Special inspection tool and special inspection system

Abstract

The utility model relates to a special inspection tool and a special inspection system. The special inspection system comprises a negative pressure extraction device and a special inspection tool; the negative pressure extraction device is connected with the special inspection tool; the special inspection tool is used for taking a thin component and comprises a tool main body and a handle, one side of the tool main body is connected with the handle; the tool main body comprises a base part, and the base part is provided with an upper surface, a lower surface and a first cavity penetrating through the upper surface and the lower surface; a plurality of suction holes are formed in the lower surface; the multiple suction holes are used for being formed in the positions, corresponding to the edges, of the thin component so that the thin component can be adsorbed and fixed to the tool body. By means of the configuration, the thin component can be prevented from being manually taken and turned over, and the deformation and pollution risks of the thin component are reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a special inspection tool and a special inspection system. Background Technology

[0002] The following are the main problems encountered during the inspection of semiconductor lead frames:

[0003] (1) The lead frame is easily deformed: Since the thickness of the lead frame is only about 0.25mm, the material is too soft. When the inspector handles and flips it by hand, the frame is easily deformed, which affects its accuracy and subsequent use.

[0004] (2) Contamination risk: During use, the inspector's gloves will gradually become contaminated with dirt, grease and other contaminants; if the gloves come into direct contact with the lead frame, it may cause contamination of the frame surface, which in turn may cause copper sheet oxidation and ultimately lead to product scrap.

[0005] (3) Impact on production: Deformation and contamination of the lead frame will directly affect the manufacturing process of semiconductor products, reduce product reliability and yield, and may even affect the performance of customer terminals. Utility Model Content

[0006] The purpose of this invention is to provide a special tool and system for inspection, so as to solve the problems of deformation and contamination that exist in the prior art when inspectors directly handle and flip thin components such as lead frames by hand.

[0007] To achieve the above objectives, this utility model provides a special inspection tool for picking up thin components, comprising: a tool body and a handle; one side of the tool body is connected to the handle; the tool body includes a base; the base has an upper surface, a lower surface, and a first cavity extending through the upper surface and the lower surface; a plurality of suction holes are formed on the lower surface; the plurality of suction holes are positioned at positions corresponding to the edges of the thin component to adsorb and fix the thin component onto the tool body.

[0008] Optionally, each of the suction holes is provided with a suction nozzle made of a soft material.

[0009] Optionally, the tool body further includes a guide positioning part disposed on the lower surface and located around the suction hole; the guide positioning part extends away from the first cavity along the central axis of the first cavity, and defines a second cavity for accommodating and positioning the thin member.

[0010] Optionally, the sidewall of the second cavity extends vertically from the lower surface away from the first cavity, forming a right angle; or, the sidewall of the second cavity gradually expands outward from the lower surface away from the first cavity, forming an oblique angle.

[0011] Optionally, the angle of the oblique angle is 30° to 60°.

[0012] Optionally, the surface of the guide positioning part is covered with a protective layer made of a soft material, or the protective layer is a silicone sleeve or a rubber sleeve.

[0013] Optionally, the depth of the guide positioning part along the central axis of the first cavity is greater than the thickness of the multiple thin members, and / or the base is U-shaped through the first cavity which is open on one side, and each of the lower surfaces of the two side branches of the base is provided with a guide positioning part, and the two side branches of the base can move relative to each other in the direction of approaching or moving away from the central axis of the first cavity.

[0014] Optionally, the base is U-shaped through the first cavity open on one side, the opening of the U-shape is opposite to the handle, and a plurality of suction holes are symmetrically arranged on the lower surface of the two side branches of the base, and / or, the thin member is a lead frame, and the lead frame is rectangular.

[0015] Furthermore, based on the same inventive concept, this utility model also provides a special inspection system, which includes a negative pressure extraction device and any of the special inspection tools described in the invention; the negative pressure extraction device is connected to the special inspection tool.

[0016] Optionally, the testing system also includes a foot switch electrically connected to the negative pressure extraction device.

