Automatic opening and closing vacuum furnace chamber device

Abstract

The utility model discloses an automatic opening and closing vacuum furnace chamber device, which relates to the technical field of vacuum furnace chamber opening and closing devices and comprises a vacuum furnace body, a furnace opening is arranged on the vacuum furnace body, a furnace door is detachably mounted at the furnace opening, and an automatic opening and closing mechanism is arranged between the furnace door and the vacuum furnace body and used for automatically opening and closing the furnace door. The furnace door can be controlled, automatic furnace door opening and closing operation is achieved, the sensitivity is high, time is saved, manual participation is reduced, the product failure probability is reduced, the vacuum degree in a cavity of the vacuum furnace body is guaranteed, and the single crystal product quality and the equipment blow-in qualification rate are remarkably improved.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuum furnace cavity switching devices, and in particular to an automatic vacuum furnace cavity switching device. Background Technology

[0002] The vacuum furnace body of the MPVCD equipment is a device used for single crystal growth. During the single crystal growth process, a certain vacuum level needs to be maintained inside the vacuum furnace body to provide the necessary and favorable conditions for single crystal growth. It is a commonly used device in single crystal growth.

[0003] The vacuum furnace body uses a manual locking device, requiring manual operation of the furnace door to open and close. Because operators' movements and strength cannot be consistent, the furnace cavity may not lock properly, leading to process instability, vacuum leakage, and consequently, equipment alarms, resource waste, environmental pollution, reduced product qualification rates, raw material loss, equipment wear, and low output. Furthermore, because the vacuum furnace lock is quite tight, manual opening and closing requires considerable force, which is time-consuming and labor-intensive. Utility Model Content

[0004] The main objective of this invention is to provide an automatic switching vacuum furnace cavity device, which can effectively solve the technical problems in the background art.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] An automatic switching vacuum furnace chamber device is provided, wherein a vacuum furnace chamber for single crystal growth is provided inside the vacuum furnace chamber, and a furnace opening is provided on the vacuum furnace chamber, and a furnace door is detachably installed on the furnace opening. The device is characterized in that an automatic switching mechanism is provided between the furnace door and the vacuum furnace chamber for automatic opening and closing of the furnace door.

[0007] As a further embodiment of this utility model, the automatic switching mechanism includes a furnace door frame, which is fixedly installed on one side surface of the furnace door. Two slots are provided through the upper and lower ends of the furnace door frame, and a cylinder is slidably installed in each of the two slots.

[0008] As a further embodiment of this utility model, the cylinder includes a piston rod, which is slidably connected to a slot, and a retaining rod is fixedly installed at the bottom end of the piston rod.

[0009] As a further embodiment of this utility model, two mounting brackets are fixedly installed on both sides of the furnace opening surface, and a sliding groove is provided on the mounting bracket, with an adjusting block slidably installed in the sliding groove.

[0010] As a further embodiment of this utility model, a linkage rod is fixedly installed on the piston rod, a guide groove is provided on the linkage rod, and a guide rod is fixedly installed on the adjusting block, the guide rod being adapted to the guide groove.

[0011] As a further embodiment of this utility model, a limit block is fixedly installed on the vacuum furnace body, and the adjustment block abuts against the furnace door frame.

[0012] The beneficial effects of this utility model are as follows:

[0013] By setting up an automatic switching mechanism, the furnace door can be controlled, realizing automated furnace door opening and closing operation. It has high sensitivity, saves time, reduces manual intervention, reduces the probability of product failure, ensures the vacuum level in the vacuum furnace cavity, and significantly improves the quality of single crystal products and the equipment furnace opening qualification rate.

[0014] By setting up linkage rods, guide grooves, mounting brackets, sliding grooves, adjusting blocks, and guide rods, when the cylinder drives the furnace door to open and close automatically, it will drive the adjusting block to move horizontally. This will provide pressure to the furnace door when closing, thereby improving the sealing performance. When opening, the furnace door will disengage from the furnace hole, avoiding wear and tear on the sealing ring. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of an automatic switching vacuum furnace cavity device according to the present invention;

[0016] Figure 2 This is a schematic diagram showing the overall structure of an automatic switching vacuum furnace cavity device according to the present invention.

