Fine leveling valve of air bag

Abstract

The utility model relates to the technical field of semiconductors, in particular to a fine leveling valve of an air bag, which comprises a valve body, an air inlet channel, an exhaust channel and a noise reduction channel are arranged on the side wall of the valve body, the exhaust channel is communicated with the air bag, and the air inlet channel and the noise reduction channel are symmetrically distributed in the axial direction of the valve body; the valve element assembly comprises a valve element base extending in the axial direction, a valve element and a lower end cover, and one end of the air inlet channel, one end of the exhaust channel and one end of the noise reduction channel are all arranged in the side wall of the valve element base; an exhaust hole communicated with the exhaust channel is formed in the side wall of the valve element, and a pressure adjusting gap is formed between the bottom of the valve element and the lower end cover of the elastic support and communicated with the air inlet channel; the pressure control mechanism comprises an upper end cover and a pressing rod penetrating through the valve element and the upper end cover, the pressing rod is elastically connected with the lower end cover through a first reset spring, and a silencing cavity communicated with the silencing channel is formed between the pressing rod and the upper end cover; the adjusting knob is connected to the outer wall face of the valve body in a screwed mode and makes contact with the exhaust channel and the noise reduction channel.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a fine leveling valve for an airbag. Background Technology

[0002] In the semiconductor manufacturing industry, highly precise control and adjustment technologies are crucial for achieving high-quality chip production. With the continuous advancement of semiconductor processes, the requirements for equipment in terms of minute displacement, precise pressure control, and dynamic stability have reached unprecedented levels. Traditional mechanical adjustment methods, such as screws and gears, while providing a certain degree of adjustment accuracy, often fall short when facing demands for nanometer-level precision, rapid response, and complex and ever-changing manufacturing environments.

[0003] Especially in semiconductor equipment processes such as wafer alignment, lithography stage positioning, and precision testing, even the slightest deviation can lead to a decrease in chip performance or even render the chip unusable. Furthermore, vibrations, temperature variations, and cleanliness requirements generated during semiconductor manufacturing also pose significant challenges to the stability and reliability of the control system.

[0004] While existing airbag adjustment technology can achieve contactless and wear-free adjustment to some extent, it still has shortcomings in terms of fine adjustment. For example, limitations in adjustment accuracy, slow response speed, and difficulty in maintaining stable performance in extreme environments restrict its widespread application in high-end semiconductor manufacturing equipment.

[0005] Therefore, this application develops a fine leveling valve for airbags to solve the problems existing in the prior art. Utility Model Content

[0006] The purpose of this invention is to provide a fine leveling valve for an airbag to solve the problem of insufficient adjustment accuracy in the prior art.

[0007] The technical solution of this utility model is: a fine leveling valve for an airbag, comprising:

[0008] Valve body, used for support;

[0009] A valve core assembly includes an axially extending valve core seat, a valve core, and a lower end cap. The valve body sidewall is provided with an air intake channel, an exhaust channel, and a silencer channel. The exhaust channel communicates with an air bladder, and the air intake channel and the silencer channel are symmetrically distributed along the axial direction of the valve body. One end of each of the air intake channel, exhaust channel, and silencer channel is located within the sidewall of the valve core seat. The valve core sidewall is provided with an exhaust hole communicating with the exhaust channel. The bottom of the valve core forms a pressure regulating gap with the elastically supported lower end cap and communicates with the air intake channel.

[0010] The pressure control mechanism includes an upper end cover and a pressure rod that passes through the valve core and the upper end cover. The pressure rod is elastically connected to the lower end cover by a first return spring. A silencing cavity communicating with the silencing channel is formed between the pressure rod and the upper end cover.

[0011] The adjustment knob is screwed onto the outer wall of the valve body and contacts the quick connector installed in the exhaust passage and the muffler connector installed in the muffler passage.

[0012] Preferably, the pressure rod includes an upper pressure rod and a lower pressure rod, the lower end of the lower pressure rod is connected to the lower end cover through the first return spring, and the upper pressure rod is connected to the valve core through the second return spring.

[0013] Preferably, the silencing channel includes a first channel that axially penetrates the lower pressure rod and communicates with the exhaust port, a second channel that is opened inside the valve core seat, and an annular cavity formed by the sealing fit between the upper end cover and the valve core seat; wherein, the first channel extends along the axis of the lower pressure rod and communicates with the second channel through the annular cavity.

