Efficient water cooling device and single crystal furnace

Abstract

The utility model relates to the technical field of semiconductors, in particular to an efficient water cooling device and a single crystal furnace. The single crystal furnace comprises the efficient water cooling device, the efficient water cooling device comprises a water cooling cylinder, the water cooling cylinder comprises an inner cylinder and an outer cylinder which are mutually sleeved, a water cooling cavity is formed between the inner cylinder and the outer cylinder, a crystal pulling channel is defined by the side, away from the outer cylinder, of the inner cylinder, and the caliber of the upper end of the crystal pulling channel is larger than that of the lower end of the crystal pulling channel; the side, facing the crystal pulling channel, of the inner cylinder is provided with at least one step part. The efficient water cooling device can increase the heat dissipation area so as to improve the pulling speed of a crystal bar, and can reduce dust falling into a crucible at the bottom of the single crystal furnace so as to reduce the wire breakage rate.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor, specifically, relates to a kind of high-efficiency water cooling device and single crystal furnace. BACKGROUND

[0002] The Czochralski method is a mainstream method for preparing single crystal silicon, and a single crystal furnace is a device for producing single crystal silicon by the Czochralski method. To increase the pulling speed of the crystal bar, a cooling device, such as a water-cooled screen, is usually added between the hot shield of the single crystal furnace and the crystal bar. The inner cavity of the water-cooled screen is connected to the water inlet pipe and the water outlet pipe, so that cooling water can be supplied to the inner cavity of the water-cooled screen to increase the absorption of radiant heat from the crystal bar, thereby increasing the axial temperature gradient of the crystal bar and improving the cooling effect of the crystal bar.

[0003] However, the cooling device provided by the related art has limited effect on improving the pulling speed of the crystal bar and is difficult to reduce the breakage rate of the crystal bar. SUMMARY

[0004] The utility model aims to provide a high-efficiency water cooling device and a single crystal furnace. The high-efficiency water cooling device can be used in the single crystal furnace and can increase the heat dissipation area to improve the pulling speed of the crystal bar. In addition, the high-efficiency water cooling device can also reduce the dust falling into the crucible at the bottom of the single crystal furnace to reduce the breakage rate.

[0005] The embodiments of the utility model can be implemented as follows:

[0006] In a first aspect, the utility model provides a high-efficiency water cooling device, which comprises a water-cooled cylinder. The water-cooled cylinder comprises an inner cylinder and an outer cylinder that are connected to each other. A water-cooled cavity is formed between the inner cylinder and the outer cylinder. A crystal pulling channel is formed around one side of the inner cylinder that faces away from the outer cylinder. The diameter of the upper end of the crystal pulling channel is larger than the diameter of the lower end of the crystal pulling channel. In addition, the high-efficiency water cooling device comprises a water inlet pipe and a water outlet pipe.

[0007] The side of the inner cylinder that faces the crystal pulling channel has at least one step portion.

[0008] In an optional embodiment, the inner cylinder comprises at least two first cylinders. The at least two first cylinders are connected in sequence along the axial direction of the crystal pulling channel. The adjacent two first cylinders have a step portion therebetween.

[0009] In an optional embodiment, the inner diameter of the upper first cylinder among the adjacent two first cylinders is larger than the inner diameter of the lower first cylinder.

[0010] In an optional embodiment, the inner diameter of the at least one first cylinder is constant.

[0011] In an optional embodiment, the inner diameter of the at least one first cylinder gradually decreases from top to bottom.

[0012] In an optional embodiment, the inner cylinder comprises four first cylinder bodies, the outer cylinder comprises a second cylinder body and a third cylinder body, the second cylinder body and the third cylinder body are connected in sequence along the axial direction of the crystal pulling channel, the inner diameter of the second cylinder body is constant, and the second cylinder body is sleeved outside two of the first cylinder bodies, the inner diameter of the third cylinder body gradually decreases from one end close to the second cylinder body to one end away from the second cylinder body, and the third cylinder body is sleeved outside the other two first cylinder bodies.

[0013] In an optional embodiment, the most bottom first cylinder is provided with a groove on the side facing the crystal pulling channel.

[0014] In an optional embodiment, the most bottom first cylinder is provided with a plurality of grooves on the side facing the crystal pulling channel, and the plurality of grooves account for 30%-80% of the total area of the side of the first cylinder facing the crystal pulling channel.

[0015] In an optional embodiment, the high-efficiency water cooling device further comprises a liquid inlet pipeline and a liquid outlet pipeline, both of which are in communication with the water cooling cavity, and the liquid inlet pipeline is used for conveying cooling liquid to the water cooling cavity, and the liquid outlet pipeline is used for outputting the cooling liquid in the water cooling cavity.

