Vacuum diffusion welding tool

Abstract

The utility model belongs to the technical field of vacuum diffusion welding, and discloses a vacuum diffusion welding tool which is used for vacuum diffusion welding of a gas uniformizing plate and comprises two molybdenum plates, the two molybdenum plates are oppositely arranged on the two sides of the gas uniformizing plate in the thickness direction in a spaced mode, and a clamping groove is formed in the side, facing the gas uniformizing plate, of each molybdenum plate. The bottom of the clamping groove abuts against and is attached to one plate face of the gas uniformizing plate, and the side wall of the clamping groove abuts against and is attached to the peripheral wall face of the gas uniformizing plate, so that when vacuum diffusion welding is carried out on the gas uniformizing plate, the two molybdenum plates apply opposite pressure to the gas uniformizing plate, the clamping groove can prevent the gas uniformizing plate from being externally warped and deformed, and the welding quality of the gas uniformizing plate is improved. Therefore, the hole site size, shape and position precision of the air channel of the plate piece of the air uniformizing plate is ensured, and the effect that the air uniformizing plate enables the air to flow out uniformly is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum diffusion welding technical field especially relates to a kind of vacuum diffusion welding tooling. BACKGROUND

[0002] Uniform gas plate is used to make gas single-channel flow, after internal flow passage shunt, on the other side of uniform gas plate multi-channel flow to reach the purpose of making gas uniform flow, need to utilize vacuum diffusion welding process and under vacuum and specific temperature conditions, respectively, to the upper cover plate and lower cover plate provided with air passage are applied axial pressure, so that the solid metal joint surface between the upper cover plate and lower cover plate reaches interatomic distance, to weld the two plate pieces together to make uniform gas plate. However, under the coupling effect of high temperature creep and mechanical load, the upper cover plate and lower cover plate of uniform gas plate are prone to out-of-plane warping deformation under axial pressure, resulting in the hole size, shape and position of the air passage of uniform gas plate are offset and deformed, resulting in the effect of uniform gas plate making gas uniform flow is reduced. SUMMARY

[0003] The utility model discloses a kind of vacuum diffusion welding tooling, can prevent the plate piece of uniform gas plate from producing out-of-plane warping deformation when welding making uniform gas plate, ensure the effect of uniform gas plate making gas uniform flow.

[0004] To achieve this purpose, the utility model adopts the following technical scheme:

[0005] A kind of vacuum diffusion welding tooling is provided, for vacuum diffusion welding uniform gas plate, vacuum diffusion welding tooling includes:

[0006] Molybdenum plate, two molybdenum plates are oppositely spaced on the two sides of uniform gas plate along the thickness direction, each molybdenum plate is provided with clamping groove towards the side of uniform gas plate, the groove bottom of clamping groove is abutted and fitted with one plate surface of uniform gas plate, the side wall of clamping groove is abutted and fitted with the outer circumferential wall surface of uniform gas plate.

[0007] Preferably, the side of molybdenum plate away from uniform gas plate is also provided with graphite plate.

[0008] Preferably, the side of graphite plate away from molybdenum plate is also provided with heating piece.

[0009] Preferably, graphite plate is abutted with the side of molybdenum plate and has pressure holding surface, and molybdenum plate is abutted with the side of graphite plate and is provided with pressure bearing surface, and pressure holding surface and pressure bearing surface are same in shape.

[0010] Preferably, one of pressure holding surface and pressure bearing surface is convex surface, and the other is concave surface matched with convex surface.

[0011] Preferably, the abutted position of molybdenum plate and uniform gas plate is also provided with solder stop element.

[0012] Preferably, solder stop element is graphite paper.

[0013] Preferably, the clamping groove has a peripheral side wall and a bottom wall, the peripheral side wall matches the outer peripheral wall surface of the air distribution plate, and the bottom wall can support the plate surface of the air distribution plate.

[0014] Preferably, a transition wall is arranged between the peripheral side wall and the bottom wall, and the transition wall matches the edge chamfer of the air distribution plate.

