Deviation rectifying structure and machining equipment
By using a dual-correction component structure to correct the correction of the component to be corrected in the X-axis, Y-axis and around the Z-axis directions, the problem of low correction accuracy and efficiency in the existing technology is solved, and a high-precision and high-efficiency multi-directional correction effect is achieved.
Patent Information
- Application Number
- CN202520568578.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-27
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2035-03-27
AI Technical Summary
Existing correction platforms suffer from poor correction accuracy due to the superposition of errors in multiple directions, and can only correct a single part, affecting processing efficiency.
A dual-correction component structure is adopted to correct the part to be corrected in the X-axis, Y-axis and around the Z-axis directions respectively, ensuring that the part to be corrected has a consistent attitude in multiple directions. By having the first correction component and the second correction component move in the linear direction and the rotational direction respectively, the multi-directional correction of the part to be corrected is realized, reducing the superposition of errors.
It improves the accuracy of web correction and processing efficiency, avoids the superposition of errors, enables simultaneous web correction of multiple parts to be corrected and adapts to subsequent processing, and enhances the overall performance of the processing equipment.
Smart Images
Figure CN223865744U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of correction technology, and in particular to a correction structure and processing equipment. Background Technology
[0002] In the processing and production of many products, the correction of raw materials or semi-finished products is often a crucial step that affects the quality of the finished product. For example, in the processing of parts to be corrected, it is necessary to correct the deviation of the parts. In the existing technology, a correction platform is usually used to correct the deviation of a single part in the X-axis, Y-axis and around the Z-axis. However, this correction method suffers from the superposition of errors in multiple directions, resulting in poor correction accuracy. Moreover, the correction platform can only correct the deviation of one part at a time, which affects the processing efficiency. Utility Model Content
[0003] This utility model provides a correction structure and processing equipment, which aims to improve correction accuracy and processing efficiency.
[0004] In a first aspect, embodiments of the present invention provide a correction structure, comprising:
[0005] Frame;
[0006] A first alignment correction component, disposed on the frame, is used to support a first alignment component to be corrected and to drive the first alignment component to be corrected to move in a first direction and a second direction; and
[0007] The second correction component is located on the frame and is used to support the second part to be corrected and drive the second part to be corrected to move upward in the third direction;
[0008] Wherein, one of the first direction, the second direction, and the third direction is a direction of rotation about a preset rotation axis, and the preset rotation axis is perpendicular to the other two of the first direction, the second direction, and the third direction.
[0009] Optionally, the first direction and the second direction are straight lines, and the third direction is a direction of rotation about the preset rotation axis, wherein the rotation axis is perpendicular to the first direction and the second direction; or,
[0010] The first direction and the third direction are straight lines, and the second direction is a direction of rotation about the preset rotation axis, which is perpendicular to the first direction and the third direction.
[0011] Optionally, the first correction component includes a first motor and a second motor, the first motor is disposed on the frame, the second motor is disposed on the first motor, and the second motor is provided with a first bearing surface for bearing the first correction component;
[0012] The second correction component includes a third motor, which is mounted on the frame. The third motor has a second bearing surface for supporting the second correction component, and the first bearing surface and the second bearing surface are coplanar.
[0013] Optionally, the frame is provided with mounting holes, through which the first motor and the third motor pass.
[0014] Optionally, the mounting hole includes a first mounting hole and a second mounting hole;
[0015] The first mounting hole penetrates both opposite sides of the frame. The first mounting hole is a stepped hole, and a first stepped portion protrudes from the outer periphery of the first motor. The first motor portion passes through the first mounting hole, and the first stepped portion abuts against the stepped surface of the first mounting hole; and / or,
[0016] The second mounting hole penetrates both opposite sides of the frame. The second mounting hole is a stepped hole. The outer periphery of the third motor is provided with a second stepped portion. The third motor portion passes through the second mounting hole, and the second stepped portion abuts against the stepped surface of the second mounting hole.
[0017] Optionally, the outer periphery of the first motor is provided with a first stepped portion, and the first stepped portion is fastened to the frame; and / or,
[0018] The outer periphery of the third motor is provided with a second step portion, which is fastened to the frame.