[0016] In a second aspect, the utility model provides a single crystal furnace, including high -efficient water cooling device of any preceding embodiment.

[0017] The beneficial effects of the high-efficiency water cooling device of the utility model embodiment include: the high-efficiency water cooling device provided by the utility model embodiment includes a water cooling cylinder, the water cooling cylinder includes an inner cylinder and an outer cylinder that are sleeved with each other, a water cooling cavity is formed between the inner cylinder and the outer cylinder, a crystal pulling channel is formed around the side of the inner cylinder away from the outer cylinder, and the caliber of the upper end of the crystal pulling channel is larger than the caliber of the lower end of the crystal pulling channel;Wherein, the side of the inner cylinder facing the crystal pulling channel has at least one step portion.The setting of the step portion can increase the heat dissipation area of the water cooling cylinder, and then improve the pulling rate;At the same time, the step portion can also be used to receive at least part of the dust, and then reduce the dust falling into the crucible, which is beneficial to reduce the breakage rate.

[0018] The single crystal furnace of the utility model embodiment includes all the beneficial effects of the foregoing high-efficiency water cooling device, for example: the setting of the step portion can increase the heat dissipation area of the water cooling cylinder, and then improve the pulling rate;At the same time, the step portion can also be used to receive at least part of the dust, and then reduce the dust falling into the crucible, which is beneficial to reduce the breakage rate. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as limiting the scope. For those skilled in the art, other related drawings can be obtained without creative labor on the basis of the drawings.

[0020] Figure 1 is a structural schematic view of the high-efficiency water cooling device in the embodiment of the present application under a first visual angle;

[0021] Figure 2 is a structural schematic view of the high-efficiency water cooling device in the embodiment of the present application under a second visual angle;

[0022] Figure 3 is Figure 2 is a sectional view in the direction of A-A;

[0023] Figure 4 is a sectional view of the high-efficiency water cooling device in some embodiments of the present application.

[0024] Icon: 010-high-efficiency water cooling device; 100-water cooling cylinder; 110-inner cylinder; 111-step part; 120-first cylinder; 121-cylinder body; 122-flange; 123-groove; 130-outer cylinder; 131-second cylinder; 132-third cylinder; 140-water cooling cavity; 141-crystal pulling channel; 151-liquid inlet pipeline; 152-liquid outlet pipeline. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solutions and advantages of the embodiments of the present application more clear, the following will combine the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, but not all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0027] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0028] In the description of the utility model, it needs to be explained that if the terms such as '' upper '' '' lower '' '' inner '' '' outer '' and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawing, or the orientation or positional relationship of the utility model product when it is usually placed, it is only for the convenience of describing the utility model and simplifying the description, and it is not indicated or implied that the device or element must have a specific orientation, be constructed and operated in a specific orientation, so it cannot be understood as a limitation on the utility model.

[0029] In addition, if the terms '' first '' '' second '' and the like are only used for differentiation, they cannot be understood as indicating or implying relative importance.

[0030] It needs to be explained that the features in the embodiments of the utility model can be combined with each other without conflict.

[0031] The embodiment provides a single crystal furnace, which is used for producing a single crystal silicon crystal bar through a Czochralski method.

[0032] The structure of the single crystal furnace is similar to that of the single crystal furnace provided by the related art, which comprises a furnace body, a crucible installed in the furnace body, a heating device, a high-efficiency water cooling device 010 (as shown in FIG. Figure 1 The crucible is used for containing a silicon liquid, the high-efficiency water cooling device 010 and the flow guide cylinder are installed above the crucible, and the flow guide cylinder is located at the periphery of the high-efficiency water cooling device 010; the high-efficiency water cooling device 010 is used for cooling the crystal bar, and the flow guide cylinder is used for guiding the gas in the furnace body; the heating device is arranged around and / or above the crucible and is used for heating the crucible and the liquid surface of the silicon liquid in the crucible.

[0033] In order to improve the pulling speed of the crystal bar, please refer to Figure 1 、 Figure 2 and Figure 3 The high-efficiency water cooling device 010 of the embodiment comprises a water cooling cylinder body 100, the water cooling cylinder body 100 comprises an inner cylinder 110 and an outer cylinder 130 which are sleeved with each other, a water cooling cavity 140 is formed between the inner cylinder 110 and the outer cylinder 130, a crystal pulling channel 141 is formed around one side of the inner cylinder 110 away from the outer cylinder 130, and the caliber of the upper end of the crystal pulling channel 141 is larger than that of the lower end of the crystal pulling channel 141; wherein the one side of the inner cylinder 110 towards the crystal pulling channel 141 is provided with at least one stepped portion 111. The connection mode of the inner cylinder 110 and the outer cylinder 130 is similar to that of the related art, and will not be described here.

