Exhaust pipe of single crystal furnace and single crystal furnace

Abstract

The utility model is applicable to the technical field of single crystal furnaces, and provides a single crystal furnace exhaust pipe and a single crystal furnace, the single crystal furnace exhaust pipe comprises a pipe body, a first cover plate and a second cover plate, the first cover plate and the second cover plate are arranged in the pipe body, and the first cover plate and the second cover plate are oppositely arranged at intervals in the axial direction of the pipe body; the first cover plate is provided with a plurality of first exhaust holes in the circumferential direction, the second cover plate is provided with a plurality of second exhaust holes in the circumferential direction, and the first exhaust holes and the second exhaust holes are arranged in a staggered mode in a one-to-one correspondence mode in the circumferential direction. The first exhaust holes and the second exhaust holes are staggered in the circumferential direction in a one-to-one correspondence mode, heat in the furnace body can be prevented from being directly radiated out through the exhaust pipes, heat loss is reduced, heat in the furnace body is prevented from being directly exposed in the external environment, heat field loss in the furnace is reduced, and the service life of the furnace body is prolonged. And the operation power consumption of the single crystal furnace can be effectively reduced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to single crystal furnace technical field especially relates to a single crystal furnace exhaust pipe and single crystal furnace. BACKGROUND

[0002] Single crystal furnace is a kind of in inert gas environment, with graphite heater the polycrystalline material such as polycrystalline silicon is melted, and the device is grown with the direct-lift method dislocation-free single crystal.Single crystal furnace's furnace body bottom is generally provided with exhaust hole.In the single crystal silicon drawing process, continuously fill argon into furnace body, simultaneously, vacuum pump continuously exhausts to outside through exhaust hole, and the pressure in furnace body is guaranteed stable.Because the hollow design in the exhaust hole of single crystal furnace, the whole exhaust pipe does not use thermal insulation material to be wrapped due to aperture problem, it will inevitably cause a large amount of heat field in the furnace cavity to radiate from exhaust pipe.Now with the progress of auxiliary material technology for single crystal silicon production, single furnace operation cycle lengthens, and oxide in the furnace suddenly cools when passing through furnace bottom plate, and it can be caked in cold place, and it is easy to block exhaust pipe, so the exhaust pipe diameter design of single crystal furnace is larger and larger, and some companies pursue high exhaust effect and make exhaust pipe diameter to 230mm, so that the heat loss in furnace is more serious. SUMMARY

[0003] The utility model provides a kind of single crystal furnace exhaust pipe, to solve the problem that a large amount of heat field in the furnace cavity radiates from exhaust pipe.

[0004] Firstly, a kind of single crystal furnace exhaust pipe includes pipe body and the first cover plate and second cover plate being set in the pipe body, the first cover plate and the second cover plate are spaced apart in the axial direction of the pipe body, the first cover plate has a plurality of first exhaust holes in the circumferential direction, the second cover plate has a plurality of second exhaust holes in the circumferential direction, and a plurality of the first exhaust holes and a plurality of the second exhaust holes are correspondingly staggered in the circumferential direction.

[0005] The utility model sets up first cover plate and second cover plate in the pipe body of exhaust pipe, first cover plate has a plurality of first exhaust holes in the circumferential direction, second cover plate has a plurality of second exhaust holes in the circumferential direction, and a plurality of the first exhaust holes and a plurality of the second exhaust holes are correspondingly staggered in the circumferential direction, can block the heat in furnace body and radiate directly through exhaust pipe, reduce heat loss, avoid the heat in furnace body and directly expose in outside environment, reduce the heat field loss in furnace, can effectively reduce the running power consumption of single crystal furnace platform.

[0006] Optionally, the first cover plate and the second cover plate are spaced apart by a distance greater than 1 / 2 of the inner diameter of the pipe body.

[0007] Optionally, the first cover plate comprises a first frame and a first shunt plate and a second shunt plate arranged in the first frame, the first frame is sleeved in the pipe body, the first frame has a first flow guide cavity, the first shunt plate and the second shunt plate are arranged at a first preset angle, and the first shunt plate and the second shunt plate divide the first flow guide cavity into a plurality of first exhaust holes.

[0008] Optionally, the first preset angle ranges from greater than or equal to 10 degrees to less than or equal to 170 degrees.

[0009] Optionally, the second cover plate comprises a second frame and a third shunt plate and a fourth shunt plate arranged in the second frame, the second frame is sleeved in the pipe body, the second frame has a second flow guide cavity, the third shunt plate and the fourth shunt plate are arranged at a second preset angle, and the third shunt plate and the fourth shunt plate divide the second flow guide cavity into a plurality of second exhaust holes.

