Air extractor for preventing fluorine from escaping

Abstract

The utility model discloses an air extractor for preventing fluorine from escaping, which comprises a support frame, a bottom plate, a cover plate and a falling curtain, the support frame is vertically arranged above an exhaust port of a machine table, and the cover plate and the bottom plate are respectively arranged on the upper surface and the lower surface of the support frame; a first opening used for being detachably connected with the exhaust port is formed in the middle of the bottom plate, a second opening used for being detachably connected with one end of an exhaust pipeline is formed in the middle of the cover plate, and the other end of the exhaust pipeline is detachably connected with a tail gas inlet of a factory affair end. One end of the curtain is arranged at the edge of the upper surface of the support frame, and the other end extends downwards along the edge of the upper surface of the support frame. The exhaust device is connected with the exhaust port of the machine table, the side surface of the exhaust device is provided with the inner and outer vertical curtains with the counter weights, and the tail end of the exhaust device is connected with a factory service end, so that after the scheme is implemented, the exhaust capability of the exhaust device on the dissipation of fluorine ions in the reaction cavity is greatly improved, the dissipation amount of the fluorine ions in the environment is favorably reduced, and the adverse effects of the fluorine ions on the environment and products are reduced.

Description

Technical Field

[0001] This utility model relates to the field of exhaust gas collection technology, and in particular to an exhaust device for preventing fluorine escape. It is specifically applicable to logic elements, mixed signal elements, embedded memory, BCD (bipolar-complementary metal-oxide-semiconductor-double-diffused metal-oxide-semiconductor), trench transistors (trench MOSFETs), and high voltage components (such as power management integrated circuits) and related products and processes. Background Technology

[0002] During preventative maintenance (PM) processes in chemical vapor deposition (WCVD) and tungsten silicide X-ray diffraction (WSIXD), especially when wiping away residual films in the reaction chamber, a large amount of fluoride ions (F) are released. - The fluoride ions escape, resulting in a high concentration of fluoride ions in the environment, which in turn causes fluoride corrosion to the products.

[0003] Previously used exhaust systems in PM processes were ineffective at removing fluoride ions, resulting in unsatisfactory outcomes in improving fluoride ion emission. A method is needed that can effectively improve fluoride ion emission without impacting preventative maintenance procedures.

[0004] In view of this, improvements should be made to the existing technology. Utility Model Content

[0005] To effectively improve the situation of fluoride ion escape, this utility model proposes a gas extraction device to prevent fluoride escape. The device is connected to the exhaust port of the machine, and has inner and outer curtains with counterweights on the side. The tail end is connected to the factory end. After implementing this solution, the gas extraction device will greatly improve its ability to extract fluoride ions from the reaction chamber. This enhanced gas extraction effect is particularly significant during the wiping process of the reaction chamber, which helps to reduce the amount of fluoride ions released into the environment and reduce its adverse effects on the environment and products.

[0006] According to one aspect of the present invention, a gas extraction device for preventing fluorine escape is provided, comprising a support frame, a base plate, a cover plate, and a curtain.

[0007] The support frame is vertically installed above the exhaust port of the machine, and the cover plate and the bottom plate are respectively installed on the upper and lower surfaces of the support frame;

[0008] The base plate has a first opening in the middle for detachable connection with the exhaust port, and the cover plate has a second opening in the middle for detachable connection with one end of the exhaust pipe. The other end of the exhaust pipe is detachably connected to the exhaust gas inlet at the plant end.

[0009] One end of the curtain is set at the edge of the upper surface of the support frame, and the other end extends freely downward along the edge of the upper surface of the support frame under the action of gravity.

[0010] According to one embodiment of the present invention, the curtain includes a first curtain and a second curtain, with the first curtain disposed inside the second curtain.

[0011] According to one embodiment of the present invention, a third opening is provided in the middle of the first curtain.

[0012] According to one embodiment of the present invention, a counterweight bar is provided on the first curtain.

[0013] According to one embodiment of the present invention, the rods of the support frame are rotatably connected by hinges.

[0014] According to one embodiment of the present invention, the end of the exhaust pipe connected to the second opening is a flared opening.

[0015] According to one embodiment of the present invention, snap-fit ​​components are provided at the first opening and the second opening, which are detachably connected to the exhaust port and the horn port, respectively.

