Heating equipment

Abstract

The utility model relates to the technical field of semiconductors, in particular to heating equipment. The heating equipment comprises a heating disc assembly and a positioning assembly, the positioning assembly comprises a positioning base and positioning rods, the multiple positioning rods are distributed in the circumferential direction of the heating disc assembly at intervals, the lower ends of the positioning rods are connected with the positioning base, and the upper ends of the positioning rods are provided with supporting faces and limiting faces which are perpendicular to each other; the lower end face of the heating disc assembly abuts against the supporting face, and the peripheral side face of the heating disc assembly abuts against the limiting face. The positioning rods with the supporting faces and the limiting faces are arranged in the circumferential direction of the heating disc assembly, the supporting faces circumferentially support the lower end face of the heating disc assembly, the limiting faces abut against the circumferential side face of the heating disc assembly, the heating disc assembly is synchronously positioned in the circumferential direction, and therefore the levelness of the heating disc assembly is improved; and the heating equipment can meet the requirement of high levelness.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a heating device. Background Technology

[0002] With the continuous expansion of the scale of major domestic semiconductor factories and the localization of PVD (Physical Vapor Deposition) materials, the semiconductor equipment and its components have developed rapidly. Semiconductor heating equipment is mainly used to heat the wafers in semiconductor equipment and is an extremely important component in the semiconductor processing. Therefore, semiconductor heating equipment has become a primary product for various companies to develop, requiring high heating uniformity and high precision.

[0003] Existing heating equipment typically includes a heating plate and a positioning fixture that supports the heating plate. The heating plate includes a base and a cover plate. The base has a groove for accommodating heating wires. The cover plate and the center of the base are fixed by a connector. The center of the bottom of the heating plate is connected to the positioning fixture to support the heating plate.

[0004] However, the existing technology of setting a positioning fixture only in the center of the bottom of the heating plate is not stable enough and is also prone to tilting of the heating plate. This tilting phenomenon is generally difficult to observe directly and can only be detected by instrument measurement, ultimately causing the heating equipment to fail to meet the high level requirements. Utility Model Content

[0005] The purpose of this utility model is to provide a heating device to solve the technical problem in the prior art where the heating plate is prone to tilting, resulting in the failure to meet the level requirements, and to achieve the effect of improving the level of the heating plate.

[0006] Based on the above concept, the technical solution adopted by this utility model is as follows:

[0007] The heating device includes a heating plate assembly and a positioning assembly. The positioning assembly includes a positioning base and positioning rods. A plurality of positioning rods are distributed circumferentially around the heating plate assembly. The lower end of each positioning rod is connected to the positioning base. The upper end of each positioning rod is provided with a mutually perpendicular support surface and a limiting surface. The lower end surface of the heating plate assembly abuts against the support surface, and the peripheral side surface of the heating plate assembly abuts against the limiting surface.

[0008] Optionally, the positioning rod includes a main body and a plug-in part. The upper end of the main body has the supporting surface and the limiting surface. The lower end of the main body is connected to the plug-in part. The cross-sectional area of ​​the plug-in part is smaller than the cross-sectional area of ​​the main body. A limiting step surface is formed at the connection between the main body and the plug-in part.

[0009] The positioning base is provided with a plurality of positioning holes, the inserting part is inserted into the positioning hole, and the limiting step surface is in abutment with the upper end surface of the positioning base.

[0010] Optionally, the shape of the positioning hole is non-circular, and the cross-sectional shape of the inserting part is the same as the shape of the positioning hole.

[0011] Optionally, the bottom of the positioning base is provided with a groove at the position corresponding to the positioning hole, the positioning assembly further comprises a fastener, the lower end of the inserting part is located in the groove and is detachably connected with the fastener, and the fastener is accommodated in the groove and is in abutment with the groove bottom.

[0012] Optionally, the positioning holes are provided in multiple groups, each group comprises a plurality of the positioning holes, the positioning holes in the same group are located on the same circumference, the positioning holes in different groups correspond to different circumferential radii, and all the positioning rods can be selectively inserted into the positioning holes in the same group.

[0013] Optionally, the centers of all the circumferences are the same.

[0014] Optionally, the positioning assembly further comprises a support rod, the lower end of the support rod is connected with the positioning base, and the upper end is in abutment with the bottom center of the heating disc base.

