Pressure measuring device and detection equipment

Abstract

The utility model relates to the technical field of detection equipment, and discloses a pressure measuring device and detection equipment. The pressure measuring device comprises a seat body assembly, a heating assembly and an adsorption assembly, wherein the seat body assembly comprises a seat body and a pressure head which are connected with each other; the heating assembly is arranged on the base assembly or connected with the base assembly in an abutting mode. The suction assembly comprises a suction nozzle and a suction cup movably penetrating through the pressing head in the first direction, the base body is provided with a vacuum channel, and the end, away from the vacuum channel, of the suction nozzle is connected to the suction cup. The suction nozzle and the suction cup are hollow, the hollow positions of the suction nozzle and the suction cup are communicated to form a vacuum channel, and the vacuum channel is communicated with the vacuum channel. The suction nozzle is arranged in the base body in a floating mode so that the suction cup can extend out of the side, away from the base body, of the pressing head in the first direction, and then the suction cup can suck a to-be-tested chip. The utility model provides a pressure measuring device and detection equipment, which can realize the fixation of a chip, and the fixation is more reliable. And meanwhile, the chip can be heated.

Description

TECHNICAL FIELD

[0001] The utility model relates to detection equipment technical field especially, relates to a kind of pressure measuring device and detection equipment. BACKGROUND

[0002] In the technical field of high-temperature testing of semiconductor package chips, it is necessary to implement chip handling and heating testing. Since BGA chips are small in size and have tin balls on the back, it is necessary to ensure that the vacuum pressure meets the standards during testing to avoid the situation that the chips are easily flying during movement due to their small size and light weight. In addition, it is also necessary to heat the chips.

[0003] Therefore, there is an urgent need for a pressure measuring device and detection equipment to solve the above problems. INVENTION CONTENTS

[0004] Based on the above, the purpose of the utility model is to provide a pressure measuring device and detection equipment that can achieve stable handling of chips and make the material taking and placing and handling process more reliable. It can also heat the chips.

[0005] To achieve the above purpose, the utility model adopts the following technical solutions:

[0006] The pressure measuring device comprises:

[0007] The seat body assembly comprises a seat body and a pressure head connected to each other.

[0008] The heating assembly is arranged in the seat body assembly or is in abutting connection with the seat body assembly.

[0009] The suction assembly comprises a suction nozzle and a suction disc movably arranged in the pressure head along a first direction. The seat body is provided with a vacuum passage, and one end of the suction nozzle away from the vacuum passage is connected to the suction disc. The suction nozzle and the suction disc are both hollow, and the hollow positions of the two are connected to form a vacuum passage. The vacuum passage is in communication with the vacuum passage. The suction nozzle is floatingly arranged in the seat body, so that the suction disc can extend out of the pressure head away from one side of the seat body along the first direction, and the suction disc can then adsorb the chip to be tested.

[0010] As a preferred solution of the pressure measuring device, the seat body assembly is further provided with a mounting seat and an elastic member. The mounting seat is provided with a floating hole, the suction nozzle is provided with a floating flange, the suction nozzle is arranged in the floating hole and connected to the suction disc, and the floating flange is arranged between the mounting seat and the seat body. One side of the floating flange away from the mounting seat is in abutting connection with the elastic member, and the elastic member makes the floating flange have a tendency to abut against the end face of the mounting seat close to the seat body.

[0011] As a preferred embodiment of the pressure measuring device, the mounting base is provided with a floating groove on the side near the base body. The floating groove is adapted to the shape of the floating flange, and the floating hole is provided through the bottom of the floating groove.

[0012] As a preferred embodiment of the pressure measuring device, the base assembly is further provided with a positioning post extending along the floating direction of the floating flange, the floating flange is provided with a positioning notch, and the positioning post is placed in the positioning notch.

[0013] As a preferred embodiment of the pressure measuring device, a mounting post is provided at one end of the base body near the pressure head. The mounting post is hollow, and the vacuum channel is connected to the hollow part of the mounting post. One end of the suction nozzle passes through the mounting post, and the elastic element is sleeved on the outside of the mounting post.

[0014] As a preferred embodiment of the pressure measuring device, a sealing element is provided between the suction nozzle and the mounting post.

