Furnace door for high-temperature reaction furnace

Abstract

The furnace door comprises a furnace door body, a furnace door sealing ring is arranged on the edge of the inner end face of the furnace door body, a cooling water channel is arranged on the edge of the outer end face of the furnace door body, and a furnace door water cooling assembly is arranged in the middle of the outer end face of the furnace door body. The furnace door for the high-temperature reaction furnace has the advantages that the service life of the furnace door sealing ring can be prolonged, the scalding risk is reduced, the surface temperature of the furnace door is uniformly distributed, and the sealing effect is good.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, concretely relates to a furnace door for high temperature reaction furnace. BACKGROUND

[0002] The production of solar cells needs to pass through processes such as texturing, diffusion, etching, film plating and printing in turn. As a core link in the preparation process of solar cells, the silicon wafer is placed into the reaction furnace through a quartz boat as a carrier, nitrogen, oxygen and diffusion source are introduced into the reaction furnace under high temperature and low pressure, so that the surface of the silicon wafer diffuses and deposits to form a PN junction. Therefore, it is particularly important to ensure a stable low-pressure environment inside the reaction furnace at high temperature. The existing mainstream equipment basically seals through the fit of the sealing ring on the furnace door and the reaction furnace, but the sealing ring is prone to aging and damage under high temperature environment.

[0003] The existing scheme seals the sealing ring by processing a water tank on the surface of the furnace door and welding a sealing plate to form a sealed water channel. The existing furnace door has the following shortcomings:

[0004] 1) The cooling range of the furnace door is small, only for the position of the sealing ring, the temperature at the center position of the furnace door is high, the temperature distribution on the surface of the furnace door is uneven, the furnace door is prone to deformation after long-term use, affecting the sealing effect, and there is a risk of scalding when the surface temperature is high during maintenance;

[0005] 2) When the furnace door cooling water is unqualified or contains impurities, the furnace door water channel is prone to blockage, the water channel structure of the furnace door processed with a water tank on the surface and welded with a sealing plate cannot be disassembled on site, and after the water channel is blocked, it is difficult to clean, so the furnace door can only be replaced, affecting reuse;

[0006] 3) The sealing water channel is formed by processing a water tank on the surface of the furnace door and welding a sealing plate, which is difficult to process and weld, and the weld is prone to cracking and leaking after long-term high-temperature use, which cannot be maintained on site and can only be returned to the factory for repair, which is time-consuming and laborious and increases the cost. INVENTION CONTENTS

[0007] The technical problem to be solved by the utility model is to overcome the shortcomings of the prior art, and provide a furnace door for a high-temperature reaction furnace, which can improve the service life of the furnace door sealing ring, the temperature distribution on the surface of the furnace door is uniform, and the sealing effect is good.

[0008] To solve the above technical problems, the utility model adopts the following technical scheme:

[0009] A furnace door for a high-temperature reaction furnace, comprising a furnace door body, the edge of the inner end face of the furnace door body is provided with a furnace door sealing ring, the edge of the outer end face of the furnace door body is provided with a cooling water channel, and the middle part of the outer end face of the furnace door body is provided with a furnace door water cooling assembly.

[0010] As a further improvement of the above technical scheme:

[0011] The cooling water path comprises a cooling water groove formed on the furnace door body, and a sealing plate is arranged on the cooling water groove and detachably connected with the furnace door body.

[0012] An inner sealing ring is arranged on the inner ring of the cooling water groove, and an outer sealing ring is arranged on the outer ring of the cooling water groove, and the cooling water groove is sealed with the inner sealing ring and the outer sealing ring.

[0013] The cooling water path is annular and arranged corresponding to the furnace door sealing ring.

[0014] The furnace door water cooling assembly comprises a water cooling pipeline, a water inlet of the water cooling pipeline is communicated with a water inlet of the cooling water path, and a water outlet of the water cooling pipeline is communicated with a water outlet of the cooling water path.

[0015] Two three-way joints are arranged on the sealing plate, a first port of one three-way joint is communicated with the cooling water path, a second port is communicated with an inlet of the water cooling pipeline, and a third port is a water inlet, a first port of the other three-way joint is communicated with the cooling water path, a second port is communicated with an outlet of the water cooling pipeline, and a third port is a water outlet.

[0016] A partition plate is arranged in the cooling water path, and the connection points of the two three-way joints with the cooling water path are located on the two sides of the partition plate.

