Ion source auxiliary installation device

Abstract

The utility model discloses an ion source auxiliary installation device which comprises a base, the top of the base is fixedly connected with a vacuum bin, the vacuum bin is of a hollow structure, the top of the vacuum bin is provided with a vacuum opening, the side wall of the vacuum bin is provided with a vacuum pipe, and the vacuum pipe and the vacuum opening are both communicated with an inner cavity of the vacuum bin. A vacuum valve is installed on the vacuum pipe, and an auxiliary installation module is arranged on the top of the vacuum bin. According to the utility model, the ion source body can be rapidly installed through the auxiliary installation module, and the auxiliary installation module can be randomly detached, so that the auxiliary installation module can be adjusted or replaced according to the model and the installation scene of the ion source body, thereby effectively improving the compatibility of the auxiliary installation device, and improving the installation efficiency. Therefore, the vacuum chamber can adapt to ion sources of different models and installation scenes, is good in sealing performance, and can effectively avoid the influence on vacuum performance.

Description

Technical Field

[0001] This utility model belongs to the field of ion source installation technology, and in particular relates to an ion source auxiliary installation device. Background Technology

[0002] An ion source is a device used to generate charged particles (ions) and is widely used in scientific research, industrial manufacturing, and the medical field. Ion sources play an important role in mass spectrometers, ion implanters, particle accelerators, and ion thrusters.

[0003] Ion sources typically operate under high vacuum and high voltage conditions. Improper installation can affect equipment performance or even cause malfunctions or damage. Therefore, auxiliary installation devices are needed to install ion sources. Currently, there are some auxiliary installation devices on the market, such as an ion source auxiliary installation tool with publication number CN218414475U disclosed on the China Patent Network. This auxiliary installation tool can assist in the installation of ion sources, but it has some defects and shortcomings that need to be improved: (1) Some existing auxiliary installation devices are usually designed for specific ion sources, and their design structure is relatively fixed. They often lack adjustable or replaceable modules, resulting in poor compatibility of the auxiliary installation devices and inability to adapt to different models of ion sources and installation scenarios; (2) Some existing auxiliary installation devices lack effective sealing measures, and gaps are easily generated when connecting the ion source to the vacuum structure, which leads to vacuum leakage. This not only reduces the vacuum performance of the system but also increases the debugging time. Therefore, in view of the above problems, the ion source auxiliary installation device provided by this utility model is of great significance. Utility Model Content

[0004] This utility model provides an ion source auxiliary installation device. The auxiliary installation module assists in the rapid installation of the ion source body, and the module is easily disassembled to allow for adjustment or replacement based on the ion source model and installation scenario. This effectively improves the compatibility of the auxiliary installation device, enabling it to adapt to different ion source models and installation scenarios. A sealing gasket fills the gap between the ion source body and the auxiliary installation module, preventing vacuum leakage caused by gaps between them. Furthermore, a sealing ring fills the gap between the auxiliary installation module and the vacuum port, further improving the sealing performance of the auxiliary installation device and preventing gaps between the auxiliary installation module and the vacuum port from affecting vacuum performance. In summary, this invention solves the problems in the prior art.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0006] This utility model discloses an ion source auxiliary installation device, including a base, a vacuum chamber fixedly connected to the top of the base, the vacuum chamber being a hollow structure with a vacuum port at its top, and a vacuum tube provided on the side wall of the vacuum chamber. Both the vacuum tube and the vacuum port are connected to the inner cavity of the vacuum chamber, and a vacuum valve is installed on the vacuum tube. An auxiliary installation module is provided on the top of the vacuum chamber.

[0007] The auxiliary installation module includes an installation plate, a positioning cylinder is fixedly connected to the bottom of the installation plate, and an installation base is fixedly connected to the top of the installation plate. The installation base is circular and has an installation groove on its top. The bottom of the installation groove is connected to the top of the positioning cylinder, and an ion source body is installed in the installation groove.

