Vacuum gauge tube protection device

Abstract

The utility model provides a vacuum gauge tube protection device which is characterized in that a protection tube is detachably arranged on a vacuum bin through an installation assembly, one end of the protection tube is an installation section which is vertically arranged, a vacuum gauge tube is inserted into the vertically arranged end of the protection tube, and a fixing mechanism is arranged between the protection tube and the vacuum gauge tube. The vacuum gauge tube and the protection tube are fixed. Relative to the mounting section, the other end of the protection pipe is a filtering section, and the multi-layer filtering mechanism is detachably arranged at the other end of the protection pipe; and the heat dissipation mechanism is arranged on the protection tube. According to the utility model, the protection tube is arranged, the vacuum gauge tube is installed in the installation section of the protection tube, and the filtering section of the protection tube is provided with multiple layers of filtering mechanisms, so that on one hand, the communication between the inner cavity of the protection tube and the vacuum chamber is not obstructed, and the detection precision of the vacuum gauge tube is not reduced; and on the other hand, coating materials can be effectively prevented from entering the protection tube during coating, the detection end of the vacuum gauge tube is prevented from being polluted, and the service life of the vacuum gauge tube is prolonged.

Description

Technical Field

[0001] This utility model belongs to the field of protective equipment technology, and more specifically, it relates to a vacuum gauge protection device. Background Technology

[0002] Vacuum deposition is a process that deposits materials onto a substrate surface to form a thin film under high vacuum conditions using physical or chemical methods. This technology can achieve high-purity, high-precision film deposition, giving the film specific optical, electrical, and mechanical properties. The main methods of vacuum deposition include physical vapor deposition and chemical vapor deposition.

[0003] Vacuum coating is an important production process for coated glass. Before coating, the vacuum chamber needs to be evacuated. During the evacuation process, the vacuum level inside the vacuum chamber needs to be measured, and the vacuum gauge is an important component of the vacuum level measurement device.

[0004] However, during the coating process, the probe end of the vacuum gauge is easily contaminated by the coating material, which reduces the service life of the vacuum gauge. Utility Model Content

[0005] The purpose of this invention is to provide a vacuum gauge protection device to improve the service life of the vacuum gauge.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a vacuum gauge tube protection device is provided, comprising a protective tube, a fixing mechanism, a multi-layer filtration mechanism, and a heat dissipation mechanism. The protective tube is detachably mounted on a vacuum chamber via an installation assembly. One end of the protective tube is a mounting section, which is vertically arranged, and the vacuum gauge tube is inserted into the vertically arranged end of the protective tube. The fixing mechanism is located between the protective tube and the vacuum gauge tube to fix them together. Relative to the mounting section, the other end of the protective tube is a filtration section, and the multi-layer filtration mechanism is detachably mounted on the other end of the protective tube. The heat dissipation mechanism is located on the protective tube and is used to cool the inner cavity of the protective tube.

[0007] In one possible implementation, the protective tube is arranged in a zigzag shape, with the protective end extending vertically downwards.

[0008] In one possible implementation, the fixing mechanism includes a fixing groove and a fixing rubber ring. The fixing groove is annular and is located on the inner wall of the mounting section of the protective tube. A portion of the fixing rubber ring is located within the fixing groove and extends into the inner cavity of the protective tube. The inner diameter of the fixing rubber ring is smaller than the diameter of the vacuum gauge tube.

[0009] In one possible implementation, multiple fixing grooves and multiple fixing rubber rings are provided, with each fixing groove corresponding to a fixing rubber ring. The multiple fixing grooves are evenly arranged along the axial direction of the mounting section, and the fixing rubber rings are located in the corresponding fixing grooves.

[0010] In one possible implementation, the multi-layer filtration mechanism includes a filter tube and multiple filter screens. The filter tube is detachably disposed in the filter section of the protective tube. The filter screen is circular, and the diameter of the filter screen is the same as the diameter of the filter tube. The sidewalls of the filter screen are fixed to the inner wall of the filter screen, and the multiple filter screens are evenly arranged along the axial direction of the filter tube.

