Self-calibration type semiconductor vacuum gauge integrated device

Abstract

The utility model provides a self-calibration type semiconductor vacuum gauge integrated device, which relates to the technical field of vacuum gauges, and comprises a vacuum chamber and a vacuum gauge body arranged on the side surface of the vacuum chamber, a quick connection assembly comprises a mounting seat arranged at one end of the vacuum gauge body, and the top of the mounting seat is fixedly connected with a first sleeve. The side surface of the first sleeve is fixedly connected with a mounting frame, the side surface of the mounting frame is provided with a connecting rod, one end of the connecting rod is rotatably connected with a flexible plugging block, the first sleeve and the mounting frame can be supported through the mounting seat mounted on the side surface of the vacuum gauge body, and the connecting rod and the flexible plugging block can be supported through the mounting frame. The vacuum gauge body and the vacuum chamber can be quickly clamped through the flexible blocking block rotationally connected to one end of the connecting rod, the clamping efficiency is effectively improved, meanwhile, the transmission pipeline arranged on the inner wall of the mounting frame can be fixed in an auxiliary mode in the using process, and the transmission stability is ensured.

Description

Technical Field

[0001] This utility model relates to the field of vacuum gauge technology, and in particular to a self-calibrating semiconductor vacuum gauge integrated device. Background Technology

[0002] Self-calibrating semiconductor vacuum gauge integrated devices are commonly used in semiconductor manufacturing, scientific research experiments, vacuum coating and other fields. Their function is to accurately measure the pressure value in a vacuum environment, and to ensure the accuracy and stability of the measurement through self-calibration, so as to provide reliable vacuum data support for related processes and experiments.

[0003] In practical applications, existing semiconductor vacuum gauges, used in conjunction with vacuum pumps and vacuum chambers, can meet the basic requirements of measurement experiments, but the following problems still exist:

[0004] Common integrated semiconductor vacuum gauge devices often use flange connections during installation. Since flange connections require multiple bolts and nuts for tightening, the installation and disassembly process is cumbersome and affects work efficiency. At the same time, during the connection process, most rely on the flange structure to compress the gasket for sealing, which can lead to uneven pressure on the gasket and affect the vacuum effect. Therefore, this application provides a self-calibrating integrated semiconductor vacuum gauge device to meet the requirements. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of existing technologies and provide a self-calibrating integrated semiconductor vacuum gauge device.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a self-calibrating semiconductor vacuum gauge integrated device, comprising a vacuum chamber and a vacuum gauge body disposed on the side of the vacuum chamber;

[0007] The quick-connect assembly includes a mounting base installed at one end of the vacuum gauge body, a first sleeve fixedly connected to the top of the mounting base, a mounting bracket fixedly connected to the side of the first sleeve, a connecting rod provided on the side of the mounting bracket, and a flexible plug rotatably connected to one end of the connecting rod.

[0008] A sealing assembly, the sealing assembly including a sealing plate mounted on the side of the mounting base, the inner wall of the sealing plate being provided with a sealing ball.

[0009] Furthermore, a fixing rod is fixedly connected to the side of the mounting bracket, and a first fixing plate is fixedly connected to the inner wall of the mounting bracket.

[0010] The technical effect of adopting the above technical solution is that by installing the fixing rod, it can be quickly snapped into place with the first groove, and by installing the first fixing plate, it can support the connecting rod, flexible pad and flexible block.

[0011] Furthermore, a flexible pad is fixedly connected to the side of the first fixing plate, and a second sleeve is provided at one end of the flexible pad.

[0012] The technical effect of adopting the above technical solution is that by setting a second sleeve, the flexible plug can be compressed, and by setting a flexible pad, the degree of compression of the flexible plug can be limited.

[0013] Furthermore, the second sleeve has a first groove and a second groove inside.

[0014] The technical effect of adopting the above technical solution is that by designing the first groove to be spiral, it can be used with the fixing rod to complete the snap-fit ​​operation. By opening the second groove, it can be used with the flexible plug to improve the stability of the connection between the vacuum gauge body and the vacuum chamber.