[0008] Furthermore, the bottom surface of the base is provided with several anti-slip pads, which are long strips and are distributed linearly at equal intervals along the length of the bottom surface of the base, and the surface of the anti-slip pads is provided with herringbone anti-slip patterns.

[0009] Furthermore, the top of the vacuum chamber is fixedly connected with several studs, and each stud is threaded with a nut that mates with it. The surface of the mounting plate is provided with several positioning holes, the number of which is the same as the number of studs, and the diameter of the positioning holes corresponds to the diameter of the studs. The center of each positioning hole corresponds one-to-one with the center of each stud.

[0010] Furthermore, the sidewall of the ion source body is fixedly connected with several fixing blocks, each fixing block having a threaded hole on its surface, and a bolt that mates with it is threaded into the threaded hole. The top surface of the mounting base has several positioning grooves, the number of which is the same as the number of fixing blocks, and the groove width is equal to the width of the fixing blocks. The center of each positioning groove corresponds one-to-one with the center of each fixing block.

[0011] Furthermore, each of the positioning grooves has a threaded groove at its bottom, and the inner wall of the threaded groove is provided with an internal thread that mates with the bolt. The diameter of the threaded groove is equal to the diameter of the threaded hole, and the center of each threaded groove corresponds one-to-one with the center of each threaded hole.

[0012] Furthermore, a sealing gasket is provided at the bottom of the mounting groove. The sealing gasket is annular, and its outer diameter is equal to the diameter of the mounting groove.

[0013] Furthermore, both the positioning cylinder and the vacuum port are circular, with their outer diameters corresponding to and equal to the diameter of the vacuum port, and a sealing ring is provided on the outer wall of the positioning cylinder.

[0014] The present invention has the following advantages over the prior art:

[0015] (1) When using the ion source auxiliary installation device of the present invention, the auxiliary installation module can assist the ion source body to be installed quickly, and the auxiliary installation module can be disassembled at will, so as to adjust or replace the auxiliary installation module according to the model of the ion source body and the installation scenario, thereby effectively improving the compatibility of the auxiliary installation device and enabling it to adapt to different models of ion sources and installation scenarios.

[0016] (2) When the ion source auxiliary installation device of this utility model is used, the sealing gasket can fill the gap between the ion source body and the auxiliary installation module to play a sealing role, thereby preventing the vacuum leakage caused by the gap between the ion source body and the auxiliary installation module. In addition, the sealing ring can fill the gap between the auxiliary installation module and the vacuum port to further improve the sealing performance of the auxiliary installation device, thereby preventing the vacuum performance from being affected by the gap between the auxiliary installation module and the vacuum port.

[0017] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of an ion source auxiliary installation device according to the present invention;

[0020] Figure 2 This is a schematic diagram of the top structure of the vacuum chamber in this utility model;

[0021] Figure 3 This is a schematic diagram of the bottom structure of the vacuum chamber in this utility model;

[0022] Figure 4 This is a schematic diagram of the top structure of the auxiliary installation module in this utility model;

[0023] Figure 5 This is a schematic diagram of the bottom structure of the auxiliary installation module in this utility model;

[0024] Figure 6 This is a schematic diagram of the sealing gasket structure in this utility model;

[0025] Figure 7 This is a schematic diagram of the structure of the ion source body in this utility model.

