Welding assembly of water-cooled alloy back plate

Abstract

The utility model discloses a welding assembly of a water-cooling alloy back plate, which comprises a back plate main body and a cover plate which are matched with each other, a main body groove is arranged on the front surface of the back plate main body, main body water channel grooves which are distributed at intervals are further arranged on the bottom surface of the main body groove, and water channel supporting walls are used for separating adjacent main body water channel grooves. The water channel supporting wall is lower than the front surface of the backboard main body; the edge of the bottom face of the cover plate is attached to the bottom face of the main body groove, the cover plate side wall of the cover plate is matched with the side wall of the main body groove, cover plate protruding parts arranged at intervals and cover plate embedding grooves between the adjacent cover plate protruding parts are arranged on the bottom face of the cover plate, and the cover plate protruding parts are embedded into the main body water channel grooves respectively. The top face of the water channel supporting wall is attached to the bottom face of the cover plate embedding groove. The welding scheme of the water-cooling back plate is economical and practical, the welding strength is high, and the combination is firm.

Description

Technical Field

[0001] This utility model relates to the field of manufacturing water-cooled backplates for sputtering targets, and more specifically, to a welding assembly for a water-cooled alloy backplate. Background Technology

[0002] Sputtering coating target assemblies typically consist of two welded parts: the target and a backplate. The operating environment of these target assemblies is quite harsh; their temperature rises rapidly during sputtering. Therefore, the backplate is needed to transfer heat and provide rapid cooling, while simultaneously preventing target deformation. In current water-cooled backplate manufacturing, electron beam welding of the backplate body and cover plate presents challenges due to the large thickness of the cover plate and the high penetration difficulty of the electron beam, resulting in a low welding bonding rate. Furthermore, the high power during welding leads to significant post-weld thermal deformation of the backplate.

[0003] Prior art CN104588807A discloses a method for forming a backplate and the backplate itself. The method includes: providing a base plate and a cover plate; the surface of the base plate facing the cover plate is the top surface of the base plate, which is flat; the bottom surface of the cover plate is flat; and the bottom of the cover plate has a cooling channel groove structure; the cooling channel groove structure and the base plate form a cooling channel; and the bottom surface of the cover plate and the top surface of the base plate are welded together using a brazing process to form the backplate. However, the backplate lacks proper sealing for the solder, which can easily lead to solder leakage, welding defects, and severely affect the product's performance.

[0004] Existing technology CN114918525A discloses a target cooling backplate and its welding method. After filling the water channels of the backplate bottom plate with solid particles, it is fixed to the backplate cover plate to obtain the component to be welded. The component to be welded is then subjected to hot isostatic pressing (HIP) welding to obtain a semi-finished target cooling backplate. The solid particles in the semi-finished target cooling backplate are then removed to obtain the final target cooling backplate. By filling the water channels of the backplate with solid particles, deformation of the water channels caused by HIP welding is avoided, thus preventing water channel leakage. It also exhibits high welding strength and welding bonding rate. However, the welding process described is a high-cost (HIP) process, which is not conducive to production.

[0005] In view of the above technical problems, this utility model is hereby introduced. Utility Model Content

[0006] The main purpose of this utility model is to provide a welding assembly and welding method for a water-cooled alloy backplate, which provides an economical, high-strength, and reliable welding solution for a water-cooled backplate.

[0007] To achieve the above objectives, according to one aspect of the present invention, a welding assembly for a water-cooled alloy backplate is provided, comprising a backplate body and a cover plate that cooperate with each other. A main groove is provided on the front side of the backplate body, and main water channels are further provided at intervals on the bottom surface of the main groove. Water channel support walls are used to space between adjacent main water channels, and the height of the water channel support walls is lower than the front surface of the backplate body.

[0008] The bottom edge of the cover plate is in contact with the bottom surface of the main groove, the side wall of the cover plate is in cooperation with the side wall of the main groove, the bottom surface of the cover plate is provided with spaced cover plate protrusions and cover plate fitting grooves between adjacent cover plate protrusions, the cover plate protrusions are respectively embedded in the main water channel groove, and the top surface of the water channel support wall is in contact with the bottom surface of the cover plate fitting groove.