[0014] Preferably, the outer wall of the pressure rod is divided into upper and lower sections. The upper section of the outer wall slides and fits into the inner wall of the valve core, while the lower section of the outer wall has an annular gap with the inner wall of the valve core to form an air cavity. The air cavity is always connected to the first channel and the exhaust port.

[0015] Preferably, the inner wall of the bottom of the valve core is provided with rubber. Initially, the first return spring is compressed between the bottom end of the lower pressure rod and the bottom of the valve core. Its elastic pressure pushes the lower pressure rod to move axially, so that the outer wall of the lower pressure rod forms a radial seal with the rubber, so that the air chamber is not connected to the air intake channel.

[0016] Preferably, the top of the upper pressure rod is embedded with a ball bearing. When the upper pressure rod contacts the platform, the ball bearing protrudes from the top surface of the upper pressure rod and rolls in contact with the lower surface of the platform, thus converting the sliding friction between the upper pressure rod and the platform into rolling friction.

[0017] Preferably, the adjustment knob is rotatably connected to the valve body via a thread, and the preset height of the airbag is adjusted by rotating it a certain number of times.

[0018] Preferably, the outer wall surface of the upper pressure rod is provided with an annular groove, and a shim is disposed in the groove to reduce the frictional resistance when the upper pressure rod moves.

[0019] Compared with the prior art, the advantages of this utility model are:

[0020] (1) The adjustment knob is connected to the valve body by a thread and is in contact with the exhaust channel and the silencer channel. Rotating the adjustment knob can adjust the overall height of the valve body. By rotating the knob a certain number of times, the airbag can be made to float to the preset height, so as to achieve fine adjustment of the airbag.

[0021] (2) The pressure rod includes an upper pressure rod and a lower pressure rod. It is elastically connected to the lower end cover and the valve core through the first return spring and the second return spring respectively, so that the pressure rod can automatically adjust its position under different air pressure conditions to realize the inflation and deflation functions of the airbag.

[0022] (3) The silencing channel consists of a first channel that axially penetrates the lower pressure rod and is connected to the exhaust hole, a second channel inside the valve core seat, and an annular cavity formed by the sealing cooperation between the upper end cover and the valve core seat, which can effectively reduce the noise when the gas is discharged. Attached Figure Description

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0024] Figure 1 This is a side sectional view of the fine leveling valve of the airbag described in this utility model;

[0025] Figure 2 This is a schematic diagram of the structure of a fine leveling valve for an airbag according to the present invention;

[0026] Figure 3 This is a side sectional view of the valve core assembly described in this utility model;

[0027] Figure 4 for Figure 3 Enlarged diagram of A in the middle;

[0028] Figure 5 for Figure 3 Enlarged diagram of B in the middle;

[0029] Figure 6 This is a partial cross-sectional view of the valve core assembly described in this utility model.

[0030] The components are as follows: 1. Valve body; 211. Inlet passage; 212. Exhaust passage; 213. Silencing passage; 2. Valve core assembly; 21. Valve core seat; 22. Valve core; 23. Lower end cover; 24. Exhaust port; 3. Pressure control mechanism; 31. Upper end cover; 32. Pressure rod; 321. Upper pressure rod; 322. Lower pressure rod; 323. Groove; 324. Gasket; 33. First return spring; 34. Silencing chamber; 341. First channel; 342. Second channel; 343. Annular cavity; 35. Second return spring; 36. Air chamber; 4. Adjustment knob; 5. Rubber; 6. Ball bearing. Detailed Implementation

[0031] The present invention will be further described in detail below with reference to specific embodiments:

[0032] like Figures 1-5 As shown, a fine leveling valve for an airbag includes a valve body 1, a valve core assembly 2, a pressure control mechanism 3, and an adjustment knob 4. These components work together to achieve fine adjustment of the airbag. The valve body 1 is the basic support structure for the entire airbag adjustment. The valve core assembly 2 includes a valve core seat 21, a valve core 22, and a lower end cover 23. An air intake channel 211, an exhaust channel 212, and a silencer channel 213 are provided on the side wall of the valve core seat 21. The exhaust channel 212 is directly connected to the airbag, ensuring that the gas inside the airbag can be smoothly discharged through the exhaust channel 212. The pressure control mechanism 3 includes an upper end cover 31 and a pressure rod 32. The pressure rod 32 passes through the valve core 22 and the upper end cover 31 and is connected to the lower end cover by a first return spring 33. 23. Flexible connection: one end of the intake channel 211, exhaust channel 212 and muffler channel 213 are all located inside the side wall of the valve core seat 21. The adjustment knob 4 is rotatably connected to the valve body 1 by a thread and contacts the quick connector installed in the exhaust channel 212 and the muffler connector installed in the muffler channel 213. When the adjustment knob 4 is rotated, the overall height of the valve body 1 will be adjusted so that the airbag floats to a certain height. The number of rotations will make the airbag float to the preset height, thereby achieving fine adjustment of the airbag.

