Glass wafer positioning clamp

Abstract

The utility model discloses a glass wafer positioning clamp which comprises a main body, the top end of the main body is connected with a processing table, the top end of the processing table is provided with an embedded groove, telescopic cylinders are symmetrically fixed at the top end of the processing table, and the end parts of the telescopic cylinders are connected with clamps embedded into the embedded groove. Steerable rolling wheels are symmetrically fixed to the corners of the bottom end of the main body, and an adjustable clamping and positioning mechanism is arranged in the clamp. Through the designed clamping groove, the positioning clamping plate, the connecting groove, the connecting block and the adjusting screw rod, the position of the positioning clamping plate can be adjusted according to the thickness of the glass wafer, the effect of clamping and positioning the end of the glass wafer is achieved, meanwhile, the rubber top pad, the rubber bottom pad and the rubber baffle are matched, and the clamping effect is good. In addition, the glass wafer in clamping can be protected, damage to the surface of the glass wafer is avoided, and compared with the prior art, positioning and clamping work of the glass wafer is greatly facilitated.

Description

Technical Field

[0001] This utility model belongs to the field of glass wafer clamping technology, and specifically relates to a glass wafer positioning clamp. Background Technology

[0002] Glass wafer positioning fixtures play a crucial role in semiconductor manufacturing, primarily ensuring the stability and accuracy of glass wafers during processing, inspection, and transportation. Glass wafers are extremely fragile and valuable; even minor movement or vibration can cause damage or performance degradation. Therefore, a high-quality positioning fixture effectively protects the wafer and ensures smooth production processes. Existing glass wafer positioning fixtures typically involve a fixed connection between the fixture and a cylinder's extension rod. The cylinder moves the fixture to press and fit the sides of the glass wafer. However, due to the varying thicknesses of the glass wafers, stable pressing and positioning of the wafer's ends within the fixture is not possible, leading to slight vertical movement or displacement within the fixture. To address this, we propose a new glass wafer positioning fixture. Utility Model Content

[0003] The purpose of this invention is to provide a glass wafer positioning fixture to solve the problem mentioned in the background art that the glass wafer positioning fixture does not have an adjustable clamping and positioning mechanism inside.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a glass wafer positioning fixture, comprising a main body, a processing table connected to the top of the main body, an embedded groove formed at the top of the processing table, telescopic cylinders symmetrically fixed to the top of the processing table, a fixture embedded in the embedded groove connected to the end of the telescopic cylinders, rotatable rollers symmetrically fixed at the bottom corner of the main body, an adjustable clamping and positioning mechanism provided inside the fixture, and a stable placement and use mechanism provided at the bottom of the main body, the adjustable clamping and positioning mechanism comprising: a clamping and positioning component and a rotation adjustment mechanism.

[0005] Preferably, the clamping and positioning assembly includes a clamping groove formed at the end of the clamp, and a positioning clamping plate is provided at the top of the inner part of the clamping groove.

[0006] Preferably, a rubber top pad is fixed to the bottom end of the positioning clamping plate, a rubber bottom pad is fixed to the inner bottom end of the clamping groove, and a rubber baffle is fixed to the inner side of the inner bottom end of the clamping groove relative to the rubber bottom pad.

[0007] Preferably, the rotation adjustment mechanism includes connecting grooves symmetrically formed on the inner wall of the clamping groove, and connecting blocks are symmetrically fixed on the inner side of the positioning clamping plate, the connecting blocks engaging with the connecting grooves.

[0008] Preferably, a guide groove is provided through the bottom end of the connecting block, and a guide rod is fixed inside the connecting groove, passing through the inside of the guide groove, and the guide rod is slidably connected to the guide groove.

[0009] Preferably, the top of the clamping groove has an adjusting screw hole extending to the top of the clamp, the top of the clamp is provided with an adjusting screw that is screwed through and connected to the adjusting screw hole, the bottom end of the adjusting screw is connected to the top of the positioning clamping plate with a bearing, and the top of the clamp is provided with a hand crank that is fixedly connected to the top of the adjusting screw.

[0010] Preferably, the stable placement mechanism includes a base symmetrically arranged at the bottom of the main body and relative to the inside of the steerable roller, and an operating block is fixed to the top of the base.