[0009] Furthermore, there is a gap between the surface of the cover plate protrusion and the bottom surface of the main water channel, so that a water channel space is formed in the main water channel after fitting.

[0010] Furthermore, the shape of the cover plate protrusion corresponds to that of the main water channel, such that the sidewall of the cover plate protrusion fits into the sidewall of the main water channel.

[0011] Furthermore, the main water channel is spirally distributed on the back plate body and is continuous and uninterrupted, so that the water channel space is unidirectionally connected.

[0012] Furthermore, the waterway support wall includes a plurality of spaced arcuate walls and a straight wall that passes through the plurality of arcuate walls and extends radially along the back plate body.

[0013] Furthermore, a positioning pin is provided at the center of the back plate body, the positioning pin is connected to the straight wall, the height of the positioning pin is higher than the waterway support wall, and a positioning hole is provided at the center of the cover plate, the positioning pin passes through the positioning hole and cooperates with the inner wall of the positioning hole.

[0014] Furthermore, the edge thickness of the cover plate is the same as the height of the side wall of the main groove, so that the top surface of the cover plate is flush with the front surface of the back plate main body.

[0015] Furthermore, the height of the waterway support wall is flush with the bottom surface of the main groove.

[0016] To achieve the above objectives, according to one aspect of this utility model, a welding method for a water-cooled alloy backplate is proposed, which employs vacuum electron beam welding to weld the welding assembly according to the above, and includes the following steps:

[0017] The splicing and welding process involves welding the sidewall of the cover plate and the sidewall of the main groove at the splicing weld position. The welding is performed twice, with the first welding being a small current welding and the second welding being the main welding.

[0018] In the plug welding step, plug welding is performed on the top surface of the cover plate at the position where the top surface of the waterway support wall fits against the bottom surface of the cover plate fitting groove. The welding is performed twice, with the first welding being a small current welding and the second welding being the main welding.

[0019] Furthermore, the splicing and welding step also includes welding at the mating positions of the positioning pin and the positioning hole, with two welding operations. The first welding is a low-current welding, and the second welding is the main welding.

[0020] Furthermore, during the welding process, the surface temperature of the welding component is monitored in real time. If the temperature exceeds 190°C, welding is stopped and air cooling is performed.

[0021] Furthermore, in the splicing welding step, the main welding adopts downward focusing to achieve the expected molten pool depth of 8.5 to 15.5 mm.

[0022] Furthermore, in the splicing and welding step, the focusing current is 1100-1200mA, the beam current for the first welding is 20-40mA, and the beam current for the second welding is 80-100mA.

[0023] Furthermore, in the plug welding step, the main welding adopts downward focusing to achieve the expected molten pool depth of 11.5 to 20.5 mm.

[0024] Furthermore, in the plug welding step, the focusing current is 1100-1200mA, the beam current for the first welding is 20-40mA, and the beam current for the second welding is 110-130mA.

[0025] By applying the technical solution of this utility model, at least the following beneficial effects are achieved:

[0026] 1. The welding assembly of this utility model, through the design of the structure of the back plate body and the cover plate, shortens the distance between the top surface of the cover plate and the top surface of the water channel support wall while ensuring that the strength of the back plate body and the cover plate is not affected. This makes it easier for electron beam welding to penetrate the cover plate, reduces the residence time of electron beam welding on the welding assembly, thereby reducing the uncontrollable deformation of the back plate caused by long heating time, and greatly improving the welding bonding rate.

[0027] 2. The welding assembly of this utility model improves the space utilization and water cooling efficiency of the back plate by designing the shape of the main water channel, water channel support wall and cover plate fitting groove, and makes the fit between the main body of the back plate and the cover plate stable, which is conducive to subsequent welding operations. By designing positioning pins and positioning holes, the fitting accuracy and welding bonding rate are further improved.