[0015] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0016] The mounting base installed on the side of the vacuum gauge body provides support for the first sleeve and the mounting frame. The mounting frame provides support for the connecting rod and the flexible plug. By rotating the flexible plug connected to one end of the connecting rod, the vacuum gauge body and the vacuum chamber can be quickly snapped together, effectively improving the snapping efficiency. At the same time, it can assist in fixing the transmission pipe set on the inner wall of the mounting frame during use, ensuring transmission stability. The sealing plate and sealing ball work together to provide additional sealing at the connection when the snapping is completed. Attached Figure Description

[0017] Figure 1 A three-dimensional structural schematic diagram of a self-calibrating semiconductor vacuum gauge integrated device provided by this utility model;

[0018] Figure 2 A schematic diagram of the internal connection structure of a self-calibrating semiconductor vacuum gauge integrated device provided by this utility model;

[0019] Figure 3 A schematic diagram of the connection structure of a quick-connect component for a self-calibrating semiconductor vacuum gauge integrated device provided by this utility model;

[0020] Figure 4 A schematic diagram of the internal structure of a quick-connect assembly for a self-calibrating semiconductor vacuum gauge integrated device provided by this utility model;

[0021] Figure 5 This is a cross-sectional structural schematic diagram of a quick-connect assembly for a self-calibrating semiconductor vacuum gauge integrated device provided by this utility model.

[0022] Legend:

[0023] 1. Vacuum chamber; 11. Vacuum gauge body;

[0024] 2. Quick-connect assembly; 21. Mounting base; 22. First sleeve; 23. Mounting bracket; 24. Fixing rod; 25. First fixing plate; 26. Connecting rod; 27. Flexible pad; 28. Flexible plug; 29. ​​Second sleeve; 210. First groove; 211. Second groove;

[0025] 3. Sealing assembly; 31. Sealing plate; 32. Sealing ball; 33. Second fixing plate; 34. Third groove. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] like Figure 1 - Figure 5 As shown, this embodiment provides a technical solution: a self-calibrating semiconductor vacuum gauge integrated device, a vacuum chamber 1, and a vacuum gauge body 11 disposed on the side of the vacuum chamber 1;

[0028] Quick-connect assembly 2 includes a mounting base 21 installed at one end of the vacuum gauge body 11. A first sleeve 22 is fixedly connected to the top of the mounting base 21. A mounting bracket 23 is fixedly connected to the side of the first sleeve 22. A connecting rod 26 is provided on the side of the mounting bracket 23. A flexible plug 28 is rotatably connected to one end of the connecting rod 26.

[0029] The sealing assembly 3 includes a sealing plate 31 mounted on the side of the mounting base 21. A sealing ball 32 is provided on the inner wall of the sealing plate 31. A fixing rod 24 is fixedly connected to the side of the mounting bracket 23. A first fixing plate 25 is fixedly connected to the inner wall of the mounting bracket 23. A flexible pad 27 is fixedly connected to the side of the first fixing plate 25. A second sleeve 29 is provided at one end of the flexible block 28. The second sleeve 29 has a first groove 210 and a second groove 211 inside. The specific model of the vacuum gauge body 11 is CX-CFG500. The first groove 210 is spiral-shaped. The mounting base 21, mounted on the top of the vacuum gauge body 11, supports the first sleeve 22 and the mounting bracket 23. The first sleeve 22, mounted on the top of the mounting base 21, provides installation space for the internal through-tube. The mounting bracket 23 and the first fixing plate 25 cooperate to control the movement trajectory of the connecting rod 26 and the flexible block 28. The flexible pad 27 installed on the inner wall of the first fixed plate 25 provides a certain buffer against the stress generated by the compression when the flexible block 28 moves downward to a certain position, thus preventing damage to the flexible block 28. By setting a certain slope on the outer surface of the flexible block 28, it can automatically retract towards the end closer to the mounting base 21 when the top of the flexible block 28 contacts the inner wall of the second sleeve 29, and then enter the inner cavity of the second groove 211. During the movement of the flexible block 28, one end of the fixing rod 24 moves along the inner cavity of the first groove 210, thereby fixing the position of the flexible block 28 for a second time, effectively improving the connection efficiency between the vacuum gauge body 11 and the vacuum chamber 1. During the operation of the vacuum gauge body 11, the built-in delivery tube shakes due to the impact of airflow. Through the cooperation of the flexible block 28 and the second groove 211, the stress generated by the shaking can be absorbed, effectively improving the stability of the connection.