[0033] In this embodiment, as Figures 3-6 As shown, the pressure rod 32 includes an upper pressure rod 321 and a lower pressure rod 322. The lower end of the lower pressure rod 322 is connected to the lower end cover 23 via a first return spring 33. The upper pressure rod 321 is connected to the valve core 22 via a second return spring 35. The top of the upper pressure rod 321 and the airbag jointly support the platform. The silencing channel 213 includes a first channel 341 that axially penetrates the lower pressure rod 322 and communicates with the exhaust port 24, a second channel 342 that is opened inside the valve core seat 21, and an annular cavity 3 formed by the sealing fit between the upper end cover 31 and the valve core seat 21. 43. The valve core 22 has an exhaust hole 24 on its side wall that communicates with the exhaust channel 212. The first channel 341 extends along the axis of the lower pressure rod 322 and communicates with the second channel 342 through the annular cavity 343. The outer wall of the lower pressure rod 322 is divided into upper and lower sections. The upper half of the outer wall slides against the inner wall of the valve core 22. The lower half of the outer wall has an annular gap between it and the inner wall of the valve core 22 to form an air cavity 36. The air cavity 36 is always in communication with the first channel 341 and the exhaust hole 24. The inner wall at the bottom of the valve core 22 is provided with rubber 5.

[0034] Initially, there is a gap between the upper pressure rod 321 and the lower pressure rod 322. The first return spring 33 pushes the lower pressure rod 322 to move axially, so that the outer wall of the lower pressure rod 322 forms a radial seal with the rubber 5, making the air chamber 36 disconnected from the air intake channel 211. Gas cannot enter the airbag through the air intake channel 211. When the air pressure inside the airbag is low, causing it to tilt, the platform presses down on the upper pressure rod 321, causing the lower pressure rod 322 to move downward. At this time, the upper pressure rod 321 seals the first channel 341, preventing gas from entering the silencer chamber 34 through the first channel 341. At the same time, the lower pressure rod 322 separates from the rubber 5, thereby connecting the air intake channel 211, the air chamber 36, and the exhaust channel 212, allowing the airbag to take in air and increase its height, thus adjusting the height of the platform.

[0035] When the internal pressure of the airbag is high and the platform tilts in another direction, the airbag needs to be vented. Under the action of the second return spring 35, the upper pressure rod 321 gradually moves away from the lower pressure rod 322, so that the exhaust channel 212 is connected to the first channel 341 through the exhaust hole 24, and connected to the silencer 34 and the second channel 342, thereby venting the gas through the silencer channel 213. At this time, the lower pressure rod 322 abuts against the rubber 5 under the action of the first return spring 33, so that the gas can only be vented through the silencer channel 213. After multiple inflation and deflation, the valve body 1 is in a dynamic and stable equilibrium state.

[0036] Specifically, the bottom of the valve core 22 and the lower end cover 23 of the elastic support form a pressure adjustment gap, which is always connected to the air intake channel 211. When the lower pressure rod 322 moves downward, the air intake channel 211 can inflate the airbag at any time. During inflation, the airbag moves downward together with the lower pressure rod 322, and the communication area with the exhaust port 24 gradually decreases. To ensure smooth inflation, the air chamber 36 is connected to the exhaust port 24. When deflation, the air chamber 36 moves upward with the upper pressure rod 321, and the communication area between the air chamber 36 and the exhaust port 24 increases. Therefore, the air chamber 36, the first channel 341, and the exhaust port 24 will always be in a connected state, ensuring the smooth inflation and deflation of the airbag. A gasket is also provided between the valve core 22 and the lower end cover 23 to absorb and disperse part of the impact force, playing a role in shock absorption and buffering.

[0037] To reduce friction during the movement of the upper pressure rod 321, an annular groove 323 is provided on the outer wall of the upper pressure rod 321, and a shim 324 is placed in the groove 323. The shim 324 is made of nylon, while the upper pressure rod 321 and the upper end cap 31 are both made of metal. This transforms the friction between metals into friction between metal and nylon, greatly reducing frictional resistance and making the movement of the upper pressure rod 321 smoother. At the same time, the shim 324 also ensures that the upper pressure rod 321 does not become eccentric during movement, thus ensuring the accuracy of the movement.