[0028] 3. The welding method of this utility model is designed to perform splicing welding first and then plug welding to prevent large deformation of the welding components before plug welding. It is also designed to use low current welding for each part first to prevent the weld from opening and shifting position during the subsequent high current welding process. At the same time, preliminary removal of gas and impurities from the weld material is performed to reduce the generation of porosity in the subsequent welding and improve the weld quality.

[0029] 4. The welding method of this utility model ensures the welding strength of the water-cooled backplate by designing the depth of the molten pool for each main weld. It also prevents the material from softening by controlling the surface temperature of the welding components during the welding process. Excessive welding depth can easily result in holes in the finished appearance, and excessive overall deformation may exceed the processing allowance, making it impossible to process. Attached Figure Description

[0030] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments and descriptions of this utility model are used to explain this utility model and do not constitute an undue limitation thereof. In the drawings:

[0031] Figure 1 A schematic diagram of the welding assembly before the water-cooled alloy backplate is shown.

[0032] Figure 2 A schematic diagram of the welding assembly for the water-cooled alloy backplate is shown.

[0033] Figure 3 A schematic diagram of the back panel body of one embodiment is shown;

[0034] Figure 4 A schematic diagram of a cover plate according to one embodiment is shown.

[0035] The above figures include the following reference numerals:

[0036] 1. Backplate main body; 11. Main water channel groove; 12. Water channel support wall; 13. Main groove; 14. Arc-shaped wall; 15. Straight wall; 16. Positioning pin; 2. Cover plate; 21. Cover plate protrusion; 22. Cover plate fitting groove; 23. Cover plate side wall; 24. Positioning hole; 3. Water channel space; 4. Electron beam gun. Detailed Implementation

[0037] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.

[0038] The present invention will be further described in detail below with reference to specific embodiments. These embodiments should not be construed as limiting the scope of protection claimed by the present invention. The term "comprising" indicates the presence of a feature, but does not exclude the presence or addition of one or more other features. The terms "lateral," "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the purpose of description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0039] In this description, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, in the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0040] Example:

[0041] This utility model mainly proposes an economical, high-strength, and reliable welding solution for water-cooled backplates. Figures 1-4 As shown, a welding assembly using a water-cooled alloy backplate is used during welding. It includes a backplate body 1 and a cover plate 2 that cooperate with each other. A main groove 13 is provided on the front side of the backplate body 1. A main water channel groove 11 is further provided on the bottom surface of the main groove 13. A water channel support wall 12 is used to separate adjacent main water channel grooves 11, and the height of the water channel support wall 12 is lower than the front surface of the backplate body 1.

[0042] The bottom edge of the cover plate 2 is in contact with the bottom surface of the main groove 13. The cover plate sidewall 23 of the cover plate 2 is in cooperation with the sidewall of the main groove 13. The bottom surface of the cover plate 2 is provided with spaced cover plate protrusions 21 and cover plate fitting grooves 22 between adjacent cover plate protrusions 21. The cover plate protrusions 21 are respectively embedded in the main water channel groove 11. The top surface of the water channel support wall 12 is in contact with the bottom surface of the cover plate fitting groove 22.

[0043] The welding assembly of this utility model, through the design of the structure of the back plate body and the cover plate, shortens the distance between the top surface of the cover plate and the top surface of the water channel support wall while ensuring that the strength of the back plate body and the cover plate is not affected. This makes it easier for electron beam welding to penetrate the cover plate, reduces the residence time of electron beam welding on the welding assembly, thereby reducing the uncontrollable deformation of the back plate caused by long heating time, and greatly improving the welding bonding rate.

[0044] In this application, there is a gap between the surface of the cover plate protrusion 21 and the bottom surface of the main water channel 11, so that a water channel space 3 is formed in the main water channel 11 after fitting.

[0045] Preferably, the shape of the cover plate protrusion 21 corresponds to that of the main water channel 11, such that the side wall of the cover plate protrusion 21 fits against the side wall of the main water channel 11.

[0046] Preferably, the edge thickness of the cover plate 2 is the same as the height of the side wall of the main groove 13, so that the top surface of the cover plate 2 is flush with the front surface of the back plate main body 1. The height of the waterway support wall 12 is flush with the bottom surface of the main groove 13.