[0010] Optionally, the second preset angle ranges from greater than or equal to 10 degrees to less than or equal to 170 degrees.

[0011] Optionally, the pipe body comprises an inner side wall and an outer side wall sleeved on the outer side of the inner side wall, the inner side wall and the outer side wall are arranged at intervals, and the inner side wall and the outer side wall enclose a cooling flow channel.

[0012] In a second aspect, a single crystal furnace comprises the single crystal furnace exhaust pipe described above, and further comprises a furnace body and a furnace bottom plate arranged at the bottom end of the furnace body, and the exhaust pipe partially penetrates through the furnace bottom plate and extends into the furnace body.

[0013] Optionally, in the axial direction of the pipe body, the second cover plate is arranged closer to the furnace bottom plate relative to the first cover plate.

[0014] Optionally, the distance between the second cover plate and the furnace bottom plate is greater than 50 mm. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a structural schematic view of an exhaust pipe provided by the utility model;

[0016] Figure 2 is Figure 1 is a structural schematic view of an A-A direction of

[0017] Figure 3 is a structural schematic view of a first cover plate provided by the utility model;

[0018] Figure 4 is a structural schematic view of a second cover plate provided by the utility model.

[0019] Explanation of reference signs:

[0020] 100, pipe body; 200, first cover plate; 201, first exhaust hole; 202, first frame; 203, first flow distribution plate; 204, second flow distribution plate; 205, first flow guide cavity; 300, second cover plate; 301, second exhaust hole; 302, second frame; 303, third flow distribution plate; 304, fourth flow distribution plate; 305, second flow guide cavity. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical scheme and advantages of the utility model more clearly, the following will be further described in detail by combining with the drawings and examples. The examples of the examples are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements with the same or similar functions throughout. The examples described below by reference to the drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model. In addition, it should be understood that the specific examples described herein are only used to explain the utility model and do not limit the utility model.

[0022] In the description of the utility model, it should be understood that the terms "length", "width", "upper", "lower", "left", "right", "horizontal", "top", "bottom" and the like indicate the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as limiting the utility model.

[0023] In addition, the terms "first", "second" are only for description purpose, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0024] In the description of the utility model, it should be noted that, unless otherwise specifically specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected or can communicate with each other; it can be directly connected, or indirectly connected through an intermediate medium, it can be the communication or interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0025] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature can include the first and second features directly contact, or can include the first and second features are not directly contact but through the other features between them contact. Moreover, the first feature is "on", "above" and "on" the second feature includes the first feature is directly above and obliquely above the second feature, or just indicates the first feature horizontal height is higher than the second feature. The first feature is "under", "below" and "under" the second feature includes the first feature is directly below and obliquely below the second feature, or just indicates the first feature horizontal height is less than the second feature.

[0026] The disclosure below provides many different embodiments or examples for implementing the different structures of the present application. In order to simplify the disclosure of the present application, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeatedly refer to numbers and / or letters in different examples, and such repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the present application provides various specific examples of processes and materials, but those skilled in the art can realize the application of other processes and / or the use of other materials.

[0027] As Figure 1As shown in the utility model embodiment, a single crystal furnace exhaust pipe includes a pipe body 100 and a first cover plate 200 and a second cover plate 300 arranged in the pipe body 100. Exemplarily, the inner wall of the pipe body is provided with a stepped structure, and the first cover plate and the second cover plate can be installed at the corresponding stepped structure, facilitating the disassembly and cleaning of the first cover plate and the second cover plate. The pipe body 100 has an air inlet and an air outlet arranged oppositely in the axial direction thereof, and the pipe body 100 serves as the main part of the exhaust pipe. The pipe body 100 is responsible for containing and guiding the flow of gas, and the material and size thereof need to be selected according to the specific requirements of the single crystal furnace to ensure the smooth discharge of the gas and the durability of the exhaust pipe. Exemplarily, the pipe body 100 is made of stainless steel. The first cover plate 200 and the second cover plate 300 are used to block the heat in the furnace body from being directly radiated out through the pipe body 100. Exemplarily, the first cover plate 200 and the second cover plate 300 can be made of static pressure graphite or carbon-carbon composite material. The first cover plate 200 and the second cover plate 300 are arranged oppositely in the axial direction of the pipe body 100. The first cover plate 200 has a plurality of first exhaust holes 201 in the circumferential direction, and the second cover plate 300 has a plurality of second exhaust holes 301 in the circumferential direction. The plurality of first exhaust holes 201 and the plurality of second exhaust holes 301 are arranged in a one-to-one corresponding staggered manner in the circumferential direction. The staggered arrangement of the plurality of first exhaust holes 201 and the plurality of second exhaust holes 301 is used to maintain the continuous flow of the gas in the furnace body outward, play the role of the exhaust pipe, and discharge the gas from the furnace body. On the other hand, the staggered arrangement can block the heat in the furnace body from being directly radiated out through the exhaust pipe, reduce heat loss, avoid direct exposure of the internal heat of the furnace body to the external environment, reduce the loss of the internal heat field of the furnace, and further reduce the attachment of the gas on the inner wall of the pipe body 100. When the gas passes through the staggered exhaust holes, a certain disturbance and vortex effect are generated. This effect helps to reduce the attachment on the inner wall, thereby prolonging the service life of the exhaust pipe.