[0016] According to one embodiment of the present invention, the curtain is disposed on one set of opposite sides of the support frame, and a vertical baffle is disposed on another set of opposite sides.

[0017] According to one embodiment of the present invention, a handle is provided on the flared mouth.

[0018] According to one embodiment of the present invention, a spray head is provided on the support frame.

[0019] By adopting the above technical solution, this utility model has the following advantages compared with the prior art: The device is connected to the exhaust port of the machine, and has inner and outer curtains with counterweights on the side. The tail end is connected to the factory end. After implementing this solution, the pumping device will greatly improve its ability to pump out fluoride ions from the reaction chamber. This enhanced pumping effect is particularly significant during the wiping process of the reaction chamber, which helps to reduce the amount of fluoride ions released into the environment and reduce their adverse effects on the environment and products.

[0020] Specifically, this invention can be applied to logic elements, mixed-signal elements, embedded memories, BCD (bipolar-complementary metal-oxide-semiconductor-double-diffused metal-oxide-semiconductor), trench MOSFETs, and high-voltage components (such as power management integrated circuits) and related products and processes. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some implementation examples of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 A schematic diagram of the structure of a vacuum device in the prior art is shown;

[0023] Figure 2 A schematic diagram of a gas extraction device for preventing fluorine escape according to an exemplary embodiment of the present invention is shown.

[0024] Figure 3 A schematic diagram of the non-operating state of an exhaust device for preventing fluorine escape according to an exemplary embodiment of the present invention is shown.

[0025] Figure 4 A schematic diagram of the curtain of an exhaust device for preventing fluorine escape according to an exemplary embodiment of the present invention is shown in its unfolded state.

[0026] Figure 5 A schematic diagram of the structure of the curtain of the air extraction device for preventing fluorine escape according to an exemplary embodiment of the present invention is shown in a folded state.

[0027] Figure 6 A schematic diagram of the hinge structure of a vacuum device for preventing fluorine escape according to an exemplary embodiment of the present invention is shown.

[0028] Figure 7 A schematic diagram of the third opening of a vacuum device for preventing fluorine escape according to an exemplary embodiment of the present invention is shown.

[0029] Figure 8 A schematic diagram showing the installation state of the cover plate of the evacuation device for preventing fluorine escape according to an exemplary embodiment of the present invention is provided.

[0030] Figure 9 A schematic diagram of the structure of the curtain of the fluorine-preventing extraction device according to an exemplary embodiment of the present invention is shown in the retracted state.

[0031] Figure 10 A schematic diagram of the handle of a vacuum device for preventing fluorine escape according to an exemplary embodiment of the present invention is shown.

[0032] Figure 11 A schematic diagram of the working state of the support of the fluorine extraction device according to an exemplary embodiment of the present invention is shown.

[0033] Figure 12 A schematic diagram of the structure of the support of the fluorine escape extraction device according to an exemplary embodiment of the present invention is shown in its stored state.

[0034] Explanation of reference numerals in the attached figures:

[0035] 1. Support frame; 2. Base plate; 3. Cover plate; 4. First curtain; 5. Second curtain; 6. First opening; 7. Second opening; 8. Third opening; 9. Exhaust port; 10. Exhaust pipe; 11. Trumpet mouth; 12. Handle; 13. Hinge. Detailed Implementation

[0036] The following detailed description of the embodiments is used to exemplify the principles of the present invention, but should not be used to limit the scope of the present invention. The present invention can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0037] These embodiments are provided to make this disclosure thorough and complete, and to fully express the scope of the invention to those skilled in the art. It should be noted that, unless otherwise specifically stated, the relative arrangement of components and steps, material composition, numerical expressions, and values ​​set forth in these embodiments should be interpreted as merely exemplary and not as limiting.

[0038] It should be noted that, in the description of this utility model, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," and "outer," etc., indicating orientation or positional relationships, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0039] It should also be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model depending on the specific circumstances. When a specific device is described as being located between a first device and a second device, an intermediary device may or may not be present between the specific device and the first or second device.

[0040] All terms used in this invention have the same meaning as understood by one of ordinary skill in the art to which this disclosure pertains, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries should be interpreted as having meanings consistent with their meanings in the context of the relevant art, and not as idealized or highly formalized, unless expressly defined herein.