[0015] As a preferred embodiment of the pressure measuring device, the base body is provided with a first mounting groove on the side near the pressure head, the pressure head is provided with a second mounting groove on the side near the base body, and the mounting seat is disposed within the mounting space enclosed by the first mounting groove and the second mounting groove.

[0016] As a preferred embodiment of the pressure measuring device, an adsorption seat is provided at the end of the pressure head away from the seat body, the adsorption seat is provided with an adsorption hole, the suction cup is movably inserted through the adsorption hole, and the adsorption seat is provided with a limit protrusion in the axial direction.

[0017] As a preferred embodiment of the pressure measuring device, the pressure measuring device further includes a quick-release assembly, which includes at least two quick-release heads, each of which is respectively disposed on two opposite sides of the base body; each of the quick-release heads is connected to the base body via an adapter plate.

[0018] The testing equipment includes a floating head and a pressure measuring device as described in any of the above embodiments, wherein the quick-release assembly of the pressure measuring device is detachably connected to the floating head.

[0019] The beneficial effects of this utility model are as follows:

[0020] This invention utilizes an adsorption component to adsorb the chip under test. A heating component heats the adsorbed chip. A mounting assembly houses the adsorption component and transfers heat from the heating component to the chip. Specifically, the heating component can be mounted on the mounting assembly or directly contact it for heat transfer. This simultaneous fixation and heating of the chip enhances the functionality of the pressure testing device, leading to more accurate performance testing of the chip. The adsorption component creates a negative pressure environment within the vacuum channel and vacuum path, ensuring stable adsorption of the chip. The floating nozzle and suction cup further enhance adsorption reliability and reduce rigid contact between the suction cup and the chip, minimizing damage. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0022] Figure 1 This is an exploded view of the pressure measuring device provided in a specific embodiment of this utility model;

[0023] Figure 2 This is an exploded view of the pressure measuring device provided in a specific embodiment of this utility model from another perspective;

[0024] Figure 3 This is a partial schematic diagram of the testing equipment provided in a specific embodiment of this utility model.

[0025] In the picture:

[0026] 100. Seat assembly; 110. Seat body; 112. Mounting post; 113. Vacuum channel; 114. First mounting groove; 120. Pressure head; 121. Second mounting groove; 122. Adsorption seat; 1221. Adsorption hole; 1222. Limiting protrusion; 130. Mounting seat; 131. Floating hole; 132. Floating groove; 133. Positioning post; 140. Elastic element; 150. Sealing element;

[0027] 200. Adsorption assembly; 210. Suction nozzle; 211. Floating flange; 2111. Positioning notch; 220. Suction cup;

[0028] 300. Quick-release assembly; 310. Quick-release head; 320. Adapter board;

[0029] 10. Testing station; 11. Test stand; 12. Mounting plate. Detailed Implementation

[0030] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0031] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0032] Unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and connections within two components or interactions between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0033] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0035] like Figure 1 and Figure 2As shown, this embodiment provides a pressure measuring device, which includes a base assembly 100, a heating assembly, and an adsorption assembly 200. The base assembly 100 includes a base body 110 and a pressure head 120 connected to each other. The heating assembly is disposed in the base assembly 100 or abuts against the base assembly 100. The adsorption assembly 200 includes a suction nozzle 210 and a suction cup 220 that moves along a first direction through the pressure head 120. The base body 110 is provided with a vacuum channel 113. One end of the suction nozzle 210 away from the vacuum channel 113 is connected to the suction cup 220. Both the suction nozzle 210 and the suction cup 220 are hollow, and their hollow positions are connected to form a vacuum passage. The vacuum channel 113 is connected to the vacuum passage. The suction nozzle 210 is floatingly disposed inside the base body 110 so that the suction cup 220 can extend along the first direction beyond the side of the pressure head 120 away from the base body 110, thereby enabling the suction cup 220 to adsorb the chip to be tested. The suction nozzle 210 and the suction cup 220 move synchronously, and the axial directions of the suction nozzle 210 and the suction cup 220 coincide. The first direction is the axial direction of the suction nozzle 210, which is also the floating direction of the suction nozzle 210 relative to the base body 110.