[0015] Preferably, the groove bottom of the clamping groove is provided with a first positioning member, and the plate surface of the air distribution plate is correspondingly provided with a second positioning member capable of positioning cooperation with the first positioning member.

[0016] The utility model discloses the beneficial effect:

[0017] The vacuum diffusion welding tool provided by the utility model is characterized in that two molybdenum plates are arranged on the two sides of the air distribution plate along the thickness direction, the side wall of the clamping groove of the molybdenum plate matches the outer peripheral wall surface of the air distribution plate, and the groove bottom of the clamping groove is in abutting and fitting connection with the plate surface of the air distribution plate. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 Is the sectional view of the vacuum diffusion welding tool provided by the utility model.

[0019] In the drawings:

[0020] 100, air distribution plate;

[0021] 1, molybdenum plate; 11, clamping groove; 111, peripheral side wall; 112, bottom wall; 12, pressure receiving surface;

[0022] 2, graphite plate; 21, pressure receiving surface. DETAILED DESCRIPTION

[0023] The utility model will be further explained in detail in combination with the drawings and examples. It can be understood that the specific examples described here are only used to explain the utility model, and not limited to the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.

[0024] In the description of the utility model, unless another definite provision and limitation, the term "link", "connect", "fix" should be broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through the intermediate medium, can be two elements inside the communication or two element's mutual action relation.For the ordinary skilled in the art, the above-mentioned term can be understood in the utility model with the specific meaning of the specific situation.

[0025] In the utility model, unless another definite provision and limitation, the first feature is "on" or "under" the second feature can include the first and second features direct contact, also can include the first and second features is not direct contact but is through the contact between other features of them.And, the first feature is "on", "above" and "on" the second feature includes the first feature is directly above and obliquely above the second feature, or just indicates that the horizontal height of the first feature is higher than the second feature.The first feature is "under", "below" and "under" the second feature includes the first feature is directly below and obliquely below the second feature, or just indicates that the horizontal height of the first feature is less than the second feature.

[0026] In the description of the embodiment, the terms "on", "under", "right", etc. Orientation or position relationship is based on the orientation or position relationship shown in the drawing, only for the convenience of description and simplification operation, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the utility model.In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.

[0027] Under the coupling action of high temperature creep and mechanical load, the upper cover plate and the lower cover plate of the uniform gas plate are subjected to axial pressure and are prone to out-of-plane warping deformation, resulting in the size, shape and position of the hole of the gas channel of the uniform gas plate being offset and deformed, resulting in the effect of the uniform gas plate on uniform gas outflow being reduced.Therefore, preventing the out-of-plane warping deformation of the plate of the uniform gas plate is the key to solving the above technical problems, and the following will be combined with the description of the utility model to illustrate the technical solutions in the embodiment of the utility model. Figure 1 The vacuum diffusion welding tool to be protected in the embodiment is introduced in detail.

[0028] Figure 1 The sectional view of the vacuum diffusion welding tool provided by the embodiment is shown.As shown in the figure, Figure 1As shown, the vacuum diffusion welding fixture provided in this embodiment is used for vacuum diffusion welding of a gas equalization plate 100. The welding fixture includes two molybdenum plates 1, which are respectively disposed on both sides of the gas equalization plate 100 along the thickness direction. A snap-fit ​​groove 11 is provided on the side of the molybdenum plate 1 facing the gas equalization plate 100. The bottom of the snap-fit ​​groove 11 abuts and fits against one plate surface of the gas equalization plate 100, and the side wall of the snap-fit ​​groove 11 abuts and fits against the outer peripheral wall surface of the gas equalization plate 100. The two molybdenum plates 1 are arranged opposite each other and spaced apart.

