Partition plate mechanism and evaporation coating equipment

Abstract

The utility model discloses a partition plate mechanism and evaporation coating equipment. The partition plate mechanism comprises a partition plate body and a first valve body assembly, and the partition plate body is provided with a first through hole; the first valve body assembly comprises a driving part and a first valve plate, the first valve plate is in transmission connection with the driving part, and the driving part can drive the first valve plate to move so as to seal or open the first through hole. When the pressure difference between the two sides of the partition plate body is large, the driving piece can drive the first valve plate to open the first through hole, so that the cavities in the two sides of the partition plate body communicate, and the pressure difference between the two sides of the partition plate body is reduced.

Description

Technical Field

[0001] This utility model relates to the field of evaporation coating equipment technology, and more specifically, to a partition mechanism and evaporation coating equipment. Background Technology

[0002] In related technologies, during evaporation coating, to reduce the number of vacuum pumps and prevent film contamination during evaporation, the vacuum chamber is typically divided into an upper chamber and a lower chamber by a chamber partition. The upper chamber is the winding chamber, and the lower chamber is the evaporation chamber. The pressure in the upper chamber is usually higher than that in the lower chamber, and the surface of the chamber partition cannot withstand too much force. This force is mainly determined by the pressure difference between the upper and lower chambers. However, during the initial vacuuming process, the pressure difference between the upper and lower chambers is difficult to control, so the chamber partition is easily damaged due to excessive pressure difference.

[0003] Therefore, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0004] One objective of this invention is to provide a new technical solution for a partition mechanism.

[0005] According to a first aspect of the present invention, a partition mechanism is provided. The partition mechanism includes:

[0006] The partition body is provided with a first through hole;

[0007] The first valve body assembly includes a drive member and a first valve plate, the first valve plate being throttledly connected to the drive member, the drive member being capable of moving the first valve plate to seal or open the first through hole.

[0008] Optionally, the partition body is further provided with a first guide hole, and the first valve body assembly further includes a first guide rod. The first guide rod is connected to one side of the first valve plate, and the first guide rod can extend into the first guide hole and slide along the guide rod.

[0009] Optionally, the first valve body assembly further includes a rotating shaft, the first valve plate being connected to the rotating shaft, and the driving member being able to drive the rotating shaft to rotate, thereby causing the first valve plate to seal or open the first through hole.

[0010] Optionally, the partition body is provided with a plurality of first through holes, and a plurality of first valve plates are provided accordingly, with the plurality of first valve plates spaced apart along the length direction of the rotating shaft.

[0011] Optionally, the first valve body assembly further includes a connector, one end of which is connected to the rotating shaft and the other end of which is rotatably connected to the first valve plate.

[0012] Optionally, the driving component includes a linear driving component and a linkage component. The linear driving component is connected to the rotating shaft via the linkage component, and the linear driving component can drive the rotating shaft to rotate via the linkage component.

[0013] Optionally, the linkage includes a first link and a second link, one end of the first link is connected to the rotating shaft, the other end is rotatably connected to the second link, and the end of the second link away from the first link is drively connected to the linear drive.

[0014] Optionally, a sealing ring is provided on the outer periphery of the first through hole, and the first valve plate can abut against the sealing ring to seal the first through hole.

[0015] Optionally, it also includes a second valve body assembly, wherein the partition body is further provided with a second through hole, the second valve body assembly includes a second valve plate and an elastic element, the elastic element being able to push the second valve plate toward the second through hole to seal the second through hole.

[0016] Optionally, the second valve body assembly further includes a second guide rod, which is slidably disposed on the partition body and connected to the second valve plate.

[0017] Optionally, the elastic element is sleeved on the second guide rod, with one end of the elastic element abutting against the partition body and the other end abutting against the second guide rod. The elastic element can push the second guide rod to move, thereby pushing the second valve plate to move toward the second through hole.

[0018] According to a second aspect of the present invention, an evaporation coating apparatus is provided. The evaporation coating apparatus includes a cavity and a partition mechanism as described in the above embodiments, the partition mechanism being capable of dividing the cavity into a first chamber and a second chamber.

[0019] One technical advantage of this application is that when the pressure difference between the two sides of the partition body is large, the driving component can drive the first valve plate to open the first through hole so that the chambers on both sides of the partition body can be connected, thereby helping to reduce the pressure difference between the two sides of the partition body.