[0036] An adsorption component 200 is used to adsorb the chip under test. A heating component is used to heat the adsorbed chip under test. A base component 100 is used to mount the adsorption component 200 and to transfer heat from the heating component to the chip under test. Specifically, the heating component can be located on the base component 100 or can abut against the base component 100 for heat transfer. This allows for both fixing and heating of the chip under test, increasing the functionality of the pressure testing device and making the performance testing of the chip under test more accurate. The adsorption component 200 adsorbs the chip under test by creating a negative pressure environment within the vacuum channel 113 and the vacuum passage. The floating design of the nozzle 210 and suction cup 220 makes the adsorption more reliable and reduces rigid contact between the suction cup 220 and the chip under test, thus reducing damage to the chip.

[0037] It is worth noting that when the heating component is set to abut against the base assembly 100, it can abut against the end of the base body 110 away from the pressure head 120; when the heating component is set to be placed in the heating component, the heating component can be set as a heating rod or set as gas heating, that is, the base body 110 is provided with a heating passage, and heating gas is introduced into the heating passage to achieve heating of the chip under test.

[0038] Specifically, a first mounting groove 114 is provided on the side of the base body 110 near the pressure head 120, and a second mounting groove 121 is provided on the side of the pressure head 120 near the base body 110. The first mounting groove 114 and the second mounting groove 121 enclose and form an installation space, in which the adsorption component 200 is floatingly mounted. By providing the mounting grooves, on the one hand, the adsorption component 200 is installed; on the other hand, the fit between the base body 110 and the pressure head 120 after installation is improved, facilitating heat transfer and thus improving the heating efficiency of the heating component for the chip under test.

[0039] Furthermore, to achieve the floating configuration of the adsorption component 200, the seat assembly 100 is also provided with a mounting base 130 and an elastic element 140. Both the mounting base 130 and the elastic element 140 are disposed within the installation space enclosed by the first mounting groove 114 and the second mounting groove 121. The mounting base 130 is provided with a floating hole 131, and the suction nozzle 210 is provided with a floating flange 211. One end of the suction nozzle 210 passes through the floating hole 131 and connects to the suction cup 220. The floating flange 211 is positioned between the mounting base 130 and the seat body 110, thereby achieving a floating connection between the suction nozzle 210 and the suction cup 220 relative to the seat body 110. The side of the floating flange 211 furthest from the mounting base 130 abuts against the elastic element 140, and the elastic element 140 causes the floating flange 211 to tend to abut against the end face of the mounting base 130 near the seat body 110 along a first direction. In addition, both the mounting base 130 and the pressure head 120 are connected to the base body 110 via connectors.

[0040] In this embodiment, a floating groove 132 is provided on the side of the mounting base 130 near the base body 110, and a floating hole 131 is provided through the bottom of the floating groove 132. When the elastic member 140 is in its natural state (i.e., without external force), the side of the floating flange 211 near the pressure head 120 abuts against the bottom of the floating groove 132, and the suction cup 220 protrudes from the pressure head 120 to adsorb the chip under test. When the elastic member 140 is compressed, the floating flange 211 moves away from the bottom of the floating groove 132 along the first direction, so that the suction cup 220 does not protrude from the pressure head 120, which facilitates the testing of the chip under test. If the external force on the elastic member 140 disappears, the floating flange 211 can be reset to its natural state (i.e., the floating flange 211 is in contact with the bottom of the floating groove 132) under the action of the elastic member 140. Preferably, the floating groove 132 and the floating flange 211 are adapted in shape.

[0041] Optionally, the base assembly 100 is further provided with a positioning post 133 extending along the floating direction (i.e., the first direction) of the floating flange 211, specifically the positioning post 133 being disposed on the mounting base 130. Correspondingly, the floating flange 211 is provided with a positioning notch 2111, within which the positioning post 133 can be placed. The positioning post 133 and the positioning notch 2111 not only provide guidance for the axial movement of the floating flange 211, but also serve to circumferentially limit the floating flange 211, preventing it from rotating around its axial direction.