[0015] Optionally, the heating disc assembly comprises a heating disc cover plate and a heating disc base, the heating disc cover plate is arranged on the upper side of the heating disc base, a plurality of first fixing ears are arranged on the circumferential side of the heating disc cover plate at intervals, a plurality of second fixing ears are arranged on the circumferential side of the heating disc base at intervals, and the first fixing ears and the second fixing ears are arranged one by one and are detachably connected.

[0016] Optionally, the plurality of second fixing ears and the plurality of positioning rods are arranged in a circumferential staggered manner.

[0017] Optionally, the first fixing ear is provided with a first fixing hole, the second fixing ear is provided with a second fixing hole, the first fixing hole and the second fixing hole are aligned, and the first fixing ear and the second fixing ear are fastened by a threaded fastener penetrating the first fixing hole and the second fixing hole.

[0018] The heating equipment disclosed by the utility model, through arranging a plurality of positioning rods with supporting surfaces and limiting surfaces in the circumferential direction of the heating disc assembly, the plurality of supporting surfaces form circumferential support for the lower end surface of the heating disc assembly, and the plurality of limiting surfaces form side abutment for the circumferential surface of the heating disc assembly, so that the circumferential direction of the heating disc assembly is synchronously positioned, thereby improving the levelness of the heating disc assembly and making the heating equipment better meet the requirement of high levelness. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 is a structure schematic view of the heating disc assembly provided by the embodiment of the present application;

[0020] Figure 2 is a structure schematic view of the positioning assembly provided by the embodiment of the present application;

[0021] Figure 3 is an exploded view of the positioning assembly provided by the embodiment of the present application;

[0022] Figure 4 is another view structure schematic view of the positioning assembly provided by the embodiment of the present application;

[0023] Figure 5 is an exploded view of the heating disc assembly provided by the embodiment of the present application.

[0024] In the figure:

[0025] 1, heating disc assembly; 11, heating disc cover plate; 111, first fixed lug; 1111, first fixed hole; 12, heating disc base; 121, second fixed lug; 1211, second fixed hole;

[0026] 2, positioning assembly; 21, positioning base; 211, positioning hole; 212, groove; 22, positioning rod; 221, main body part; 222, plug-in part; 223, support surface; 224, limiting surface. DETAILED DESCRIPTION

[0027] In order to make the technical problems solved by the present application, the technical scheme adopted and the technical effects reached more clear, the technical scheme of the present application will be further explained below in combination with the drawings and through specific embodiments. It can be understood that the specific embodiments described herein are only used to explain the present application, but not limit the present application. In addition, it should be noted that, in order to facilitate the description, only the parts related to the present application are shown in the drawings, not all.

[0028] In the description of the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0029] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0030] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0031] This embodiment provides a heating device to solve the technical problem that the heating plate is prone to tilting, causing the horizontality to fail to meet the requirements.

[0032] like Figure 1 and Figure 2 As shown, the heating device includes a heating plate assembly 1 and a positioning assembly 2. The heating plate assembly 1 is used to heat semiconductor components and has high level requirements; the positioning assembly 2 is used to support and position the heating plate assembly 1 to ensure the stability and levelness of the heating plate assembly 1.

[0033] Specifically, the positioning component 2 includes a positioning base 21 and positioning rods 22. Multiple positioning rods 22 are distributed circumferentially along the heating plate component 1. The lower end of the positioning rod 22 is connected to the positioning base 21, and the upper end is provided with a mutually perpendicular support surface 223 and a limiting surface 224. The lower end surface of the heating plate component 1 abuts against the support surface 223, and the peripheral side surface of the heating plate component 1 abuts against the limiting surface 224.

[0034] Understandably, the positioning base 21 provides an installation foundation for multiple positioning rods 22, enabling the positioning rods 22 to support and position the heating plate assembly 1. The multiple positioning rods 22 are spaced apart along the circumference of the heating plate assembly 1, and the support surface 223 at their upper ends abuts against the lower end surface of the heating plate assembly 1. This achieves multi-directional support of the lower end of the heating plate assembly 1 from the circumference, eliminating the risk of the heating plate assembly 1 tilting from any direction and effectively improving the levelness of the heating plate assembly 1. In addition, the circumferential side of the heating plate assembly 1 abuts against the limiting surface 224, that is, the limiting surface 224 abuts against and positions the heating plate assembly 1 radially, avoiding horizontal displacement of the heating plate assembly 1, further reducing the risk of the heating equipment tipping over, and improving the stability of the heating equipment.