[0011] Preferably, the bottom end of the main body is provided with a fixing screw groove on the inner side of the steerable roller, and the top end of the operating block is fixed with a telescopic screw rod, which is screwed into the fixing screw groove.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] This invention, through its designed clamping groove, positioning clamping plate, connecting groove, connecting block, and adjusting screw, enables the position of the positioning clamping plate to be adjusted according to the thickness of the glass wafer, thereby achieving the function of clamping and positioning the end of the glass wafer. At the same time, the designed rubber top pad, rubber bottom pad, and rubber baffle can also protect the glass wafer during clamping, avoiding damage to the surface of the glass wafer. Compared with existing technologies, this invention greatly facilitates the positioning and clamping of glass wafers. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the external structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the groove structure of this utility model;

[0016] Figure 3 In this utility model Figure 1 Enlarged view of point A;

[0017] Figure 4 In this utility model Figure 1 Enlarged view of point B;

[0018] Figure 5 In this utility model Figure 3 Enlarged view of point C;

[0019] In the diagram: 1. Main body; 2. Machining table; 3. Embedded groove; 4. Telescopic cylinder; 5. Fixture; 6. Steering roller; 100. Clamping groove; 101. Positioning clamping plate; 200. Rubber top pad; 201. Rubber bottom pad; 202. Rubber baffle; 300. Connecting groove; 301. Connecting block; 400. Guide groove; 401. Guide rod; 500. Adjusting screw hole; 501. Adjusting screw; 502. Bearing; 503. Hand crank; 600. Base; 601. Operating block; 602. Fixing screw groove; 603. Telescopic screw. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see Figures 1 to 5 This utility model provides a technical solution: a glass wafer positioning fixture, including a main body 1, a processing table 2 connected to the top of the main body 1, an embedded groove 3 opened at the top of the processing table 2, telescopic cylinders 4 symmetrically fixed at the top of the processing table 2, a fixture 5 embedded in the embedded groove 3 connected to the end of the telescopic cylinder 4, rotatable rollers 6 symmetrically fixed at the bottom corner of the main body 1, an adjustable clamping and positioning mechanism is provided inside the fixture 5, and a stable placement and use mechanism is provided at the bottom of the main body 1. The adjustable clamping and positioning mechanism includes: a clamping and positioning component and a rotation adjustment mechanism.

[0022] In this embodiment, preferably, the clamping and positioning component includes a clamping groove 100 formed at the end of the clamp 5, and a positioning clamping plate 101 is provided at the top of the inside of the clamping groove 100, which facilitates the clamping and positioning of the glass wafer with the clamp 5.

[0023] In this embodiment, preferably, a rubber top pad 200 is fixed to the bottom end of the positioning clamping plate 101, a rubber bottom pad 201 is fixed to the inner bottom end of the clamping groove 100, and a rubber baffle 202 is fixed to the inner side of the inner bottom end of the clamping groove 100 relative to the inner side of the rubber bottom pad 201. This can protect the glass wafer embedded in the clamp 5 during clamping and prevent scratches and damage to the surface of the glass wafer.

[0024] In this embodiment, preferably, the rotation adjustment mechanism includes a connecting groove 300 symmetrically opened on the inner wall of the clamping groove 100, and a connecting block 301 symmetrically fixed on the inner side of the positioning clamping plate 101. The connecting block 301 is engaged with the connecting groove 300 to facilitate the connection between the positioning clamping plate 101 and the clamping groove 100.

[0025] In this embodiment, preferably, a guide groove 400 is provided through the bottom end of the connecting block 301, and a guide rod 401 that passes through the inside of the guide groove 400 is fixed inside the connecting groove 300. The guide rod 401 is slidably connected to the guide groove 400, which can play a role in connecting and limiting the connection between the connecting block 301 and the connecting groove 300.

[0026] In this embodiment, preferably, the top of the clamping groove 100 is provided with an adjusting screw hole 500 extending to the top of the clamp 5. The top of the clamp 5 is provided with an adjusting screw 501 that is screwed through and connected to the adjusting screw hole 500. A bearing 502 is connected between the bottom of the adjusting screw 501 and the top of the positioning clamping plate 101, which can drive the positioning clamping plate 101 to adjust its position while the adjusting screw 501 rotates. The top of the clamp 5 is provided with a hand crank 503 that is fixedly connected to the top of the adjusting screw 501, so as to easily rotate the adjusting screw 501 for rotation and lifting.

[0027] In this embodiment, preferably, the stable placement and use mechanism includes a base 600 symmetrically arranged at the bottom of the main body 1 and relative to the inside of the steerable roller 6. An operating block 601 is fixed at the top of the base 600, which can easily rotate the telescopic screw 603 inside the fixed screw groove 602.

[0028] In this embodiment, preferably, a fixing screw groove 602 is provided at the bottom end of the main body 1 relative to the inner side of the steerable roller 6, and a telescopic screw 603 is fixed at the top of the operating block 601. The telescopic screw 603 is screwed into the fixing screw groove 602, which can drive the base 600 to rise and fall, so as to position or release the main body 1.