[0011] In one possible implementation, the top of the filter tube is provided with an installation tube, the outer wall of the installation tube is provided with a first thread, the inner wall of the filter section of the protective tube is provided with a second thread, the first thread and the second thread are adapted to each other, and the installation tube is screwed into the filter section of the protective tube.

[0012] In one possible implementation, the heat dissipation mechanism includes an inlet pipe, an outlet pipe, and a heat dissipation channel. The heat dissipation channel is spirally disposed within the side wall of the mounting section. One end of the heat dissipation channel is connected to the outlet pipe, and the other end of the heat dissipation channel is connected to the inlet pipe. The inlet pipe and the outlet pipe are connected to an external circulation mechanism, so that the heat dissipation medium circulates within the heat dissipation channel.

[0013] In one possible implementation, the inner wall of the mounting section is wavy, and the distance from the crest of the wave to the center of the protective tube is greater than the distance from the inner side of the fixing ring to the center of the protective tube.

[0014] In one possible implementation, the protective tube includes an installation section, a filter section, a blocking section, and two arc-shaped connecting sections. The blocking section is arranged parallel to the installation section and the filter section, and is located between the installation section and the filter section. The filter section is connected to the blocking section via one arc-shaped segment, and the installation section is connected to the blocking section via the other arc-shaped segment. The blocking section has multiple baffles, one end of which is connected to the inner wall of the blocking section, and the other end of which is spaced apart from the inner wall of the blocking section to form an air passage. The gap between the air passage and the baffle is connected to form an air passage channel. Adjacent baffles are staggered so that the air passage channel is S-shaped.

[0015] In one possible implementation, the mounting assembly includes a fixing member, a insert plate, and a connecting rod. The fixing member is welded to the inner wall of the vacuum chamber and has a fixing groove. The bottom end of the connecting rod is connected to the protective tube. The insert plate is fixed to the top end of the connecting rod and inserted into the fixing groove to fix the insert plate to the fixing member. The connecting rod is made of an elastic material, and the insert plate can be dislodged from the fixing groove due to the deformation of the connecting rod.

[0016] The beneficial effects of the vacuum gauge tube protection device provided by this utility model are as follows: Compared with the prior art, this utility model, by setting a protective tube and installing the vacuum gauge tube in the installation section of the protective tube, and by setting a multi-layer filtration mechanism on the filter section of the protective tube, not only does it not hinder the communication between the inner cavity of the protective tube and the vacuum chamber, thus not reducing the detection accuracy of the vacuum gauge tube, but also effectively prevents the coating material during coating from entering the protective tube, preventing the detection end of the vacuum gauge tube from being contaminated and improving the service life of the vacuum gauge tube; in addition, by setting a heat dissipation mechanism, the heat dissipation of the vacuum gauge tube is improved, preventing the vacuum gauge tube from being damaged by high temperature, further improving the service life of the vacuum gauge tube. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the working structure of the vacuum gauge protection device provided in this embodiment of the utility model;

[0019] Figure 2 for Figure 1 Enlarged view of part A;

[0020] Figure 3 A cross-sectional structural schematic diagram of the air gauge protection device provided in this embodiment of the utility model.

[0021] The labels for the attached figures are as follows:

[0022] 1. Protective tube; 2. Fixing mechanism; 3. Multi-layer filtration mechanism; 4. Heat dissipation mechanism;

[0023] 101. Installation component; 102. Installation section; 103. Filter section; 104. Blocking section; 105. Connecting section; 106. Fixture; 107. Insert plate; 108. Connecting rod;

[0024] 201. Fix the rubber ring;

[0025] 301. Filter tube; 302. Filter screen; 303. Installation tube;

[0026] 401. Liquid inlet pipe; 402. Liquid outlet pipe; 403. Heat dissipation channel; 404. Baffle; 405. Air passage gap. Detailed Implementation

[0027] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model and are not intended to limit this utility model.

[0028] It should be further noted that the accompanying drawings and embodiments of this utility model mainly describe the concept of this utility model. Based on this concept, some specific forms and settings of connection relationships, positional relationships, power mechanisms, power supply systems, hydraulic systems and control systems may not be fully described. However, under the premise that those skilled in the art understand the concept of this utility model, they can implement the above-mentioned specific forms and settings in a well-known manner.