[0019] Optionally, the first correction component has a protruding first support portion, which is used to support the first correction element; and / or,
[0020] The second correction component has a second support portion, which is used to support the second correction component.
[0021] Optionally, the frame is provided with a first clearance groove and a second clearance groove, the first clearance groove being arranged around the outer periphery of the first correction component, and the second clearance groove being arranged around the outer periphery of the second correction component.
[0022] Optionally, the frame is provided with reinforcing ribs; and / or,
[0023] The frame is equipped with a weight-reducing groove.
[0024] Secondly, embodiments of the present invention provide a processing device, including the correction structure as described in the first aspect.
[0025] The present invention provides a correction structure and processing equipment. A first correction component carries a first correction part, and a second correction component carries a second correction part. The first correction component can move the first correction part in a first direction and a second direction according to the posture of the second correction part, thereby correcting the first correction part in the first and second directions. The second correction component can move the second correction part in a third direction according to the posture of the first correction part, thereby correcting the second correction part in the third direction. This ensures that the postures of the first and second correction parts are identical, thus achieving correction of both parts. Consequently, during subsequent processing, other components of the processing equipment can simultaneously adapt to the postures of both parts, allowing for further processing of both parts in one operation, improving processing efficiency. This also reduces the correction requirements of the same correction component on multiple parts, avoiding the accumulation of errors between different parts of the correction component that could affect correction accuracy. Therefore, it is beneficial for improving the correction accuracy of both the first and second correction parts. Attached Figure Description
[0026] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0027] Figure 1 A schematic diagram of a correction structure provided in an embodiment of this utility model;
[0028] Figure 2 An exploded view of a correction structure provided in an embodiment of this utility model;
[0029] Figure 3 This is a structural schematic diagram of a frame provided for an embodiment of the present utility model.
[0030] Explanation of key figure labels:
[0031] 1. Frame; 10. Mounting hole; 10a. First mounting hole; 10b. Second mounting hole; 11. First clearance groove; 12. Second clearance groove; 13. Weight reduction groove; 14. Reinforcing rib; 2. First correction component; 21. First motor; 211. First step; 22. Second motor; 221. First bearing part; 2211. First bearing surface; 3. Second correction component; 31. Third motor; 311. Second step; 312. Second bearing part; 3121. Second bearing surface. Detailed Implementation
[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.
[0033] Please see Figures 1 to 3 This utility model discloses a correction structure, including a frame 1, a first correction component 2, and a second correction component 3. The first correction component 2 is disposed on the frame 1 and is used to support a first component to be corrected and to drive the first component to be corrected to move in a first direction and a second direction. The second correction component 3 is disposed on the frame 1 and is used to support a second component to be corrected and to drive the second component to be corrected to move in a third direction. One of the first direction, the second direction, and the third direction is a direction of rotation about a preset rotation axis, and the preset rotation axis is perpendicular to the other two of the first direction, the second direction, and the third direction.
[0034] In this embodiment of the present invention, the first correction component 2 carries the first part to be corrected, and the second correction component 3 carries the second part to be corrected. The first correction component 2 can drive the first part to be corrected to move in the first direction and the second direction according to the posture of the second part to be corrected, so as to correct the first part to be corrected in the first direction and the second direction. The second correction component can drive the second part to be corrected to move in the third direction according to the posture of the first part to be corrected, so as to correct the second part to be corrected in the third direction. This makes the postures of the first part to be corrected and the second part to be corrected the same, that is, to achieve the correction of the first part to be corrected and the second part to be corrected. Thus, when performing subsequent processing, other components of the processing equipment can simultaneously adapt to the postures of the first part to be corrected and the second part to be corrected, and further process the first part to be corrected and the second part to be corrected at the same time, thereby improving processing efficiency. At the same time, it reduces the correction requirement of the same correction component for the part to be corrected, and avoids the superposition of errors between different parts of the correction component from affecting the correction accuracy. That is, it is beneficial to improve the correction accuracy of the first part to be corrected and the second part to be corrected.