[0028] As shown in the utility model embodiment, Figure 2 In some embodiments, the distance between the first cover plate 200 and the second cover plate 300 is greater than 1 / 2 of the inner diameter of the pipe body 100. Further, the distance between the first cover plate 200 and the second cover plate 300 is greater than 1 / 2 of the inner diameter of the pipe body 100 and less than 1 / 2 of the length of the pipe body 100. Preferably, the distance between the first cover plate 200 and the second cover plate 300 is equal to the inner diameter of the pipe body 100. The larger distance between the first cover plate 200 and the second cover plate 300 can reduce the vortex and turbulence generated when the gas flows, reduce the resistance to the gas, and make the gas flow out more smoothly.

[0029] As shown in the utility model embodiment, Figure 3As shown, in the embodiment of the utility model, first cover plate 200 includes first frame 202 and first shunt plate 203 and second shunt plate 204 set in first frame 202, first frame 202 is sleeved in pipe body 100, first frame 202 has first flow guide cavity 205, first shunt plate 203 and second shunt plate 204 are crossed with first preset angle, first shunt plate 203 and second shunt plate 204 divide first flow guide cavity 205 and form multiple first exhaust holes 201. First frame 202 is the main support structure of first cover plate 200, it is usually a ring or frame structure, is used for fixing first cover plate 200 in pipe body 100, first shunt plate 203 and second shunt plate 204 are two key components arranged in first frame 202, they are fixed on first frame 202 in a certain way (such as welding, bolt connection etc.), the design purpose of these two shunt plates is to shunt and guide the fluid entering first flow guide cavity 205, and first flow guide cavity 205 is limited to semi-closed state, avoids first flow guide cavity 205 to be completely exposed to outside environment. It can be understood that first shunt plate 203 and second shunt plate 204 are located in the same plane and cross arrangement, gas will be limited and guided to a certain extent in the flow process. Further, the range of first preset angle is greater than or equal to 10 degrees, and less than or equal to 170 degrees. Preferably, the range of first preset angle is greater than or equal to 60 degrees, and less than or equal to 120 degrees, in this range, the uniformity of the area that first flow guide cavity 205 divides and forms multiple first exhaust holes 201 is better, this helps to realize more efficient fluid exchange.

[0030] As Figure 4As shown, in some embodiments, the second cover plate 300 comprises a second frame 302, and a third shunt plate 303 and a fourth shunt plate 304 arranged in the second frame 302, the second frame 302 is sleeved in the pipe body 100, the second frame 302 has a second flow guide cavity 305, and the third shunt plate 303 and the fourth shunt plate 304 are arranged in a second preset angle, and the third shunt plate 303 and the fourth shunt plate 304 divide the second flow guide cavity 305 to form a plurality of second exhaust holes 301. The second frame 302 is the main supporting structure of the second cover plate 300, which is usually a ring or frame structure, used to fix the second cover plate 300 in the pipe body 100, and the third shunt plate 303 and the fourth shunt plate 304 are two key components arranged in the second frame 302, which are fixed on the second frame 302 in a certain way (such as welding, bolt connection, etc.), and the design purpose of the two shunt plates is to shunt and guide the fluid entering the second flow guide cavity 305, and to limit the second flow guide cavity 305 to a semi-closed state, avoiding the second flow guide cavity 305 being completely exposed to the outside environment. It can be understood that the third shunt plate 303 and the fourth shunt plate 304 are located in the same plane and are arranged in cross, and the gas will be limited and guided to a certain extent during the flow. Further, the second preset angle is greater than or equal to 10 degrees and less than or equal to 170 degrees. Preferably, the second preset angle is greater than or equal to 60 degrees and less than or equal to 120 degrees, and in this range, the area of the second flow guide cavity 305 divided into a plurality of second exhaust holes 301 is more uniform, which helps to achieve more efficient fluid exchange.