[0029] When a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0030] The terms “length”, “width”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inner”, and “outer” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0031] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "multiple" means two or more, and "several" means one or more, unless otherwise explicitly specified.

[0032] The vacuum gauge protection device provided by this utility model will now be described.

[0033] Please refer to the following: Figure 1 , Figure 2 and Figure 3 The vacuum gauge tube protection device includes a protection tube 1, a fixing mechanism 2, a multi-layer filtration mechanism 3, and a heat dissipation mechanism 4. The protection tube 1 is detachably mounted on the vacuum chamber via an installation assembly 101. One end of the protection tube 1 is an installation section 102, which is vertically arranged. The vacuum gauge tube is inserted into the vertically arranged end of the protection tube 1. The fixing mechanism 2 is located between the protection tube 1 and the vacuum gauge tube to fix the vacuum gauge tube and the protection tube 1. Relative to the installation section 102, the other end of the protection tube 1 is a filtration section 103. The multi-layer filtration mechanism 3 is detachably mounted on the other end of the protection tube 1. The heat dissipation mechanism 4 is located on the protection tube 1 and is used to cool the inner cavity of the protection tube 1.

[0034] The beneficial effects of the vacuum gauge protection device provided in this embodiment are as follows: Compared with the prior art, the vacuum gauge protection device provided in this embodiment, by setting a protective tube 1 and installing the vacuum gauge in the mounting section 102 of the protective tube 1, and by setting a multi-layer filter mechanism 3 on the filter section 103 of the protective tube 1, on the one hand, does not hinder the communication between the inner cavity of the protective tube 1 and the vacuum chamber, thus not reducing the detection accuracy of the vacuum gauge; on the other hand, it can also effectively prevent the coating material during coating from entering the protective tube 1, preventing the detection end of the vacuum gauge from being contaminated and improving the service life of the vacuum gauge. In addition, by setting a heat dissipation mechanism 4, the heat dissipation of the vacuum gauge is improved, preventing the vacuum gauge from being damaged by high temperature, further improving the service life of the vacuum gauge.

[0035] In this embodiment, the protective tube 1 is arranged in a zigzag shape, with the protective end extending vertically downwards. The zigzag shape of the protective tube 1 makes it more difficult for particles of some coating materials to sputter onto the detection end of the vacuum gauge tube during the coating process, thereby protecting the vacuum gauge tube.

[0036] The fixing mechanism 2 includes a fixing groove and a fixing rubber ring 201. The fixing groove is annular and located on the inner wall of the mounting section 102 of the protective tube 1. A portion of the fixing rubber ring 201 is located within the fixing groove and extends into the inner cavity of the protective tube 1. The inner diameter of the fixing rubber ring 201 is smaller than the diameter of the vacuum gauge tube. In use, the vacuum gauge tube is inserted into the mounting section 102 and tightly abuts against the inner wall of the fixing rubber ring 201. This serves two purposes: fixing the vacuum gauge tube and sealing the connection between the vacuum gauge tube and the mounting section 102.

[0037] Preferably, multiple fixing grooves and fixing rubber rings 201 are provided, with each fixing groove corresponding to a fixing rubber ring 201. The multiple fixing grooves are evenly arranged along the axial direction of the mounting section 102, and the fixing rubber rings 201 are disposed in the corresponding fixing grooves. The arrangement of multiple fixing rubber rings 201 increases the contact area and improves the fixing and sealing effects.

[0038] In this embodiment, the multi-layer filtration mechanism 3 includes a filter tube 301 and multiple filter screens 302. The filter tube 301 is detachably mounted on the filter section 103 of the protective tube 1. The filter screen 302 is circular, and its diameter is the same as that of the filter tube 301. The sidewalls of the filter screen 302 are fixed to the inner wall of the filter tube 302, and the multiple filter screens 302 are evenly arranged along the axial direction of the filter tube 301. The arrangement of multiple filter screens 302 ensures that even if some particles of the coating material pass through the first filter screen 302 during coating, they will still be filtered by the second and third filter screens 302, thus improving the filtration effect.