[0035] like Figure 2 and Figure 3 As shown, optionally, the positioning rod 22 includes a main body 221 and a plug-in part 222. The upper end of the main body 221 has a support surface 223 and a limiting surface 224. The lower end of the main body 221 is connected to the plug-in part 222. The cross-sectional area of ​​the plug-in part 222 is smaller than the cross-sectional area of ​​the main body 221. A limiting step surface is formed at the connection between the main body 221 and the plug-in part 222. The positioning base 21 has a plurality of positioning holes 211. The plug-in part 222 is inserted into the positioning holes 211, and the limiting step surface abuts against the upper end surface of the positioning base 21. Understandably, since the insertion part 222 is thinner than the main body part 221, a limiting step surface will be formed at the connection between the main body part 221 and the insertion part 222. When the insertion part 222 is inserted into the positioning hole 211, the limiting step surface will abut against the lower end face of the positioning base 21 to prevent the positioning rod 22 from moving down, thereby improving the installation stability and positioning accuracy of the positioning rod 22 and better ensuring that the support surfaces 223 of all positioning rods 22 are on the same horizontal plane.

[0036] Optionally, the positioning hole 211 is non-circular, and the cross-sectional shape of the insertion part 222 is the same as that of the positioning hole 211. This ensures that after the insertion part 222 is inserted into the positioning hole 211, the positioning rod 22 itself cannot rotate, guaranteeing the accuracy of the orientation of the support surface 223 and the limiting surface 224. This reduces the probability of the support surface 223 and the limiting surface 224 not corresponding to the bottom and peripheral surfaces of the heating plate assembly 1, improving the feasibility of the overall structure and the accuracy of the fit between components.

[0037] Optionally, the positioning hole 211 is preferably a D-shaped hole. Of course, in other embodiments, the positioning hole 211 can also be a rectangular hole, an oblong hole or other irregular hole, as long as it can prevent the positioning rod 22 from rotating and improve the orientation accuracy of the support surface 223 and the limiting surface 224. No further restrictions are imposed here.

[0038] Optionally, multiple sets of positioning holes 211 are provided, each set including multiple positioning holes 211, and the positioning holes 211 in the same set are located on the same circumference. The circumferential radii corresponding to the positioning holes 211 in different sets are different, and all positioning rods 22 are inserted into the positioning holes 211 in the same set. It can be understood that in order for the positioning component 2 to adapt to the support and positioning of heating plate components 1 of different sizes, the positioning rods 22 need more installation positions to adapt to the contours of heating plate components 1 of different sizes. Therefore, by setting multiple sets of positioning holes 211, with each set of positioning holes 211 located on the same circumference and having different circumferential radii, that is, by distributing the positioning rods 22 on circumferences of different radii to adapt to the contours of heating plate components 1 of different sizes, the adaptability of the positioning component 2 is expanded. The positioning holes 211 are preferably 2-5 sets. This number of sets of positioning holes 211 can enable the positioning component 2 to adapt to most heating plate components 1, while avoiding the difficulty of manufacturing and transportation caused by the positioning base 21 being too large.

[0039] Optionally, all the circles have the same center. This arrangement allows different groups of positioning holes 211 to expand outwards from the same center, saving space occupied by the positioning base 21.

[0040] like Figure 3 and Figure 4 As shown, to improve the connection stability between the positioning base 21 and the positioning rod 22, a groove 212 is provided at the bottom of the positioning base 21 at the corresponding position of the positioning hole 211. The positioning assembly 2 also includes a fastener. The lower end of the insertion part 222 is located in the groove 212 and is detachably connected to the fastener. The fastener is accommodated in the groove 212 and abuts against the bottom of the groove 212. By providing a groove 212 at the corresponding position of the positioning hole 211 at the bottom of the positioning base 21 to accommodate the fastener, and by fastening the fastener to the insertion part 222 and abutting against the bottom of the groove 212, the positioning rod 22 is more firmly abutted against the positioning base 21, thereby improving the connection stability between the positioning base 21 and the positioning rod 22.

[0041] Specifically, the plug-in part 222 has a threaded section, and the fastener is a nut. After the plug-in part 222 is inserted into the positioning hole 211, it extends out of the groove 212. The nut is screwed into the threaded section until it is in close contact with the bottom of the groove 212.