[0031] In the utility model, the pipe body 100 comprises an inner side wall and an outer side wall (not shown in the figure) sleeved on the outer side of the inner side wall, the inner side wall and the outer side wall are arranged at intervals, and the inner side wall and the outer side wall enclose a cooling flow channel. Cooling water can be introduced into the cooling flow channel to continuously cool the pipe body 100, and the arrangement of the cooling flow channel can prevent the pipe body 100 from deforming due to high temperature.

[0032] In another embodiment of the utility model, a single crystal furnace (not shown in the figure) comprises the single crystal furnace exhaust pipe, further comprises a furnace body and a furnace bottom plate arranged at the bottom end of the furnace body, and the exhaust pipe partially penetrates the furnace bottom plate and extends into the furnace body. Part of the exhaust pipe is located inside the furnace body, and the other part extends outside the furnace body, and the continuous exhaust of the exhaust pipe can carry out the oxides generated by the reaction of molten silicon and quartz crucible in the furnace body and the volatile substances in the molten silicon at high temperature.

[0033] Further, in the axial direction of the pipe body 100, the second cover plate 300 is arranged close to the furnace bottom plate relative to the first cover plate 200, the first cover plate 200 is arranged in the pipe body 100 close to the air inlet, the second cover plate is arranged away from the air inlet relative to the first cover plate, and the spacing distance between the second cover plate 300 and the furnace bottom plate is greater than 50 mm. The spacing distance between the second cover plate 300 and the furnace bottom plate is arranged to be large enough, which can ensure that the first cover plate 200 and the second cover plate 300 are located in the temperature environment in the furnace body, and avoid that the oxides of the furnace body are easily agglomerated in the cold place and then blocked in the exhaust hole, thereby affecting the exhaust effect.

[0034] In the description of the present specification, the description referring to the terms "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0035] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A single crystal furnace exhaust tube, characterized by, The single crystal furnace exhaust pipe comprises a pipe body, a first cover plate and a second cover plate arranged in the pipe body, the first cover plate and the second cover plate are arranged opposite at an interval in the axial direction of the pipe body, the first cover plate has a plurality of first exhaust holes in the circumferential direction, the second cover plate has a plurality of second exhaust holes in the circumferential direction, and the plurality of first exhaust holes and the plurality of second exhaust holes are arranged in a one-to-one staggered manner in the circumferential direction.

2. The single crystal furnace exhaust tube of claim 1, wherein, The interval distance between the first cover plate and the second cover plate is greater than 1 / 2 of the inner diameter of the pipe body.

3. The single crystal furnace exhaust tube of claim 1, wherein The first cover plate comprises a first frame, a first shunt plate and a second shunt plate arranged in the first frame, the first frame is sleeved in the pipe body, the first frame has a first flow guide cavity, and the first shunt plate and the second shunt plate are arranged at a first preset angle.

4. The single crystal furnace exhaust tube of claim 3, wherein The first preset angle is greater than or equal to 10 degrees and less than or equal to 170 degrees.

5. The single crystal furnace exhaust tube of claim 1, wherein The second cover plate comprises a second frame, a third shunt plate and a fourth shunt plate arranged in the second frame, the second frame is sleeved in the pipe body, the second frame has a second flow guide cavity, and the third shunt plate and the fourth shunt plate are arranged at a second preset angle.

6. The single crystal furnace exhaust tube of claim 5, wherein The second preset angle is greater than or equal to 10 degrees and less than or equal to 170 degrees.

7. The single crystal furnace exhaust tube of claim 1, wherein The pipe body comprises an inner side wall and an outer side wall sleeved on the outer side of the inner side wall, the inner side wall and the outer side wall are arranged at an interval, and the inner side wall and the outer side wall enclose a cooling flow channel.

8. A single crystal furnace characterized by comprising: The single crystal furnace exhaust pipe comprises a pipe body, a first cover plate and a second cover plate arranged in the pipe body, the first cover plate and the second cover plate are arranged opposite at an interval in the axial direction of the pipe body, the first cover plate has a plurality of first exhaust holes in the circumferential direction, the second cover plate has a plurality of second exhaust holes in the circumferential direction, and the plurality of first exhaust holes and the plurality of second exhaust holes are arranged in a one-to-one staggered manner in the circumferential direction.

9. The single crystal furnace of claim 8, wherein In the axial direction of the pipe body, the second cover plate is arranged close to the furnace bottom plate relative to the first cover plate.

10. The single crystal furnace of claim 9, wherein The interval distance between the second cover plate and the furnace bottom plate is greater than 50 mm.

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