[0017] Compared with the prior art, the technical solution provided by this utility model has at least the following beneficial effects:

[0018] The aforementioned inspection tool can firmly adhere to thin components through the tool body, while also allowing thin components to be picked up and flipped through the handle, reducing the risk of deformation and contamination of thin components. It can also be inspected from multiple angles and directions, making the inspection of thin components more convenient and efficient.

[0019] The aforementioned inspection system can also automate the inspection of thin components through a negative pressure extraction device and a foot switch, further improving inspection efficiency. Attached Figure Description

[0020] Those skilled in the art will understand that the accompanying drawings are provided to better understand the present invention and do not constitute any limitation on the scope of the present invention.

[0021] Figure 1 This is a schematic diagram of the structure of a special inspection system provided by this utility model according to an embodiment;

[0022] Figure 2 This is a side view of a special inspection tool provided according to an embodiment of the present invention;

[0023] Figure 3 This is a top view of the lead frame provided according to an embodiment of the present invention;

[0024] Figure 4 This is a bottom view of a special inspection tool provided according to an embodiment of the present invention, wherein the arrows in the figure indicate the direction of negative pressure airflow;

[0025] Figure 5 yes Figure 4 The cross-sectional view of the special inspection tool at the position of line AA is shown in the figure. The dotted line in the figure represents the protective layer, and the upward arrow in the figure represents the direction of the adsorption force.

[0026] In the attached diagram: 110-Negative pressure extraction device, 120-Foot switch, 10-Tool body, 10a-Base, 101-First cavity, 102-Opening, 103-Lower surface, 104-Second cavity, 105-Upper surface, 11-Suction hole, 12-Suction nozzle, 13-Guide positioning part, 14-Protective layer, 20-Handle, 21-Sliding sleeve, 30-Thin component. Detailed Implementation

[0027] The present invention will be further described in detail below with reference to the accompanying drawings. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, intended only to facilitate and clarify the illustration of the embodiments of the present invention. It should be understood that relative terms such as "above," "below," "top," "bottom," and "upper" shown in the drawings can be used to describe the relationships between various elements. These relative terms are intended to cover different orientations of elements other than those depicted in the drawings. For example, if the device is inverted relative to the view in the drawings, an element described, for example, as being "above" another element would now be below that element.

[0028] One of the purposes of this invention is to provide a special inspection tool, which can be used not only on lead frames, but also for visual inspection of other thin and deformable objects in the semiconductor field.

[0029] The inspection tool provided by this utility model aims to solve the problem of deformation and contamination of thin components such as lead frames caused by handling them by hand in the prior art.

[0030] The second objective of this utility model is to provide a special inspection system, which includes a negative pressure extraction device and a special inspection tool, wherein the negative pressure extraction device is connected to the special inspection tool.

[0031] For ease of description, the accompanying drawings consistently use a lead frame as an example. However, those skilled in the art can modify the description of the embodiments in this application to adapt to situations where the lead frame is other thin components. The following section will provide a more detailed description of the inspection tools and inspection system.

[0032] like Figure 1 As shown, this embodiment of the present invention provides a special inspection system, comprising: a negative pressure extraction device 110; and a special inspection tool. The negative pressure extraction device 110 is connected to the special inspection tool to control it. The negative pressure extraction device 110 ensures the adsorption capacity of the special inspection tool by providing negative pressure and achieves control over the tool. Specifically, the negative pressure extraction device 110 generates negative pressure, creating a negative pressure state (including a vacuum state) inside the special inspection tool, thereby adsorbing the thin component 30. The negative pressure extraction device 110 can be operated manually or automatically. Preferably, the negative pressure extraction device 110 is a vacuum pump.

[0033] In one implementation, the inspection system also includes a foot switch 120, which is electrically connected to the negative pressure extraction device 110. The foot switch 120 can control the negative pressure extraction device 110 to free the inspector's hands, enabling semi-automatic operation and improving inspection efficiency.

[0034] Furthermore, the inspection tool includes a tool body 10 and a handle 20; one side of the tool body 10 is connected to the handle 20. The tool body 10 and handle 20 are integrally formed, that is, the tool body 10 and handle 20 are integrally formed, or the tool body 10 and handle 20 are independently formed and connected as one unit by any suitable method. When the tool body 10 and handle 20 are independently formed, they can be connected in a detachable or non-detachable manner, and the specific connection method is not limited.