[0017] Figure 3 This is an enlarged schematic diagram of the linkage rod of an automatic switching vacuum furnace cavity device according to this utility model;

[0018] Figure 4 This is an enlarged schematic diagram of the adjusting block of an automatic switching vacuum furnace cavity device according to this utility model.

[0019] In the diagram: 1. Vacuum furnace body; 2. Furnace opening; 3. Furnace door; 4. Automatic switching mechanism; 5. Furnace door frame; 6. Slot; 7. Cylinder; 8. Piston rod; 9. Locking rod; 10. Linkage rod; 11. Guide groove; 12. Mounting bracket; 13. Sliding groove; 14. Adjusting block; 15. Guide rod; 16. Limiting block. Detailed Implementation

[0020] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0021] like Figure 1-4As shown in the figure, an automatic-switch vacuum furnace chamber device includes a vacuum furnace body 1, which provides good conditions for single crystal growth. A furnace opening 2 is provided on the vacuum furnace body 1, and a furnace door 3 is installed in the furnace opening 2 through an automatic-switch mechanism 4. A sealing ring is provided on the furnace door 3 to enhance the sealing performance of the furnace door 3 to the furnace opening 2. The automatic-switch mechanism 4 can control the furnace door 3, enabling the furnace door 3 to automatically close and open the furnace opening 2, achieving automated operation of opening and closing the furnace door 3, with high sensitivity, time saving, less manual participation, and reduced probability of product failure.

[0022] In this embodiment, the automatic-switch mechanism 4 includes a furnace door frame 5, which is fixedly installed on the furnace door 3 to control the position of the furnace door 3. Card slots 6 are provided near both sides at the upper and lower ends of the furnace door frame 5, and the card slots 6 are slidably connected to the piston rod 8 of the air cylinder 7. The card slots 6 are rectangular through slots, enabling the piston rod 8 to displace vertically and horizontally along the card slots 6. A clamping rod 9 is fixedly connected to the bottom end of the piston rod 8, and the length of the clamping rod 9 is longer than that of the card slots 6, enabling the clamping rod 9 to play a limiting role and preventing the piston rod 8 from disengaging from the card slots 6. Thus, the clamping rod 9 can be used to clamp at the bottom end of the card slots 6 to drive the displacement of the furnace door frame 5.

[0023] In this embodiment, mounting brackets 12 are fixedly installed on both sides of the furnace opening 2. A sliding slot 13 is provided in the mounting bracket 12, and an adjusting block 14 is slidably installed in the sliding slot 13. The sliding slot 13 plays a limiting role, enabling the adjusting block 14 to only slide along the sliding slot 13. The adjusting block 14 is of a "C" - shaped structure, and one end of the adjusting block 14 is in close contact with the furnace door frame 5, enabling the displacement of the adjusting block 14 to drive the displacement of the furnace door frame 5, thereby driving the displacement of the furnace door 3 to open and seal the furnace opening 2.

[0024] In this embodiment, a linkage rod 10 is fixedly installed on the piston rod 8. The bottom end of the linkage rod 10 is flush with the bottom end of the piston rod 8. A guiding slot 11 is provided on the linkage rod 10, and a guiding rod 15 is fixedly connected in the adjusting block 14. The guiding rod 15 is adapted to the guiding slot 11. The guiding slot 11 has two ends as straight slots, which are connected by an arc-shaped slot. The structure of the guiding slot 11 can drive the guiding rod 15 to displace stably along the guiding slot 11, enabling the guiding rod 15 to displace horizontally, thereby driving the displacement of the adjusting block 14.

[0025] In this embodiment, a limiting block 16 is fixedly installed at the bottom end position of the vacuum furnace body 1 corresponding to the furnace opening 2. The limiting block 16 is of an elastic structure, such as rubber, etc., which can avoid the problem of damage caused by hard contact between the furnace door 3 and the limiting block 16.