[0038] Furthermore, the top of the upper pressure rod 321 is embedded with a ball bearing 6. When the upper pressure rod 321 contacts the platform, the ball bearing 6 protrudes from the top surface of the upper pressure rod 321 and rolls in contact with the lower surface of the platform, converting the sliding friction between the upper pressure rod 321 and the platform into rolling friction, making the movement of the upper pressure rod 321 more stable and accurate, and improving the precision of the movement.

[0039] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and therefore, all changes falling within the meaning and scope of the equivalents of the claims are intended to be included within this utility model.

Claims

1. A precision leveling valve for an airbag, characterized in that, include: Valve body (1), used for support; The valve core assembly (2) includes an axially extending valve core seat (21), a valve core (22), and a lower end cover (23). The valve core seat (21) has an air intake channel (211), an exhaust channel (212), and a muffler channel (213) on its side wall. The exhaust channel (212) is connected to the airbag. The air intake channel (211) and the muffler channel (213) are symmetrically distributed in the axial direction of the valve body (1). One end of the air intake channel (211), the exhaust channel (212), and the muffler channel (213) are all located inside the side wall of the valve core seat (21). The side wall of the valve core (22) is provided with an exhaust hole (24) that communicates with the exhaust channel (212). The bottom of the valve core (22) forms a pressure adjustment gap with the elastically supported lower end cover (23) and communicates with the air intake channel (211). The pressure control mechanism (3) includes an upper end cover (31) and a pressure rod (32) that passes through the valve core (22) and the upper end cover (31). The pressure rod (32) is elastically connected to the lower end cover (23) through a first return spring (33). A silencing cavity (34) communicating with the silencing channel (213) is formed between the pressure rod (32) and the upper end cover (31). Adjustment knob (4) is screwed onto the outer wall of valve body (1) and comes into contact with quick connector installed in exhaust channel (212) and silencer connector installed in silencer channel (213).

2. The precision leveling valve for an airbag according to claim 1, characterized in that: The pressure rod (32) includes an upper pressure rod (321) and a lower pressure rod (322). The lower end of the lower pressure rod (322) is connected to the lower end cover (23) through the first return spring (33), and the upper pressure rod (321) is connected to the valve core (22) through the second return spring (35).

3. The fine leveling valve for an airbag according to claim 2, characterized in that: The silencing channel (213) includes a first channel (341) that axially penetrates the pressure rod (322) and communicates with the exhaust hole (24), a second channel (342) that is opened inside the valve core seat (21), and an annular cavity (343) formed by the sealing fit between the upper end cover (31) and the valve core seat (21); wherein, the first channel (341) extends along the axis of the pressure rod (322) and communicates with the second channel (342) through the annular cavity (343).

4. The precision leveling valve for an airbag according to claim 3, characterized in that: The outer wall of the pressure rod (322) is divided into upper and lower sections. The upper half of the outer wall slides and fits against the inner wall of the valve core (22). The lower half of the outer wall has an annular gap between it and the inner wall of the valve core (22) to form an air chamber (36). The air chamber (36) is always connected to the first channel (341) and the exhaust hole (24).

5. The precision leveling valve for an airbag according to claim 4, characterized in that: The inner wall of the bottom of the valve core (22) is provided with rubber (5). Initially, the first return spring (33) is compressed between the bottom end of the lower pressure rod (322) and the bottom of the valve core (22). Its elastic pressure pushes the lower pressure rod (322) to move axially, so that the outer wall of the lower pressure rod (322) and the rubber (5) form a radial seal and abut, so that the air chamber (36) is not connected to the air inlet channel (211).

6. The precision leveling valve for an airbag according to claim 2, characterized in that: The top of the upper pressure rod (321) is embedded with a ball (6). When the upper pressure rod (321) contacts the platform, the ball (6) protrudes from the top surface of the upper pressure rod (321) and rolls in contact with the lower surface of the platform, thus converting the sliding friction between the upper pressure rod (321) and the platform into rolling friction.

7. The precision leveling valve for an airbag according to claim 1, characterized in that: The adjustment knob (4) is rotatably connected to the valve body (1) by a thread, and the preset height of the airbag is adjusted by the number of rotations.

8. The precision leveling valve for an airbag according to claim 2, characterized in that: The outer wall of the upper pressure rod (321) is provided with an annular groove (323), and a gasket (324) is disposed in the groove (323) to reduce the frictional resistance when the upper pressure rod (321) moves.

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