[0020] Other features and advantages of the present invention will become clear from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. Attached Figure Description

[0021] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present invention and, together with their description, serve to explain the principles of the present invention.

[0022] Figure 1 This is a schematic diagram of the partition mechanism according to an embodiment of the present invention.

[0023] Figure 2 yes Figure 1 The enlarged view of point A is shown.

[0024] Figure 3 yes Figure 1 The enlarged view at point B is shown.

[0025] Figure 4 This is a schematic diagram of the structure of the first valve body assembly according to an embodiment of the present invention.

[0026] Figure 5 This is a schematic diagram of the internal structure of the cavity according to an embodiment of the present invention.

[0027] Figure label:

[0028] 1. Partition body; 11. First through hole; 13. First sealing groove; 14. Second through hole; 15. Second abutment part; 16. Coating port; 2. First valve body assembly; 21. Drive component; 211. Linear drive component; 212. First connecting rod; 213. Second connecting rod; 22. First valve plate; 23. Rotating shaft; 24. Connecting component; 25. Rotating rod; 26. First guide rod; 3. Second valve body assembly; 31. Second valve plate; 32. Second guide rod; 321. First abutment part; 4. Cavity; 41. First chamber; 42. Second chamber; 5. Coating roller; 6. Bearing seat; 7. Mounting seat. Detailed Implementation

[0029] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0030] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0031] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0032] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0033] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0034] According to one embodiment of this application, a partition mechanism is provided. For example... Figures 1 to 5 As shown, the partition mechanism includes a partition body 1 and a first valve body assembly 2. The partition body 1 has a first through hole 11. The first valve body assembly 2 includes a drive member 21 and a first valve plate 22. The first valve plate 22 is tractively connected to the drive member 21, and the drive member 21 can move the first valve plate 22 to seal or open the first through hole 11.

[0035] In this example, the partition body 1 can divide the cavity 4 into a first chamber 41 and a second chamber 42. When the pressure difference between the two sides of the partition body 1 is large, for example, when the pressure difference between the two chambers on both sides of the partition body 1 is greater than a preset value, the driving member 21 can drive the first valve plate 22 to open the first through hole 11, so that the two chambers on both sides of the partition body 1 are connected. This helps to reduce the pressure difference between the two sides of the partition body 1, thereby effectively protecting the partition body 1 from deformation caused by air pressure. When the pressure difference between the two sides of the partition body 1 is small, for example, when the pressure difference between the two chambers on both sides of the partition body 1 does not exceed the preset value, the driving member 21 can drive the first valve plate 22 to move toward the first through hole 11 to seal the first through hole 11.

[0036] In this example, the partition body 1 can be made of stainless steel or other materials. The first valve plate 22 can be a sheet-like structure made of stainless steel or aluminum alloy or other materials. The first valve plate 22 can be circular, elliptical, square, or irregular in shape. Of course, the specific structure of the partition body 1 and the first valve plate 22 can be determined by those skilled in the art according to the actual situation, and is not specifically limited here.

[0037] In this example, the pressure difference between the two sides of the partition body 1 can be determined by installing air pressure detectors in the chambers on both sides of the partition body 1.

[0038] In one example, such as Figure 4 As shown, the partition body 1 is also provided with a first guide hole, and the first valve body assembly 2 is further provided with a first guide rod 26. The first guide rod 26 is connected to one side of the first valve plate 22. The first guide rod 26 can extend into the first guide hole and can slide along the guide rod.

[0039] In this example, a first guide rod 26 is provided on one side of the first valve plate 22 along the thickness direction, and a corresponding first guide hole is provided on the partition body 1. The first guide rod 26 can be inserted into the first guide hole and can slide along the first guide hole, so that when the first valve plate 22 moves toward the first through hole 11 to seal the first through hole 11, the first guide hole can guide the first valve plate 22 so that the first valve plate 22 can accurately seal the first through hole 11.

[0040] like Figure 2 As shown, in this example, the first through hole 11 can be composed of two spaced-apart semicircular holes, and the first guide hole can be positioned between the two semicircular holes. This allows the first valve plate 22 to seal the first guide hole as well as the first through hole 11. Alternatively, the first through hole 11 can be formed by multiple fan-shaped holes surrounding it. The first guide hole is located in the middle of the multiple fan-shaped holes. Of course, the specific shape and composition of the first through hole 11 and the first guide hole can be determined by those skilled in the art according to the actual situation, and are not specifically limited here.