[0034] Through the arrangement of the stepped portion 111, the heat dissipation area of the water cooling cylinder body 100 can be increased, and then the crystal pulling rate is improved, moreover, the arrangement of the stepped portion 111 is beneficial to forming a stable temperature gradient and is beneficial to crystal formation; meanwhile, the stepped portion 111 can also be used for receiving at least part of the dust, and then the dust falling into the crucible is reduced, which is beneficial to reducing the wire breaking rate.

[0035] Optionally, the inner cylinder 110 comprises at least two first cylinder bodies 120, the at least two first cylinder bodies 120 are connected in sequence along the axial direction of the crystal pulling channel 141, and the adjacent two first cylinder bodies 120 have the step portion 111 therebetween. In this way, the easy formation of the step portion 111 is ensured, and the production efficiency of the water-cooled cylinder 100 is improved.

[0036] Further, the inner diameter of the upper first cylinder body 120 among the adjacent two first cylinder bodies 120 is greater than that of the lower first cylinder body 120. In this way, the step portion 111 can reliably receive at least part of the dust while protruding towards the crystal pulling channel 141 to increase the heat dissipation area, so as to reduce the falling of the dust into the lower crucible and reduce the wire breakage rate.

[0037] Optionally, the connection mode between the adjacent two first cylinder bodies 120 includes but is not limited to integral molding and welding.

[0038] Optionally, the inner diameter of the at least one first cylinder body 120 is constant; in this way, the width of the step portion 111 is increased, and the falling of the dust into the crucible is reduced, and the wire breakage rate is reduced.

[0039] Alternatively, in other embodiments, the inner diameter of the at least one first cylinder body 120 gradually decreases from top to bottom.

[0040] For example, the inner cylinder 110 of the present embodiment comprises four first cylinder bodies 120, the four first cylinder bodies 120 are connected in sequence along the axial direction of the crystal pulling channel 141; the inner diameters of the four first cylinder bodies 120 are constant, and the inner diameters of the four first cylinder bodies 120 gradually decrease from top to bottom; please refer to Figure 3 , wherein the first cylinder body 120 comprises a cylinder body 121 and a flange 122 connected to one end of the cylinder body 121, the flange 122 is connected to the other first cylinder body 120 away from the flange 122, and the flange 122 forms the step portion 111.

[0041] Of course, in other embodiments, the inner diameter of at least one of the four first cylinder bodies 120 is non-constant, and the inner diameter of the at least one first cylinder body 120 gradually decreases from top to bottom.

[0042] It should be understood that in other embodiments, the number of first cylinder bodies 120 can also be two, three, five, etc., which is not limited here.

[0043] Further, please refer to Figure 1 and Figure 3The outer cylinder 130 comprises a second cylinder body 131 and a third cylinder body 132, which are connected in sequence along the axial direction of the crystal pulling channel 141. The inner diameter of the second cylinder body 131 is constant, and the second cylinder body 131 is arranged outside the two first cylinder bodies 120 above. The inner diameter of the third cylinder body 132 gradually decreases from one end close to the second cylinder body 131 to one end away from the second cylinder body 131, and the third cylinder body 132 is arranged outside the two first cylinder bodies 120 below. In this way, the appearance of the water-cooled cylinder 100 is more regular.

[0044] Optionally, the connection mode of the second cylinder body 131 and the third cylinder body 132 includes but is not limited to one-piece forming and welding.

[0045] Please refer to Figure 4 In some embodiments, the first cylinder body 120 at the bottom end is provided with a groove 123 on the side facing the crystal pulling channel 141. Specifically, the cylinder body 121 of the first cylinder body 120 at the bottom end is provided with a groove 123 on the side facing the crystal pulling channel 141. The setting of the groove 123 forms a diffuse reflection, and the heat radiation at the groove 123 forms a vortex, which is beneficial to improve the heat dissipation performance and increase the crystal pulling rate.

[0046] Optionally, the first cylinder body 120 at the bottom end is provided with a plurality of grooves 123 on the side facing the crystal pulling channel 141, and the plurality of grooves 123 account for 30%-80% of the total area of the side of the first cylinder body 120 facing the crystal pulling channel 141, for example, 30%, 40%, 50%, 60%, 70%, 80%, etc., which is not limited here. Optimizing the proportion of the groove 123 can ensure good heat dissipation performance to improve the crystal pulling rate.