[0030] Furthermore, such as Figure 2 , Figure 4 and Figure 5 As shown: A second fixing plate 33 is fixedly connected to the side of the second sleeve 29. A third groove 34 is provided on the inner wall of the second fixing plate 33. When the fixing rod 24 rotates along the inner cavity of the first groove 210, the sealing ball 32 contacts the side of the second fixing plate 33 under rotational stress, thereby entering the inner cavity of the third groove 34. This allows it to work with the sealing plate 31 to provide additional sealing at the connection between the vacuum gauge body 11 and the vacuum chamber 1, ensuring a stable sealing environment for the vacuum gauge body 11 during operation.

[0031] Working principle:

[0032] like Figure 1-5 As shown:

[0033] In use: First, push one end of the vacuum gauge body 11 along the inner cavity of the second fixing plate 33. This allows the vacuum gauge body 11 to drive the sealing plate 31 and the mounting base 21 to move. When the mounting base 21 moves to a certain position, one end of the flexible plug 28 contacts the inner wall of the second sleeve 29, causing the flexible plug 28 to move closer to the mounting base 21. Through the cooperation of the connecting rod 26 and the flexible pad 27, the position of the flexible plug 28 can be restricted. While the flexible plug 28 moves, the fixing rod 24 rotates clockwise along the inner cavity of the first groove 210. When the fixing rod 24 moves to a certain position... When the position is fixed, one end of the fixing rod 24 engages with the inner cavity of the first groove 210. At this time, the flexible plug 28 enters the inner cavity of the second groove 211. Through the cooperation of the flexible pad 27 and the second groove 211, the flexible plug 28 can fill the inner cavity of the second groove 211. Through the cooperation of the flexible plug 28 and the fixing rod 24, the vacuum gauge body 11 and the vacuum chamber 1 can be quickly engaged, effectively improving the installation efficiency. Similarly, when the sealing plate 31 moves to a certain position, through the cooperation of the sealing ball 32 and the third groove 34, an additional seal can be provided at the connection between the vacuum gauge body 11 and the vacuum chamber 1 to ensure the vacuum effect.

[0034] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A self-calibrating semiconductor vacuum gauge integrated device, characterized by, Include: Vacuum chamber (1) and vacuum gauge body (11) arranged on the side of vacuum chamber (1); Quick connector assembly (2), the mounting seat (21) is mounted on one end of the vacuum gauge body (11), the top of the mounting seat (21) is fixedly connected with the first sleeve (22), the side of the first sleeve (22) is fixedly connected with the mounting bracket (23), the side of the mounting bracket (23) is provided with the connecting rod (26), one end of the connecting rod (26) is rotatably connected with the flexible plug (28); Sealing assembly (3), the sealing plate (31) is mounted on the side of the mounting seat (21), and the inner wall of the sealing plate (31) is provided with a sealing ball (32).

2. The self-calibrating semiconductor vacuum gauge integrated device of claim 1, wherein, The side of the mounting bracket (23) is fixedly connected with the fixed rod (24), and the inner wall of the mounting bracket (23) is fixedly connected with the first fixed plate (25).

3. A self-calibrating semiconductor vacuum gauge integrated device according to claim 2, wherein, The side of the first fixed plate (25) is fixedly connected with the flexible pad (27), and one end of the flexible plug (28) is provided with the second sleeve (29).

4. The self-calibrating semiconductor vacuum gauge integrated device of claim 3, wherein, The inside of the second sleeve (29) is provided with a first recess (210) and a second recess (211).

5. The self-calibrating semiconductor vacuum gauge integrated device of claim 3, wherein, The side of the second sleeve (29) is fixedly connected with the second fixed plate (33).

6. A self-calibrating semiconductor vacuum gauge integrated device according to claim 5, wherein, The inner wall of the second fixed plate (33) is provided with a third recess (34).

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