[0041] In this example, the first guide rod 26 can be screwed, snapped, or welded to the first valve plate 22. Those skilled in the art can decide according to the actual situation, and no specific limitation is made here.

[0042] In one example, such as Figure 1 and Figure 2 As shown, the first valve body assembly 2 also includes a rotating shaft 23, the first valve plate 22 is connected to the rotating shaft 23, and the driving member 21 can drive the rotating shaft 23 to rotate so as to drive the first valve plate 22 to seal or open the first through hole 11.

[0043] like Figure 1 and Figure 2 As shown, in this example, the first valve plate 22 can be connected to the rotating shaft 23 and is located on one side of the rotating shaft 23 along the radial direction. The driving member 21 can be driven to one end of the rotating shaft 23, and the rotating shaft 23 is rotated by the driving member 21, thereby driving the first valve plate 22 to rotate toward or away from the first through hole 11. By setting the rotating shaft 23 and connecting the first valve plate 22 to the rotating shaft 23, it is beneficial to make reasonable arrangements for the first valve body assembly 2, so as to adapt to different installation environments.

[0044] like Figure 2 and Figure 4 As shown, in this example, the rotating shaft 23 can be rotatably mounted on the bearing housing 6. For example, both ends of the rotating shaft 23 pass through the bearing housing 6, which helps to improve the smoothness of the rotation of the rotating shaft 23. The bearing housing 6 can be fixedly mounted on a fixing device, thereby providing fixed support for the rotating shaft 23.

[0045] In this example, the drive element 21 can be an electric rotator, a pneumatic rotator, or a hydraulic rotator, etc. The specific structure of the drive element 21 can be determined by those skilled in the art based on the actual situation, and is not specifically limited here.

[0046] In one example, such as Figure 4 As shown, the partition body 1 is provided with a plurality of first through holes 11, and a plurality of first valve plates 22 are provided accordingly. The plurality of first valve plates 22 are spaced apart along the length direction of the rotating shaft 23.

[0047] like Figure 4 As shown, in this example, the first valve body assembly 2 includes a plurality of first valve plates 22, which are spaced apart along the axial direction of the rotating shaft 23. The partition body 1 is provided with first through holes 11 at corresponding positions. By driving the rotating shaft 23 to rotate through the driving member 21, the plurality of first valve plates 22 can be simultaneously driven to seal or open the plurality of first through holes 11. That is, by opening the plurality of first through holes 11 through the first valve plates 22, the efficiency of air pressure balance on both sides of the partition body 1 can be improved.

[0048] For example, two, three, or four first valve plates 22 can be provided, and those skilled in the art can decide according to the actual situation, without making specific limitations here.

[0049] In one example, the first valve body assembly 2 further includes a connector 24, one end of which is connected to the rotating shaft 23 and the other end is rotatably connected to the first valve plate 22.

[0050] In this example, one end of the connector 24 is rotatably connected to the first valve plate 22. For example, the connector 24 is rotatably connected to the side of the valve plate away from the first through hole 11. The end of the first through hole 11 facing the first valve plate 22 is horizontally positioned, and the first valve plate 22 is rotatably connected to the connector 24, which helps to keep the first valve plate 22 horizontal, thereby improving the sealing effect on the first through hole 11.

[0051] In this example, a first guide rod 26 is connected to one side of the first valve plate 22, and a connector 24 is rotatably connected to the side of the first valve plate 22 opposite to the first guide rod 26. Rotating the first valve plate 22 to the connector 24 also facilitates the smooth sliding of the first guide rod 26 along the first guide hole.

[0052] For example, such as Figure 2 and Figure 4 As shown, a rotating rod 25 is rotatably mounted on one end of the connector 24. One end of the rotating rod 25 is rotatably connected to the connector 24, and the other end is connected to the first valve plate 22. The end of the connector 24 away from the valve plate can be fixedly connected to the rotating shaft 23 by means of snap-fit, screw-fit, or welding.

[0053] In one example, the drive element 21 includes a linear drive element 211 and a linkage element. The linear drive element 211 is connected to the rotating shaft 23 via the linkage element, and the linear drive element 211 can drive the rotating shaft 23 to rotate via the linkage element.

[0054] In this example, the drive element 21 can be a combination of a linear drive element 211 and a linkage element. That is, the drive end of the linear drive element 211 can be connected to the rotating shaft 23 via the linkage element. The linkage element can increase the torque, thereby generating a larger torque with a smaller applied force. In other words, the rotating shaft 23 can be rotated by the linear drive element 211 with a smaller power.

