Semiconductor liquid testing device

Abstract

The utility model discloses a semiconductor liquid testing device which can be divided into two states, in a liquid supply state, a pneumatic pump normally works to be matched with a pneumatic valve A to extract liquid in a to-be-pumped liquid barrel and convey the liquid to a testing supply point; in the other liquid supply ending state, after the liquid in the to-be-pumped liquid barrel is pumped out, the manual valve A is opened to discharge the liquid in the pipeline between the pneumatic pump and the to-be-pumped liquid barrel while the pneumatic valve B is closed, the manual valve B is opened to discharge the liquid in the pipeline between the pneumatic pump and the pneumatic valve C, and certainly, a pipeline between the pneumatic pump and the pneumatic valve B is also included; after emptying, the impact on the pneumatic pump caused by backflow of liquid due to the fact that part of liquid remains in the pipeline when the pneumatic pump is stopped during vertical upward liquid pumping is avoided; the manual valve D is used for releasing pressure of the filtering device before working, and the manual valve E is used for emptying liquid in the filtering device after the working is finished.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor liquid, concretely to a semiconductor liquid testing device. BACKGROUND

[0002] Semiconductor liquids are liquids that can be used in the manufacture of electronic components. They have the properties of semiconductor materials, including controllable resistance, conductivity, and capacitance. Semiconductor liquids are usually organic or inorganic compounds, such as polymers, silanes, and metal organic compounds.

[0003] The conventional conditions for testing semiconductor liquids are usually performed by a pneumatic pump. However, the pneumatic pump has fewer pipe fittings and valves set in the liquid inlet pipe and the liquid outlet pipe.

[0004] For example, a spinning equipment liquid supply system is disclosed in Chinese Patent No. CN211339749U, which includes a vacuum tank (100), a liquid outlet barrel (200), a solution tank (300), a pressure barrel, and a liquid addition barrel (600). The solution tank (300) is connected to the liquid outlet barrel (200), the liquid outlet barrel (200) is connected to the vacuum tank (100), the solution tank (300) is connected to a pressure barrel, and the pressure barrel is connected to the liquid addition barrel (600).

[0005] In summary, the existing semiconductor liquid testing has many drawbacks, which are summarized as follows:

[0006] The conventional conditions for testing semiconductor liquids are usually performed by a pneumatic pump. However, the pneumatic pump has fewer pipe fittings and valves set in the liquid inlet pipe and the liquid outlet pipe.

[0007] The conventional conditions for testing semiconductor liquids are usually performed by a pneumatic pump. However, the pneumatic pump has fewer pipe fittings and valves set in the liquid inlet pipe and the liquid outlet pipe. SUMMARY

[0008] To overcome the shortcomings of the prior art, the utility model provides a semiconductor liquid testing device to solve the above problems.

[0009] To achieve the above purpose, the utility model realizes the following technical solutions.

[0010] A semiconductor liquid testing device includes a pneumatic pump, a pneumatic valve A, a pneumatic valve B, a pneumatic valve C, a manual valve A, a manual valve B, a manual valve C, a filter device,

[0011] The manual valve A is horizontally connected with the liquid inlet of the pneumatic pump through a pipeline, one end of the pneumatic valve A is vertically connected with the manual valve A from top to bottom through a pipeline, and the connection position is located in the middle of the pipeline connecting the manual valve A and the liquid inlet of the pneumatic pump,

[0012] One end of the manual valve C is vertically connected with the manual valve B from top to bottom through a pipeline, the other end is connected with the filter through a pipeline, and the liquid outlet of the pneumatic pump is connected on the pipeline between the manual valve C and the manual valve B through a pipeline,

[0013] One end of the pneumatic valve B and the pneumatic valve C is connected in series through a pipeline, and is extended to be connected to the filtering device, and the testing device can be divided into two states, in the liquid supply state, the pneumatic pump 1 normally works to cooperate with the pneumatic valve A to extract liquid in the liquid barrel to be pumped to the testing supply point;

[0014] Another liquid supply end state: after the liquid in the liquid barrel to be pumped is pumped out, the pneumatic valve B is closed, the manual valve A is opened to discharge the liquid in the pipeline between the pneumatic pump and the liquid barrel to be pumped, the manual valve B is opened to discharge the liquid in the pipeline between the pneumatic pump and the pneumatic valve C, and of course, the pipeline between the pneumatic pump and the pneumatic valve B is also included, after being emptied, the impact of liquid backflow on the pneumatic pump due to the residual liquid in the pipeline when the pneumatic pump is stopped is avoided when the liquid is pumped vertically upward;

[0015] The manual valve D is used for pressure relief of the filtering device before work, and the manual valve E is used for discharging the liquid in the filtering device after work.