[0039] In addition, the top of the filter tube 301 is provided with a mounting tube 303, the outer wall of the mounting tube 303 is provided with a first thread, and the inner wall of the filter section 103 of the protective tube 1 is provided with a second thread. The first thread and the second thread are compatible, and the mounting tube 303 is screwed into the filter section 103 of the protective tube 1. The mounting tube 303 allows the multi-layer filter mechanism 3 and the filter section 103 to be detachably connected.

[0040] In this embodiment, the heat dissipation mechanism 4 includes an inlet pipe 401, an outlet pipe 402, and a heat dissipation channel 403. The heat dissipation channel 403 is spirally arranged inside the side wall of the mounting section 102. One end of the heat dissipation channel 403 is connected to the outlet pipe 402, and the other end is connected to the inlet pipe 401. The inlet pipe 401 and the outlet pipe 402 are connected to an external circulation mechanism, allowing the heat dissipation medium to circulate within the heat dissipation channel 403. As the heat dissipation medium flows, it can carry away the heat from the mounting section 102, thereby improving the heat absorption effect of the mounting section 102 on the heat emitted by the vacuum gauge tube, which is beneficial for the heat dissipation of the vacuum gauge tube.

[0041] Preferably, the inner wall of the mounting section 102 is corrugated, and the distance from the crest of the corrugation to the center of the protective tube 1 is greater than the distance from the inner side of the fixing ring 201 to the center of the protective tube 1. This increases the heat absorption area of ​​the inner wall of the mounting section 102 and improves the heat dissipation efficiency of the vacuum gauge tube.

[0042] like Figure 1 and Figure 3As shown, the protective pipe 1 includes an installation section 102, a filter section 103, a blocking section 104, and two arc-shaped connecting sections 105. The blocking section 104 is arranged parallel to the installation section 102 and the filter section 103, and is located between the installation section 102 and the filter section 103. The filter section 103 and the blocking section 104 are connected by one of their arc-shaped sections, and the installation section 102 and the blocking section are connected by the other arc-shaped section. The blocking section 104 is provided with multiple baffles 404. One end of the baffle 404 is connected to the inner wall of the blocking section 104, and the other end of the baffle 404 is spaced apart from the inner wall of the blocking section 104 to form an air passage 405. The gap between the air passage 405 and the baffle 404 is connected to form an air passage. Adjacent baffles 404 are staggered so that the air passage is S-shaped. The baffle 404 and the S-shaped air passage ensure that the particles of the coating material will collide with the baffle 404 when moving, further preventing the particles of the coating material from entering the installation section 102, thereby protecting the vacuum gauge tube.

[0043] Finally, the mounting assembly 101 includes a fixing member 106, an insert plate 107, and a connecting rod 108. The fixing member 106 is welded and fixed to the inner wall of the vacuum chamber. The fixing member 106 is provided with a fixing groove. The bottom end of the connecting rod 108 is connected to the protective tube 1. The insert plate is fixed to the top end of the connecting rod 108. The insert plate 107 is inserted into the fixing groove so that the insert plate 107 is fixed to the fixing member 106. The connecting rod 108 is made of elastic material. The insert plate 107 can be dislodged from the fixing groove due to the deformation of the connecting rod 108. This configuration of the mounting assembly 101 results in a simple structure and convenient use.

[0044] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A vacuum gauge protection device, characterized in that, include: The protective tube (1) is detachably mounted on the vacuum chamber via the mounting assembly (101). One end of the protective tube (1) is the mounting section (102), which is arranged vertically. The vacuum gauge tube is inserted into the vertically arranged end of the protective tube (1). A fixing mechanism (2) is provided between the protective tube (1) and the vacuum gauge tube to fix the vacuum gauge tube and the protective tube (1); The multi-layer filter mechanism (3) is located at the other end of the protective tube (1) relative to the mounting section (102), and the multi-layer filter mechanism (3) can be detached from the other end of the protective tube (1). A heat dissipation mechanism (4) is provided on the protective tube (1), and the heat dissipation mechanism (4) is used to cool the inner cavity of the protective tube (1).

2. The vacuum gauge protection device as described in claim 1, characterized in that: The protective tube (1) is arranged in a zigzag shape, and the protective end extends vertically downward.