[0017] The furnace door water cooling assembly further comprises a water cooling disc, the water cooling disc is arranged on the middle part of the outer end surface of the furnace door body, and the water cooling pipeline is arranged in the water cooling disc.

[0018] One or more rings of water cooling pipelines are arranged in the water cooling disc.

[0019] The water cooling pipeline is a copper pipe, a stainless steel pipe or a galvanized pipe.

[0020] Compared with the prior art, the furnace door for a high-temperature reaction furnace has the following advantages:

[0021] 1. The furnace door for a high-temperature reaction furnace can cool the furnace door sealing ring by a water cooling mode, prevent the furnace door sealing ring from being overheated and damaged, and improve the service life of the furnace door sealing ring; the furnace door water cooling assembly arranged in the middle part of the furnace door body can reduce the temperature of the central position of the furnace door, reduce the risk of scalding, improve the uniformity of the surface temperature distribution of the furnace door, prevent the furnace door from being deformed after long-time use, and improve the sealing effect.

[0022] 2. The furnace door for a high-temperature reaction furnace according to the utility model, through the form of the groove on the furnace door body to form the cooling water groove, under the guarantee of the structural strength, reduce the door plate thickness of the interval between the cooling water groove and the furnace door sealing ring, facilitate the cooling water to take away the heat more effectively, improve the cooling effect, and through the setting of the detachable sealing plate, the sealing plate is detached to clean the cooling water groove, improve the maintenance convenience, reduce the maintenance cost, prevent the cooling water groove from being blocked, and improve the cooling effect.

[0023] 3. The furnace door for a high-temperature reaction furnace according to the utility model, the cooling water groove is sealed with the sealing plate through the inner sealing ring and the outer sealing ring, facilitating maintenance and repair and being easy to replace.

[0024] 4. The furnace door for a high-temperature reaction furnace according to the utility model, the annular cooling water path is arranged on the two end faces of the furnace door body corresponding to the furnace door sealing ring, so that the furnace door sealing ring can be uniformly cooled, and the cooling effect is improved.

[0025] 5. The furnace door for a high-temperature reaction furnace according to the utility model, the cooling water path and the water cooling pipeline share the water inlet and the water outlet, so that the number of external water inlets and water outlets can be reduced, the structure is simple and compact, the cooling water path and the water cooling pipeline are connected in parallel with each other, independently cooled, do not affect each other, and are high in reliability.

[0026] 6. The furnace door for a high-temperature reaction furnace according to the utility model, the water inlet and the water outlet of the cooling water path are arranged on the two sides of the partition plate, so that the cooling water can circulate along a complete annular path, the temperature of each part of the cooling water path is uniform, the cooling effect is better, and the cooling is more uniform.

[0027] 7. The furnace door for a high-temperature reaction furnace according to the utility model, the water cooling disc can increase the cooling area and has a better cooling effect, and the water cooling disc is installed in the middle of the outer end face of the furnace door body, so that the original furnace door structure does not need to be changed and the strength of the furnace door is not affected. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 is a structural schematic view of an inner end face of the furnace door for a high-temperature reaction furnace according to the utility model.

[0029] Figure 2 is a structural schematic view of an outer end face of the furnace door for a high-temperature reaction furnace according to the utility model.

[0030] Figure 3 is a front view of the outer end face of the furnace door for a high-temperature reaction furnace according to the utility model.

[0031] Figure 4 is a structural schematic view of a cooling water path of the furnace door for a high-temperature reaction furnace according to the utility model.

[0032] Figure 5This is a schematic diagram of the structure of the furnace door water-cooling assembly in the furnace door of a high-temperature reactor according to this utility model.

[0033] The labels in the diagram represent: 1. Furnace door body; 11. Furnace door sealing ring; 2. T-joint; 3. Cooling water passage; 31. Cooling water tank; 32. Sealing plate; 33. Inner sealing ring; 34. Outer sealing ring; 35. Partition plate; 4. Furnace door water cooling assembly; 41. Water cooling pipe; 42. Water cooling plate. Detailed Implementation

[0034] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0035] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0036] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0037] In this utility model, unless otherwise explicitly specified and limited, the terms "assembly," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0038] like Figures 1 to 5 As shown, the furnace door for a high-temperature reactor in this embodiment includes a furnace door body 1, a furnace door sealing ring 11 is provided on the edge of the inner end face of the furnace door body 1, a cooling water channel 3 is provided on the edge of the outer end face of the furnace door body 1, and a furnace door water cooling assembly 4 is provided in the middle of the outer end face of the furnace door body 1.