[0047] Furthermore, combining Figure 3 and Figure 4 As shown, the main water channel 11 is spirally distributed on the back plate body 1 and is continuous and uninterrupted, so that the water channel space 3 is unidirectionally connected. The water channel support wall 12 includes a plurality of spaced arc-shaped walls 14 and a straight wall 15 that passes through the plurality of arc-shaped walls 14 and extends radially along the back plate body 1.

[0048] By designing the shapes of the main water channel, water channel support wall, and cover plate fitting groove, the space utilization rate and water cooling efficiency of the back plate are improved, and the fit between the main body of the back plate and the cover plate is made more stable, which is conducive to subsequent welding operations.

[0049] Preferably, a positioning pin 16 is provided at the center of the back plate body 1, the positioning pin 16 is connected to the straight wall 15, and the height of the positioning pin 16 is higher than the waterway support wall 12. A positioning hole 24 is provided at the center of the cover plate 2, and the positioning pin 16 passes through the positioning hole 24 and cooperates with the inner wall of the positioning hole 24. By designing the positioning pin and positioning hole, the fitting accuracy and welding bonding rate are further improved.

[0050] This utility model further proposes a welding method for a water-cooled alloy backplate, combined with Figure 2-4 As shown, the welding assembly according to the above is welded using vacuum electron beam welding, and includes the following steps:

[0051] In the splicing and welding step S1, the electron beam gun 4 is used to weld the splicing weld between the side wall 23 of the cover plate and the side wall of the main groove 13. The welding is performed twice, with the first welding being a low-current welding and the second welding being the main welding. The positioning pin 16 and the positioning hole 24 are also welded at their mating positions, with the first welding being a low-current welding and the second welding being the main welding.

[0052] In plug welding step S2, on the top surface of the cover plate 2, an electron beam gun 4 is used to perform plug welding on the position where the top surface of the water channel support wall 12 and the bottom surface of the cover plate fitting groove 22 are in contact. The welding is performed twice, with the first welding being a small beam welding and the second welding being the main welding.

[0053] Post-processing step S3: After welding, perform subsequent machining, check for voids in the appearance, pass helium test, and hold pressure without abnormalities (0.5 MPa, 1 hour).

[0054] By designing a process of first performing splicing welding and then plug welding, significant deformation of the welded components before plug welding can be prevented. Furthermore, by designing each part to be welded with a low beam current first, the weld seam can be prevented from opening and shifting during subsequent high beam current welding. At the same time, preliminary removal of gas and impurities from the weld material is performed to reduce the generation of porosity in subsequent welding and improve weld quality.

[0055] In the splicing and welding step S1, the surface temperature of the welding components is monitored in real time during the welding process. If the temperature exceeds 190°C, welding is stopped and air cooling is performed. By controlling the surface temperature of the welding components during the welding process, material softening and excessive welding depth are prevented, which could lead to holes in the finished product. Additionally, excessive overall deformation may exceed the processing allowance, making further processing impossible.

[0056] Specifically, preferably, in the splicing welding step S1, the main welding adopts downward focusing, the purpose of which is to achieve the expected molten pool depth of 8.5-15.5mm to ensure welding strength. The focusing current is 1100-1200mA, the beam current of the first welding is 20-40mA, and the beam current of the second welding is 80-100mA.

[0057] Preferably, in the plug welding step S2, the main welding uses down-focusing to achieve the expected molten pool depth of 11.5–20.5 mm to ensure welding strength. In the plug welding step S2, the focusing current is 1100–1200 mA, the beam current for the first welding is 20–40 mA, and the beam current for the second welding is 110–130 mA.

[0058] Preferably, the other welding parameters for vacuum electronic welding are: vacuum degree ≤ 5 × 10⁻⁶ -2 The welding distance is 300-400mm, the high voltage is 80kV, and the welding speed is 350mm / min.