[0042] As an optional solution for the pressure measuring device, a mounting post 112 is provided at one end of the base body 110 near the pressure head 120. The mounting post 112 is hollow, and the end of the suction nozzle 210 away from the suction cup 220 passes through the mounting post 112. It can be understood that the mounting post 112 is located at the bottom of the first mounting groove 114. At the same time, the vacuum channel 113 is connected to the hollow position of the mounting post 112, and the hollow part of the suction nozzle 210 is connected to the vacuum channel 113. The end of the vacuum channel 113 away from the suction nozzle 210 extends out of the base body 110 and is connected to the negative pressure device, so that the negative pressure device can create negative pressure in the vacuum channel 113 and the vacuum passage to adsorb the chip under test. Preferably, the inlet of the vacuum channel 113 (i.e., the opening of the vacuum channel 113 connecting with the external negative pressure device) is located on the side wall of the base body 110 without the quick-release assembly 300, so as to facilitate the connection of the negative pressure device and avoid interference with the quick-release assembly 300.

[0043] Preferably, a seal 150 is provided between the suction nozzle 210 and the mounting post 112 to improve the sealing between the vacuum channel 113 and the vacuum passage. Exemplarily, the seal 150 is an O-ring.

[0044] Furthermore, the elastic element 140 is sleeved on the outside of the mounting post 112. The mounting post 112 limits the elastic deformation direction of the elastic element 140, that is, the axial direction of the mounting post 112 is consistent with the direction of the elastic element 140 under force deformation. Preferably, the elastic element 140 is a spring, that is, the spring is sleeved on the outside of the mounting post 112, one end of which is sleeved on the outside of the mounting post 112 and presses against the bottom of the first mounting groove 114, and the other end presses against the side of the floating flange 211 facing the seat body 110.

[0045] In this embodiment, the end of the pressure head 120 away from the base body 110 is provided with an adsorption seat 122 protruding away from the base body 110. The adsorption seat 122 is provided with an adsorption hole 1221 for the suction cup 220 to pass through. The adsorption seat 122 is provided with a limiting protrusion 1222 in the axial direction. When the suction cup 220 adsorbs the chip under test and floats towards the base body 110, the chip under test can be confined between the limiting protrusions 1222, ensuring the accuracy of the adsorption position of the chip under test by the pressure measuring device, and thus ensuring the accuracy of the pressing between the chip under test and the detection chip 11.

[0046] Exemplarily, the pressure testing device also includes a quick-release assembly 300, which includes at least two quick-release heads 310 for quick disassembly from the floating head. Specifically, each quick-release head 310 is disposed on two opposite sides of the base body 110 to improve the reliability of the connection with the floating head. The quick-release head 310 is connected to the base body 110 via an adapter plate 320, i.e., the quick-release head 310 is connected to the adapter plate 320, and the adapter plate 320 is connected to the base body 110. It is worth noting that the quick-release head 310 can be connected to the floating head by using a latching protrusion and a latching groove, or it can be connected to the floating head by magnetic attraction. The specific connection method is not specifically limited here.

[0047] like Figure 3 As shown, this embodiment also discloses a testing device, including a floating head and the pressure measuring device in the above scheme, wherein the quick-release assembly 300 is detachably connected to the floating head; the testing device is also provided with a testing platform 10, and a test seat 11 for placing the chip under test is provided on the testing platform 10. During testing, the chip under test is first adsorbed by the pressure measuring device, and then the floating head drives the pressure measuring device and the chip under test to move so that the chip under test adsorbed by the pressure measuring device is placed in the test station of the test seat, and then the corresponding test is performed. Understandably, when the chip under test is pressed into the test socket 11, the elastic element 140 is compressed by force, and the end of the floating flange 211 away from the bottom of the floating groove 132 is disengaged from the base body 110. The suction cup 220 retracts into the pressure head 120. After the test is completed, the adsorption assembly 200 adsorbs the chip under test by negative pressure and moves the pressure head 120 away from the test socket 11 in the first direction. When the pressure head 120 is completely disengaged from the test socket 11, the external force on the elastic element 140 gradually disappears, causing the elastic element 140 to gradually return to its natural state (i.e., the state without external compression), so that the side of the floating flange 211 away from the base body 110 is pressed into the bottom of the floating groove 132 again.