[0026] It should be noted that this utility model is an automatic opening and closing vacuum furnace cavity device. When in use, when closing the door, the cylinder 7 is activated. The piston rod 8 of the cylinder 7 passes through the slot 6 of the furnace door frame 5, and the piston rod 8 is engaged with the bottom end of the furnace door frame 5 through the bottom locking rod 9. When the piston rod 8 moves down, the furnace door 3 moves down synchronously under the action of gravity until the furnace door 3 contacts the limiting block 16, so that the furnace door 3 and the furnace opening 2 are on the same axis.

[0027] As the piston rod 8 continues to move downward, the guide rod 15 enters the guide groove 11 of the linkage rod 10. The guide groove 11 moves downward, and the guide rod 15 moves along the guide groove 11, thereby driving the adjusting block 14 to move. The adjusting block 14 presses against the furnace door frame 5, thereby driving the furnace door 3 to move towards the furnace opening 2 until the furnace door 3 is tightly engaged with the furnace opening 2, which can effectively improve the airtightness of the furnace opening 2.

[0028] When the door needs to be opened, cylinder 7 is activated. Cylinder 7 drives piston rod 8 upward, which in turn moves linkage rod 10. The guide groove 11 inside linkage rod 10 moves guide rod 15 along guide groove 11, thereby moving adjusting block 14 and pushing furnace door 3 out of furnace opening 2. Piston rod 8 continues to move upward, and locking rod 9 contacts the bottom end of furnace door frame 5, thereby moving furnace door frame 5 upward and causing furnace door 3 to disengage from furnace opening 2. Automatic door opening is completed.

[0029] When the furnace door 3 opens and closes automatically, it will undergo a certain lateral displacement. When the door opens, it moves horizontally, causing the sealing ring to completely disengage from the furnace opening 2. The vertical displacement of the furnace door 3 will not affect the service life of the sealing ring. At the same time, when the furnace door 3 closes, it can provide a pressure to the furnace opening 2, making the sealing effect of the furnace door 3 better.

[0030] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. An automatic switching vacuum furnace chamber device, comprising a vacuum furnace body (1), wherein a vacuum furnace chamber for single crystal growth is provided inside the vacuum furnace body (1), and a furnace opening (2) is provided on the vacuum furnace body (1), wherein a furnace door (3) is detachably installed on the furnace opening (2), characterized in that: An automatic switching mechanism (4) is provided between the furnace door (3) and the vacuum furnace body (1) for the automatic opening and closing of the furnace door (3).

2. The automatic switching vacuum furnace chamber device according to claim 1, characterized in that: The automatic switching mechanism (4) includes a furnace door frame (5), which is fixedly installed on one side surface of the furnace door (3). Two slots (6) are opened through the upper and lower ends of the furnace door frame (5), and cylinders (7) are slidably installed in both slots (6).

3. The automatic switching vacuum furnace chamber device according to claim 2, characterized in that: The cylinder (7) includes a piston rod (8), which is slidably connected to a slot (6), and a retaining rod (9) is fixedly installed at the bottom end of the piston rod (8).

4. The automatic switching vacuum furnace chamber device according to claim 3, characterized in that: Two mounting brackets (12) are fixedly installed on both sides of the surface of the furnace opening (2). A sliding groove (13) is provided on the mounting bracket (12), and an adjusting block (14) is slidably installed in the sliding groove (13).

5. The automatic switching vacuum furnace chamber device according to claim 4, characterized in that: A linkage rod (10) is fixedly installed on the piston rod (8), and a guide groove (11) is provided on the linkage rod (10). A guide rod (15) is fixedly installed on the adjusting block (14), and the guide rod (15) is adapted to the guide groove (11).

6. The automatic switching vacuum furnace chamber device according to claim 4, characterized in that: A limit block (16) is fixedly installed on the vacuum furnace body (1), and the adjusting block (14) abuts against the furnace door frame (5).

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