[0035] The tool body 10 can adsorb thin components 30, achieving the effect of fixing the thin components 30. The handle 20 is used for handheld handling, allowing inspectors to manually pick up and flip the tool body 10 to achieve multi-angle and multi-directional inspection of the thin components 30. It is worth noting that the tool body 10 should generally be made of anti-static and anti-contamination materials to ensure that it does not cause secondary contamination to the thin components 30, thereby improving production efficiency and product quality.

[0036] For details, please refer to Figure 5The tool body 10 includes a base 10a having a lower surface 103, an upper surface 105, and a first cavity 101 extending through the upper surface 105 and the lower surface 103. The first cavity 101 allows the tool body 10 to avoid contact with the central region of the thin member 30, particularly for the lead frame. The first cavity 101 can be made in various shapes, including, but not limited to, the rectangular space depicted in the figures. In this embodiment, one side of the first cavity 101 is open, making the base 10a U-shaped. This forms an opening 102 on the side of the tool body 10. Alternatively, in other examples, the first cavity 101 is configured as a closed shape. Preferably, the handle 20 is disposed opposite to the opening 102 of the first cavity 101.

[0037] Figure 2 , Figures 4-5 In the base 10a, a plurality of suction holes 11 are formed on the lower surface 103. The specific number and distribution of the suction holes 11 can be set according to the shape and size of the thin member 30, and this application does not impose any special restrictions on this. In actual use, the suction holes 11 are used to be set at positions corresponding to the edges of the thin member 30, so as to adsorb and fix the thin member 30 onto the tool body 10.

[0038] In this way, inspectors can use special inspection tools to pick up and flip the thin component 30, avoiding direct contact with the thin component 30 by hand, reducing the risk of deformation and contamination of the thin component 30, and allowing for inspection from multiple angles and directions, making the inspection operation more convenient and the inspection efficiency higher.

[0039] It should also be noted that the suction holes 11 must ensure sufficient adsorption force to stably handle the thin component 30. The suction holes 11 should be rationally distributed to ensure uniform adsorption force and prevent excessive localized stress on the thin component 30 during handling, which could cause deformation. The stability of the negative pressure is also crucial, as it directly affects the adsorption effect. Insufficient or fluctuating negative pressure may lead to adsorption failure or frame detachment. Therefore, a sufficient number of suction holes 11 can be set to ensure uniform adsorption force distribution, and the distribution of the suction holes 11 can be optimized to ensure that the adsorption force is concentrated at the edge of the thin component 30 (i.e., the support area). Furthermore, the suction holes 11 can utilize a micropore design, employing smaller holes 11 to reduce the possibility of clogging and improve adsorption stability. In addition, during actual use, measures can be taken to stabilize the negative pressure, ensuring the stability of the adsorption force and preventing adsorption failure due to pressure fluctuations. Sensors can also be added to monitor the adsorption status in real time, triggering alarms or adjustments upon detecting abnormalities.

[0040] In this embodiment, the base 10a is U-shaped through a first cavity 101 open on one side. A plurality of suction holes 11 are symmetrically arranged on the lower surfaces 103 of the two side branches of the base 10a. These suction holes 11 can adsorb the thin component 30 as a whole on the plane provided by the lower surface 103, avoiding deformation of the thin component 30, and can especially realize vacuum adsorption of rectangular frames, etc. It should be understood that each side branch of the base 10a has a cavity inside, and the cavity is connected to the corresponding suction hole 11. Then, under the action of the negative pressure extraction device 110, a negative pressure is formed, and the thin component 30 can be adsorbed through the suction hole 11.

[0041] Furthermore, the contact between the base 10a and the thin member 30 can be either soft or hard. In the case of hard contact, the lower surface 103 of the base 10a directly contacts the thin member 30, and no soft material is required between them. In the case of soft contact, a soft material, such as silicone or rubber, is provided between the lower surface 103 of the base 10a and the thin member 30.