[0026] The attached diagram lists the components represented by each number as follows:

[0027] 1. Base; 2. Vacuum chamber; 3. Vacuum port; 4. Vacuum tube; 5. Vacuum valve; 6. Mounting plate; 7. Positioning cylinder; 8. Mounting seat; 9. Mounting groove; 10. Ion source body; 11. Anti-slip pad; 12. Stud; 13. Nut; 14. Positioning hole; 15. Fixing block; 16. Threaded hole; 17. Bolt; 18. Positioning groove; 19. Threaded groove; 20. Sealing gasket; 21. Sealing ring. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0029] In the description of this utility model, it should be understood that the terms "relative", "one end", "inner", "lateral", "end", "both ends", "both sides", "front", "one end face", "the other end face", etc., which indicate orientation or positional relationship, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0030] Please see Figure 1-7 As shown, an ion source auxiliary installation device of this utility model includes a base 1, a vacuum chamber 2 fixedly connected to the top of the base 1, the vacuum chamber 2 is a hollow structure, a vacuum port 3 is opened on the top of the vacuum chamber 2, and a vacuum tube 4 is provided on the side wall of the vacuum chamber 2. The vacuum tube 4 and the vacuum port 3 are both connected to the inner cavity of the vacuum chamber 2, and a vacuum valve 5 is installed on the vacuum tube 4. A vacuum pump is connected to the vacuum tube 4. An auxiliary installation module is provided on the top of the vacuum chamber 2.

[0031] The auxiliary installation module includes a mounting plate 6, with a positioning cylinder 7 fixedly connected to the bottom of the mounting plate 6 and a mounting base 8 fixedly connected to the top of the mounting plate 6. The mounting base 8 is circular, and its top has an installation groove 9. The bottom of the installation groove 9 is connected to the top of the positioning cylinder 7, and an ion source body 10 is installed in the installation groove 9. The ion source body 10 is an existing product that can be directly purchased on the market, and the corresponding model can be selected according to actual needs. When the ion source body 10 is installed in the installation groove 9, its interior is connected to the inner cavity of the vacuum chamber 2 through the vacuum port 3. At this time, by opening the vacuum valve 5, the air in the vacuum chamber 2 can be extracted by an external vacuum pump so that the ion source body 10 is in a vacuum environment.

[0032] The base 1 has several anti-slip pads 11 on its bottom surface. The anti-slip pads 11 are long strips and are distributed linearly at equal intervals along the length of the bottom surface of the base 1. The surface of the anti-slip pads 11 is provided with herringbone anti-slip patterns. When the auxiliary installation device is placed on a smooth surface, the anti-slip patterns on the surface of each anti-slip pad 11 can increase the friction between the base 1 and the smooth surface, thereby playing an anti-slip role and effectively preventing the auxiliary installation device from slipping and shifting during use.

[0033] The vacuum chamber 2 is fixedly connected to the top of several studs 12, and each stud 12 is threaded with a nut 13. The surface of the mounting plate 6 is provided with several positioning holes 14, the number of which is the same as the number of studs 12. The diameter of the positioning holes is equal to the diameter of the studs 12, and the center of each positioning hole 14 corresponds to the center of each stud 12. Each stud 12 can be aligned and passed through the corresponding positioning hole 14. The nuts 13 are then threaded onto each stud 12 and tightened. The mounting plate 6, together with the auxiliary mounting module, is fixedly installed on the top of the vacuum chamber 2 through the cooperation between the studs 12, positioning holes 14, and nuts 13. By unscrewing the nuts 13, the mounting plate 6, together with the entire auxiliary mounting module, can be removed from the top of the vacuum chamber 2. This allows the auxiliary mounting module to be adjusted or replaced according to the model of the ion source body 10 and the installation scenario, thereby effectively improving the compatibility of the auxiliary mounting device and enabling it to adapt to different models of ion sources and installation scenarios.

[0034] The ion source body 10 has several fixing blocks 15 fixedly connected to its side wall. Each fixing block 15 has a threaded hole 16 on its surface, and a bolt 17 is threaded into the threaded hole 16 to cooperate with it. The top surface of the mounting base 8 has several positioning grooves 18. The number of positioning grooves 18 is the same as that of the fixing blocks 15, and the width of the grooves is equal to the width of the fixing blocks 15. The center of each positioning groove 18 corresponds to the center of each fixing block 15. When the ion source body 10 is placed into the mounting groove 9, each fixing block 15 can be aligned and fitted into the corresponding positioning groove 18. At this time, the mutual cooperation between the fixing block 15 and the positioning groove 18 can play a role in quick positioning, so as to prevent the position of the ion source body 10 from shifting and affecting the installation efficiency.