[0055] In this example, such as Figure 2 and Figure 4 As shown, the linkage includes a first link 212 and a second link 213. One end of the first link 212 is connected to the rotating shaft 23, and the other end is rotatably connected to the second link 213. The end of the second link 213 away from the first link 212 is connected to the linear drive 211.

[0056] One end of the first connecting rod 212 is fixedly connected to the rotating shaft 23, and the first connecting rod 212 extends radially along the rotating shaft 23. The end of the first connecting rod 212 away from the rotating shaft 23 is rotatably connected to one end of the second connecting rod 213, and the other end of the second connecting rod 213 is connected to the linear drive component 211. By pushing or pulling the second connecting rod 213 through the linear drive component 211, the rotating shaft 23 can be rotated again through the first connecting rod 212. The linear drive component 211 can be a cylinder or a linear motor, etc., and the output end of the cylinder or linear motor is connected to the second connecting rod 213.

[0057] like Figure 2 and Figure 4 As shown, in this example, the partition mechanism also includes a mounting base 7, to which the linear drive member 211 can be fixedly connected. The mounting base 7 can be mounted on a fixing device at a corresponding position. For example, the mounting base 7 can be a fixing block, and it can be mounted on the fixing device using fasteners such as screws or bolts. The linear drive mechanism is rotatably adjustable on the mounting base 7; by rotating the linear drive member 211, the output direction of the linear drive member 211 can be adjusted.

[0058] In this example, the linkage can also consist of only one first link 212, one end of which is fixedly connected to the rotating shaft 23, and the first link 212 extends radially along the rotating shaft 23. The linear drive 211 is rotatably mounted on the mounting base 7, and the output shaft of the linear drive 211 is rotatably connected to the end of the first link 212 away from the rotating shaft 23.

[0059] Of course, those skilled in the art can determine the specific structure of the linkage components according to the actual situation, and no specific limitations are made here.

[0060] In this example, the first link 212 and the second link 213 can be made of metals such as stainless steel or aluminum alloy. Furthermore, the specific strength and dimensions of the first link 212 and the second link 213 can be determined by those skilled in the art based on the actual situation, and are not specifically limited here.

[0061] In one example, a sealing ring is provided on the outer periphery of the first through hole 11, and the first valve plate 22 can abut against the sealing ring to seal the first through hole 11.

[0062] like Figure 2 As shown, in this example, the partition body 1 also has a first sealing groove 13 on the outer periphery of the first through hole 11, and the sealing ring can be disposed in the first sealing groove 13. When the first valve plate 22 seals the first through hole 11, one side surface of the first valve plate 22 can abut against the sealing ring, thereby improving the sealing effect on the first through hole 11.

[0063] The sealing ring can be a silicone rubber ring or a fluororubber ring, etc., which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0064] In one example, such as Figure 1 and Figure 3 As shown, the partition mechanism also includes a second valve body assembly 3. The partition body 1 is also provided with a second through hole 14. The second valve body assembly 3 includes a second valve plate 31 and an elastic element. The elastic element can push the second valve plate 31 toward the second through hole 14 to seal the second through hole 14.

[0065] like Figure 1 and Figure 3 As shown, in this example, the partition body 1 has a second through hole 14 along its thickness direction. The second through hole 14 is suitable for connecting the first chamber 41 and the second chamber 42 on both sides of the partition body 1. One end of the elastic element can be fixed, and the other end acts on the second valve plate 31, and has the tendency to drive the second valve plate 31 toward the second through hole 14. That is, when the pressure difference between the chambers on both sides of the partition body 1 does not exceed a preset value, the elastic element can drive the second valve plate 31 to seal the second through hole 14. When the pressure difference between the two sides of the partition body 1 is greater than the preset value, the air pressure can push the valve plate away from the second through hole 14, thereby opening the second through hole 14, so that the chambers on both sides of the partition body 1 are connected, thereby reducing the air pressure difference between the chambers on both sides of the partition body 1.

[0066] The partition body 1, by providing a second through hole 14 and a corresponding second valve assembly 3, facilitates improved efficiency in restoring pressure balance on both sides of the partition body 1. Furthermore, the second valve assembly 3 has a simple structure; when the pressure difference on both sides of the partition body 1 exceeds a preset value, the second through hole 14 can be passively opened under pressure. Therefore, when the first valve assembly 2 fails to function in time—for example, due to a malfunction in the drive component 21 or a failure in the pressure difference detection on both sides of the partition body 1—the second valve assembly 3 and the second through hole 14 can further prevent the partition body 1 from being deformed or damaged due to excessive pressure difference.

