Device for testing reflectivity and transmittance of thin film
By designing a thin film reflectivity and transmittance testing device that combines multiple electric push rods and a rotary table, the problems of synchronous measurement and high cost in existing technologies have been solved, achieving the effect of synchronous measurement and accuracy assurance.
Patent Information
- Application Number
- CN202520420617.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-11
- Publication Date
- 2026-02-10
- Estimated Expiration
- 2035-03-11
AI Technical Summary
Existing thin film reflectivity and transmittance testing equipment cannot be operated simultaneously on a single machine, and suffers from limitations in optical path scanning angle and high cost.
A testing device for thin film reflectivity and transmittance was designed. By combining multiple electric push rods and a rotary stage, the reflectivity and transmittance of thin films can be measured simultaneously. The collimator and rotary stage are used to determine the normal direction of the sample surface and adjust the incident light angle, thereby reducing equipment costs.
This technology enables simultaneous measurement of thin film reflectivity and transmittance, reducing operation time, expanding the incident light angle range, lowering equipment costs, and ensuring measurement accuracy.
Smart Images
Figure CN223897318U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to laser measuring equipment field, concretely is a kind of testing device of thin film reflectivity and transmittance. BACKGROUND
[0002] Measuring the reflectivity and transmittance of thin films is crucial for evaluating the optical performance of the films. These parameters affect the performance of thin films in optical devices, such as displays, laser systems, sensors, fiber-optic communication, and other fields. Measuring the reflectivity and transmittance of thin films can be used for optical performance evaluation, thin film quality control, and environmental adaptability testing. Existing thin film reflectivity testing components and transmittance testing components are often set separately and cannot be operated simultaneously on one machine. Additionally, there are the following defects: 1. Each test point needs to find its corresponding normal direction to determine the incident angle and reflection angle, so this process takes a long time; 2. The range of scanable incident light angles is limited due to potential mechanical structure blockage; 3. The motorized rotary table used in the equipment must meet high precision and high vertical center load capacity, so the cost of the motion mechanism is high.
[0003] Therefore, to solve the above problems, the utility model provides a kind of testing device of thin film reflectivity and transmittance. UTILITY MODEL CONTENT
[0004] The utility model aims at providing a kind of testing device of thin film reflectivity and transmittance to solve the problems raised in the above background technology.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a kind of testing device of thin film reflectivity and transmittance, including first reflector, the upper side of the first reflector is adjustably provided with second reflector, laser polarization is after from first reflector passes through second reflector and is incident on the sample surface of sample stage, the upper side of the sample stage is equipped with the collimator that can be rotationally adjusted, the opposite side of the second reflector is equipped with the first power meter that can be rotationally adjusted, the opposite side of the reflector is also equipped with second power meter, the second power meter and reflector are arranged on the same straight line shaft;
[0006] The incident front end of the first reflector is also provided with a polarization beam splitter prism, and a third power meter is provided perpendicular to the direction of laser incidence into the first reflector.
[0007] Preferably, the first reflector is a 45° reflector.
[0008] Preferably, the collimator is installed on the first rotary table, the first rotary table is arranged in a Z shape, and the lower section of the first rotary table is arranged in the first mounting seat and connected with the driving motor.
[0009] Preferably, the first power meter is arranged on a single-sided swing arm in a Z shape, and the lower section of the single-sided swing arm is arranged in the second mounting seat and connected to the driving motor.
[0010] Preferably, a connecting plate is provided on the outer side of the sample stage, and the connecting plate is fixedly installed on the slider of the second electric push rod. The second electric push rod is installed on the slider of the first electric push rod, and the first electric push rod and the second electric push rod are arranged perpendicular to each other.
[0011] Preferably, the first mirror is installed on the slider of the third electric push rod, and the setting direction of the third electric push rod is the same as that of the first electric push rod.
[0012] Preferably, the second power meter and the mirror are respectively arranged at both ends of the second rotating table. The second rotating table is arranged in a "冂" shape, and the rear rotating shaft of the second rotating table is arranged in the third mounting seat and connected to the driving motor.
[0013] Preferably, the second power meter is adjustably arranged on the second rotating table.
[0014] Preferably, the second power meter is assembled on the slider of the fifth electric push rod. The fifth electric push rod is installed on the fourth electric push rod. The fourth electric push rod is arranged on the top side of one end of the second rotating table, and the fourth electric push rod and the fifth electric push rod are arranged perpendicular to each other.