[0042] In this embodiment, each suction hole 11 is provided with a suction nozzle 12, which is made of a soft material such as silicone or rubber. By providing the suction nozzle 12, damage to the surface of the thin component 30 is reduced and deformation of the thin component 30 is prevented.

[0043] The suction nozzle 12 can fit tightly against the surface of the thin component 30 to prevent air leakage and ensure a seal. Based on this, air can be automatically or manually extracted from the tool body 10 to create a negative pressure. When the external atmospheric pressure is greater than the internal pressure of the suction hole 11, a pressure difference is generated, pressing the thin component 30 tightly against the base 10a. The pressure difference causes the suction nozzle 12 to firmly adhere to the edge of the thin component 30, achieving a fixing effect.

[0044] The nozzle 12 is typically embedded within the suction hole 11. The nozzle 12 can also be made of anti-static material to prevent static electricity from attracting dust or particles, reducing the risk of clogging the suction hole 11. Of course, regular cleaning and maintenance can also be performed to ensure that the suction hole 11 and nozzle 12 remain clean. A filter can also be added to prevent dust or particles from entering the negative pressure channel, further reducing the likelihood of clogging the suction hole 11 and nozzle 12.

[0045] Figure 2 and Figure 5 In a preferred embodiment, the tool body 10 also includes a guide and positioning part 13 for guiding and positioning the thin member 30 so that the thin member 30 can be correctly placed to achieve good adsorption.

[0046] Specifically, a guide and positioning part 13 is provided on the lower surface 103 of the base 10a around the suction hole 11 (see...). Figure 5The guide and positioning part 13 extends away from the first cavity 101 along the central axis of the first cavity 101, thereby defining the second cavity 104. The second cavity 104 is coaxially arranged with the first cavity 101 and the two are connected as one. The second cavity 104 is equivalent to an enlarged extension of the first cavity 101 and is used to accommodate and position the thin member 30.

[0047] In some embodiments, the sidewall of the second cavity 104 extends vertically from the lower surface 103 away from the first cavity 101, forming a right angle.

[0048] In this embodiment, the sidewall of the second cavity 104 gradually expands outward from its lower surface 103 away from the first cavity 101, that is, the diameter of the second cavity 104 gradually increases towards the side away from the first cavity 101, forming an angle. The angle serves a guiding function. The specific angle of this angle is not limited; for example, an angle of 30° to 60° can be used, and more preferably 45°.

[0049] Continue to refer to Figure 5 The surface of the guide positioning part 13 is preferably covered with a protective layer 14, which is made of various commonly used soft materials such as silicone or rubber. The protective layer 14 can be a coating or a protective sleeve. In this embodiment, the retaining layer 14 is a silicone sleeve or a rubber sleeve, which is directly sleeved on the surface of the guide positioning part 13, thereby directly contacting the side of the thin member 30, reducing the deformation of the thin member 30, and mechanically clamping the thin member 30 to a certain extent through an interference fit, thereby improving the stability and reliability of picking up.

[0050] The depth H of the guide positioning part 13 along the central axis of the first cavity 101 is greater than the thickness of the thin member 30. Preferably, the depth H of the guide positioning part 13 is greater than the thickness of the multiple thin members 30, which facilitates the simultaneous inspection of multiple thin members 30. For example, in a specific application scenario, the thin member 30 is a rectangular lead frame, and the thickness of each lead frame is approximately 2 mm, while the depth of the guide positioning part 13 is greater than the thickness of the multiple lead frames, which can be two, three, or more pieces.

[0051] Furthermore, the tool body 10 is fixedly mounted on the handle 20, or slidably mounted on the handle 20. In this embodiment, the base 10a is U-shaped, and its two side branches are slidably mounted on the handle 20, allowing the two side branches of the base 10a to move relative to each other in the direction of approaching or moving away from the central axis of the first cavity 101, for example, sliding relative to each other along the width direction W of the thin member 30. This application directly adjusts the size and position of the tool body 10 by means of the relative movement of the two side branches of the base 10a, thereby meeting the inspection and adjustment requirements of different thin members 30.