[0016] The flow meter is convenient for observing the running state of the pneumatic pump, and the pressure gauge prevents the pressure in each pipeline from being blocked, so that accidents are avoided.

[0017] Preferably, the top of the filtering device is connected with the manual valve D through a pipeline extending downward.

[0018] Preferably, the bottom of the filtering device is connected with the manual valve E through a pipeline extending downward.

[0019] Preferably, the pipeline connecting the manual valve C and the filtering device is provided with a flow meter.

[0020] Preferably, the pipeline connecting the pneumatic valve C and the filtering device is provided with a pressure gauge.

[0021] Preferably, the other end of the pneumatic valve A is connected with the liquid barrel to be pumped through a pipeline.

[0022] Preferably, the other end of the pneumatic valve B is connected with the empty liquid barrel through a pipeline.

[0023] Preferably, the other end of the pneumatic valve C is connected with the testing supply point through a pipeline.

[0024] Compared with the prior art, the utility model discloses a kind of semiconductor liquid testing devices, including pneumatic pump, pneumatic valve A, pneumatic valve B, pneumatic valve C, manual valve A, manual valve B, manual valve C, filtering device, mutually combined use plays a role, testing device can be divided into two states, liquid supply carries out state under pneumatic pump 1 normal work cooperation pneumatic valve A in liquid barrel to be extracted liquid delivery to test supply point;

[0025] Another liquid supply end state: after liquid in the liquid barrel to be extracted is exhausted, pneumatic valve B is closed while opening manual valve A to release liquid between pneumatic pump and the liquid barrel to be extracted, while opening manual valve B to discharge liquid between pneumatic pump and pneumatic valve C, of course, it also includes the pipeline between pneumatic pump and pneumatic valve B, after emptying, when vertically upwardly hitting liquid, stopping pneumatic pump due to residual liquid in pipeline, liquid backflowing down generates impact on pneumatic pump is avoided;

[0026] The role of manual valve D is to depressurize filtering device before work, and the role of manual valve E is to drain liquid in filtering device after work.

[0027] Flow meter is convenient to observe the running condition of pneumatic pump, to ensure that pneumatic pump is in normal working range, and pressure gauge prevents pressure from being blocked in each pipeline, to cause accident. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 It is the structural schematic diagram of the utility model semiconductor liquid testing device. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments.

[0030] A semiconductor liquid testing device includes pneumatic pump 1, pneumatic valve A2, pneumatic valve B3, pneumatic valve C4, manual valve A5, manual valve B6, manual valve C7, filtering device 8,

[0031] The liquid inlet of the pneumatic pump 1 is connected to the manual valve A5 through a pipeline horizontally, one end of the pneumatic valve A2 is connected to the manual valve A5 through a pipeline vertically from top to bottom, and the connection position is located in the middle of the pipeline connecting the liquid inlet of the pneumatic pump 1 and the manual valve A5,

[0032] One end of the manual valve C7 is connected to the manual valve B6 through a pipeline vertically from top to bottom, and the other end is connected to the filter through a pipeline, and the liquid outlet of the pneumatic pump 1 is connected to the pipeline between the manual valve C7 and the manual valve B6 through a pipeline,

[0033] The pneumatic valve B3 and the pneumatic valve C4 are connected in series through a pipeline at one end, and are extended to be connected to the filtering device 8.

[0034] The top of the filtering device 8 is extended downwardly connected to the manual valve D81 through a pipeline, and the manual valve D81 is used to release pressure before work.

[0035] The bottom of the filtering device 8 is extended downwardly connected to the manual valve E82 through a pipeline, and the manual valve E82 is used to drain the liquid in the filtering device 8 after work.

[0036] The pipeline connected to the filtering device 8 is provided with a flow meter 11, which is convenient for observing the operation of the pneumatic pump 1 and ensuring that the pneumatic pump 1 is in a normal working range.

[0037] The pipeline connected to the filtering device 8 is provided with a pressure gauge 22, which prevents pressure from being blocked in each pipeline, causing an accident.

[0038] The other end of the pneumatic valve A2 is connected to a liquid barrel to be pumped through a pipeline, which is a storage carrier for pumping liquid to a test supply point, and is a prior art. The core of the present scheme lies in the structural layout features between the pipelines, and therefore will not be described here.