[0067] The partition body 1 may be provided with a plurality of second through holes 14 at intervals, and each second through hole 14 is provided with a second valve body assembly 3. For example, two, three or four second through holes 14 may be provided. Those skilled in the art can decide according to the actual situation, and no specific limitation is made here.

[0068] In this example, the partition body 1 can be provided with two second through holes 14. The second valve plate 31 corresponding to one of the second through holes 14 is located on the surface of the partition body 1 on one side of the first chamber 41. When the pressure in the second chamber 42 is greater than the pressure in the first chamber 41, if the pressure difference is too large, it will push the second valve plate 31 in the first chamber 41 to open the second through hole 14. The second valve plate 31 corresponding to the other second through hole 14 is located on the surface of the partition body 1 on one side of the second chamber 42. When the pressure in the second chamber 42 is less than the pressure in the first chamber 41, if the pressure difference is too large, it will push the second valve plate 31 in the second chamber 42 to open the second through hole 14.

[0069] In one example, such as Figure 3 As shown, the second valve body assembly 3 further includes a second guide rod 32, which is slidably disposed on the partition body 1 and connected to the second valve plate 31.

[0070] like Figure 3 As shown, in this example, the second guide rod 32 is slidably disposed on the partition body 1. One end of the second guide rod 32 can be connected to the second valve plate 31, and can guide the second valve plate 31 when it moves. For example, the second through hole 14 is formed by multiple fan-shaped holes. The partition body 1 is provided with a second guide hole in the middle of the multiple fan-shaped holes. One end of the second guide rod 32 passes through the second guide hole and is connected to the second valve plate 31, so that when the second valve plate 31 covers the multiple fan-shaped holes, it can also cover the second guide hole. The second guide rod 32 can slide along the second guide hole. The specific shape and composition of the second through hole 14 and the second guide hole can be determined by those skilled in the art according to the actual situation, and are not specifically limited here.

[0071] In one example, the elastic element is sleeved on the second guide rod 32, with one end of the elastic element abutting against the partition body 1 and the other end abutting against the second guide rod 32. The elastic element can push the second guide rod 32 to move, thereby pushing the second valve plate 31 toward the second through hole 14.

[0072] In this example, the elastic element can be a cylindrical spring structure, and it can be sleeved on the second guide rod 32. One end of the second guide rod 32 passes through the partition body 1 and is connected to the second valve plate 31. A first abutment portion 321 is provided on the side of the second guide rod away from the second valve plate 31, and a second abutment portion 15 is provided on the partition body 1. The elastic element is located on the side of the partition body 1 opposite to the second valve plate 31. The elastic element is in a compressed state, with one end abutting against the first abutment portion 321 and the other end abutting against the second abutment portion 15.

[0073] The first abutting part 321 can be a nut, which is screwed onto the second guide rod 32. The second abutting part 15 can be a sliding sleeve fixedly installed on the partition body 1, with the second guide rod 32 passing through the sliding sleeve and one end of the elastic member abutting against one end of the sliding sleeve.

[0074] In this example, the elasticity of the elastic element can be adjusted according to the preset value of the pressure difference, for example, by adjusting the degree of compression of the elastic element, or by selecting elastic elements with different elasticity.

[0075] According to a second aspect of this utility model, an evaporation coating apparatus is provided. For example... Figure 5 As shown, the evaporation coating equipment includes a cavity 4 and a partition mechanism as described in the above embodiment. The partition mechanism can divide the cavity 4 into a first chamber 41 and a second chamber 42.

[0076] The partition mechanism includes a partition body 1 and a first valve assembly 2. The partition body 1 has a first through hole 11. The first valve assembly 2 includes a drive member 21 and a first valve plate 22. The first valve plate 22 is tractively connected to the drive member 21, and the drive member 21 can drive the first valve plate 22 to move to seal or open the first through hole 11. The partition body 1 can divide the cavity 4 into a first chamber 41 and a second chamber 42. When the pressure difference between the two sides of the partition body 1 is large, for example, when the pressure difference between the two chambers of the partition body 1 is greater than a preset value, the drive member 21 can drive the first valve plate 22 to open the first through hole 11, so that the two chambers of the partition body 1 are connected, thereby helping to reduce the pressure difference between the two sides of the partition body 1, and thus effectively protecting the partition body 1 from deformation caused by air pressure. When the pressure difference between the two sides of the partition body 1 is small, for example, when the pressure difference between the two chambers of the partition body 1 does not exceed the preset value, the drive member 21 can drive the first valve plate 22 to move toward the first through hole 11 to seal the first through hole 11.