[0059] In summary, it can be seen from the above description that the embodiments of this utility model achieve the following technical effects:

[0060] 1. The welding assembly of this utility model, through the design of the structure of the back plate body and the cover plate, shortens the distance between the top surface of the cover plate and the top surface of the water channel support wall while ensuring that the strength of the back plate body and the cover plate is not affected. This makes it easier for electron beam welding to penetrate the cover plate, reduces the residence time of electron beam welding on the welding assembly, thereby reducing the uncontrollable deformation of the back plate caused by long heating time, and greatly improving the welding bonding rate.

[0061] 2. The welding assembly of this utility model improves the space utilization and water cooling efficiency of the back plate by designing the shape of the main water channel, water channel support wall and cover plate fitting groove, and makes the fit between the main body of the back plate and the cover plate stable, which is conducive to subsequent welding operations. By designing positioning pins and positioning holes, the fitting accuracy and welding bonding rate are further improved.

[0062] 3. The welding method of this utility model is designed to perform splicing welding first and then plug welding to prevent large deformation of the welding components before plug welding. It is also designed to use low current welding for each part first to prevent the weld from opening and shifting position during the subsequent high current welding process. At the same time, preliminary removal of gas and impurities from the weld material is performed to reduce the generation of porosity in the subsequent welding and improve the weld quality.

[0063] 4. The welding method of this utility model ensures the welding strength of the water-cooled backplate by designing the depth of the molten pool for each main weld. It also prevents the material from softening by controlling the surface temperature of the welding components during the welding process. Excessive welding depth can easily result in holes in the finished appearance, and excessive overall deformation may exceed the processing allowance, making it impossible to process.

[0064] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A welding assembly for a water-cooled alloy backplate, comprising a backplate body (1) and a cover plate (2) that cooperate with each other, characterized in that, The back plate body (1) has a main groove (13) on its front side, and a main water channel groove (11) is further provided on the bottom surface of the main groove (13) at intervals. The water channel support wall (12) is used to separate adjacent main water channel grooves (11), and the height of the water channel support wall (12) is lower than the front surface of the back plate body (1). The bottom edge of the cover plate (2) is in contact with the bottom surface of the main groove (13). The cover plate sidewall (23) of the cover plate (2) is in cooperation with the sidewall of the main groove (13). The bottom surface of the cover plate (2) is provided with spaced cover plate protrusions (21) and cover plate fitting grooves (22) between adjacent cover plate protrusions (21). The cover plate protrusions (21) are respectively embedded in the main water channel groove (11). The top surface of the water channel support wall (12) is in contact with the bottom surface of the cover plate fitting groove (22).

2. The welding assembly according to claim 1, characterized in that: There is a gap between the surface of the cover plate protrusion (21) and the bottom surface of the main water channel (11), so that a water channel space (3) is formed in the main water channel (11) after fitting.

3. The welding assembly according to claim 2, characterized in that: The shape of the cover plate protrusion (21) corresponds to that of the main water channel (11), such that the side wall of the cover plate protrusion (21) fits against the side wall of the main water channel (11).

4. The welding assembly according to claim 3, characterized in that: The main water channel (11) is spirally distributed on the back plate main body (1) and is continuous and uninterrupted, so that the water channel space (3) is unidirectionally connected.

5. The welding assembly according to claim 4, characterized in that: The waterway support wall (12) includes a plurality of spaced arcuate walls (14) and a straight wall (15) that passes through the plurality of arcuate walls (14) and extends radially along the back plate body (1).

6. The welding assembly according to claim 5, characterized in that: A positioning pin (16) is provided at the center of the back plate body (1). The positioning pin (16) is connected to the straight wall (15). The height of the positioning pin (16) is higher than that of the waterway support wall (12). A positioning hole (24) is provided at the center of the cover plate (2). The positioning pin (16) passes through the positioning hole (24) and cooperates with the inner wall of the positioning hole (24).

7. The welding assembly according to claim 1, characterized in that: The edge thickness of the cover plate (2) is the same as the side wall height of the main body groove (13), so that the top surface of the cover plate (2) is flush with the front surface of the back plate main body (1).

8. The welding assembly according to claim 1, characterized in that: The height of the waterway support wall (12) is flush with the bottom surface of the main groove (13).

Images