[0039] The other end of the pneumatic valve B3 is connected to an empty liquid barrel through a pipeline, which is a position for returning the remaining liquid after supplying the required amount to the test supply point, and is a prior art. The core of the present scheme lies in the structural layout features between the pipelines, and therefore will not be described here.

[0040] The other end of the pneumatic valve C4 is connected to a test supply point through a pipeline, which is a test position required to be supplied with liquid, and is a prior art. The core of the present scheme lies in the structural layout features between the pipelines, and therefore will not be described here.

[0041] The liquid supply state: the pneumatic pump 1 starts to work, the pneumatic valve A2 is opened to pump liquid in the liquid barrel to be pumped, the liquid passes through the manual valve C7 to the filtering device 8, and after being filtered, is transmitted to the test supply point through the pneumatic valve C4.

[0042] The end state of liquid supply: based on the above-mentioned liquid supply state of each valve, when the pneumatic valve C4 is closed, the pneumatic valve B3 is opened to pump the remaining liquid in the liquid barrel to be pumped into the empty liquid barrel, and after the liquid in the liquid barrel to be pumped is emptied, the pneumatic valve B3 is closed, the manual valve A5 is opened to discharge the liquid in the pipeline between the pneumatic pump 1 and the liquid barrel to be pumped, the manual valve B6 is opened to discharge the liquid in the pipeline between the pneumatic pump 1 and the pneumatic valve C4, and of course, the pipeline between the pneumatic pump 1 and the pneumatic valve B3 is also included, so as to avoid the impact of the remaining liquid on the pneumatic pump 1 after being emptied.

[0043] It is to be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments consistent with the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used in this specification, specify the presence of stated features, steps, operations, devices, components and / or combinations thereof, but do not preclude the presence or addition of one or more other features, steps, operations, devices, components and / or combinations thereof.

[0044] It is to be noted that the terminology used in the present specification and the appended claims should not be interpreted as implying any particular order or sequence of steps. It will be further understood that the data used herein can be interchanged, where appropriate, to enable the embodiments of the present application described herein to be carried out in sequences other than those illustrated or described herein.

[0045] The preferred embodiments of the present application have been described above with the specific details. Obviously, the present application can be carried out in various ways and can be changed or modified by those skilled in the art without departing from the spirit and principles of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A semiconductor liquid testing device, characterized in that: Includes a pneumatic pump (1), pneumatic valve A (2), pneumatic valve B (3), pneumatic valve C (4), manual valve A (5), manual valve B (6), manual valve C (7), and a filter device (8). The manual valve A (5) is horizontally connected to the inlet of the pneumatic pump (1) via a pipe. One end of the pneumatic valve A (2) is vertically connected to the manual valve A (5) from top to bottom via a pipe, and the connection position is located in the middle of the pipe connecting the inlet of the manual valve A (5) and the pneumatic pump (1). One end of the manual valve C (7) is vertically connected to the manual valve B (6) from top to bottom through a pipe, and the other end is connected to the filter through a pipe. The outlet of the pneumatic pump (1) is connected to the pipe between the manual valve C (7) and the manual valve B (6) through a pipe. The pneumatic valves B (3) and C (4) are connected in series by a pipe and extend to the filter device (8).

2. The semiconductor liquid testing apparatus according to claim 1, characterized in that: The top of the filter device (8) is connected to a manual valve D (81) via a pipe extending downwards.

3. The semiconductor liquid testing apparatus according to claim 1, characterized in that: The bottom of the filter device (8) is connected to a manual valve E (82) via a pipe extending downwards.

4. The semiconductor liquid testing apparatus according to claim 1, characterized in that: A flow meter (11) is installed on the pipe connecting the manual valve C (7) and the filter device (8).

5. The semiconductor liquid testing apparatus according to claim 1, characterized in that: A pressure gauge (22) is installed on the pipe connecting the pneumatic valve C (4) and the filter device (8).

6. The semiconductor liquid testing apparatus according to claim 1, characterized in that: The other end of the pneumatic valve A (2) is connected to the liquid tank to be pumped through a pipe.

7. The semiconductor liquid testing apparatus according to claim 1, characterized in that: The other end of the pneumatic valve B (3) is connected to an empty liquid tank via a pipe.

8. The semiconductor liquid testing apparatus according to claim 1, characterized in that: The other end of the pneumatic valve C (4) is connected to the test supply point via a pipeline.

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