[0035] It is understandable that the surfaces to be processed of the first and second parts to be corrected are coplanar, and other components of the processing equipment can simultaneously adapt to the postures of the first and second parts to be corrected, so as to achieve further processing of the first and second parts to be corrected in one go.
[0036] For example, taking the application of the correction structure in a processing equipment for fabricating solar cells as an example, the first and second components to be corrected can be silicon wafers. The first component to be corrected is mounted on the first correction assembly 2, and the second component to be corrected is mounted on the second correction assembly 3. Other components of the processing equipment can detect the attitude difference between the first component to be corrected and the second component to be corrected in the first and second directions, and drive the first component to be corrected to move in the first and second directions through the first correction assembly 2 to correct the first component to be corrected in the first and second directions. Other components of the processing equipment can also detect the attitude difference between the second component to be corrected and the first component to be corrected in the third direction, and drive the second component to be corrected to move in the third direction through the second correction assembly 3 to correct the second component to be corrected in the third direction, thereby making the attitudes of the first and second components to be corrected the same, and realizing the correction of the first and second components to be corrected. Understandably, during the correction process, the first correction component 2 only needs to correct the first part to be corrected in the first and second directions, and the second correction component 3 only needs to correct the second part to be corrected in the third direction. This reduces the correction requirements of the same correction component for the parts to be corrected, avoids the superposition of accuracy errors between different parts of the correction component affecting the correction accuracy, and helps improve the correction accuracy of the first and second parts to be corrected. After completing the correction of the first and second parts to be corrected, they can be treated with adhesive scraping. During adhesive scraping, the scraper can adjust its own posture according to the posture of the first and second parts to be corrected after correction, realizing adhesive scraping of both parts in one operation, thus improving processing efficiency.
[0037] In some embodiments, the first direction and the second direction are linear directions, and the third direction is a direction of rotation about a preset rotation axis, the rotation axis being perpendicular to the first direction and the second direction. For example, one of the first direction and the second direction may be as follows: Figure 1 The X direction shown, the other of the first and second directions can be as follows: Figure 1 The Y-direction shown is perpendicular to the X-direction, and the preset rotation axis can be as follows: Figure 1 The axis containing the Z direction is shown. The third direction can be the direction of rotation around the axis containing the Z direction. The axis containing the Z direction is perpendicular to the X and Y directions.
[0038] In some embodiments, the first direction and the third direction are linear directions, and the second direction is a direction of rotation about a preset rotation axis, the rotation axis being perpendicular to the first direction and the third direction. For example, one of the first direction and the third direction may be as follows: Figure 1 The X direction shown, the other of the first direction and the third direction can be as follows: Figure 1 The Y direction is shown, and the preset rotation axis can be as follows: Figure 1 The axis in the Z direction shown can be the direction of rotation around the axis in the Z direction, which is perpendicular to the X and Y directions.
[0039] In some embodiments, the first correction component 2 includes a first motor 21 and a second motor 22. The first motor 21 is mounted on the frame 1, and the second motor 22 is mounted on the first motor 21. The second motor 22 has a first bearing surface 2211 for supporting the first component to be corrected. The second correction component 3 includes a third motor 31, which is mounted on the frame 1. The third motor 31 has a second bearing surface 3121 for supporting the second component to be corrected. The first bearing surface 2211 and the second bearing surface 3121 are coplanar. The first motor 21 and the second motor 22 respectively drive the first component to be corrected to move along a first direction and a second direction, while the third motor 31 drives the second component to be corrected to move along a third direction. The third motor 31 is spaced apart from the first motor 21 and the second motor 22 to avoid the superposition of errors of the first motor 21, the second motor 22, and the third motor 31.
[0040] Understandably, the coplanarity of the first bearing surface 2211 and the second bearing surface 3121 is beneficial because when the first part to be corrected is installed on the first correction assembly 2 and the second part to be corrected is installed on the second correction assembly 3, the surfaces to be processed of the first and second parts to be corrected are coplanar. Of course, in other embodiments, the coplanarity of the surfaces to be processed of the first and second parts to be corrected can also be achieved by using other structural components.