[0015] Compared with the prior art, the beneficial effects of the present utility model are as follows:
[0016] By arranging a plurality of electric push rods in the present utility model, the positions of the linked components are adjusted respectively, which is convenient for measuring the transmittance and reflectance scanning structure of the curved surface film of the sample; the collimator and the rotating table are used in combination for scanning to determine the normal direction of the sample surface under different curvatures, and the operation is more convenient. After confirming the position of the normal line, the position of the first mirror is controlled by the third electric push rod, and the incident light angle can be changed by cooperating with the rotation direction of the second mirror, which is convenient for realizing the synchronous measurement of the film reflectance and transmittance, reducing the operation duration and accelerating the measurement efficiency. By arranging the cooperation of a plurality of electric push rods and the rotating table, the situation that the optical path is blocked is effectively avoided, and the applicable range of the incident light angle is increased. The structure adopted in this scheme is simple, the equipment cost is reduced while ensuring the measurement accuracy, and the requirements of high hardness and fatigue resistance of the material for the machining connecting parts are ensured. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 is a three-dimensional structural schematic diagram of the present utility model;
[0018] Figure 2 is Figure 1 the top view of
[0019] Figure 3 is Figure 1 a front view;
[0020] Figure 4 is a schematic diagram of the light path of the utility model in the process of measuring reflectivity;
[0021] Figure 5 is a schematic diagram of the light path of the utility model in the process of measuring transmittance.
[0022] In the figure: 1. first reflector, 2. second reflector, 3. collimator, 4. first power meter, 41. one-sided swing arm, 5. second power meter, 6. first rotary table, 7. second rotary table, 8. sample table, 81. connecting plate, 9. third power meter, 10. first electric push rod, 11. second electric push rod, 12. third electric push rod, 13. fourth electric push rod, 14. fifth electric push rod. DETAILED DESCRIPTION
[0023] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.
[0024] Please refer to Figures 1-3 The utility model provides a kind of testing device of film reflectivity and transmittance, including first reflector 1, the upper side of the first reflector 1 is adjustably provided with second reflector 2, laser polarization is after from first reflector 1 through second reflector 2 and is incident on the sample surface of sample table 8, the upper side of the sample table 8 is equipped with the collimator 3 of being able to rotate adjustment, the opposite side of second reflector 2 is equipped with the first power meter 4 of being able to rotate adjustment, the opposite side of reflector 2 is also equipped with second power meter 5, and second power meter 5 is arranged on the same straight line shaft with reflector 2;The incident front end of the first reflector 1 is also equipped with polarized light splitting prism, and third power meter 9 is arranged on the direction perpendicular to the laser injection first reflector 1.
[0025] In order to improve the accuracy, smoothness and operability of measurement, the first mirror 1 is a 45° mirror; the collimator 3 is installed on the first rotating table 6, the first rotating table 6 is arranged in a Z shape, the lower section of the first rotating table 6 is arranged in the first mounting seat and is connected with the driving motor, so as to facilitate the rotation of the first rotating table 6; the first power meter 4 is arranged on the single-sided swing arm 41 of the Z shape, the lower section of the single-sided swing arm 41 is arranged in the second mounting seat and is connected with the driving motor, so as to facilitate the rotation of the single-sided swing arm 41; the sample table 8 is provided with a connecting plate 81 on the outward side, the connecting plate 81 is fixedly installed on the sliding block of the second electric push rod 11, the second electric push rod 11 is installed on the sliding block of the first electric push rod 10, and the first electric push rod 10 and the second electric push rod 11 are arranged perpendicular to each other; the first mirror 1 is installed on the sliding block of the third electric push rod 12, the third electric push rod 12 is arranged in the same direction as the first electric push rod 10, so as to facilitate the position adjustment of the first mirror 1; the second power meter 5 and the mirror 2 are arranged at two ends of the second rotating table 7 respectively, the second rotating table 7 is arranged in a 'H' shape, the rear end rotating shaft of the second rotating table 7 is arranged in the third mounting seat and is connected with the driving motor, so as to facilitate the rotation of the second rotating table 7; specifically, the second power meter 5 is adjustably arranged on the second rotating table 7, in order to realize the adjustment of the second power meter 5 in multiple directions, the second power meter 5 is assembled on the sliding block of the fifth electric push rod 14, the fifth electric push rod 14 is installed on the fourth electric push rod 13, the fourth electric push rod 13 is arranged on the top side of one end of the second rotating table 7, and the fourth electric push rod 13 and the fifth electric push rod 14 are arranged perpendicular to each other.