[0041] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0042] like Figure 1 As shown, in the prior art, the exhaust pipe is directly connected to the exhaust port. When the chamber is opened and the exhaust operation is performed, the space is basically open, which makes it impossible to completely remove the fluoride ions that have escaped.

[0043] like Figure 2-3 As shown, this utility model provides a gas extraction device to prevent fluorine escape, which includes a support frame 1, a base plate 2, a cover plate 3, and a curtain. The support frame 1 is vertically arranged above the exhaust port 9 of the machine. The cover plate 3 and the base plate 2 are respectively arranged on the upper and lower surfaces of the support frame 1. The middle part of the base plate 2 is provided with a first opening 6 for detachable connection with the exhaust port 9. The middle part of the cover plate 3 is provided with a second opening 7 for detachable connection with one end of the exhaust pipe 10. The other end of the exhaust pipe 10 is detachably connected to the tail gas inlet at the plant end. One end of the curtain is arranged at the edge of the upper surface of the support frame 1, and the other end extends freely downward along the edge of the upper surface of the support frame 1 under the action of gravity.

[0044] like Figure 4-5 As shown, in some embodiments, the curtain includes a first curtain 4 and a second curtain 5, with the first curtain 4 disposed inside the second curtain 5. During operation, fluoride ions may escape; the double curtain can significantly reduce the risk of these exhaust gases escaping. The double-layer curtain structure can also reduce the outward propagation of noise generated during the operation of the exhaust device to some extent. Sound is reflected and absorbed as it passes through different media (air and curtain material).

[0045] In some embodiments, a counterweight is provided on the first curtain 4. When the suction device operates and generates negative pressure, the surrounding air exerts inward pressure on the curtain. Frequent deformation can cause fatigue in the material of the first curtain 4, making it prone to breakage, tearing, etc. The counterweight reduces the frequency and extent of curtain deformation due to negative pressure, lowering the risk of material damage. The counterweight can use its own weight to resist this inward suction force, keeping the first curtain 4 in a proper position and ensuring structural stability.

[0046] like Figure 6As shown, based on the above embodiment, the rods of the support frame 1 are rotatably connected by hinges 13. This rotatable rod connection simplifies the installation process when installing the support frame 1. When the support frame 1 needs to be stored or transported, the rods rotatably connected by hinges 13 can be easily folded, saving a significant amount of space. The hinge connection 13 also allows the angle between the rods to be adjusted according to actual needs.

[0047] In some embodiments, the end of the exhaust pipe 10 connected to the second opening 7 is a flared nozzle 11. The flared nozzle 11 is designed to allow airflow to enter the pipe more smoothly from the outside. According to fluid dynamics principles, when airflow enters a relatively narrow pipe from a relatively open space, if the inlet is suddenly constricted, it will generate significant local resistance. The flared nozzle 11 acts as a transition, allowing the airflow to gradually accelerate and change direction before entering the pipe, reducing the resistance caused by sudden changes in airflow direction and speed.

[0048] like Figure 7 As shown, based on the above embodiment, a third opening 8 is provided in the middle of the first curtain 4. When manual operations are required on the air extraction device, such as adjusting valves, checking instruments, or clearing small blockages, the presence of the third opening 8 allows the operator to directly reach in. Compared to curtains without openings, this design avoids the hassle of having to lift or remove the curtain for each operation, saving operation time and improving work efficiency.

[0049] Based on the above embodiments, snap-fit ​​components are provided at the first opening 6 and the second opening 7 to be detachably connected to the exhaust port 9 and the flared port 11, respectively. During installation and disassembly, the user does not need to use complicated tools (such as screws, wrenches, etc.). They only need to align the two parts of the snap-fit ​​components with the exhaust port 9 and the flared port 11, and the connection can be completed by snapping them together. This detachable connection method facilitates the individual handling of each part of the air extraction device.

[0050] like Figure 8 As shown, in some embodiments, the curtain is disposed on one set of opposite sides of the support frame 1, and a vertical baffle is disposed on another set of opposite sides. The other set of opposite sides can also be other components of the machine, as long as they achieve the function of preventing the escape of fluoride ions.

[0051] like Figure 9 As shown, the air extraction device can be folded for easy storage and transport.