[0042] Optionally, the positioning component 2 also includes a support rod, the lower end of which is connected to the positioning base 21, and the upper end which abuts against the center of the bottom of the heating plate assembly 1. This arrangement supports the middle part of the heating plate base 12, preventing the middle part of the heating plate assembly 1 from sinking downwards and causing damage to the heating plate assembly 1, thus improving the service life of the heating equipment.

[0043] like Figure 5As shown, optionally, the heating plate assembly 1 includes a heating plate cover 11 and a heating plate base 12. The heating plate cover 11 covers the upper side of the heating plate base 12. Annular grooves are provided on one side of the heating plate cover 11 and one side of the heating plate base 12. The two annular grooves abut against each other to form a heating groove. A heating wire is provided in the heating groove to generate heat and make the heating plate assembly 1 heat up. A fixing hole is provided in the middle of the heating plate cover 11 and the heating plate base 12. Fasteners are provided in the fixing hole to connect the heating plate cover 11 and the heating plate base 12.

[0044] In this embodiment, the heating plate cover 11 is provided with a plurality of first fixing ears 111 at intervals along its circumference, and the heating plate base 12 is provided with a plurality of second fixing ears 121 at intervals along its circumference. The first fixing ears 111 and the second fixing ears 121 are provided in a one-to-one correspondence and are detachably connected.

[0045] Understandably, in the prior art, the heating plate cover 11 and the heating plate base 12 are usually only connected at the middle. However, the peripheral areas other than the middle inevitably have insufficient contact, which causes the heating wire in the heating tank to warp up. This results in insufficient heating at the warped area, affecting the overall heating uniformity of the heating plate assembly 1. In addition, the edges of the heating plate cover 11 and the heating plate base 12 are reinforced by brazing. When the peripheral contact of the heating plate assembly 1 is not tight enough, the brazing filler metal can easily enter the interior of the heating plate assembly 1 through the gaps, causing damage to the heating plate assembly 1. In this embodiment, first fixing ears 111 are spaced apart on the periphery of the heating plate cover 11, and second fixing ears 121 are spaced apart on the periphery of the heating plate base 12. The first fixing ears 111 and the second fixing ears 121 are arranged in a one-to-one correspondence and are detachably connected, thereby securing the periphery of the heating plate assembly 1 with the fixing ears. This avoids the situation where the periphery of the heating plate assembly 1 is not tightly fitted, thereby preventing the heating wire from warping or the brazing filler from entering the heating plate assembly 1, thus greatly improving the heating uniformity of the heating plate assembly 1.

[0046] Optionally, the first fixing ear 111 has a first fixing hole 1111, and the second fixing ear 121 has a second fixing hole 1211. The first fixing hole 1111 and the second fixing hole 1211 are aligned, and the first fixing ear 111 and the second fixing ear 121 are fastened by threaded fasteners passing through the first fixing hole 1111 and the second fixing hole 1211. This arrangement facilitates the detachable connection of the first fixing ear 111 and the second fixing ear 121, improving the ease of disassembly and assembly of the heating plate assembly 1.

[0047] Optionally, the first fixing ear 111 and the heating plate cover 11 have the same thickness, and the second fixing ear 121 has the same thickness as the heating plate base 12. This arrangement allows the heating plate cover 11 and the heating plate base 12 to fit tightly together after the first fixing ear 111 and the second fixing ear 121 are connected, avoiding the threaded fasteners from being exposed on the outside of the heating plate assembly 1, thus improving the overall structural strength and aesthetics.

[0048] Optionally, multiple second fixing ears 121 and multiple positioning rods 22 are staggered in the circumferential direction of the heating plate assembly 1. This arrangement allows the positioning rods 22 to avoid the second fixing ears 121, preventing interference between the support surface 223 and the limiting surface 224 and the second fixing ears 121, which would prevent the heating plate assembly 1 from being installed on the positioning assembly 2, thus improving the structural rationality.

[0049] It is worth noting that the installation structure of the heating wire in the heating plate assembly 1 can be set with reference to the existing technology. This is not the focus of this utility model and will not be described in detail here.