[0052] Furthermore, a guide positioning part 13 is provided on the lower surface of each of the two branches of the base 10a, and a thin member 30 is placed between the two guide positioning parts 13. In this way, the guide positioning part 13 and the corresponding base 10a slide together as a whole, keeping the relative position of the base 10a and the guide positioning part 13 unchanged. The base 10a can be slidably mounted on the handle 20 by various means, such as using a sliding sleeve 21 or other methods, which are not limited in this application.

[0053] In summary, when visual inspection of thin components 30 such as lead frames is required, the special inspection tool provided in this application embodiment can be used to pick up and flip the thin component 30 for multi-angle and multi-directional inspection, which will hardly cause deformation and contamination of the thin component 30, reduce the product scrap rate, and thus improve the reliability and yield of semiconductor products, ensuring the performance of customer terminals. In addition, by introducing the foot switch 120, semi-automatic operation can be achieved, significantly improving inspection efficiency and thus improving production efficiency.

[0054] Finally, it should be noted that although the innovation of this utility model originates from the field of lead frame inspection technology, those skilled in the art will understand that this utility model can also be applied to the inspection technology of other easily deformable objects. In short, as long as there is a problem of easily deformable objects being easily deformed and contaminated when handled manually, the technical concept of this utility model can be applied to achieve essentially the same or similar effects.

[0055] It should be understood that the above embodiments specifically disclose the features of the preferred embodiments of this utility model, enabling those skilled in the art to better understand this utility model. Those skilled in the art should understand that, based on the disclosure of this application, appropriate modifications can be easily made to this utility model to achieve the same purpose and / or the same advantages as the disclosed embodiments. Those skilled in the art should also recognize that such similar structures do not depart from the scope of this utility model, and that they can be changed, substituted, and modified in various ways without departing from the scope of this utility model.

Claims

1. A special inspection tool for picking up thin components, characterized in that, include: The tool body and handle are provided; one side of the tool body is connected to the handle; the tool body includes a base; the base has an upper surface, a lower surface, and a first cavity extending through the upper surface and the lower surface; a plurality of suction holes are provided on the lower surface; the plurality of suction holes are provided at positions corresponding to the edges of the thin member to adsorb and fix the thin member onto the tool body.

2. The special inspection tool according to claim 1, characterized in that, Each of the suction holes is provided with a suction nozzle made of soft material.

3. The special inspection tool according to claim 1, characterized in that, The tool body also includes a guide positioning part, which is disposed on the lower surface and located around the suction hole; the guide positioning part extends away from the first cavity along the central axis of the first cavity, and defines a second cavity for accommodating and positioning the thin member.

4. The special inspection tool according to claim 3, characterized in that, The sidewall of the second cavity extends vertically from the lower surface away from the first cavity, forming a right angle; or, the sidewall of the second cavity gradually expands outward from the lower surface away from the first cavity, forming an oblique angle.

5. The special inspection tool according to claim 4, characterized in that, The angle of the oblique angle is 30° to 60°.

6. The special inspection tool according to claim 3, characterized in that, The surface of the guide positioning part is covered with a protective layer made of soft material, or the protective layer is a silicone sleeve or a rubber sleeve.

7. The special inspection tool according to claim 3, characterized in that, The depth of the guide positioning part along the central axis of the first cavity is greater than the thickness of the multiple thin components, and / or the base is U-shaped through the first cavity which is open on one side, and each of the lower surfaces of the two branches of the base is provided with a guide positioning part, and the two branches of the base can move relative to each other in the direction of approaching or moving away from the central axis of the first cavity.

8. The special inspection tool according to claim 1, characterized in that, The base is U-shaped through the first cavity open on one side, the opening of the U-shape is opposite to the handle, and a plurality of suction holes are symmetrically arranged on the lower surface of the two side branches of the base, and / or the thin member is a lead frame, and the lead frame is rectangular.

9. A special inspection system, characterized in that, It includes a negative pressure extraction device and a special inspection tool as described in any one of claims 1-8; the negative pressure extraction device is connected to the special inspection tool.

10. The inspection system according to claim 9, characterized in that, It also includes a foot switch electrically connected to the negative pressure extraction device.

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