[0029] The vacuum diffusion welding fixture provided in this embodiment has two molybdenum plates 1 respectively set on both sides of the gas equalization plate 100 along the thickness direction. The side wall of the snap-fit ​​groove 11 of the molybdenum plate 1 matches the outer peripheral wall of the gas equalization plate 100, and the bottom of the snap-fit ​​groove 11 abuts against the plate surface of the gas equalization plate 100. Thus, when vacuum diffusion welding is performed on the gas equalization plate 100, the two molybdenum plates 1 apply opposing pressures to the gas equalization plate 100. The snap-fit ​​groove 11 can prevent the gas equalization plate 100 from warping and deforming outward, thereby ensuring the accuracy of the hole size, shape and position of the gas passage of the gas equalization plate 100, and ensuring the effect of the gas equalization plate 100 in making the gas flow out uniformly.

[0030] Continue as Figure 1 As shown, a graphite plate 2 is also provided on the side of the molybdenum plate 1 facing away from the gas equalization plate 100. When the two molybdenum plates 1 apply pressure to the gas equalization plate 100, the heat from the high-temperature environment can be absorbed by the graphite plate 2 and conducted to the gas equalization plate 100 via the molybdenum plates 1, thereby shortening the heating time of the gas equalization plate 100 and improving the vacuum welding efficiency. Specifically, the side of the graphite plate 2 that abuts against the molybdenum plate 1 has a pressing surface 21, and the side of the molybdenum plate 1 that abuts against the graphite plate 2 has a bearing surface 12. The pressing surface 21 and the bearing surface 12 have the same shape, ensuring that the heat from the high-temperature environment can be absorbed by the graphite plate 2 and evenly conducted from the graphite plate 2 to the gas equalization plate 100 via the molybdenum plates 1. This ensures uniform temperature in the welding area of ​​the gas equalization plate 100, reduces thermal stress, and prevents uneven heating and out-of-plane warping deformation of the gas equalization plate 100.

[0031] Preferably, one of the pressing surface 21 and the bearing surface 12 is a convex surface and the other is a concave surface that matches the convex surface. This prevents the graphite plate 2 from sliding relative to the molybdenum plate 1 when pressure is applied to the graphite plate 2 and transmitted through the molybdenum plate 1 to the gas equalization plate 100. This prevents uneven force distribution on the gas equalization plate 100, which in turn leads to uneven force distribution at the welding position and a poorer vacuum diffusion welding effect.

[0032] In some embodiments, the graphite plate 2 is further provided with a heating element on the side away from the molybdenum plate 1, so that the graphite plate 2 can be heated and the heat is conducted to the air distribution plate 100 through the molybdenum plate 1, thereby shortening the heating time of the air distribution plate 100 and improving the vacuum welding efficiency. Specifically, the heating element can be a resistance wire or an electric heating rod, and any heating component that can heat the graphite plate 2 to shorten the heating time of the air distribution plate 100 is within the protection scope of the present embodiment, and will not be repeated here.

[0033] As shown in FIG. 1, the molybdenum plate 1 is provided with a clamping groove 11 at the position where the molybdenum plate 1 abuts against the air distribution plate 100, so that the air distribution plate 100 is separated from the molybdenum plate 1, and the air distribution plate 100 is prevented from being bonded to the molybdenum plate 1 after the vacuum diffusion welding process is performed, thereby improving the vacuum diffusion welding qualification rate of the air distribution plate 100. Figure 1 As shown in FIG. 1, the molybdenum plate 1 is provided with a clamping groove 11 at the position where the molybdenum plate 1 abuts against the air distribution plate 100, so that the air distribution plate 100 is separated from the molybdenum plate 1, and the air distribution plate 100 is prevented from being bonded to the molybdenum plate 1 after the vacuum diffusion welding process is performed, thereby improving the vacuum diffusion welding qualification rate of the air distribution plate 100.

[0034] Preferably, the solder resist is graphite paper, which can ensure that the heat generated in the high-temperature environment during the vacuum diffusion welding process can be absorbed by the graphite plate 2 and conducted to the air distribution plate 100 through the molybdenum plate 1, thereby shortening the heating time of the air distribution plate 100 and preventing the air distribution plate 100 from being bonded to the molybdenum plate 1. As long as the solder resist component can normally conduct heat from the graphite plate 2 to the air distribution plate 100 through the molybdenum plate 1 and prevent the air distribution plate 100 from being bonded to the molybdenum plate 1, it is within the protection scope of the present embodiment, and will not be repeated here.