[0077] In this example, the first chamber 41 is located on the upper side of the partition body 1 and can serve as a winding chamber, i.e., the first chamber 41 can accommodate the winding mechanism. The second chamber 42 is located on the lower side of the partition body 1 and can serve as an evaporation chamber, i.e., the second chamber 42 is used to accommodate the evaporation boat. When the first chamber 41 and the second chamber 42 are evacuated, when the pressure difference between the chambers on both sides of the partition body 1 is greater than a preset value, the driving member 21 can drive the first valve plate 22 to open the first through hole 11, so that the chambers on both sides of the partition body 1 are connected. This helps to reduce the pressure difference between the two sides of the partition body 1, thereby effectively protecting the partition body 1 from deformation caused by air pressure.

[0078] like Figure 1 and Figure 5 As shown, the partition body 1 is provided with a coating port 16. The winding mechanism includes a coating roller 5, which is suitable for winding the substrate. The coating roller 5 corresponds to the coating port 16 so that the substrate can be coated by evaporation at the position of the coating port 16.

[0079] like Figure 1 and Figure 5 As shown, the partition body 1 can be provided with multiple coating ports 16, and each coating port 16 is provided with a corresponding coating roller 5. For example, the partition body 1 can be provided with two, three or four coating ports 16, which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0080] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0081] Although specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A partition mechanism, characterized in that, include: The partition body is provided with a first through hole; The first valve body assembly includes a drive member and a first valve plate, the first valve plate being throttledly connected to the drive member, the drive member being capable of moving the first valve plate to seal or open the first through hole.

2. The partition mechanism according to claim 1, characterized in that, The partition body is also provided with a first guide hole, and the first valve body assembly is further provided with a first guide rod. The first guide rod is connected to the first valve plate. The first guide rod can extend into the first guide hole and can slide along the first guide hole.

3. The partition mechanism according to claim 1, characterized in that, The first valve body assembly further includes a rotating shaft, the first valve plate is connected to the rotating shaft, and the driving member can drive the rotating shaft to rotate so as to drive the first valve plate to seal or open the first through hole.

4. The partition mechanism according to claim 3, characterized in that, The partition body is provided with a plurality of first through holes, and a plurality of first valve plates are provided accordingly, with the plurality of first valve plates spaced apart along the length direction of the rotating shaft.

5. The partition mechanism according to claim 3, characterized in that, The first valve body assembly further includes a connector, one end of which is connected to the rotating shaft, and the other end is rotatably connected to the first valve plate.

6. The partition mechanism according to claim 3, characterized in that, The driving component includes a linear driving component and a linkage component. The linear driving component is connected to the rotating shaft via the linkage component, and the linear driving component can drive the rotating shaft to rotate via the linkage component.

7. The partition mechanism according to claim 6, characterized in that, The linkage includes a first link and a second link. One end of the first link is connected to the rotating shaft, and the other end is rotatably connected to the second link. The end of the second link away from the first link is drively connected to the linear drive.

8. The partition mechanism according to claim 1, characterized in that, A sealing ring is provided on the outer periphery of the first through hole, and the first valve plate can abut against the sealing ring to seal the first through hole.

9. The partition mechanism according to claim 1, characterized in that, It also includes a second valve body assembly, the partition body is further provided with a second through hole, the second valve body assembly includes a second valve plate and an elastic element, the elastic element is capable of pushing the second valve plate toward the second through hole to seal the second through hole.

10. The partition mechanism according to claim 9, characterized in that, The second valve body assembly further includes a second guide rod, which is slidably disposed on the partition body and connected to the second valve plate.

11. The partition mechanism according to claim 10, characterized in that, The elastic element is sleeved on the second guide rod. One end of the elastic element abuts against the partition body, and the other end abuts against the second guide rod. The elastic element can push the second guide rod to move, thereby pushing the second valve plate toward the second through hole.

12. An evaporation coating apparatus, characterized in that, It includes a cavity and a partition mechanism as described in any one of claims 1 to 11, the partition mechanism being capable of dividing the cavity into a first chamber and a second chamber.

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