[0041] For example, when the first and second directions are linear directions, and the third direction is a direction of rotation around a preset axis, the first motor 21 and the second motor 22 can be linear motors, and the third motor 31 can be a rotary motor. The second motor 22 is mounted on the first motor 21 and can carry the first component to be corrected. The first motor 21 can drive the second motor 22 and the first component to be corrected to move along the X direction, and the second motor 22 can drive the first component to be corrected to move along the Y direction. The third motor 31 can carry the second component to be corrected and can drive the second component to be corrected to move around the axis in the Z direction. Thus, the third motor 31 is a rotary motor, and the third motor 31 is set separately, rather than being stacked with the first motor 21 and the second motor 22. This allows the third motor 31 to have a larger installation space, making it easier to install a taller third motor 31, improving the response speed of the third motor 31, and improving the correction efficiency.
[0042] For example, when the first and third directions are linear directions, and the second direction is a direction of rotation around a preset axis, the first motor 21 and the third motor 31 can be linear motors, and the second motor 22 can be a rotary motor. The second motor 22 is mounted on the first motor 21. The second motor 22 can carry the first part to be corrected. The first motor 21 can drive the second motor 22 and the first part to be corrected to move along the X direction. The second motor 22 can drive the first part to be corrected to move around the axis in the Z direction.
[0043] The third motor 31 can carry the second component to be corrected, and can drive the second component to move along the Y direction. In this way, the second motor 22 is a rotary motor, and the second motor 22 is not simultaneously stacked with the first motor 21 and the second motor 22. This allows the second motor 22 to have a relatively large installation space, which facilitates the installation of a taller second motor 22, improves the response speed of the second motor 22, and improves the correction efficiency.
[0044] In some embodiments, the frame 1 is provided with mounting holes 10, through which the first motor 21 and the third motor 31 pass. By passing the first motor 21 and the third motor 31 through the first mounting holes 10a, it is beneficial to control the overall height of the correction structure and reduce the overall volume.
[0045] Furthermore, the mounting hole 10 includes a first mounting hole 10a and a second mounting hole 10b. The first motor 21 passes through the first mounting hole 10a, and the third motor 31 passes through the second mounting hole 10b. The first mounting hole 10a and the second mounting hole 10b are spaced apart, which helps to ensure the overall strength of the frame 1, and the first correction component 2 and the second correction component 3 can be stably installed on the frame 1.
[0046] Furthermore, the first mounting hole 10a and the second mounting hole 10b penetrate the opposite sides of the frame 1.
[0047] Specifically, the first mounting hole 10a penetrates both opposite sides of the frame 1. The first mounting hole 10a is a stepped hole, and the outer periphery of the first motor 21 is provided with a first stepped portion 211, which abuts against the stepped surface of the first mounting hole 10a. And / or, the second mounting hole 10b penetrates both opposite sides of the frame 1. The second mounting hole 10b is a stepped hole, and the outer periphery of the third motor 31 is provided with a second stepped portion 311, which abuts against the stepped surface of the second mounting hole 10b. It can be understood that the first mounting hole 10a being a stepped hole, with the first stepped portion 211 abutting against the stepped surface of the first mounting hole 10a, facilitates the positioning and installation of the first correction component 2. Similarly, the second mounting hole 10b being a stepped hole, with the second stepped portion 311 abutting against the stepped surface of the second mounting hole 10b, facilitates the positioning and installation of the second correction component 3.
[0048] For example, the first correction component 2 passes through the first mounting hole 10a from the bottom of the frame 1, so that the first bearing surface 2211 is located outside the first mounting hole 10a, so that the first bearing surface 2211 can bear the first correction component. The first step portion 211 on the outer periphery of the first motor 21 abuts against the step surface of the first mounting hole 10a to achieve the positioning of the first motor 21. The first step portion 211 can be fastened to the frame 1 by fasteners. The second correction component 3 passes through the second mounting hole 10b from the bottom of the frame 1, so that the second bearing surface 3121 is located outside the second mounting hole 10b, so that the second bearing surface 3121 can bear the second correction component. The second step portion 311 on the outer periphery of the third motor 31 abuts against the step surface of the second mounting hole 10b to achieve the positioning of the third motor 31. The second step portion 311 can be fastened to the frame 1 by fasteners.