[0035] Each positioning groove 18 has a threaded groove 19 at its bottom. The inner wall of the threaded groove 19 is provided with an internal thread that mates with the bolt 17. The diameter of the threaded groove 19 is equal to the diameter of the threaded hole 16. The center of each threaded groove 19 corresponds to the center of each threaded hole 16. When each fixing block 15 is aligned and fitted into the corresponding positioning groove 18, the bolt 17 in each threaded hole 16 can be screwed into the corresponding threaded groove 19 by tightening it. At this time, the ion source body 10 can be firmly fixed in the mounting groove 9 by the mutual cooperation between the bolt 17 and the threaded groove 19 to prevent it from loosening. The ion source body 10 can be removed from the mounting groove 9 by unscrewing the bolt 17.

[0036] The bottom of the mounting groove 9 is provided with a sealing gasket 20. The sealing gasket 20 is annular, and its outer diameter corresponds to the diameter of the mounting groove 9. The sealing gasket 20 can be made of elastic materials such as rubber. After being placed in the mounting groove 9, it can fit against the inner wall of the mounting groove 9. When the ion source body 10 is installed in the mounting groove 9, the sealing gasket 20 can be placed at the bottom of the ion source body 10. At this time, the sealing gasket 20 can fill the gap between the ion source body 10 and the auxiliary mounting module to play a sealing role, thereby preventing the formation of gaps between the ion source body 10 and the auxiliary mounting module and causing vacuum leakage.

[0037] Both the positioning cylinder 7 and the vacuum port 3 are circular, with their outer diameters corresponding to the diameter of the vacuum port 3. The outer wall of the positioning cylinder 7 is provided with a sealing ring 21, which can be made of elastic materials such as rubber and is fixed by means of glue. When the auxiliary installation module is fixedly installed on the top of the vacuum chamber 2, the positioning cylinder 7 can be inserted and fitted into the vacuum port 3. At this time, the sealing ring 21 can fill the gap between the auxiliary installation module and the vacuum port 3 to further improve the sealing performance of the auxiliary installation device, thereby preventing gaps from forming between the auxiliary installation module and the vacuum port 3 and affecting the vacuum performance.

[0038] The circuits, electronic components, and chip modules involved in this utility model are all existing technologies, which can be fully implemented by those skilled in the art, and need not be elaborated upon. The content protected by this utility model does not involve any improvement to the software and methods.

[0039] All standard parts used in the application documents can be purchased from the market. All components in this application documents can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art.

[0040] The working principle of this utility model is as follows:

[0041] In use, the mounting plate 6, along with the auxiliary mounting module, is fixedly installed on the top of the vacuum chamber 2 through the cooperation of the studs 12, positioning holes 14, and nuts 13. Then, the ion source body 10 is placed into the mounting groove 9 on the top of the mounting plate 6, and each fixing block 15 is aligned and fitted into its corresponding positioning groove 18. The bolts 17 in each threaded hole 16 are then tightened until they are screwed into their corresponding threaded grooves 19. At this point, the ion source body 10 is firmly fixed in the mounting groove 9 through the cooperation of the bolts 17 and the threaded grooves 19, thus achieving the auxiliary installation of the ion source body 10. When the ion source body 10 is installed in the mounting groove 9, its interior is connected to the inner cavity of the vacuum chamber 2 through the vacuum port 3. By opening the vacuum valve 5, an external vacuum pump can be used to extract the air from the vacuum chamber 2, placing the ion source body 10 in a vacuum environment. A sealing gasket 20 is provided at the bottom of the mounting groove 9. When the ion source body 10 is installed in the vacuum chamber 2... When the ion source body 10 is installed in the slot 9, the sealing gasket 20 can be placed at the bottom of the ion source body 10. At this time, the sealing gasket 20 can fill the gap between the ion source body 10 and the auxiliary installation module to achieve a sealing effect, thereby preventing the vacuum leakage caused by the gap between the ion source body 10 and the auxiliary installation module. At the same time, when the auxiliary installation module is fixedly installed on the top of the vacuum chamber 2, the positioning cylinder 7 can be inserted and fitted into the vacuum port 3. At this time, the sealing ring 21 can fill the gap between the auxiliary installation module and the vacuum port 3 to further improve the sealing performance of the auxiliary installation device, thereby preventing the vacuum performance from being affected by the gap between the auxiliary installation module and the vacuum port 3. By unscrewing the nut 13, the mounting plate 6 and the entire auxiliary installation module can be removed from the top of the vacuum chamber 2, so that the auxiliary installation module can be adjusted or replaced according to the model of the ion source body 10 and the installation scenario, thereby effectively improving the compatibility of the auxiliary installation device and enabling it to adapt to different models of ion sources and installation scenarios.

[0042] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. An ion source auxiliary installation device, characterized in that, The device includes a base, on the top of which a vacuum chamber is fixedly connected. The vacuum chamber is a hollow structure with a vacuum port at its top. A vacuum tube is provided on the side wall of the vacuum chamber. Both the vacuum tube and the vacuum port are connected to the inner cavity of the vacuum chamber. A vacuum valve is installed on the vacuum tube. An auxiliary installation module is provided on the top of the vacuum chamber. The auxiliary installation module includes an installation plate, a positioning cylinder is fixedly connected to the bottom of the installation plate, and an installation base is fixedly connected to the top of the installation plate. The installation base is circular and has an installation groove on its top. The bottom of the installation groove is connected to the top of the positioning cylinder, and an ion source body is installed in the installation groove.

2. The ion source auxiliary installation device according to claim 1, characterized in that, The bottom surface of the base is provided with several anti-slip pads. The anti-slip pads are long strips and are distributed linearly at equal intervals along the length of the bottom surface of the base. The surface of the anti-slip pads is provided with herringbone anti-slip patterns.

3. The ion source auxiliary installation device according to claim 1, characterized in that, The top of the vacuum chamber is fixedly connected with several studs, and each stud is threaded with a nut that matches it. The surface of the mounting plate is provided with several positioning holes. The number of positioning holes is the same as the number of studs, and the diameter of the positioning holes corresponds to the diameter of the studs. The center of each positioning hole corresponds one-to-one with the center of each stud.

4. The ion source auxiliary installation device according to claim 1, characterized in that, The sidewall of the ion source body is fixedly connected with several fixing blocks. Each fixing block has a threaded hole on its surface, and a bolt that mates with it is threaded into the threaded hole. The top surface of the mounting base has several positioning grooves. The number of positioning grooves is the same as that of the fixing blocks, and the width of the grooves is equal to the width of the fixing blocks. The center of each positioning groove corresponds one-to-one with the center of each fixing block.

5. The ion source auxiliary installation device according to claim 4, characterized in that, Each of the positioning slots has a threaded groove at its bottom. The inner wall of the threaded groove is provided with an internal thread that mates with the bolt. The diameter of the threaded groove is equal to the diameter of the threaded hole, and the center of each threaded groove corresponds one-to-one with the center of each threaded hole.

6. The ion source auxiliary installation device according to claim 1, characterized in that, The bottom of the mounting groove is provided with a sealing gasket, which is annular and its outer diameter is equal to the diameter of the mounting groove.

7. The ion source auxiliary installation device according to claim 1, characterized in that, Both the positioning cylinder and the vacuum port are circular, with their outer diameters corresponding to and equal to the diameter of the vacuum port, and the outer wall of the positioning cylinder is provided with a sealing ring.

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