[0050] The assembly process of the heating device in this embodiment is as follows:

[0051] First, the heating wire is placed in the annular groove on one side of the heating plate base 12. Then, the heating plate cover 11 is placed on the side of the heating plate base 12 with the annular groove. The annular groove on one side of the heating plate cover 11 and the annular groove on one side of the heating plate base 12 abut against each other to form a heating groove, in which the heating wire is located. Next, the middle parts of the heating plate cover 11 and the heating plate base 12 are connected. Then, the first fixing ear 111 and the second fixing ear 121 are connected by threaded fasteners. Finally, the heating plate cover 11 and the heating plate base are... 12. The edges are brazed and reinforced, and the heating plate assembly 1 is assembled. After the heating plate assembly 1 is assembled, the positioning rod 22 is selectively inserted into the positioning hole 211 of the corresponding size according to the size of the heating plate assembly 1, and the fastener is connected to the insertion part 222. Then, the bottom surface of the heating plate assembly 1 abuts against the support surface 223 of the positioning rod 22, and the peripheral side surface of the heating plate assembly 1 abuts against the limiting surface 224 of the positioning rod 22. The heating device is assembled and the heating plate assembly 1 heats the semiconductor element after being powered on.

[0052] The above embodiments merely illustrate the basic principles and characteristics of this utility model. This utility model is not limited to the above embodiments. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A heating device, comprising a heating plate assembly (1) and a positioning assembly (2), characterized in that, The positioning component (2) includes a positioning base (21) and a positioning rod (22). A plurality of positioning rods (22) are distributed circumferentially around the heating plate assembly (1). The lower end of the positioning rod (22) is connected to the positioning base (21). The upper end of the positioning rod (22) is provided with a mutually perpendicular support surface (223) and a limiting surface (224). The lower end surface of the heating plate assembly (1) abuts against the support surface (223), and the peripheral side surface of the heating plate assembly (1) abuts against the limiting surface (224).

2. The heating device according to claim 1, characterized in that, The positioning rod (22) includes a main body (221) and a plug-in part (222). The upper end of the main body (221) has the support surface (223) and the limiting surface (224). The lower end of the main body (221) is connected to the plug-in part (222). The cross-sectional area of ​​the plug-in part (222) is smaller than the cross-sectional area of ​​the main body (221). A limiting step surface is formed at the connection between the main body (221) and the plug-in part (222). The positioning base (21) has multiple positioning holes (211), the insertion part (222) is inserted into the positioning holes (211), and the limiting step surface abuts against the upper end surface of the positioning base (21).

3. The heating device according to claim 2, characterized in that, The positioning hole (211) is non-circular in shape, and the cross-sectional shape of the insertion part (222) is the same as that of the positioning hole (211).

4. The heating device according to claim 2, characterized in that, The bottom of the positioning base (21) has a groove (212) at the position corresponding to the positioning hole (211). The positioning component (2) also includes a fastener. The lower end of the plug (222) is located in the groove (212) and is detachably connected to the fastener. The fastener is accommodated in the groove (212) and abuts against the bottom of the groove (212).

5. The heating device according to claim 2, characterized in that, The positioning holes (211) are provided in multiple groups, each group including multiple positioning holes (211), and all positioning holes (211) in the same group are located on the same circumference. The circumferential radii corresponding to the positioning holes (211) in different groups are different, and all positioning rods (22) can be selectively inserted into the positioning holes (211) in the same group.

6. The heating device according to claim 5, characterized in that, All the circles mentioned have the same center.

7. The heating device according to claim 1, characterized in that, The positioning component (2) also includes a support rod, the lower end of which is connected to the positioning base (21), and the upper end of which abuts against the bottom center of the heating plate component (1).

8. The heating device according to any one of claims 1-7, characterized in that, The heating plate assembly (1) includes a heating plate cover (11) and a heating plate base (12). The heating plate cover (11) covers the upper side of the heating plate base (12). The heating plate cover (11) has a plurality of first fixing ears (111) spaced apart along its circumference. The heating plate base (12) has a plurality of second fixing ears (121) spaced apart along its circumference. The first fixing ears (111) and the second fixing ears (121) are arranged in a one-to-one correspondence and are detachably connected.

9. The heating device according to claim 8, characterized in that, Multiple second fixing ears (121) and multiple positioning rods (22) are arranged circumferentially in an alternating manner on the heating plate assembly (1).

10. The heating device according to claim 8, characterized in that, The first fixing ear (111) has a first fixing hole (1111), and the second fixing ear (121) has a second fixing hole (1211). The first fixing hole (1111) and the second fixing hole (1211) are aligned. The first fixing ear (111) and the second fixing ear (121) are fastened by threaded fasteners passing through the first fixing hole (1111) and the second fixing hole (1211).

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