[0052] like Figure 10 As shown, based on the above embodiment, a handle 12 is provided on the flare 11. When installing the air extraction device, the operator can hold the handle 12 to more accurately connect the flare 11 with other components (such as snap-fit ​​components or exhaust pipe 10).

[0053] like Figure 11-12 As shown, the rods of the support frame 1 are rotatably connected by hinges 13, which facilitates folding, storage and transportation.

[0054] Based on the above embodiments, a spray head is provided on the support frame 1. A liquid (e.g., calcium hydroxide solution) can be added to the spray head to react chemically with any potentially escaping fluoride ions. Fluoride ions are highly reactive; when they come into contact with the calcium hydroxide solution, they react to form calcium fluoride precipitate. The liquid sprayed from the spray head forms small droplets in the air, which can, to some extent, block the diffusion path of fluoride ions. When fluoride ions attempt to diffuse outward from the exhaust port 9, they collide with and are encapsulated by these droplets.

[0055] This utility model achieves a stable connection with the exhaust port 9 of the machine tool and is equipped with inner and outer curtains with counterweights on the side. This counterweight design effectively prevents deformation caused by negative pressure and other factors, thus ensuring that the curtains maintain good sealing performance and protective function under various operating conditions. The tail end of the device is precisely connected to the plant end, constructing a complete and efficient air extraction passage system.

[0056] In practical applications, once this solution is implemented, the pumping device's ability to remove fluoride ions from the reaction chamber will be greatly enhanced. This is especially true during the crucial process of wiping the reaction chamber, where fluoride ions are more easily released into the environment. The device's powerful pumping effect becomes particularly evident at this time. Through pumping operation, any fluoride ions that may escape from the reaction chamber can be quickly removed, significantly reducing the total amount of fluoride ions released into the environment.

[0057] This not only helps reduce the pollution and damage caused by fluoride ions to the surrounding environment, such as preventing them from eroding and polluting natural environmental elements like soil and water, but also effectively avoids the adverse effects of fluoride ions on product quality, such as preventing surface defects and performance degradation caused by fluoride ion pollution. This provides extremely solid support and protection for environmental protection and product quality assurance during the production process.

[0058] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples. Within the framework of the present invention, technical features of the above embodiments or different embodiments can also be combined, and many other variations of different aspects of the present invention exist, which are not provided in the details for the sake of brevity. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A gas extraction device for preventing fluorine escape, characterized in that, Includes support frame, base plate, cover plate and curtains, The support frame is vertically installed above the exhaust port of the machine tool, and the cover plate and the bottom plate are respectively installed on the upper and lower surfaces of the support frame; The base plate has a first opening in the middle for detachable connection with the exhaust port, the cover plate has a second opening in the middle for detachable connection with one end of the exhaust pipe, and the other end of the exhaust pipe is detachably connected to the tail gas inlet at the plant end. One end of the curtain is located at the edge of the upper surface of the support frame, and the other end extends freely downward along the edge of the upper surface of the support frame under the action of gravity.

2. The gas extraction device for preventing fluorine escape according to claim 1, characterized in that, The curtain includes a first curtain and a second curtain, with the first curtain located inside the second curtain.

3. The gas extraction device for preventing fluorine escape according to claim 2, characterized in that, A third opening is provided in the middle of the first curtain.

4. The gas extraction device for preventing fluorine escape according to claim 2, characterized in that, The first curtain is equipped with a counterweight bar.

5. The gas extraction device for preventing fluorine escape according to claim 1, characterized in that, The rods of the support frame are rotatably connected by hinges.

6. The gas extraction device for preventing fluorine escape according to claim 1, characterized in that, The end of the exhaust pipe that connects to the second opening is a flared end.

7. The gas extraction device for preventing fluorine escape according to claim 6, characterized in that, The first opening and the second opening are provided with snap-fit ​​components that are detachably connected to the exhaust port and the horn port, respectively.

8. The gas extraction device for preventing fluorine escape according to claim 1, characterized in that, The curtain is disposed on one set of opposite sides of the support frame, and a vertical baffle is disposed on the other set of opposite sides.

9. The gas extraction device for preventing fluorine escape according to claim 6, characterized in that, A handle is provided on the horn opening.

10. The gas extraction device for preventing fluorine escape according to claim 1, characterized in that, The support frame is equipped with spray heads.

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