[0047] It should be noted that the proportion of the plurality of grooves 123 to the total area of the side of the first cylinder body 120 facing the crystal pulling channel 141 is specifically the ratio of the total area of the side of the first cylinder body 120 facing the crystal pulling channel 141 to the total area of the side of the first cylinder body 120 facing the crystal pulling channel 141, for example, the total area of the side of the first cylinder body 120 facing the crystal pulling channel 141 is 100cm 2 , and the total area of the side of the first cylinder body 120 facing the crystal pulling channel 141 is 30cm 2 -80cm 2 .

[0048] Please refer to Figure 1 and Figure 3The high-efficiency water cooling device 010 of the embodiment further comprises an inlet pipe 151 and an outlet pipe 152, both of which are communicated with the water cooling cavity 140, the inlet pipe 151 is used for conveying the cooling liquid to the water cooling cavity 140, and the outlet pipe 152 is used for outputting the cooling liquid in the water cooling cavity 140. Through the arrangement of the inlet pipe 151 and the outlet pipe 152, the cooling liquid in the water cooling cavity 140 can be circulated, and the efficiency of heat dissipation and cooling is improved.

[0049] Optionally, the inlet pipe 151 is connected with at least one of the inner cylinder 110 and the outer cylinder 130, and the outlet pipe 152 is connected with at least one of the inner cylinder 110 and the outer cylinder 130; the connection mode includes but is not limited to integral molding and welding.

[0050] In summary, the high-efficiency water cooling device 010 can be used as a water cooling screen in a single crystal furnace, the high-efficiency water cooling device 010 can increase the heat dissipation area to improve the pulling speed of the crystal bar, and can also reduce the dust falling into the crucible at the bottom of the single crystal furnace to reduce the wire breaking rate.

[0051] The above is only a specific implementation manner of the utility model, but the protection scope of the utility model is not limited to this, any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model.

Claims

1. A high efficiency water cooling device, characterized by, The high-efficiency water cooling device comprises a water-cooled cylinder (100), which comprises an inner cylinder (110) and an outer cylinder (130) that are sleeved with each other, a water-cooled cavity (140) is formed between the inner cylinder (110) and the outer cylinder (130), a crystal pulling channel (141) is formed on the side of the inner cylinder (110) away from the outer cylinder (130), and the caliber of the upper end of the crystal pulling channel (141) is larger than the caliber of the lower end of the crystal pulling channel (141). The side of the inner cylinder (110) facing the crystal pulling channel (141) is provided with at least one stepped portion (111). The inner cylinder (110) comprises at least two first cylinders (120), the at least two first cylinders (120) are connected in sequence along the axial direction of the crystal pulling channel (141), and the stepped portion (111) is arranged between the adjacent two first cylinders (120).

2. The high efficiency water cooling device of claim 1, wherein, The inner diameter of the upper first cylinder (120) is larger than the inner diameter of the lower first cylinder (120).

3. The high efficiency water cooling device of claim 2, wherein, The inner diameter of at least one first cylinder (120) is constant.

4. The high efficiency water cooling device of claim 2, wherein, The inner diameter of at least one first cylinder (120) gradually decreases from top to bottom.

5. The high efficiency water cooling device of claim 2, wherein, The inner cylinder (110) comprises four first cylinders (120), the outer cylinder (130) comprises a second cylinder (131) and a third cylinder (132), the second cylinder (131) and the third cylinder (132) are connected in sequence along the axial direction of the crystal pulling channel (141), the inner diameter of the second cylinder (131) is constant, the second cylinder (131) is sleeved outside two first cylinders (120), the inner diameter of the third cylinder (132) gradually decreases from one end close to the second cylinder (131) to one end away from the second cylinder (131), and the third cylinder (132) is sleeved outside the other two first cylinders (120).

6. The high efficiency water cooling device according to any one of claims 2-5, characterized in that, The bottommost first cylinder (120) is provided with a groove (123) on the side facing the crystal pulling channel (141).

7. The efficient water cooling device of claim 2, wherein, The bottommost first cylinder (120) is provided with a plurality of grooves (123) on the side facing the crystal pulling channel (141), and the plurality of grooves (123) account for 30%-80% of the total area of the side of the first cylinder (120) facing the crystal pulling channel (141).

8. The high efficiency water cooling device of claim 7, wherein, The high-efficiency water cooling device further comprises a liquid inlet pipeline (151) and a liquid outlet pipeline (152), the liquid inlet pipeline (151) and the liquid outlet pipeline (152) are both in communication with the water-cooled cavity (140), the liquid inlet pipeline (151) is used for conveying cooling liquid to the water-cooled cavity (140), and the liquid outlet pipeline (152) is used for outputting the cooling liquid in the water-cooled cavity (140).

9. The efficient water cooling device of claim 1, wherein, The high-efficiency water cooling device comprises the high-efficiency water cooling device according to any one of claims 1-9.

10. A single crystal furnace characterized by comprising: ​

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