[0048] Optionally, to enable the test socket 11 to be installed on the testing station 10, the testing station 10 also includes a mounting plate 12, through which the test socket 11 is connected to the testing station 10. It is understood that the connections between the testing station 10, the mounting plate 12, and the test socket 11 are all detachable, facilitating the replacement of different test sockets 11 according to different chips under test, thereby improving the versatility of the testing equipment.

[0049] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. A pressure measuring device, characterized in that, include: The seat assembly (100) includes a seat body (110) and a pressure head (120) connected to each other; A heating component is disposed on the base assembly (100) or abutted and connected to the base assembly (100); The adsorption assembly (200) includes a suction nozzle (210) and a suction cup (220) that moves along a first direction through the pressure head (120). The base body (110) is provided with a vacuum channel (113). One end of the suction nozzle (210) away from the vacuum channel (113) is connected to the suction cup (220). Both the suction nozzle (210) and the suction cup (220) are hollow, and their hollow positions are connected to form a vacuum passage. The vacuum channel (113) is connected to the vacuum passage. The suction nozzle (210) is floating inside the base body (110) so that the suction cup (220) can extend along the first direction out of the side of the pressure head (120) away from the base body (110), thereby enabling the suction cup (220) to adsorb the chip to be tested.

2. The pressure measuring device according to claim 1, characterized in that, The seat assembly (100) is further provided with a mounting base (130) and an elastic element (140). The mounting base (130) is provided with a floating hole (131), and the suction nozzle (210) is provided with a floating flange (211). The suction nozzle (210) passes through the floating hole (131) and is connected to the suction cup (220). The floating flange (211) is placed between the mounting base (130) and the seat body (110). The side of the floating flange (211) away from the mounting base (130) abuts against the elastic element (140). The elastic element (140) causes the floating flange (211) to tend to abut against the end face of the mounting base (130) near the seat body (110) in a first direction.

3. The pressure measuring device according to claim 2, characterized in that, The mounting base (130) is provided with a floating groove (132) on the side near the base body (110). The floating groove (132) is adapted to the shape of the floating flange (211). The floating hole (131) is provided through the bottom of the floating groove (132).

4. The pressure measuring device according to claim 2, characterized in that, The seat assembly (100) is further provided with a positioning post (133) extending along the floating direction of the floating flange (211), the floating flange (211) is provided with a positioning notch (2111), and the positioning post (133) is placed in the positioning notch (2111).

5. The pressure measuring device according to claim 2, characterized in that, The mounting post (112) is provided at one end of the seat body (110) near the pressure head (120). The mounting post (112) is hollow. The vacuum channel (113) is connected to the hollow part of the mounting post (112). One end of the suction nozzle (210) is inserted into the mounting post (112). The elastic element (140) is sleeved on the outside of the mounting post (112).

6. The pressure measuring device according to claim 5, characterized in that, A sealing element (150) is provided between the suction nozzle (210) and the mounting post (112).

7. The pressure measuring device according to claim 2, characterized in that, The base body (110) is provided with a first mounting groove (114) on the side near the pressure head (120), and the pressure head (120) is provided with a second mounting groove (121) on the side near the base body (110). The mounting seat (130) is disposed within the mounting space enclosed by the first mounting groove (114) and the second mounting groove (121).

8. The pressure measuring device according to any one of claims 1-7, characterized in that, An adsorption seat (122) is provided at one end of the pressure head (120) away from the seat body (110). An adsorption hole (1221) is provided on the adsorption seat (122). The suction cup (220) is movably inserted through the adsorption hole (1221). A limit protrusion (1222) is provided axially on the adsorption seat (122).

9. The pressure measuring device according to any one of claims 1-7, characterized in that, The pressure measuring device also includes a quick-release assembly (300), which includes at least two quick-release heads (310), each of which is disposed on two opposite sides of the seat body (110); each of the quick-release heads (310) is connected to the seat body (110) via an adapter plate (320).

10. A testing device, characterized in that, It includes a floating head and a pressure measuring device as described in any one of claims 1-9, wherein the quick-release assembly of the pressure measuring device is detachably connected to the floating head.

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