[0049] In some embodiments, a first step 211 protrudes from the outer periphery of the first motor 21, and the first step 211 is fastened to the frame 1. By providing the first step 211 protruding from the outer periphery of the first motor 21 and connecting it to the frame 1, it is convenient to install the first motor 21 onto the frame 1. The first step 211 and the frame 1 can be fastened together with fasteners such as screws and bolts, thereby improving the connection stability between the first motor 21 and the frame 1.
[0050] In some embodiments, the outer periphery of the third motor 31 is provided with a second step portion 311, which is fastened to the frame 1. By providing the second step portion 311 on the outer periphery of the third motor 31 and connecting it to the frame 1 through the second step portion 311, it is convenient to install the second motor 22 on the frame 1. The second step portion 311 and the frame 1 can be fastened together with fasteners such as screws and bolts, thereby improving the connection stability between the third motor 31 and the frame 1.
[0051] In some embodiments, the first correction component 2 has a protruding first support portion 221 for supporting the first component to be corrected. And / or, the second correction component 3 has a protruding second support portion 312 for supporting the second component to be corrected. It is understood that by providing a first support surface 2211 on the first support portion 221 of the second motor 22 and a second support surface 3121 on the second support portion 312 of the third motor 31, it is beneficial to control the area of the first support surface 2211 and the second support surface 3121. Since the first support surface 2211 and the second support surface 3121 are precision-machined surfaces, the area requiring precision machining of the correction structure can be reduced. This allows the first support surface 2211 to stably support the first component to be corrected, and the second support surface 3121 to stably support the second component to be corrected, while simplifying the fabrication process of the correction structure.
[0052] For example, after the first correction component 2 and the second correction component 3 are installed on the frame 1, the entire correction structure can be transferred to a grinding machine. The upper surfaces of the first bearing portion 221 and the second bearing portion 312 are ground by the grinding machine to obtain the first bearing surface 2211 and the second bearing surface 3121 after finishing, making the first bearing surface 2211 and the second bearing surface 3121 coplanar. During the grinding process, the lower surface of the frame 1 can be used as the reference surface, so that the parallelism of the first bearing surface 2211 and the second bearing surface 3121 relative to the lower surface of the frame 1 is less than or equal to a preset value, such as 20 μm, so that the first bearing surface 2211 and the second bearing surface 3121 are coplanar.
[0053] In some embodiments, the frame 1 is provided with a first clearance groove 11 and a second clearance groove 12. The first clearance groove 11 is arranged around the outer periphery of the first correction component 2, and the second clearance groove 12 is arranged around the outer periphery of the second correction component 3. The first clearance groove 11 and the second clearance groove 12 are used to avoid predetermined components.
[0054] For example, the first clearance groove 11 and the second clearance groove 12 can be set at intervals, or the first clearance groove 11 and the second clearance groove 12 can be set in a connected manner. The specific arrangement can be adjusted according to the actual situation, and is not limited here.
[0055] For example, the first correction component 2 is provided with a first tray, which carries a first part to be corrected. The first tray has a first hole, which is connected to a vacuum generating component through a first vacuum tube. The vacuum generating component can create a vacuum environment through the first hole, so that the first part to be corrected is adsorbed onto the first tray under vacuum. The first vacuum tube can be located in the first clearance groove 11 for easy arrangement. The second correction component 3 is provided with a second tray, which carries a second part to be corrected. The second tray has a second hole, which is connected to a vacuum generating component through a second vacuum tube. The vacuum generating component can create a vacuum environment through the second hole, so that the second part to be corrected is adsorbed onto the second tray under vacuum. The second vacuum tube can be located in the second clearance groove 12 for easy arrangement.
[0056] In some embodiments, the frame 1 is provided with a weight reduction groove 13 to reduce the weight of the correction structure and reduce manufacturing costs.
[0057] For example, there may be one or more weight-reducing grooves 13.