[0035] In some embodiments, a transition wall is arranged between the peripheral side wall 111 and the bottom wall 112 of the clamping groove 11, and the transition wall matches the edge chamfer of the air distribution plate 100, so that the clamping groove 11 can better fit the peripheral wall of the air distribution plate 100, thereby preventing the air distribution plate 100 from being warped and deformed.

[0036] In some embodiments, the bottom of the clamping groove 11 is provided with a first positioning element, and the surface of the air distribution plate 100 is correspondingly provided with a second positioning element, and the first positioning element and the second positioning element can be positioned and matched, so as to determine the relative position between the molybdenum plate 1 and the air distribution plate 100, thereby preventing the air distribution plate 100 from sliding relative to the molybdenum plate 1 during the vacuum diffusion welding process. Specifically, one of the first positioning element and the second positioning element is a positioning pin, and the other is a positioning hole, and the positioning pin is matched with the positioning hole, so as to determine the relative position between the molybdenum plate 1 and the air distribution plate 100.

[0037] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present application. Here, it is unnecessary and impossible to enumerate all the implementation modes. Any modification, equivalent substitution and improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application claim.

Claims

1. A vacuum diffusion welding tooling for vacuum diffusion welding of a gas distribution plate (100), characterized by, The vacuum diffusion welding tool comprises: The molybdenum plate (1) is provided with a clamping groove (11) on the side facing the air distribution plate (100), the groove bottom of the clamping groove (11) is in abutting fit with one plate surface of the air distribution plate (100), and the side wall of the clamping groove (11) is in abutting fit with the outer peripheral wall surface of the air distribution plate (100).

2. The vacuum diffusion bonding tooling of claim 1, wherein, The molybdenum plate (1) is further provided with a graphite plate (2) on the side away from the air distribution plate (100).

3. The vacuum diffusion bonding tooling of claim 2, wherein, The graphite plate (2) is further provided with a heating element on the side away from the molybdenum plate (1).

4. The vacuum diffusion bonding tooling of claim 2, wherein, The graphite plate (2) is provided with a pressing surface (21) on the side abutting the molybdenum plate (1), and the molybdenum plate (1) is provided with a pressure receiving surface (12) on the side abutting the graphite plate (2), and the pressing surface (21) and the pressure receiving surface (12) are of the same shape.

5. The vacuum diffusion bonding tooling of claim 4, wherein, One of the pressing surface (21) and the pressure receiving surface (12) is a convex surface, and the other is a concave surface matched with the convex surface.

6. The vacuum diffusion bonding tooling of claim 1, wherein, The molybdenum plate (1) is further provided with a solder resisting element at the abutting position with the air distribution plate (100).

7. The vacuum diffusion bonding tooling of claim 6, wherein, The solder resisting element is graphite paper.

8. The vacuum diffusion bonding tooling of claim 7, wherein, The clamping groove (11) has a peripheral side wall (111) and a bottom wall (112), the peripheral side wall (111) is matched with the outer peripheral wall surface of the air distribution plate (100), the bottom wall (112) can support the plate surface of the air distribution plate (100), and the solder resisting element completely covers the peripheral side wall (111) and the bottom wall (112).

9. The vacuum diffusion bonding tooling of claim 8, wherein, A transition wall is arranged between the peripheral side wall (111) and the bottom wall (112), and the transition wall is matched with the edge chamfer of the air distribution plate (100).

10. The vacuum diffusion bonding tooling of any one of claims 1-9, wherein, The groove bottom of the clamping groove (11) is provided with a first positioning element, and the plate surface of the air distribution plate (100) is correspondingly provided with a second positioning element capable of positioning and cooperating with the first positioning element.

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