limited to the number of objects, for example, the first object can be one or more. In addition, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / ", generally indicates that the front and rear associated objects are in an "or" relationship.

[0091] In the description of the application, it should be understood that the terms "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown by the drawings, and are only used to facilitate the description of the application and simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the application.

[0092] In the description of the application, "first feature", "second feature" can include one or more of the features.

[0093] In the description of the application, "a plurality of" means two or more.

[0094] In the description of the application, the first feature "above" or "below" the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them.

[0095] In the description of the application, the first feature "above", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the first feature is higher than the second feature in horizontal height.

[0096] Other configurations of … according to embodiments of the application, such as … and …, and operations are known to those skilled in the art, and are not described in detail here.

[0097] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0098] Although embodiments of the application have been shown and described, those skilled in the art can understand that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and purposes of the application, and the scope of the application is defined by the claims and their equivalents.

Claims

1. A PECVD apparatus, characterized by, The application relates to a cooling device, comprising: a base forming an outer cavity; a plurality of cooling devices vertically stacked in the outer cavity, each of the cooling devices comprising a support and a cooling tower mounted on the support, and two adjacent cooling towers being connected by two sets of corresponding supports in the vertical direction; a guide member mounted on the outer cavity and forming a guide groove, the extension direction of the guide groove being parallel to the stacking direction of the plurality of cooling devices, and the support and the guide groove being in sliding fit.

2. The PECVD apparatus of claim 1, wherein, A plurality of supports are arranged at each corner of the cooling tower, and a plurality of guide members are arranged at at least some corners of the outer cavity, and at least some of the supports are in sliding fit with the guide members one by one.

3. The PECVD apparatus of claim 1, wherein, The cross section of the guide groove matches the outer contour of the maximum cross section of the support.

4. The PECVD apparatus of claim 3, wherein, The outer contour of the maximum cross section of the support is circular, and the guide groove is arc-shaped.

5. The PECVD apparatus of claim 4, wherein, The arc of the guide groove satisfies 90 DEG <= alpha <= 180 DEG.

6. The PECVD apparatus of claim 1, wherein, The guide member comprises a mounting section, a transition section and a guide section connected in sequence, the mounting section is connected with the base and is arranged in a bent manner relative to the transition section, and the guide section forms the guide groove.

7. The PECVD apparatus of claim 6, wherein, The mounting section is arranged in a folded manner relative to the transition section and away from the guide section.

8. The PECVD apparatus of claim 6, wherein, The mounting section is provided with a first threaded structure, and the base is provided with a second threaded structure matched with the first threaded structure.

9. The PECVD apparatus according to any one of claims 1-8, wherein, The support comprises a first connecting section, a main body section and a second connecting section connected in sequence from top to bottom, the cooling tower is supported by the second connecting section, the second connecting section forms a clamping groove, and the first connecting section of the support is adapted to be inserted into the clamping groove of the second connecting section of another support arranged above, so that two adjacent cooling towers are connected in abutment.

10. The PECVD apparatus of claim 9, wherein, The sizes of the first connecting section and the second connecting section are greater than the size of the main body section, so as to form a limiting groove, and the corner of the cooling tower is arranged in the limiting groove.

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