[0058] For example, the weight reduction groove 13 may be provided on the lower surface of the frame 1.
[0059] In some embodiments, the frame 1 is provided with reinforcing ribs 14 to enhance the strength of the frame 1, so that the first correction component 2 and the second correction component 3 can be stably installed on the reinforcing ribs 14.
[0060] For example, the mounting hole 10 includes a first mounting hole 10a and a second mounting hole 10b, which are stepped holes, and a reinforcing rib 14 is formed between the first mounting hole 10a and the second mounting hole 10b.
[0061] This application also discloses a processing device including the correction structure described above. It is understood that the processing device including the correction structure described above also possesses all its technical effects, namely, it can utilize the correction structure to correct the first and second parts to be corrected, ensuring that the first and second parts have the same posture. During subsequent processing, other components of the processing device can simultaneously adapt to the postures of the first and second parts to be corrected, allowing for further processing of both parts in one operation, improving processing efficiency, reducing the correction requirements of the same correction component on multiple parts, and avoiding the accumulation of errors between different parts of the correction component that could affect the correction accuracy. This is beneficial for improving the correction accuracy of the first and second parts to be corrected.
[0062] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.
Claims
1. A correction structure, characterized in that, include: Frame; A first correction component is disposed on the frame and is used to support the first correction component and drive the first correction component to move in a first direction and a second direction. as well as The second correction component is located on the frame and is used to support the second part to be corrected and drive the second part to be corrected to move upward in the third direction; Wherein, one of the first direction, the second direction, and the third direction is a direction of rotation about a preset rotation axis, and the preset rotation axis is perpendicular to the other two of the first direction, the second direction, and the third direction.
2. The correction structure according to claim 1, characterized in that, The first and second directions are straight lines, and the third direction is a direction of rotation about the preset rotation axis, which is perpendicular to the first and second directions; or... The first direction and the third direction are straight lines, and the second direction is a direction of rotation about the preset rotation axis, which is perpendicular to the first direction and the third direction.
3. The correction structure according to claim 1, characterized in that, The first correction component includes a first motor and a second motor. The first motor is mounted on the frame, and the second motor is mounted on the first motor. The second motor has a first bearing surface for bearing the first correction component. The second correction component includes a third motor, which is mounted on the frame. The third motor has a second bearing surface for supporting the second correction component, and the first bearing surface and the second bearing surface are coplanar.
4. The correction structure according to claim 3, characterized in that, The frame is provided with mounting holes, through which the first motor and the third motor pass.
5. The correction structure according to claim 4, characterized in that, The mounting holes include a first mounting hole and a second mounting hole; The first mounting hole penetrates both opposite sides of the frame. The first mounting hole is a stepped hole, and a first stepped portion protrudes from the outer periphery of the first motor. The first motor portion passes through the first mounting hole, and the first stepped portion abuts against the stepped surface of the first mounting hole; and / or, The second mounting hole penetrates both opposite sides of the frame. The second mounting hole is a stepped hole. The outer periphery of the third motor is provided with a second stepped portion. The third motor portion passes through the second mounting hole, and the second stepped portion abuts against the stepped surface of the second mounting hole.
6. The correction structure according to claim 3, characterized in that, The first motor has a first stepped portion protruding from its outer periphery, and the first stepped portion is fastened to the frame; and / or, The outer periphery of the third motor is provided with a second step portion, which is fastened to the frame.
7. The correction structure according to any one of claims 1-6, characterized in that, The first correction component has a first support portion, which is used to support the first correction component; And / or, The second correction component has a second support portion, which is used to support the second correction component.
8. The correction structure according to any one of claims 1-6, characterized in that, The frame is provided with a first clearance groove and a second clearance groove. The first clearance groove is arranged around the outer periphery of the first correction component, and the second clearance groove is arranged around the outer periphery of the second correction component.
9. The correction structure according to any one of claims 1-6, characterized in that, The frame is provided with reinforcing ribs; and / or, The frame is equipped with a weight-reducing groove.
10. A processing device, characterized in that, Includes the correction structure as described in any one of claims 1-9.