[0039] In this embodiment, the furnace door for a high-temperature reactor is sealed to the reactor via a furnace door sealing ring 11. The reactor undergoes a high-temperature reaction. Cooling water channels 3 cool the furnace door sealing ring 11 at the edges of the furnace door body 1, while a furnace door water-cooling assembly 4 cools the center of the furnace door body 1, achieving overall cooling of the furnace door body 1. This embodiment of the furnace door for a high-temperature reactor uses water cooling to prevent the furnace door sealing ring 11 from overheating and being damaged, thus extending its service life. By placing the furnace door water-cooling assembly 4 in the middle of the furnace door body 1, the temperature at the center of the furnace door can be reduced, lowering the risk of burns. Furthermore, it improves the uniformity of temperature distribution on the furnace door surface, preventing deformation of the furnace door after prolonged use and enhancing the sealing effect.

[0040] Furthermore, in this embodiment, the cooling water path 3 includes a cooling water trough 31 formed on the furnace door body 1. The cooling water trough 31 is covered with a sealing plate 32, which is detachably connected to the furnace door body 1. By forming the cooling water trough 31 by slotting it on the furnace door body 1, the thickness of the door plate between the cooling water trough 31 and the furnace door sealing ring 11 is reduced while ensuring structural strength. This allows the cooling water to more effectively remove heat, improving the cooling effect. Furthermore, the detachable sealing plate 32 allows for cleaning of the cooling water trough 31, improving maintenance convenience, reducing maintenance costs, and preventing blockage of the cooling water trough 31, thus enhancing the cooling effect.

[0041] Furthermore, in this embodiment, the inner ring of the cooling water tank 31 is equipped with an inner sealing ring 33, and the outer ring is equipped with an outer sealing ring 34. The cooling water tank 31 is sealed to the sealing plate 32 through the inner sealing ring 33 and the outer sealing ring 34. The sealing of the cooling water tank 31 to the sealing plate 32 through the inner sealing ring 33 and the outer sealing ring 34 facilitates maintenance and repair, and makes replacement easy.

[0042] Furthermore, in this embodiment, the cooling water channel 3 is annular and is arranged correspondingly to the furnace door sealing ring 11. The annular cooling water channel 3 and the furnace door sealing ring 11 are respectively arranged on the two end faces of the furnace door body 1, that is, the projection of the furnace door sealing ring 11 on the outer end face of the furnace door body 1 can be completely covered or overlapped by the cooling water channel 3, so that the furnace door sealing ring 11 can be uniformly cooled in all places, thereby improving the cooling effect.

[0043] Furthermore, in this embodiment, the furnace door water-cooling assembly 4 includes a water-cooling pipe 41. The inlet of the water-cooling pipe 41 is connected to the inlet of the cooling water circuit 3, and the outlet of the water-cooling pipe 41 is connected to the outlet of the cooling water circuit 3. The cooling water circuit 3 and the water-cooling pipe 41 share the same inlet and outlet, which can reduce the number of external inlet and outlet pipes, resulting in a simple and compact structure. Moreover, the cooling water circuit 3 and the water-cooling pipe 41 are connected in parallel and cool independently without affecting each other, thus ensuring high reliability.

[0044] Furthermore, in this embodiment, the sealing plate 32 is provided with two T-joints 2. The first interface of one T-joint 2 is connected to the cooling water passage 3, the second interface is connected to the inlet of the water-cooled pipe 41, and the third interface is the water inlet. The first interface of the other T-joint 2 is connected to the cooling water passage 3, the second interface is connected to the outlet of the water-cooled pipe 41, and the third interface is the water outlet. By setting the T-joints 2 to connect the cooling water passage 3 and the water-cooled pipe 41 in parallel, the T-joints 2 can enable the cooling water passage 3 and the water-cooled pipe 41 to have common water inlet and outlet, and the structure is simple and compact. Of course, the T-joints 2 can also be replaced by a structure of multiple joints spliced ​​together.

[0045] Furthermore, in this embodiment, a baffle 35 is provided in the cooling water circuit 3, and the connection points of the two T-joints 2 with the cooling water circuit 3 are located on both sides of the baffle 35. By setting the baffle 35, the inlet and outlet of the cooling water circuit 3 are located on both sides of the baffle 35, so that the cooling water can circulate in a complete annular path, the temperature is uniform throughout the cooling water circuit 3, the cooling effect is better, and the cooling is more uniform.