[0026] In the use process, the first mirror is mainly used for reflecting the first polarized laser beam; the second mirror is mainly used for adjusting the angle of incident light; the collimator is mainly used for detecting the normal direction of the surface of a sample with different curvatures; the first power meter is mainly used for detecting the signal of reflected light; the second power meter is mainly used for detecting the light signal transmitted through the sample; the first rotating table is mainly used for adjusting the angle of the collimated light beam; the second rotating table is mainly used for adjusting the angle of the second mirror and the second power meter; the third power meter is mainly used for detecting the light power separated by the PBS, and is used for monitoring the light intensity entering the detection system; in the scheme, the device can be used to measure the reflectivity and transmittance of a thin film, and specific details are shown in the following table Figure 4 and 5 :
[0027] The light path process for measuring reflectivity is shown in the following table Figure 4The specific operation is as follows: After laser polarization, it is incident on the sample surface of the sample stage through the second mirror and the 45° reflector. The collimator is controlled by the first rotating stage to detect the normal direction of the sample surface with different curvatures. The angle of the first power meter is adjusted according to the normal and the incident light to detect the reflected light signal and calculate the reflectivity.
[0028] The optical path process for measuring transmittance is shown below. Figure 5 The specific operation is as follows: After laser polarization, it is incident on the sample surface of the sample stage through the second mirror and the 45° reflector. At this time, the second power meter and the second reflector are coaxial. The incident light angle is switched by the second rotating stage, and the sample transmittance is calculated based on the light signal of the second power meter.
[0029] The intensity of the light signal entering the system, I3, can be calculated based on the intensity of the light signal detected by the third power meter. The reflectivity, I1 / I3, can be calculated based on the intensity of the light signal, I1, from the first power meter. The transmittance, I2 / I3, can be calculated based on the intensity of the light signal, I2, from the second power meter.
[0030] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A testing device for the reflectivity and transmittance of a thin film, characterized in that: It includes a first reflector, and a second reflector is adjustably arranged above the first reflector. After the laser is polarized, it is incident on the sample surface of the sample stage from the first reflector through the second reflector. A collimator capable of rotational adjustment is arranged above the sample stage. A first power meter capable of rotational adjustment is arranged on the opposite side of the second reflector. A second power meter is also arranged on the opposite side of the reflector, and the second power meter and the reflector are arranged on the same straight axis; A polarization beam splitter prism is further arranged at the incident front end of the first reflector, and a third power meter is arranged in the direction perpendicular to the direction of the laser incident on the first reflector.
2. The device for testing the reflectivity and transmittance of a thin film according to claim 1, characterized in that: The first reflector is a 45° reflector.
3. The device for testing the reflectivity and transmittance of a thin film according to claim 1, characterized in that: The collimator is installed on a first rotating table, and the first rotating table is arranged in a Z shape. The lower segment of the first rotating table is arranged in a first mounting seat and is connected to a driving motor.
4. The device for testing the reflectivity and transmittance of a thin film according to claim 1, characterized in that: The first power meter is arranged on a single-side swing arm of the Z shape. The lower segment of the single-side swing arm is arranged in a second mounting seat and is connected to a driving motor.
5. A testing device for thin film reflectance and transmittance according to any one of claims 1-4, characterized in that: A connecting plate is arranged on the outer side of the sample stage, and the connecting plate is fixedly installed on the slider of a second electric push rod. The second electric push rod is installed on the slider of a first electric push rod, and the first electric push rod and the second electric push rod are arranged perpendicular to each other.
6. The apparatus for testing the reflectivity and transmittance of a thin film according to claim 5, characterized in that: The first reflector is installed on the slider of a third electric push rod, and the setting direction of the third electric push rod is the same as the direction of the first electric push rod.
7. The apparatus for testing the reflectivity and transmittance of a thin film according to claim 6, characterized in that: The second power meter and the reflector are respectively arranged at both ends of a second rotating table. The second rotating table is arranged in a "冂" shape. The rear-end rotating shaft of the second rotating table is arranged in a third mounting seat and is connected to a driving motor.
8. The apparatus for testing the reflectivity and transmittance of a thin film according to claim 7, characterized in that: The second power meter is adjustably arranged on the second rotating table.
9. The apparatus for testing the reflectivity and transmittance of a thin film according to claim 8, characterized in that: The second power meter is assembled on the slider of a fifth electric push rod. The fifth electric push rod is installed on a fourth electric push rod. The fourth electric push rod is arranged on the top side of one end of the second rotating table, and the fourth electric push rod and the fifth electric push rod are arranged perpendicular to each other.