[0029] The working principle and usage process of this utility model are as follows: When clamping and positioning glass wafers, the present utility model first moves the clamps 5 by pushing the telescopic cylinder 4 to adjust the distance between the two clamps 5 to be approximately the same as the size of the glass wafer. Then, the glass wafer is embedded into the clamping groove 100 and connected to the clamps 5, so that the bottom end of the glass wafer is in contact with the top end of the rubber base 201. Then, the telescopic cylinder 4 is activated again to push the clamps 5, so that the rubber baffle 202 inside the clamping groove 100 is in contact with the side of the glass wafer. The telescopic cylinder 4 is then stopped. Then, the hand crank 503 at the top of the clamps 5 is turned, which drives the adjusting screw 501 to move downward inside the adjusting screw hole 500. At the same time, the bearing 502 drives the positioning clamping plate 101 to move downward inside the clamping groove 100, and drives the connecting block 301 to slide inside the connecting groove 300. It also drives the guide groove 400 to slide downward on the surface of the guide rod 401 to play a moving guiding role. When the positioning is achieved... When the rubber pad 200 at the bottom of the clamping plate 101 presses against the top of the glass wafer, the hand crank 503 can be stopped, allowing the positioning clamping plate 101 to be positioned inside the clamping groove 100. The positioning clamping plate 101, in conjunction with the clamp 5, clamps and positions the glass wafer for processing. After processing, simply loosen the adjusting screw 501 in the opposite direction and move it upwards to release the positioning clamping plate 101 from clamping the glass wafer. Then, the telescopic cylinder 4 moves the clamp 5 to retract, allowing the glass wafer to be easily removed. After moving the main body 1 to a new position using the steerable roller 6, to ensure stable placement of the main body 1, first turn the operating block 601 clockwise, causing the telescopic screw 603 to rotate downwards inside the fixed screw groove 602. This simultaneously moves the base 600 downwards at the bottom of the main body 1, pressing it against the ground to position the main body 1 for stable placement.

[0030] Although embodiments of the present invention have been shown and described (see the detailed description above), it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A glass wafer positioning fixture, comprising a main body (1), a processing table (2) connected to the top of the main body (1), an embedded groove (3) formed at the top of the processing table (2), telescopic cylinders (4) symmetrically fixed at the top of the processing table (2), a clamp (5) embedded in the embedded groove (3) connected to the end of the telescopic cylinder (4), and steerable rollers (6) symmetrically fixed at the bottom corner of the main body (1), characterized in that: The clamp (5) is provided with an adjustable clamping and positioning mechanism inside, and the bottom of the main body (1) is provided with a stable placement and use mechanism. The adjustable clamping and positioning mechanism includes a clamping and positioning component and a rotation adjustment mechanism.

2. The glass wafer positioning fixture according to claim 1, characterized in that: The clamping and positioning assembly includes a clamping groove (100) formed at the end of the clamp (5), and a positioning clamping plate (101) is provided at the top of the inside of the clamping groove (100).

3. A glass wafer positioning fixture according to claim 2, characterized in that: A rubber top pad (200) is fixed to the bottom end of the positioning clamping plate (101), a rubber bottom pad (201) is fixed to the inner bottom end of the clamping groove (100), and a rubber baffle (202) is fixed to the inner side of the clamping groove (100) relative to the rubber bottom pad (201).

4. A glass wafer positioning fixture according to claim 3, characterized in that: The rotation adjustment mechanism includes connecting grooves (300) symmetrically opened on the inner wall of the clamping groove (100), and connecting blocks (301) are symmetrically fixed on the inner side of the positioning clamping plate (101), and the connecting blocks (301) are engaged with the connecting grooves (300).

5. A glass wafer positioning fixture according to claim 4, characterized in that: The bottom end of the connecting block (301) is provided with a guide groove (400), and a guide rod (401) passing through the inside of the connecting groove (300) is fixed inside the guide groove (400). The guide rod (401) is slidably connected to the guide groove (400).

6. A glass wafer positioning fixture according to claim 5, characterized in that: An adjusting screw hole (500) extending to the top of the clamp (5) is provided through the top of the clamp (100). An adjusting screw (501) is provided at the top of the clamp (5) and is screwed through the adjusting screw hole (500). A bearing (502) is connected between the bottom end of the adjusting screw (501) and the top end of the positioning clamping plate (101). A hand crank (503) is provided at the top of the clamp (5) and is fixedly connected to the top end of the adjusting screw (501).

7. A glass wafer positioning fixture according to claim 1, characterized in that: The stable placement mechanism includes a base (600) symmetrically arranged at the bottom of the main body (1) and inside the steerable roller (6), and an operating block (601) is fixed at the top of the base (600).

8. A glass wafer positioning fixture according to claim 7, characterized in that: The bottom end of the main body (1) is provided with a fixed screw groove (602) relative to the inner side of the steerable roller (6), and the top end of the operating block (601) is fixed with a telescopic screw (603), which is screwed into the fixed screw groove (602).

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