[0046] Furthermore, in this embodiment, the furnace door water-cooling assembly 4 also includes a water-cooling plate 42, which is installed in the middle of the outer end face of the furnace door body 1, and the water-cooling pipe 41 is wound around the water-cooling plate 42. The water-cooling plate 42 can increase the cooling area and improve the cooling effect. Moreover, since the water-cooling plate 42 is installed in the middle of the outer end face of the furnace door body 1, there is no need to change the original furnace door structure and the strength of the furnace door is not affected.

[0047] Furthermore, in this embodiment, multiple turns of water-cooling pipes 41 are wound around the water-cooling plate 42. The multiple turns of water-cooling pipes 41 increase the contact area with the water-cooling plate 42, resulting in faster heat conduction and better cooling. Of course, in other embodiments, the number of turns of the water-cooling pipes 41 or the addition of heat sinks can further improve the cooling effect.

[0048] Furthermore, in this embodiment, the water-cooling pipe 41 is a copper pipe. Copper pipes have good thermal conductivity and cooling effect. Of course, in other embodiments, the water-cooling pipe 41 can also be a stainless steel pipe, a galvanized pipe, or a metal pipe of other materials, which is low in cost.

[0049] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to preferred embodiments, it is not intended to limit the present utility model. Any person skilled in the art can make many possible variations and modifications to the technical solution of the present utility model using the methods and techniques disclosed above, or modify it into equivalent embodiments with equivalent changes, without departing from the spirit and technical solution of the present utility model. Therefore, any simple modifications, equivalent substitutions, equivalent changes and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the content of the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A furnace door for a high-temperature reactor, comprising a furnace door body (1), wherein a furnace door sealing ring (11) is provided on the edge of the inner end face of the furnace door body (1), characterized in that: The edge of the outer end face of the furnace door body (1) is provided with a cooling water channel (3), and the middle part of the outer end face of the furnace door body (1) is provided with a furnace door water cooling assembly (4).

2. The furnace door for a high-temperature reactor according to claim 1, characterized in that: The cooling water channel (3) includes a cooling water tank (31) opened on the furnace door body (1), and a sealing plate (32) is provided on the cooling water tank (31). The sealing plate (32) is detachably connected to the furnace door body (1).

3. The furnace door for a high-temperature reactor according to claim 2, characterized in that: The inner ring of the cooling water tank (31) is equipped with an inner sealing ring (33), and the outer ring is equipped with an outer sealing ring (34). The cooling water tank (31) is sealed to the sealing plate (32) through the inner sealing ring (33) and the outer sealing ring (34).

4. The furnace door for a high-temperature reactor according to claim 1, characterized in that: The cooling water channel (3) is annular and is arranged in correspondence with the furnace door sealing ring (11).

5. The furnace door for a high-temperature reactor according to claim 2, characterized in that: The furnace door water cooling assembly (4) includes a water cooling pipe (41), the inlet of which is connected to the inlet of the cooling water circuit (3), and the outlet of which is connected to the outlet of the cooling water circuit (3).

6. The furnace door for a high-temperature reactor according to claim 5, characterized in that: The sealing plate (32) is provided with two T-connectors (2). The first interface of one T-connector (2) is connected to the cooling water circuit (3), the second interface is connected to the inlet of the water-cooled pipe (41), and the third interface is the water inlet. The first interface of the other T-connector (2) is connected to the cooling water circuit (3), the second interface is connected to the outlet of the water-cooled pipe (41), and the third interface is the water outlet.

7. The furnace door for a high-temperature reactor according to claim 6, characterized in that: The cooling water passage (3) is provided with a partition (35), and the connection points of the two three-way connectors (2) and the cooling water passage (3) are located on both sides of the partition (35).

8. The furnace door for a high-temperature reactor according to any one of claims 5 to 7, characterized in that: The furnace door water cooling assembly (4) also includes a water cooling plate (42), which is installed in the middle of the outer end face of the furnace door body (1), and the water cooling pipe (41) is wound around the water cooling plate (42).

9. The furnace door for a high-temperature reactor according to claim 8, characterized in that: One or more turns of water-cooled pipe (41) are wound around the water-cooled plate (42).

10. The furnace door for a high-temperature reactor according to any one of claims 5 to 7, characterized in that: The water-cooled pipe (41) is a copper pipe, a stainless steel pipe, or a galvanized pipe.

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