3. The vacuum gauge protection device as described in claim 2, characterized in that: The fixing mechanism (2) includes a fixing groove and a fixing rubber ring (201). The fixing groove is annular and is located on the inner wall of the mounting section (102) of the protective tube (1). A portion of the fixing rubber ring (201) is located in the fixing groove and a portion of the fixing rubber ring (201) extends into the inner cavity of the protective tube (1). The inner diameter of the fixing rubber ring (201) is smaller than the diameter of the vacuum gauge tube.

4. The vacuum gauge protection device as described in claim 3, characterized in that: Multiple fixing grooves and multiple fixing rubber rings (201) are provided. The fixing grooves correspond one-to-one with the fixing rubber rings (201). The multiple fixing grooves are evenly arranged along the axial direction of the installation section (102). The fixing rubber rings (201) are located in the corresponding fixing grooves.

5. The vacuum gauge protection device as described in claim 4, characterized in that: The multi-layer filtration mechanism (3) includes a filter tube (301) and a multi-layer filter screen (302). The filter tube (301) is detachably disposed in the filter section (103) of the protective tube (1). The filter screen (302) is circular, and the diameter of the filter screen (302) is the same as the diameter of the filter tube (301). The sidewall of the filter screen (302) is fixed on the inner wall of the filter screen (302), and the multi-layer filter screen (302) is evenly arranged along the axial direction of the filter tube (301).

6. The vacuum gauge protection device as described in claim 5, characterized in that: The top of the filter tube (301) is provided with an installation tube (303), the outer wall of the installation tube (303) is provided with a first thread, the inner wall of the filter section (103) of the protective tube (1) is provided with a second thread, the first thread and the second thread are adapted to each other, and the installation tube (303) is screwed into the filter section (103) of the protective tube (1).

7. The vacuum gauge protection device as described in claim 6, characterized in that: The heat dissipation mechanism (4) includes an inlet pipe (401), an outlet pipe (402), and a heat dissipation channel (403). The heat dissipation channel (403) is spirally arranged in the side wall of the mounting section (102). One end of the heat dissipation channel (403) is connected to the outlet pipe (402), and the other end of the heat dissipation channel (403) is connected to the inlet pipe (401). The inlet pipe (401) and the outlet pipe (402) are connected to an external circulation mechanism to allow the heat dissipation medium to circulate within the heat dissipation channel (403).

8. The vacuum gauge protection device as described in claim 7, characterized in that: The inner wall of the mounting section (102) is wavy, and the distance from the crest of the wave to the center of the protective tube (1) is greater than the distance from the inner side of the fixing ring (201) to the center of the protective tube (1).

9. The vacuum gauge protection device as described in claim 8, characterized in that: The protective tube (1) includes an installation section (102), a filter section (103), a blocking section (104), and two arc-shaped connecting sections (105). The blocking section (104) is arranged parallel to the installation section (102) and the filter section (103), and the blocking section (104) is located between the installation section (102) and the filter section (103). The filter section (103) is connected to the blocking section (104) through one of its arc-shaped sections, and the installation section (102) is connected to the blocking section through the other arc-shaped section. The blocking section (104) is provided with a plurality of baffles (404). One end of the baffle (404) is connected to the inner wall of the blocking section (104), and the other end of the baffle (404) is arranged at intervals with the inner wall of the blocking section (104) to form an air passage gap (405). The gap between the air passage gap (405) and the baffle (404) is connected to form an air passage channel. Adjacent baffles (404) are arranged alternately so that the air passage is S-shaped.

10. The vacuum gauge protection device as described in claim 9, characterized in that: The mounting assembly (101) includes a fixing member (106), a insert plate (107), and a connecting rod (108). The fixing member (106) is welded and fixed to the inner wall of the vacuum chamber. The fixing member (106) is provided with a fixing groove. The bottom end of the connecting rod (108) is connected to the protective tube (1). The insert plate is fixed to the top end of the connecting rod (108). The insert plate (107) is inserted into the fixing groove so that the insert plate (107) is fixed to the fixing member (106). The connecting rod (108) is made of elastic material. The insert plate (107) can be dislodged from the fixing groove due to the deformation of the connecting rod (108).

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